FR2838423B1 - Procede de fabrication d'une microstructure comportant une cavite sous vide et microstructure correspondante - Google Patents
Procede de fabrication d'une microstructure comportant une cavite sous vide et microstructure correspondanteInfo
- Publication number
- FR2838423B1 FR2838423B1 FR0204628A FR0204628A FR2838423B1 FR 2838423 B1 FR2838423 B1 FR 2838423B1 FR 0204628 A FR0204628 A FR 0204628A FR 0204628 A FR0204628 A FR 0204628A FR 2838423 B1 FR2838423 B1 FR 2838423B1
- Authority
- FR
- France
- Prior art keywords
- microstructure
- manufacturing
- vacuum cavity
- corresponding microstructure
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0035—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS
- B81B7/0038—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0111—Bulk micromachining
- B81C2201/0115—Porous silicon
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0204628A FR2838423B1 (fr) | 2002-04-12 | 2002-04-12 | Procede de fabrication d'une microstructure comportant une cavite sous vide et microstructure correspondante |
PCT/FR2003/001012 WO2003086957A1 (fr) | 2002-04-12 | 2003-04-01 | Procede de fabrication d'une microstructure comportant une cavite sous vide et microstructure |
US10/510,385 US20050118920A1 (en) | 2002-04-12 | 2003-04-01 | Method for the production of a microstructure comprising a vacuum cavity and a microstructure |
EP03746317A EP1494964A1 (fr) | 2002-04-12 | 2003-04-01 | Procede de fabrication d une microstructure comportant une c avite sous vide et microstructure |
CA002482077A CA2482077A1 (fr) | 2002-04-12 | 2003-04-01 | Procede de fabrication d'une microstructure comportant une cavite sous vide et microstructure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0204628A FR2838423B1 (fr) | 2002-04-12 | 2002-04-12 | Procede de fabrication d'une microstructure comportant une cavite sous vide et microstructure correspondante |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2838423A1 FR2838423A1 (fr) | 2003-10-17 |
FR2838423B1 true FR2838423B1 (fr) | 2005-06-24 |
Family
ID=28459799
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0204628A Expired - Lifetime FR2838423B1 (fr) | 2002-04-12 | 2002-04-12 | Procede de fabrication d'une microstructure comportant une cavite sous vide et microstructure correspondante |
Country Status (5)
Country | Link |
---|---|
US (1) | US20050118920A1 (fr) |
EP (1) | EP1494964A1 (fr) |
CA (1) | CA2482077A1 (fr) |
FR (1) | FR2838423B1 (fr) |
WO (1) | WO2003086957A1 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2519814C (fr) | 2004-09-20 | 2013-11-26 | Lg Electronics Inc. | Pave numerique pour station mobile |
US7204737B2 (en) * | 2004-09-23 | 2007-04-17 | Temic Automotive Of North America, Inc. | Hermetically sealed microdevice with getter shield |
US7462931B2 (en) * | 2006-05-15 | 2008-12-09 | Innovative Micro Technology | Indented structure for encapsulated devices and method of manufacture |
US20150225230A1 (en) * | 2014-02-07 | 2015-08-13 | Infineon Technologies Dresden Gmbh | Support for mems cover |
CN105783998A (zh) * | 2016-04-15 | 2016-07-20 | 广东合微集成电路技术有限公司 | 一种复合传感器 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6323550B1 (en) * | 1995-06-06 | 2001-11-27 | Analog Devices, Inc. | Package for sealing an integrated circuit die |
US5635638A (en) * | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Coupling for multiple masses in a micromachined device |
FR2742230B1 (fr) * | 1995-12-12 | 1998-01-09 | Sextant Avionique | Accelerometre et procede de fabrication |
US5882496A (en) * | 1997-02-27 | 1999-03-16 | The Regents Of The University Of California | Porous silicon structures with high surface area/specific pore size |
US5892140A (en) * | 1997-04-30 | 1999-04-06 | Honeywell Inc. | Micromachined inferential opto-thermal gas sensor |
FR2763745B1 (fr) * | 1997-05-23 | 1999-08-27 | Sextant Avionique | Procede de fabrication d'un micro-capteur en silicium usine |
FR2763694B1 (fr) * | 1997-05-23 | 1999-07-30 | Sextant Avionique | Micro-accelerometre a resonateur capacitif |
DE19754513A1 (de) * | 1997-12-09 | 1999-06-10 | Bosch Gmbh Robert | Verfahren zur Herstellung einer Mikrostruktur und entsprechende Mikrostruktur |
US6017257A (en) * | 1997-12-15 | 2000-01-25 | Advanced Vision Technologies, Inc. | Fabrication process for self-gettering electron field emitter |
US6499354B1 (en) * | 1998-05-04 | 2002-12-31 | Integrated Sensing Systems (Issys), Inc. | Methods for prevention, reduction, and elimination of outgassing and trapped gases in micromachined devices |
US6257059B1 (en) * | 1999-09-24 | 2001-07-10 | The Charles Stark Draper Laboratory, Inc. | Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation |
DE19961578A1 (de) * | 1999-12-21 | 2001-06-28 | Bosch Gmbh Robert | Sensor mit zumindest einer mikromechanischen Struktur und Verfahren zur Herstellung |
FR2808264B1 (fr) * | 2000-04-28 | 2002-06-07 | Commissariat Energie Atomique | Structure mecanique micro-usinee et dispositif incorporant la structure |
DE10032579B4 (de) * | 2000-07-05 | 2020-07-02 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement |
US6806557B2 (en) * | 2002-09-30 | 2004-10-19 | Motorola, Inc. | Hermetically sealed microdevices having a single crystalline silicon getter for maintaining vacuum |
-
2002
- 2002-04-12 FR FR0204628A patent/FR2838423B1/fr not_active Expired - Lifetime
-
2003
- 2003-04-01 US US10/510,385 patent/US20050118920A1/en not_active Abandoned
- 2003-04-01 WO PCT/FR2003/001012 patent/WO2003086957A1/fr active Application Filing
- 2003-04-01 EP EP03746317A patent/EP1494964A1/fr not_active Withdrawn
- 2003-04-01 CA CA002482077A patent/CA2482077A1/fr not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20050118920A1 (en) | 2005-06-02 |
EP1494964A1 (fr) | 2005-01-12 |
WO2003086957A1 (fr) | 2003-10-23 |
CA2482077A1 (fr) | 2003-10-23 |
FR2838423A1 (fr) | 2003-10-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
CL | Concession to grant licences | ||
PLFP | Fee payment |
Year of fee payment: 15 |
|
PLFP | Fee payment |
Year of fee payment: 16 |