DE69303654D1 - Optische Wellenleitervorrichtung und Herstellungsverfahren - Google Patents

Optische Wellenleitervorrichtung und Herstellungsverfahren

Info

Publication number
DE69303654D1
DE69303654D1 DE69303654T DE69303654T DE69303654D1 DE 69303654 D1 DE69303654 D1 DE 69303654D1 DE 69303654 T DE69303654 T DE 69303654T DE 69303654 T DE69303654 T DE 69303654T DE 69303654 D1 DE69303654 D1 DE 69303654D1
Authority
DE
Germany
Prior art keywords
manufacturing
optical waveguide
waveguide device
optical
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69303654T
Other languages
English (en)
Other versions
DE69303654T2 (de
Inventor
Kazuo Eda
Miho Sugihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4100837A external-priority patent/JP2606525B2/ja
Priority claimed from JP4107134A external-priority patent/JP2581486B2/ja
Priority claimed from JP4133248A external-priority patent/JP2574594B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69303654D1 publication Critical patent/DE69303654D1/de
Publication of DE69303654T2 publication Critical patent/DE69303654T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
    • G02F2201/063—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide ridge; rib; strip loaded
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/20—LiNbO3, LiTaO3

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
DE69303654T 1992-04-21 1993-04-20 Optische Wellenleitervorrichtung und Herstellungsverfahren Expired - Fee Related DE69303654T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP4100837A JP2606525B2 (ja) 1992-04-21 1992-04-21 光導波路素子とその製造方法
JP4107134A JP2581486B2 (ja) 1992-04-27 1992-04-27 光導波路素子およびその製造方法
JP4133248A JP2574594B2 (ja) 1992-05-26 1992-05-26 光導波路素子とその製造方法

Publications (2)

Publication Number Publication Date
DE69303654D1 true DE69303654D1 (de) 1996-08-22
DE69303654T2 DE69303654T2 (de) 1997-02-13

Family

ID=27309317

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69303654T Expired - Fee Related DE69303654T2 (de) 1992-04-21 1993-04-20 Optische Wellenleitervorrichtung und Herstellungsverfahren

Country Status (4)

