DE69309375T2 - Hochglanzpolierbares Siliziumkarbid mit hoher thermischer leitfähigkeit, Verfahren zur Herstellung und Anwendung - Google Patents

Hochglanzpolierbares Siliziumkarbid mit hoher thermischer leitfähigkeit, Verfahren zur Herstellung und Anwendung

Info

Publication number
DE69309375T2
DE69309375T2 DE69309375T DE69309375T DE69309375T2 DE 69309375 T2 DE69309375 T2 DE 69309375T2 DE 69309375 T DE69309375 T DE 69309375T DE 69309375 T DE69309375 T DE 69309375T DE 69309375 T2 DE69309375 T2 DE 69309375T2
Authority
DE
Germany
Prior art keywords
manufacturing
thermal conductivity
silicon carbide
high thermal
application process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69309375T
Other languages
English (en)
Other versions
DE69309375D1 (de
Inventor
Michael A Pickering
Lee E Burns Lee E Burns
Jitendra S Goela Jitendr Goela
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CVD Inc
Original Assignee
CVD Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CVD Inc filed Critical CVD Inc
Application granted granted Critical
Publication of DE69309375D1 publication Critical patent/DE69309375D1/de
Publication of DE69309375T2 publication Critical patent/DE69309375T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/571—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/32—Thermal properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Ceramic Products (AREA)
  • Manufacturing Of Tubular Articles Or Embedded Moulded Articles (AREA)
DE69309375T 1992-07-31 1993-07-30 Hochglanzpolierbares Siliziumkarbid mit hoher thermischer leitfähigkeit, Verfahren zur Herstellung und Anwendung Expired - Lifetime DE69309375T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US92307792A 1992-07-31 1992-07-31
US07/959,880 US5374412A (en) 1992-07-31 1992-10-13 Highly polishable, highly thermally conductive silicon carbide

Publications (2)

Publication Number Publication Date
DE69309375D1 DE69309375D1 (de) 1997-05-07
DE69309375T2 true DE69309375T2 (de) 1997-07-10

Family

ID=27129861

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69309375T Expired - Lifetime DE69309375T2 (de) 1992-07-31 1993-07-30 Hochglanzpolierbares Siliziumkarbid mit hoher thermischer leitfähigkeit, Verfahren zur Herstellung und Anwendung

Country Status (9)

Country Link
US (3) US5374412A (de)
EP (1) EP0588479B1 (de)
JP (1) JPH06199513A (de)
KR (1) KR970002892B1 (de)
CA (1) CA2099833C (de)
DE (1) DE69309375T2 (de)
HK (1) HK119997A (de)
IL (1) IL106417A (de)
SG (1) SG52732A1 (de)

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JP4523661B1 (ja) * 2009-03-10 2010-08-11 三井造船株式会社 原子層堆積装置及び薄膜形成方法
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US8753985B2 (en) * 2012-01-17 2014-06-17 Applied Materials, Inc. Molecular layer deposition of silicon carbide
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Also Published As

Publication number Publication date
KR940002164A (ko) 1994-02-16
KR970002892B1 (ko) 1997-03-12
US5465184A (en) 1995-11-07
US5374412A (en) 1994-12-20
CA2099833A1 (en) 1994-02-01
IL106417A (en) 1996-09-12
HK119997A (en) 1997-09-05
JPH06199513A (ja) 1994-07-19
SG52732A1 (en) 1998-09-28
IL106417A0 (en) 1993-11-15
CA2099833C (en) 1997-11-25
EP0588479B1 (de) 1997-04-02
US5474613A (en) 1995-12-12
EP0588479A1 (de) 1994-03-23
DE69309375D1 (de) 1997-05-07

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Representative=s name: MUELLER-BORE & PARTNER, PATENTANWAELTE, EUROPEAN PAT