DE69311209T2 - Verfahren und Vorrichtung zum Beheben von Kurzschlussbereichen in Halbleiterelementen - Google Patents
Verfahren und Vorrichtung zum Beheben von Kurzschlussbereichen in HalbleiterelementenInfo
- Publication number
- DE69311209T2 DE69311209T2 DE69311209T DE69311209T DE69311209T2 DE 69311209 T2 DE69311209 T2 DE 69311209T2 DE 69311209 T DE69311209 T DE 69311209T DE 69311209 T DE69311209 T DE 69311209T DE 69311209 T2 DE69311209 T2 DE 69311209T2
- Authority
- DE
- Germany
- Prior art keywords
- conductor layer
- forming
- electric conductor
- substrate
- transparent conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title abstract 7
- 238000000034 method Methods 0.000 title abstract 3
- 239000004020 conductor Substances 0.000 abstract 8
- 230000002950 deficient Effects 0.000 abstract 3
- 238000004519 manufacturing process Methods 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 150000001450 anions Chemical class 0.000 abstract 2
- 150000001768 cations Chemical class 0.000 abstract 2
- 238000004070 electrodeposition Methods 0.000 abstract 2
- 238000009413 insulation Methods 0.000 abstract 2
- 239000011347 resin Substances 0.000 abstract 2
- 229920005989 resin Polymers 0.000 abstract 2
- 230000015556 catabolic process Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/208—Particular post-treatment of the devices, e.g. annealing, short-circuit elimination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S136/00—Batteries: thermoelectric and photoelectric
- Y10S136/29—Testing, calibrating, treating, e.g. aging
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
- Bipolar Transistors (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
- Die Bonding (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4197828A JP2686022B2 (ja) | 1992-07-01 | 1992-07-01 | 光起電力素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69311209D1 DE69311209D1 (de) | 1997-07-10 |
DE69311209T2 true DE69311209T2 (de) | 1998-01-15 |
Family
ID=16381021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69311209T Expired - Fee Related DE69311209T2 (de) | 1992-07-01 | 1993-06-30 | Verfahren und Vorrichtung zum Beheben von Kurzschlussbereichen in Halbleiterelementen |
Country Status (7)
Country | Link |
---|---|
US (1) | US6132585A (de) |
EP (1) | EP0577108B1 (de) |
JP (1) | JP2686022B2 (de) |
KR (1) | KR970005153B1 (de) |
AT (1) | ATE154167T1 (de) |
AU (1) | AU667718B2 (de) |
DE (1) | DE69311209T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8575476B2 (en) | 2007-07-13 | 2013-11-05 | Omron Corporation | CIS solar cell and method for manufacturing the same |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6274805B1 (en) * | 1997-05-07 | 2001-08-14 | Asahi Kasei Kabushiki Kaisha | Solar cell and manufacturing method thereof |
JP2001230341A (ja) * | 2000-02-18 | 2001-08-24 | Hitachi Ltd | 半導体装置 |
WO2002095810A1 (en) * | 2001-05-21 | 2002-11-28 | Molecular Electronics Corporation | Method of repairing molecular electronic defects |
JP2003069055A (ja) * | 2001-06-13 | 2003-03-07 | Sharp Corp | 太陽電池セルとその製造方法 |
US7109517B2 (en) * | 2001-11-16 | 2006-09-19 | Zaidi Saleem H | Method of making an enhanced optical absorption and radiation tolerance in thin-film solar cells and photodetectors |
JP2004063933A (ja) | 2002-07-31 | 2004-02-26 | Canon Inc | 半導体素子及び半導体素子の製造方法 |
AU2003295880A1 (en) * | 2002-11-27 | 2004-06-23 | University Of Toledo, The | Integrated photoelectrochemical cell and system having a liquid electrolyte |
WO2004049052A1 (ja) * | 2002-11-28 | 2004-06-10 | Konica Minolta Holdings, Inc. | 表示素子、表示装置及び表示装置の製造方法 |
US7667133B2 (en) * | 2003-10-29 | 2010-02-23 | The University Of Toledo | Hybrid window layer for photovoltaic cells |