Country Link
US (1) US5408566A (de)
EP (1) EP0567051B1 (de)
KR (1) KR0134763B1 (de)
DE (1) DE69303654T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5473721A (en) * 1994-04-13 1995-12-05 Photonic Integration Research, Inc. Multi-mode optical circuit to couple light between various optical elements and method of fabricating same
US5749132A (en) * 1995-08-30 1998-05-12 Ramar Corporation Method of fabrication an optical waveguide
US5963034A (en) * 1996-09-19 1999-10-05 Ramar Corporation Electro-optic electromagnetic field sensor system with optical bias adjustment
US6064788A (en) * 1997-08-14 2000-05-16 Lucent Technologies Inc. Adiabatic Y-branch modulator with negligible chirp
FR2771517B1 (fr) * 1997-11-27 2001-12-14 Dassault Electronique Dispositif electro-optique, notamment pour la repartition optique
US6222966B1 (en) 1998-12-29 2001-04-24 Lucent Technologies Inc. Adiabatic Y-branch waveguide having controllable chirp
JP4443011B2 (ja) * 2000-07-27 2010-03-31 日本碍子株式会社 進行波型光変調器
JP4698018B2 (ja) * 2000-12-12 2011-06-08 日本碍子株式会社 接着体の製造方法、および接着剤
WO2002048765A1 (en) * 2000-12-14 2002-06-20 Bookham Technology Plc Integrated optical devices
US6904186B2 (en) * 2001-11-16 2005-06-07 Ngk Insulators, Ltd. Optical modulators and a method for modulating light
US7295742B2 (en) * 2002-05-31 2007-11-13 Matsushita Electric Industrial Co., Ltd. Optical element and method for producing the same
AU2003300348A1 (en) * 2002-12-30 2004-07-29 Corning Incorporated Fast-switching scalable optical interconnection design with fast contention resolution
US6925216B2 (en) 2003-05-30 2005-08-02 The Regents Of The University Of California Direct-patterned optical waveguides on amorphous silicon films
JP5063001B2 (ja) * 2003-08-21 2012-10-31 日本碍子株式会社 進行波形光変調器
US7672558B2 (en) * 2004-01-12 2010-03-02 Honeywell International, Inc. Silicon optical device
US7217584B2 (en) * 2004-03-18 2007-05-15 Honeywell International Inc. Bonded thin-film structures for optical modulators and methods of manufacture
JP4084360B2 (ja) * 2004-03-31 2008-04-30 株式会社東芝 光周波数安定化装置及び光周波数安定化方法
WO2006035992A1 (ja) 2004-09-29 2006-04-06 Ngk Insulators, Ltd. 光機能デバイス
JP4658658B2 (ja) * 2005-03-29 2011-03-23 住友大阪セメント株式会社 光変調器
US20070101927A1 (en) * 2005-11-10 2007-05-10 Honeywell International Inc. Silicon based optical waveguide structures and methods of manufacture
US7362443B2 (en) 2005-11-17 2008-04-22 Honeywell International Inc. Optical gyro with free space resonator and method for sensing inertial rotation rate
US7463360B2 (en) * 2006-04-18 2008-12-09 Honeywell International Inc. Optical resonator gyro with integrated external cavity beam generator
US7454102B2 (en) 2006-04-26 2008-11-18 Honeywell International Inc. Optical coupling structure
US20070274655A1 (en) * 2006-04-26 2007-11-29 Honeywell International Inc. Low-loss optical device structure
US7535576B2 (en) * 2006-05-15 2009-05-19 Honeywell International, Inc. Integrated optical rotation sensor and method for sensing rotation rate
JP5092494B2 (ja) * 2007-03-29 2012-12-05 住友大阪セメント株式会社 光導波路素子、及び光導波路素子の温度クロストーク抑止方法
JP4589354B2 (ja) * 2007-03-30 2010-12-01 住友大阪セメント株式会社 光変調素子
JP4187771B2 (ja) * 2007-03-30 2008-11-26 住友大阪セメント株式会社 光制御素子
JP4445977B2 (ja) * 2007-03-30 2010-04-07 住友大阪セメント株式会社 光制御素子
US7764851B2 (en) * 2007-11-01 2010-07-27 Ngk Insulators, Ltd. Optical modulators
JP4732539B2 (ja) 2009-09-25 2011-07-27 住友大阪セメント株式会社 光導波路素子モジュール
US10295849B2 (en) 2016-12-16 2019-05-21 Lumentum Operations Llc Optical modulator
JP7343347B2 (ja) * 2019-10-04 2023-09-12 日本碍子株式会社 光変調器用接合体、光変調器および光変調器用接合体の製造方法
WO2021142588A1 (zh) * 2020-01-13 2021-07-22 华为技术有限公司 一种电光调制器及其制造方法、芯片
CN112130352A (zh) * 2020-09-28 2020-12-25 联合微电子中心有限责任公司 一种光开关
CN112764244B (zh) * 2021-01-26 2022-05-17 济南晶正电子科技有限公司 一种电光晶体薄膜、制备方法及电子元器件

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2443129A1 (de) * 1974-09-09 1976-03-25 Siemens Ag Anordnung zur modulation von optischen wellen
NL8303446A (nl) * 1983-10-07 1985-05-01 Philips Nv Component voor een geintegreerd optisch systeem.
US4728167A (en) * 1986-02-24 1988-03-01 The United States Of America As Represented By The Secretary Of The Air Force. Electrically controlled integrated optical switch

Also Published As

Publication number Publication date
EP0567051B1 (de) 1996-07-17
EP0567051A1 (de) 1993-10-27
KR930022103A (ko) 1993-11-23
US5408566A (en) 1995-04-18
DE69303654T2 (de) 1997-02-13
KR0134763B1 (ko) 1998-04-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee