DE69323958D1 - Optische Wellenleiter-Anordnung und Herstellungsmethode - Google Patents

Optische Wellenleiter-Anordnung und Herstellungsmethode

Info

Publication number
DE69323958D1
DE69323958D1 DE69323958T DE69323958T DE69323958D1 DE 69323958 D1 DE69323958 D1 DE 69323958D1 DE 69323958 T DE69323958 T DE 69323958T DE 69323958 T DE69323958 T DE 69323958T DE 69323958 D1 DE69323958 D1 DE 69323958D1
Authority
DE
Germany
Prior art keywords
manufacturing
optical waveguide
waveguide arrangement
arrangement
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69323958T
Other languages
English (en)
Other versions
DE69323958T2 (de
Inventor
Kazuo Eda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69323958D1 publication Critical patent/DE69323958D1/de
Publication of DE69323958T2 publication Critical patent/DE69323958T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12038—Glass (SiO2 based materials)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
DE69323958T 1992-11-16 1993-11-16 Optische Wellenleiter-Anordnung und Herstellungsmethode Expired - Fee Related DE69323958T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP30429992 1992-11-16
JP30429892 1992-11-16
JP30430092 1992-11-16

Publications (2)

Publication Number Publication Date
DE69323958D1 true DE69323958D1 (de) 1999-04-22
DE69323958T2 DE69323958T2 (de) 1999-09-16

Family

ID=27338671

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69323958T Expired - Fee Related DE69323958T2 (de) 1992-11-16 1993-11-16 Optische Wellenleiter-Anordnung und Herstellungsmethode

Country Status (4)