WO2005101510A2 (en) * | 2004-04-16 | 2005-10-27 | The University Of Toledo | Light-assisted electrochemical shunt passivation for photovoltaic devices |
US20060089292A1 (en) * | 2004-10-22 | 2006-04-27 | Thomas Wirz | Methods for VOC reduced pretreatment of substrates and detection by luminescence |
WO2006062510A1 (en) * | 2004-12-07 | 2006-06-15 | Ahbee 2, Lp | Non contact method and apparatus for measurement of sheet resistance of p-n junctions |
WO2006110613A2 (en) * | 2005-04-11 | 2006-10-19 | The University Of Toledo | Integrated photovoltaic-electrolysis cell |
US20070131270A1 (en) * | 2005-07-14 | 2007-06-14 | Russell Gaudiana | Window with photovoltaic cell |
US7772485B2 (en) * | 2005-07-14 | 2010-08-10 | Konarka Technologies, Inc. | Polymers with low band gaps and high charge mobility |
US20070267055A1 (en) * | 2005-07-14 | 2007-11-22 | Konarka Technologies, Inc. | Tandem Photovoltaic Cells |
US8158881B2 (en) * | 2005-07-14 | 2012-04-17 | Konarka Technologies, Inc. | Tandem photovoltaic cells |
US20070181179A1 (en) | 2005-12-21 | 2007-08-09 | Konarka Technologies, Inc. | Tandem photovoltaic cells |
US7781673B2 (en) * | 2005-07-14 | 2010-08-24 | Konarka Technologies, Inc. | Polymers with low band gaps and high charge mobility |
US20080006324A1 (en) * | 2005-07-14 | 2008-01-10 | Konarka Technologies, Inc. | Tandem Photovoltaic Cells |
JP2007189199A (ja) | 2005-12-12 | 2007-07-26 | Tdk Corp | キャパシタおよびその製造方法 |
US20080053518A1 (en) * | 2006-09-05 | 2008-03-06 | Pen-Hsiu Chang | Transparent solar cell system |
US8008424B2 (en) | 2006-10-11 | 2011-08-30 | Konarka Technologies, Inc. | Photovoltaic cell with thiazole-containing polymer |
US8008421B2 (en) | 2006-10-11 | 2011-08-30 | Konarka Technologies, Inc. | Photovoltaic cell with silole-containing polymer |
KR100828254B1 (ko) * | 2006-10-27 | 2008-05-07 | 미리넷솔라 주식회사 | 태양전지용 실리콘 기판의 제조 공정 |
US20100304512A1 (en) * | 2007-11-30 | 2010-12-02 | University Of Toledo | System for Diagnosis and Treatment of Photovoltaic and Other Semiconductor Devices |
JP5062684B2 (ja) * | 2008-02-13 | 2012-10-31 | シャープ株式会社 | 薄膜光電変換モジュールの製造方法および製造装置 |
JP2011513951A (ja) * | 2008-02-21 | 2011-04-28 | コナルカ テクノロジーズ インコーポレイテッド | タンデム型光電池 |
US20100043863A1 (en) | 2008-03-20 | 2010-02-25 | Miasole | Interconnect assembly |
US20110197947A1 (en) | 2008-03-20 | 2011-08-18 | Miasole | Wire network for interconnecting photovoltaic cells |
US8912429B2 (en) * | 2008-03-20 | 2014-12-16 | Hanergy Holding Group Ltd. | Interconnect assembly |
WO2009120974A2 (en) * | 2008-03-28 | 2009-10-01 | University Of Toledo | System for selectively filling pin holes, weak shunts and/or scribe lines in photovoltaic devices and photovoltaic cells made thereby |
GB2459651A (en) * | 2008-04-28 | 2009-11-04 | Quantasol Ltd | Concentrator photovoltaic cell |
JP2010021437A (ja) * | 2008-07-11 | 2010-01-28 | Ulvac Japan Ltd | 太陽電池の製造装置およびその製造方法 |
US8455606B2 (en) * | 2008-08-07 | 2013-06-04 | Merck Patent Gmbh | Photoactive polymers |
US8318239B2 (en) * | 2008-11-17 | 2012-11-27 | Solopower, Inc. | Method and apparatus for detecting and passivating defects in thin film solar cells |
US7979969B2 (en) * | 2008-11-17 | 2011-07-19 | Solopower, Inc. | Method of detecting and passivating a defect in a solar cell |
US8318240B2 (en) * | 2008-11-17 | 2012-11-27 | Solopower, Inc. | Method and apparatus to remove a segment of a thin film solar cell structure for efficiency improvement |
US20100264035A1 (en) * | 2009-04-15 | 2010-10-21 | Solopower, Inc. | Reel-to-reel plating of conductive grids for flexible thin film solar cells |
JP5528929B2 (ja) * | 2009-08-31 | 2014-06-25 | 三井化学東セロ株式会社 | 測定方法、太陽電池モジュールの製造方法、太陽電池モジュールおよび太陽電池モジュールの評価方法 |
