DE69124679D1 - Beschleunigungsmesser und Verfahren zu seiner Herstellung - Google Patents

Beschleunigungsmesser und Verfahren zu seiner Herstellung

Info

Publication number
DE69124679D1
DE69124679D1 DE69124679T DE69124679T DE69124679D1 DE 69124679 D1 DE69124679 D1 DE 69124679D1 DE 69124679 T DE69124679 T DE 69124679T DE 69124679 T DE69124679 T DE 69124679T DE 69124679 D1 DE69124679 D1 DE 69124679D1
Authority
DE
Germany
Prior art keywords
accelerometer
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69124679T
Other languages
English (en)
Other versions
DE69124679T2 (de
Inventor
Eric P Reidemeister
Keith W Kawata
Steven Beringhause
Larry K Johnson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensata Technologies Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69124679D1 publication Critical patent/DE69124679D1/de
Publication of DE69124679T2 publication Critical patent/DE69124679T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE69124679T 1990-12-17 1991-12-05 Beschleunigungsmesser und Verfahren zu seiner Herstellung Expired - Fee Related DE69124679T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/628,249 US5239871A (en) 1990-12-17 1990-12-17 Capacitive accelerometer

Publications (2)

Publication Number Publication Date
DE69124679D1 true DE69124679D1 (de) 1997-03-27
DE69124679T2 DE69124679T2 (de) 1997-05-28

Family

ID=24518107

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69124679T Expired - Fee Related DE69124679T2 (de) 1990-12-17 1991-12-05 Beschleunigungsmesser und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (2) US5239871A (de)
EP (1) EP0491506B1 (de)
JP (1) JP3193752B2 (de)
DE (1) DE69124679T2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6295870B1 (en) * 1991-02-08 2001-10-02 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
DE69211269T2 (de) * 1991-09-24 1997-01-23 Murata Manufacturing Co Beschleunigungsmessaufnehmer
US5345823A (en) * 1991-11-12 1994-09-13 Texas Instruments Incorporated Accelerometer
JPH05164775A (ja) * 1991-12-17 1993-06-29 Atsugi Unisia Corp 加速度センサ
US5555766A (en) * 1993-11-04 1996-09-17 Texas Instruments Incorporated Acceleration sensor apparatus and method for making same
DE69432396T2 (de) * 1993-12-27 2004-03-04 Hitachi, Ltd. Beschleunigungsmessaufnehmer
JP3161736B2 (ja) * 1994-04-05 2001-04-25 株式会社 日立製作所 加速度センサ
US5542296A (en) * 1995-01-03 1996-08-06 Reidemeister; Eric P. Compact capacitive acceleration sensor
US5808197A (en) * 1995-01-13 1998-09-15 Remec, Inc. Vehicle information and control system
US5835077A (en) * 1995-01-13 1998-11-10 Remec, Inc., Computer control device
US5581034A (en) * 1995-01-13 1996-12-03 Remec, Inc. Convective accelerometer and inclinometer
FR2734057B1 (fr) * 1995-05-11 1997-06-20 Suisse Electronique Microtech Capteur accelerometrique capacitif miniature
US5644081A (en) * 1995-09-28 1997-07-01 Delco Electronics Corp. Microaccelerometer package with integral support braces
DE19541388A1 (de) * 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
JPH1090299A (ja) * 1996-09-12 1998-04-10 Mitsubishi Electric Corp 静電容量式加速度センサ
US5824902A (en) * 1996-09-30 1998-10-20 Texas Instruments Incorporated Condition responsive sensor having a signal conditioning capacitor
US6386032B1 (en) 1999-08-26 2002-05-14 Analog Devices Imi, Inc. Micro-machined accelerometer with improved transfer characteristics
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
US6912902B2 (en) * 2003-03-26 2005-07-05 Honeywell International Inc. Bending beam accelerometer with differential capacitive pickoff
US7501835B2 (en) * 2004-03-10 2009-03-10 Kabushiki Kaisha Toyota Chuo Kenkyusho Displacement sensor
US7516660B2 (en) * 2004-05-21 2009-04-14 Met Tech, Inc. Convective accelerometer
US7863907B2 (en) * 2007-02-06 2011-01-04 Chevron U.S.A. Inc. Temperature and pressure transducer
JP5678741B2 (ja) * 2011-03-11 2015-03-04 セイコーエプソン株式会社 加速度検出器、加速度検出デバイス及び電子機器
DE102015212669B4 (de) * 2015-07-07 2018-05-03 Infineon Technologies Ag Kapazitive mikroelektromechanische Vorrichtung und Verfahren zum Ausbilden einer kapazitiven mikroelektromechanischen Vorrichtung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3226981A (en) * 1962-10-29 1966-01-04 North American Aviation Inc Condition responsive signal generator for producing a variable frequency signal
US3339419A (en) * 1964-07-02 1967-09-05 North American Aviation Inc Accelerometer
US3673873A (en) * 1969-10-23 1972-07-04 North American Rockwell Sensing instrument having a cantilevered proof mass
US4250757A (en) * 1979-11-05 1981-02-17 Sundstrand Data Control, Inc. Movable element with position sensing means for transducers
US4342227A (en) * 1980-12-24 1982-08-03 International Business Machines Corporation Planar semiconductor three direction acceleration detecting device and method of fabrication
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
JPS6117959A (ja) * 1984-07-05 1986-01-25 Japan Aviation Electronics Ind Ltd 加速度計
US4736629A (en) * 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
US4854169A (en) * 1987-06-15 1989-08-08 Japan Aviation Electronics Industry Ltd. Accelerometer
US4932258A (en) * 1988-06-29 1990-06-12 Sundstrand Data Control, Inc. Stress compensated transducer
IT1223933B (it) * 1988-11-23 1990-09-29 Marelli Autronica Trasduttore di accelerazione ad effetto capacitivo
US5058430A (en) * 1989-12-29 1991-10-22 Honeywell Inc. Sensor capsule mounting
US5085079A (en) * 1990-06-11 1992-02-04 Sundstrand Data Control, Inc. Accelerometer with mounting/coupling structure for an electronics assembly

Also Published As

Publication number Publication date
DE69124679T2 (de) 1997-05-28
JPH04301575A (ja) 1992-10-26
US5239871A (en) 1993-08-31
US5303589A (en) 1994-04-19
EP0491506B1 (de) 1997-02-12
EP0491506A1 (de) 1992-06-24
JP3193752B2 (ja) 2001-07-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SENSATA TECHNOLOGIES, INC. (N.D.GES.D. STAATES DEL

8339 Ceased/non-payment of the annual fee