Country Link
US (2) US5485540A (de)
EP (1) EP0598395B1 (de)
KR (1) KR0137125B1 (de)
DE (1) DE69323958T2 (de)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5747857A (en) * 1991-03-13 1998-05-05 Matsushita Electric Industrial Co., Ltd. Electronic components having high-frequency elements and methods of manufacture therefor
EP0657900B1 (de) * 1993-12-06 1998-03-25 Matsushita Electric Industrial Co., Ltd. Hybrid Magnetstruktur und deren Herstellungsverfahren
US5652674A (en) * 1994-08-31 1997-07-29 Matsushita Electric Industrial Co., Ltd. Method for manufacturing domain-inverted region, optical wavelength conversion device utilizing such domain-inverted region and method for fabricating such device
DE19607107A1 (de) * 1996-02-26 1997-08-28 Sel Alcatel Ag Anordnung zur Kopplung von Signallicht zwischen einem Lichtwellenleiter und einer optoelektronischen Komponente
DK0881195T3 (da) * 1996-07-19 2004-02-09 Kurita Water Ind Ltd Fremgangsmåde og anordning til biologisk behandling af organisk affaldsvæske
JP4108790B2 (ja) * 1997-07-23 2008-06-25 浜松ホトニクス株式会社 ガラス部材の接合方法
GB2334789B (en) * 1998-06-12 2000-01-19 Bookham Technology Ltd A waveguide end face
GB9816168D0 (en) * 1998-07-25 1998-09-23 Secr Defence Etching method
GB2341454B (en) * 1998-09-14 2003-01-29 Univ Southampton Optical waveguide and method of fabricating the same
JP2000162460A (ja) * 1998-11-27 2000-06-16 Sharp Corp 有機光導波路およびその製造方法並びにそれを用いた光学部品
US6316332B1 (en) * 1998-11-30 2001-11-13 Lo Yu-Hwa Method for joining wafers at a low temperature and low stress
US6984571B1 (en) 1999-10-01 2006-01-10 Ziptronix, Inc. Three dimensional device integration method and integrated device
US6500694B1 (en) * 2000-03-22 2002-12-31 Ziptronix, Inc. Three dimensional device integration method and integrated device
US20020048900A1 (en) * 1999-11-23 2002-04-25 Nova Crystals, Inc. Method for joining wafers at a low temperature and low stress
JP4414535B2 (ja) * 2000-01-13 2010-02-10 進 野田 半導体装置の製造方法
US6902987B1 (en) 2000-02-16 2005-06-07 Ziptronix, Inc. Method for low temperature bonding and bonded structure
US7058245B2 (en) * 2000-04-04 2006-06-06 Waveguide Solutions, Inc. Integrated optical circuits
EP1285290A1 (de) 2000-04-28 2003-02-26 Edgelight Biosciences, Inc. Mikroarray-leckwellen-fluoreszenzdetektionseinrichtung
US6563133B1 (en) * 2000-08-09 2003-05-13 Ziptronix, Inc. Method of epitaxial-like wafer bonding at low temperature and bonded structure
GB2370409A (en) * 2000-12-14 2002-06-26 Bookham Technology Plc Integrated optical devices
US6785052B2 (en) * 2001-05-21 2004-08-31 Jds Uniphase Corporation Stress free and thermally stabilized dielectric fiber
US6996324B2 (en) * 2001-09-19 2006-02-07 Matsushita Electric Industrial Co., Ltd. Optical waveguide and method for fabricating the same
US20030164006A1 (en) * 2001-10-26 2003-09-04 Buchanan Karl H. Direct bonding of glass articles for drawing
US6814833B2 (en) * 2001-10-26 2004-11-09 Corning Incorporated Direct bonding of articles containing silicon
US20030079503A1 (en) * 2001-10-26 2003-05-01 Cook Glen B. Direct bonding of glass articles for drawing
US20030081906A1 (en) * 2001-10-26 2003-05-01 Filhaber John F. Direct bonding of optical components
US6836602B2 (en) 2001-10-26 2004-12-28 Corning Incorporated Direct bonding of optical components
US20030188553A1 (en) * 2002-04-08 2003-10-09 Mann Larry G. Direct bonding methods using lithium
EP1502135A2 (de) * 2002-04-16 2005-02-02 Xloom Photonics Ltd. Elektrooptische schaltkreise mit integriertem verbinder und verfahren zu ihrer herstellung
US20040021214A1 (en) * 2002-04-16 2004-02-05 Avner Badehi Electro-optic integrated circuits with connectors and methods for the production thereof
US6791748B2 (en) 2002-05-02 2004-09-14 Corning Incorporated Optical isolators and methods of manufacture
US6950235B2 (en) * 2002-05-02 2005-09-27 Corning Incorporated Optical isolators and methods of manufacture
US6885781B2 (en) * 2002-05-03 2005-04-26 Fujitsu Limited Thin film electro-optical deflector device and a method of fabrication of such a device
US6777252B2 (en) * 2002-05-24 2004-08-17 Alphion Corporation Method and apparatus for testing an individual lightwave chip on a wafer
US20030230113A1 (en) * 2002-06-12 2003-12-18 Patrick Gedeon Methods for manufacturing glass articles
FR2847990B1 (fr) * 2002-11-29 2005-02-18 Thales Sa Procede de realisation de reseaux optiques non lineaires epais
AU2003300348A1 (en) * 2002-12-30 2004-07-29 Corning Incorporated Fast-switching scalable optical interconnection design with fast contention resolution
JP2004281686A (ja) * 2003-03-14 2004-10-07 Sumitomo Electric Ind Ltd 半導体発光デバイス及びその製造方法
US7109092B2 (en) 2003-05-19 2006-09-19 Ziptronix, Inc. Method of room temperature covalent bonding
EP1676160A4 (de) 2003-10-15 2008-04-09 Xloom Photonics Ltd Elektrooptische schaltkreise mit integriertem verbinder und verfahren zu ihrer herstellung
TWI235412B (en) * 2004-08-10 2005-07-01 Ind Tech Res Inst Method for manufacturing bonded wafer with ultra-thin single crystal ferroelectricity film
JP2006080314A (ja) * 2004-09-09 2006-03-23 Canon Inc 結合基板の製造方法
US20090093137A1 (en) * 2007-10-08 2009-04-09 Xloom Communications, (Israel) Ltd. Optical communications module
JP2010263153A (ja) * 2009-05-11 2010-11-18 Sumitomo Electric Ind Ltd 半導体集積光デバイス及びその作製方法
US9434145B2 (en) 2012-12-07 2016-09-06 Semrock, Inc. Dichroic filter conformed to optical surface
US10401099B2 (en) 2016-10-05 2019-09-03 Raytheon Company Transparent heat exchanger
EP3399228B1 (de) * 2016-12-19 2021-12-29 NGK Insulators, Ltd. Phosphorelement und beleuchtungsvorrichtung
US10629577B2 (en) 2017-03-16 2020-04-21 Invensas Corporation Direct-bonded LED arrays and applications
US11169326B2 (en) 2018-02-26 2021-11-09 Invensas Bonding Technologies, Inc. Integrated optical waveguides, direct-bonded waveguide interface joints, optical routing and interconnects
US11762200B2 (en) 2019-12-17 2023-09-19 Adeia Semiconductor Bonding Technologies Inc. Bonded optical devices
CN111399116A (zh) * 2020-04-24 2020-07-10 罕王微电子（辽宁）有限公司 一种堆叠式光波导结构及制备方法
CN115951454B (zh) * 2023-03-13 2023-05-30 中科鑫通微电子技术(北京)有限公司 铌酸锂-氮化硅波导与激光器异质集成结构及其制备方法

