DE69223463D1 - Optische Halbleiter-Wellenleitervorrichtung und ihr Herstellungsverfahren - Google Patents

Optische Halbleiter-Wellenleitervorrichtung und ihr Herstellungsverfahren

Info

Publication number
DE69223463D1
DE69223463D1 DE69223463T DE69223463T DE69223463D1 DE 69223463 D1 DE69223463 D1 DE 69223463D1 DE 69223463 T DE69223463 T DE 69223463T DE 69223463 T DE69223463 T DE 69223463T DE 69223463 D1 DE69223463 D1 DE 69223463D1
Authority
DE
Germany
Prior art keywords
manufacturing
optical waveguide
semiconductor optical
waveguide device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69223463T
Other languages
English (en)
Other versions
DE69223463T2 (de
Inventor
Keiro Komatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of DE69223463D1 publication Critical patent/DE69223463D1/de
Application granted granted Critical
Publication of DE69223463T2 publication Critical patent/DE69223463T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/131—Integrated optical circuits characterised by the manufacturing method by using epitaxial growth
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/0151—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the refractive index
    • G02F1/0154—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the refractive index using electro-optic effects, e.g. linear electro optic [LEO], Pockels, quadratic electro optical [QEO] or Kerr effect
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31—Digital deflection, i.e. optical switching
    • G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
    • G02F1/3132—Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type
    • G02F1/3133—Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type the optical waveguides being made of semiconducting materials
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
    • G02F2201/063—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide ridge; rib; strip loaded

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Semiconductor Lasers (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
DE69223463T 1991-07-10 1992-07-10 Optische Halbleiter-Wellenleitervorrichtung und ihr Herstellungsverfahren Expired - Fee Related DE69223463T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16853991A JP2754957B2 (ja) 1991-07-10 1991-07-10 半導体光制御素子およびその製造方法

Publications (2)

Publication Number Publication Date
DE69223463D1 true DE69223463D1 (de) 1998-01-22
DE69223463T2 DE69223463T2 (de) 1998-06-04

Family

ID=15869894

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69223463T Expired - Fee Related DE69223463T2 (de) 1991-07-10 1992-07-10 Optische Halbleiter-Wellenleitervorrichtung und ihr Herstellungsverfahren

Country Status (4)

Country Link
US (2) US5334551A (de)
EP (1) EP0526023B1 (de)
JP (1) JP2754957B2 (de)
DE (1) DE69223463T2 (de)

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JPH07176827A (ja) * 1993-08-20 1995-07-14 Mitsubishi Electric Corp 変調器付半導体レーザ装置の製造方法
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US5473721A (en) * 1994-04-13 1995-12-05 Photonic Integration Research, Inc. Multi-mode optical circuit to couple light between various optical elements and method of fabricating same
US5418183A (en) * 1994-09-19 1995-05-23 At&T Corp. Method for a reflective digitally tunable laser
DE19502684A1 (de) * 1995-01-28 1996-08-01 Sel Alcatel Ag Verfahren zur Herstellung von Mehrsegment-Rippenwellenleitern
WO1996027146A1 (de) * 1995-02-28 1996-09-06 Siemens Aktiengesellschaft Integriert optischer wellenleiter mit einer einen steuerbaren komplexen brechungsindex aufweisenden wellenleitenden schicht
JPH08288541A (ja) * 1995-04-20 1996-11-01 Hitachi Ltd 半導体光集積化素子、及び光ジャイロ
JPH0921985A (ja) * 1995-07-07 1997-01-21 Nec Corp マッハツェンダー変調器及びその製造方法
KR100237858B1 (ko) * 1996-09-17 2000-02-01 권문구 역메사 리지 웨이브가이드 구조의 분포귀환형 레이저 다이오드
GB2323450A (en) * 1997-03-20 1998-09-23 Secr Defence Optical modulator
US6064788A (en) * 1997-08-14 2000-05-16 Lucent Technologies Inc. Adiabatic Y-branch modulator with negligible chirp
JP2000056281A (ja) * 1998-08-07 2000-02-25 Mitsubishi Electric Corp 光変調器とその製造方法
GB2348293A (en) * 1999-03-25 2000-09-27 Bookham Technology Ltd Optical phase modulator
US6556605B1 (en) 2000-02-29 2003-04-29 Triquent Technology Holding, Co. Method and device for preventing zinc/iron interaction in a semiconductor laser
US7058245B2 (en) * 2000-04-04 2006-06-06 Waveguide Solutions, Inc. Integrated optical circuits
US6456429B1 (en) * 2000-11-15 2002-09-24 Onetta, Inc. Double-pass optical amplifier
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US20030099420A1 (en) * 2001-11-13 2003-05-29 Achintya Bhowmik Electro-optic modulator
JP2003195239A (ja) 2001-12-25 2003-07-09 Nec Corp 集積型光導波路デバイス
US7146086B2 (en) * 2003-06-30 2006-12-05 Intel Corporation Constructing well structures for hybrid optical waveguides
WO2005109519A1 (en) * 2004-05-01 2005-11-17 Cristopher Croft Jones Charge carrier flow apparatus and methods
US8870571B2 (en) * 2004-09-24 2014-10-28 Spectrum Systems, Llc Rotary dental tool and method of manufacture
JP2006294984A (ja) * 2005-04-13 2006-10-26 Matsushita Electric Ind Co Ltd 半導体レーザ素子とその製造方法およびそれを用いた光ピックアップ装置
US20080018988A1 (en) * 2006-07-24 2008-01-24 Andrew Davidson Light source with tailored output spectrum
US8213751B1 (en) * 2008-11-26 2012-07-03 Optonet Inc. Electronic-integration compatible photonic integrated circuit and method for fabricating electronic-integration compatible photonic integrated circuit
JP5262960B2 (ja) * 2009-04-28 2013-08-14 日本電気株式会社 半導体マッハツェンダー光変調器及びその製造方法、半導体光集積素子及びその製造方法
US20100284645A1 (en) * 2009-05-07 2010-11-11 Alcatel-Lucent Usa Inc. Semiconductor thermooptic phase shifter
US9277958B2 (en) * 2012-02-22 2016-03-08 Candela Corporation Reduction of RF electrode edge effect
CN103809303B (zh) * 2012-11-06 2016-08-10 上海华虹宏力半导体制造有限公司 可调光分路器及其制造方法
JP6390676B2 (ja) * 2015-09-16 2018-09-19 株式会社デンソー 熱電発電装置
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Also Published As

Publication number Publication date
EP0526023A3 (en) 1993-05-05
US5334551A (en) 1994-08-02
EP0526023B1 (de) 1997-12-10
JP2754957B2 (ja) 1998-05-20
DE69223463T2 (de) 1998-06-04
JPH0521904A (ja) 1993-01-29
US5455433A (en) 1995-10-03
EP0526023A2 (de) 1993-02-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee