DE69731176D1 - Optische Wellenleitervorrichtung und Herstellungsverfahren - Google Patents

Optische Wellenleitervorrichtung und Herstellungsverfahren

Info

Publication number
DE69731176D1
DE69731176D1 DE1997631176 DE69731176T DE69731176D1 DE 69731176 D1 DE69731176 D1 DE 69731176D1 DE 1997631176 DE1997631176 DE 1997631176 DE 69731176 T DE69731176 T DE 69731176T DE 69731176 D1 DE69731176 D1 DE 69731176D1
Authority
DE
Germany
Prior art keywords
manufacturing
optical waveguide
waveguide device
optical
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1997631176
Other languages
English (en)
Other versions
DE69731176T2 (de
Inventor
Atsuo Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69731176D1 publication Critical patent/DE69731176D1/de
Application granted granted Critical
Publication of DE69731176T2 publication Critical patent/DE69731176T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12116—Polariser; Birefringent
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12142—Modulator
DE69731176T 1996-12-27 1997-12-23 Optische Wellenleitervorrichtung und Herstellungsverfahren Expired - Lifetime DE69731176T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP35127496 1996-12-27
JP35127496 1996-12-27

Publications (2)

Publication Number Publication Date
DE69731176D1 true DE69731176D1 (de) 2004-11-18
DE69731176T2 DE69731176T2 (de) 2005-10-20

Family

ID=18416211

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69731176T Expired - Lifetime DE69731176T2 (de) 1996-12-27 1997-12-23 Optische Wellenleitervorrichtung und Herstellungsverfahren

Country Status (3)

Country Link
US (1) US5991489A (de)
EP (1) EP0851244B1 (de)
DE (1) DE69731176T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000199872A (ja) * 1998-12-29 2000-07-18 Sony Corp 照明装置及び画像表示装置
JP3728124B2 (ja) 1999-01-07 2005-12-21 ペンタックス株式会社 ビーム形状補正光学系および描画装置
US6724962B2 (en) * 2002-01-23 2004-04-20 Yuan Ze University Wavelength to optical power converter and method for converting wavelength into optical power
US6940878B2 (en) * 2002-05-14 2005-09-06 Lambda Crossing Ltd. Tunable laser using microring resonator
EP1657588B1 (de) * 2003-08-21 2015-03-04 NGK Insulators, Ltd. OPTISCHe WELLENLEITERANORDNUNG UND OPTISCHER MODULATOR IN WANDERWELLEnAUSFÜHRUNG
WO2006041172A1 (ja) * 2004-10-12 2006-04-20 Ngk Insulators, Ltd. 光導波路基板および高調波発生デバイス
JP4557264B2 (ja) * 2007-03-08 2010-10-06 日本碍子株式会社 波長変換素子
JP2009015307A (ja) * 2007-06-07 2009-01-22 Nitto Denko Corp 光導波路の製造方法
EP2000837A1 (de) * 2007-06-07 2008-12-10 Nitto Denko Corporation Herstellungsverfahren für einen Lichtwellenleiter
RU2470421C1 (ru) * 2011-07-11 2012-12-20 Открытое акционерное общество Завод "Красное знамя" Способ изготовления гофрированных волноводов
JP6321013B2 (ja) 2012-09-17 2018-05-09 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 成形された基板を含む発光デバイス
CN115145062A (zh) * 2021-03-30 2022-10-04 Tdk株式会社 光学器件

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4196963A (en) * 1978-05-30 1980-04-08 Hughes Aircraft Company Method for eliminating Li2 O out-diffusion in LiNbO3 and LiTaO3 waveguide structures
US4343890A (en) * 1978-07-24 1982-08-10 Rca Corporation Method for making planar optical waveguide comprising thin metal oxide film incorporating a relief phase grating
JP3213619B2 (ja) * 1991-02-05 2001-10-02 パイオニア株式会社 光導波路型デバイスの製造方法及び光導波路型デバイス
US5365338A (en) * 1991-05-28 1994-11-15 The United States Of America As Represented By The Secretary Of The Navy Wavelength sensor for fiber optic gyroscope
DE69226761T2 (de) * 1991-12-27 1999-01-14 Fujitsu Ltd Optische Wellenleiteranordnung mit reduzierter DC-Drift
JPH07159637A (ja) * 1993-12-10 1995-06-23 Nikon Corp リッジ型光導波路の製造方法

Also Published As

Publication number Publication date
US5991489A (en) 1999-11-23
EP0851244B1 (de) 2004-10-13
EP0851244A1 (de) 1998-07-01
DE69731176T2 (de) 2005-10-20

Similar Documents

Publication Publication Date Title
DE69303654D1 (de) Optische Wellenleitervorrichtung und Herstellungsverfahren
DE69827902D1 (de) Optische Vorrichtung und Herstellungsverfahren
DE19545164B8 (de) Optische Halbleitervorrichtung mit vergrabenem Wellenleiter und Herstellungsverfahren dafür
DE69323958D1 (de) Optische Wellenleiter-Anordnung und Herstellungsmethode
DE69511810D1 (de) Optische Halbleitervorrichtung und Herstellungsverfahren
DE69811861T2 (de) Optisches herstellungsverfahren und - gerät
DE69828471D1 (de) Oberflächenartige optische Vorrichtung und Herstellungsverfahren
DE69739682D1 (de) Optische Wellenleiter-Gitter-Anordnung und deren Herstellungsmethode
DE69839654D1 (de) Optische Verzögerungsvorrichtung und entsprechendes Verfahren
DE69834462D1 (de) Optische Übertragungseinrichtung und optisches Übertragungssystem
EE9700318A (et) Optiline seade ja meetod
DE69719117T2 (de) Optische Vorrichtung
DE69526174D1 (de) Optische Wellenleitervorrichtung
DE69737917D1 (de) Optische Wellenleiter-Gitter-Anordnung und deren Herstellungsmethode
DE69714107D1 (de) Optische Wellenleitersonde und optisches System
DE69408743T2 (de) Optische Kopplungsvorrichtung und zugehörige Herstellungsmethode
DE69524794T2 (de) Optische Halbleitervorrichtung und Herstellungsverfahren
DE69735327D1 (de) Optische Halbleitervorrichtung und Herstellungsverfahren
DE69933176D1 (de) Optische Wellenleitervorrichtung und deren Herstellungsverfahren
DE69535427D1 (de) Optische Anordnung und Herstellungsverfahren dafür
DE69732278D1 (de) Optische Faserlaservorrichtung
DE69735839D1 (de) Optische Übertragungseinrichtung und optisches Übertragungssystem
DE69635494D1 (de) Optisches steuerungsverfahren und optische steuerungsvorrichtung
DE69722339D1 (de) Optische Vorrichtung
DE69725084D1 (de) Optische abtastvorrichtung und plattenspieler

Legal Events

Date Code Title Description
8364 No opposition during term of opposition