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51115794A (en) * 1975-04-02 1976-10-12 Mitsubishi Electric Corp Thin film photo switch element
JPS5223355A (en) * 1975-08-18 1977-02-22 Nippon Telegr & Teleph Corp <Ntt> Process for fabricating a flush type light wave guiding path
US4403825A (en) * 1978-11-16 1983-09-13 Hughes Aircraft Company Integrated optics thin film devices and fabrication thereof
US4615962A (en) * 1979-06-25 1986-10-07 University Patents, Inc. Diacetylenes having liquid crystal phases
JPS56131219A (en) * 1980-03-17 1981-10-14 Ngk Spark Plug Co Ltd Energy-confined type piezoelectric filter
US4582390A (en) * 1982-01-05 1986-04-15 At&T Bell Laboratories Dielectric optical waveguide and technique for fabricating same
JPS5967710A (ja) * 1982-10-12 1984-04-17 Seikosha Co Ltd 厚みすべり圧電振動子
EP0192850A1 (de) * 1985-01-07 1986-09-03 Siemens Aktiengesellschaft Monolithisch integriertes optoelektronisches Halbleiterbauelement
GB2191603A (en) * 1986-06-13 1987-12-16 Northern Telecom Ltd Optical conductor having at least three layers
DE3641285A1 (de) * 1986-12-03 1988-06-09 Schott Glaswerke Verfahren zur messung von (alpha) und ss-strahlen geringer intensitaet
JPS63261219A (ja) * 1987-04-20 1988-10-27 Fujitsu Ltd 光変調素子
JPH01189614A (ja) * 1988-01-26 1989-07-28 Nippon Telegr & Teleph Corp <Ntt> 石英系光導波路及びその製造方法
US5070488A (en) * 1988-06-29 1991-12-03 Atsuko Fukushima Optical integrated circuit and optical apparatus
JP2788652B2 (ja) * 1989-06-30 1998-08-20 日立電線株式会社 希土類元素添加ガラス導波路の製造方法
JPH0375608A (ja) * 1989-08-17 1991-03-29 Nippon Telegr & Teleph Corp <Ntt> 光導波路部品の実装方法
DE59010811D1 (de) * 1989-09-01 1998-04-23 Siemens Ag Integriert optische Anordnung mit wenigstens einem auf einem Substrat aus Halbleitermaterial integrierten optischen Wellenleiter
EP0420173A3 (en) * 1989-09-26 1992-09-09 Omron Corporation Rib optical waveguide and method of manufacturing the same
DE69126155T2 (de) * 1990-03-02 1997-12-18 Toshiba Kawasaki Kk Optische Wellenlängenwandlervorrichtung zur Erzeugung der zweiten Harmonischen mit Cerenkovstrahlung in einem Wellenleiter
US5122852A (en) * 1990-04-23 1992-06-16 Bell Communications Research, Inc. Grafted-crystal-film integrated optics and optoelectronic devices
JPH04110831A (ja) * 1990-08-31 1992-04-13 Nec Corp 光制御デバイス
JPH04131805A (ja) * 1990-09-25 1992-05-06 Sumitomo Electric Ind Ltd 石英系光導波路及びその製造方法
US5157748A (en) * 1990-09-28 1992-10-20 Siemens Aktiengesellschaft Controllable integrated optical directional coupler
JP2643620B2 (ja) * 1991-03-13 1997-08-20 松下電器産業株式会社 電圧制御発振器とその製造方法
US5281305A (en) * 1992-05-22 1994-01-25 Northrop Corporation Method for the production of optical waveguides employing trench and fill techniques
EP0575948B1 (de) * 1992-06-23 1997-04-23 Matsushita Electric Industrial Co., Ltd. Quartzgerät und Verfahren zur Herstellung
KR0138006B1 (ko) * 1992-10-26 1998-06-15 모리시타 요이찌 광도파로 및 그 제조방법

Also Published As

Publication number Publication date
US5785874A (en) 1998-07-28
EP0598395A1 (de) 1994-05-25
DE69323958T2 (de) 1999-09-16
US5485540A (en) 1996-01-16
KR0137125B1 (ko) 1998-06-15
KR940011975A (ko) 1994-06-22
EP0598395B1 (de) 1999-03-17

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