US8356640B1 (en) | 2010-01-14 | 2013-01-22 | Mia Solé | Apparatuses and methods for fabricating wire current collectors and interconnects for solar cells |
US9061344B1 (en) | 2010-05-26 | 2015-06-23 | Apollo Precision (Fujian) Limited | Apparatuses and methods for fabricating wire current collectors and interconnects for solar cells |
US10026859B2 (en) | 2010-10-04 | 2018-07-17 | Beijing Apollo Ding Rong Solar Technology Co., Ltd. | Small gauge wire solar cell interconnect |
US8951824B1 (en) | 2011-04-08 | 2015-02-10 | Apollo Precision (Fujian) Limited | Adhesives for attaching wire network to photovoltaic cells |
US9151597B2 (en) | 2012-02-13 | 2015-10-06 | First Solar, Inc. | In situ substrate detection for a processing system using infrared detection |
JP6049556B2 (ja) | 2013-07-01 | 2016-12-21 | 株式会社東芝 | 太陽電池、太陽電池モジュール及び太陽電池の製造方法 |
US9564270B2 (en) * | 2013-12-27 | 2017-02-07 | Tdk Corporation | Thin film capacitor |
JP6446877B2 (ja) | 2014-07-16 | 2019-01-09 | Tdk株式会社 | 薄膜キャパシタ |
JP6365216B2 (ja) | 2014-10-15 | 2018-08-01 | Tdk株式会社 | 薄膜キャパシタ |
JP6641872B2 (ja) | 2015-10-15 | 2020-02-05 | Tdk株式会社 | 電子デバイスシート |
WO2018155938A1 (en) * | 2017-02-24 | 2018-08-30 | Lg Electronics Inc. | Compound semiconductor solar cell and method of manufacturing the same |
WO2019061159A1 (zh) * | 2017-09-28 | 2019-04-04 | 深圳市大疆创新科技有限公司 | 定位故障光伏板的方法、设备及无人机 |
US11430974B2 (en) * | 2019-05-17 | 2022-08-30 | Ppg Industries Ohio, Inc. | System for roll-to-roll electrocoating of battery electrode coatings onto a foil substrate |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4197141A (en) * | 1978-01-31 | 1980-04-08 | Massachusetts Institute Of Technology | Method for passivating imperfections in semiconductor materials |
US4451970A (en) * | 1982-10-21 | 1984-06-05 | Energy Conversion Devices, Inc. | System and method for eliminating short circuit current paths in photovoltaic devices |
US4464823A (en) * | 1982-10-21 | 1984-08-14 | Energy Conversion Devices, Inc. | Method for eliminating short and latent short circuit current paths in photovoltaic devices |
JPS6085577A (ja) * | 1983-10-17 | 1985-05-15 | Fuji Xerox Co Ltd | 薄膜光電変換素子の製造方法 |
US4729970A (en) * | 1986-09-15 | 1988-03-08 | Energy Conversion Devices, Inc. | Conversion process for passivating short circuit current paths in semiconductor devices |
US4749454A (en) * | 1986-11-17 | 1988-06-07 | Solarex Corporation | Method of removing electrical shorts and shunts from a thin-film semiconductor device |
JPH04266068A (ja) * | 1991-02-20 | 1992-09-22 | Canon Inc | 光電変換素子及びその製造方法 |
-
1992
- 1992-07-01 JP JP4197828A patent/JP2686022B2/ja not_active Expired - Fee Related
-
1993
- 1993-06-29 AU AU41610/93A patent/AU667718B2/en not_active Ceased
- 1993-06-30 EP EP93110466A patent/EP0577108B1/de not_active Expired - Lifetime
- 1993-06-30 DE DE69311209T patent/DE69311209T2/de not_active Expired - Fee Related
- 1993-06-30 AT AT93110466T patent/ATE154167T1/de not_active IP Right Cessation
- 1993-07-01 KR KR1019930012272A patent/KR970005153B1/ko not_active IP Right Cessation
-
1996
- 1996-11-15 US US08/749,727 patent/US6132585A/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8575476B2 (en) | 2007-07-13 | 2013-11-05 | Omron Corporation | CIS solar cell and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
EP0577108B1 (de) | 1997-06-04 |
ATE154167T1 (de) | 1997-06-15 |
EP0577108A1 (de) | 1994-01-05 |
US6132585A (en) | 2000-10-17 |
KR940006294A (ko) | 1994-03-23 |
DE69311209D1 (de) | 1997-07-10 |
JPH0621493A (ja) | 1994-01-28 |
KR970005153B1 (ko) | 1997-04-12 |
AU667718B2 (en) | 1996-04-04 |
JP2686022B2 (ja) | 1997-12-08 |
AU4161093A (en) | 1994-01-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |