DE69124679T2 - Beschleunigungsmesser und Verfahren zu seiner Herstellung - Google Patents
Beschleunigungsmesser und Verfahren zu seiner HerstellungInfo
- Publication number
- DE69124679T2 DE69124679T2 DE69124679T DE69124679T DE69124679T2 DE 69124679 T2 DE69124679 T2 DE 69124679T2 DE 69124679 T DE69124679 T DE 69124679T DE 69124679 T DE69124679 T DE 69124679T DE 69124679 T2 DE69124679 T2 DE 69124679T2
- Authority
- DE
- Germany
- Prior art keywords
- accelerometer
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/628,249 US5239871A (en) | 1990-12-17 | 1990-12-17 | Capacitive accelerometer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69124679D1 DE69124679D1 (de) | 1997-03-27 |
DE69124679T2 true DE69124679T2 (de) | 1997-05-28 |
Family
ID=24518107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69124679T Expired - Fee Related DE69124679T2 (de) | 1990-12-17 | 1991-12-05 | Beschleunigungsmesser und Verfahren zu seiner Herstellung |
Country Status (4)
Country | Link |
---|---|
US (2) | US5239871A (de) |
EP (1) | EP0491506B1 (de) |
JP (1) | JP3193752B2 (de) |
DE (1) | DE69124679T2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6295870B1 (en) | 1991-02-08 | 2001-10-02 | Alliedsignal Inc. | Triaxial angular rate and acceleration sensor |
EP0534366B1 (de) * | 1991-09-24 | 1996-06-05 | Murata Manufacturing Co., Ltd. | Beschleunigungsmessaufnehmer |
US5345823A (en) * | 1991-11-12 | 1994-09-13 | Texas Instruments Incorporated | Accelerometer |
JPH05164775A (ja) * | 1991-12-17 | 1993-06-29 | Atsugi Unisia Corp | 加速度センサ |
US5555766A (en) * | 1993-11-04 | 1996-09-17 | Texas Instruments Incorporated | Acceleration sensor apparatus and method for making same |
EP0660119B1 (de) * | 1993-12-27 | 2003-04-02 | Hitachi, Ltd. | Beschleunigungsmessaufnehmer |
WO1995027215A1 (fr) * | 1994-04-05 | 1995-10-12 | Hitachi, Ltd. | Capteur d'acceleration |
US5542296A (en) * | 1995-01-03 | 1996-08-06 | Reidemeister; Eric P. | Compact capacitive acceleration sensor |
US5808197A (en) * | 1995-01-13 | 1998-09-15 | Remec, Inc. | Vehicle information and control system |
US5581034A (en) * | 1995-01-13 | 1996-12-03 | Remec, Inc. | Convective accelerometer and inclinometer |
US5835077A (en) * | 1995-01-13 | 1998-11-10 | Remec, Inc., | Computer control device |
FR2734057B1 (fr) * | 1995-05-11 | 1997-06-20 | Suisse Electronique Microtech | Capteur accelerometrique capacitif miniature |
US5644081A (en) * | 1995-09-28 | 1997-07-01 | Delco Electronics Corp. | Microaccelerometer package with integral support braces |
DE19541388A1 (de) * | 1995-11-07 | 1997-05-15 | Telefunken Microelectron | Mikromechanischer Beschleunigungssensor |
JPH1090299A (ja) * | 1996-09-12 | 1998-04-10 | Mitsubishi Electric Corp | 静電容量式加速度センサ |
US5824902A (en) * | 1996-09-30 | 1998-10-20 | Texas Instruments Incorporated | Condition responsive sensor having a signal conditioning capacitor |
US6386032B1 (en) | 1999-08-26 | 2002-05-14 | Analog Devices Imi, Inc. | Micro-machined accelerometer with improved transfer characteristics |
US6868726B2 (en) * | 2000-01-20 | 2005-03-22 | Analog Devices Imi, Inc. | Position sensing with improved linearity |
US6912902B2 (en) * | 2003-03-26 | 2005-07-05 | Honeywell International Inc. | Bending beam accelerometer with differential capacitive pickoff |
US7501835B2 (en) * | 2004-03-10 | 2009-03-10 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Displacement sensor |
US7516660B2 (en) * | 2004-05-21 | 2009-04-14 | Met Tech, Inc. | Convective accelerometer |
US7863907B2 (en) * | 2007-02-06 | 2011-01-04 | Chevron U.S.A. Inc. | Temperature and pressure transducer |
JP5678741B2 (ja) * | 2011-03-11 | 2015-03-04 | セイコーエプソン株式会社 | 加速度検出器、加速度検出デバイス及び電子機器 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3226981A (en) * | 1962-10-29 | 1966-01-04 | North American Aviation Inc | Condition responsive signal generator for producing a variable frequency signal |
US3339419A (en) * | 1964-07-02 | 1967-09-05 | North American Aviation Inc | Accelerometer |
US3673873A (en) * | 1969-10-23 | 1972-07-04 | North American Rockwell | Sensing instrument having a cantilevered proof mass |
US4250757A (en) * | 1979-11-05 | 1981-02-17 | Sundstrand Data Control, Inc. | Movable element with position sensing means for transducers |
US4342227A (en) * | 1980-12-24 | 1982-08-03 | International Business Machines Corporation | Planar semiconductor three direction acceleration detecting device and method of fabrication |
CH642461A5 (fr) * | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
JPS6117959A (ja) * | 1984-07-05 | 1986-01-25 | Japan Aviation Electronics Ind Ltd | 加速度計 |
US4736629A (en) * | 1985-12-20 | 1988-04-12 | Silicon Designs, Inc. | Micro-miniature accelerometer |
US4854169A (en) * | 1987-06-15 | 1989-08-08 | Japan Aviation Electronics Industry Ltd. | Accelerometer |
US4932258A (en) * | 1988-06-29 | 1990-06-12 | Sundstrand Data Control, Inc. | Stress compensated transducer |
IT1223933B (it) * | 1988-11-23 | 1990-09-29 | Marelli Autronica | Trasduttore di accelerazione ad effetto capacitivo |
US5058430A (en) * | 1989-12-29 | 1991-10-22 | Honeywell Inc. | Sensor capsule mounting |
US5085079A (en) * | 1990-06-11 | 1992-02-04 | Sundstrand Data Control, Inc. | Accelerometer with mounting/coupling structure for an electronics assembly |
-
1990
- 1990-12-17 US US07/628,249 patent/US5239871A/en not_active Expired - Lifetime
-
1991
- 1991-12-05 DE DE69124679T patent/DE69124679T2/de not_active Expired - Fee Related
- 1991-12-05 EP EP91311328A patent/EP0491506B1/de not_active Expired - Lifetime
- 1991-12-16 JP JP33211291A patent/JP3193752B2/ja not_active Expired - Fee Related
-
1993
- 1993-03-17 US US08/032,212 patent/US5303589A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5239871A (en) | 1993-08-31 |
EP0491506B1 (de) | 1997-02-12 |
JP3193752B2 (ja) | 2001-07-30 |
DE69124679D1 (de) | 1997-03-27 |
US5303589A (en) | 1994-04-19 |
JPH04301575A (ja) | 1992-10-26 |
EP0491506A1 (de) | 1992-06-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: SENSATA TECHNOLOGIES, INC. (N.D.GES.D. STAATES DEL |
|
8339 | Ceased/non-payment of the annual fee |