DE69203510D1 - Verfahren zur Herstellung einer metallischen Kaltkathode in mikroskopischer Grösse. - Google Patents
Verfahren zur Herstellung einer metallischen Kaltkathode in mikroskopischer Grösse.Info
- Publication number
- DE69203510D1 DE69203510D1 DE69203510T DE69203510T DE69203510D1 DE 69203510 D1 DE69203510 D1 DE 69203510D1 DE 69203510 T DE69203510 T DE 69203510T DE 69203510 T DE69203510 T DE 69203510T DE 69203510 D1 DE69203510 D1 DE 69203510D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- cold cathode
- microscopic size
- metallic cold
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/02—Manufacture of cathodes
- H01J2209/022—Cold cathodes
- H01J2209/0223—Field emission cathodes
- H01J2209/0226—Sharpening or resharpening of emitting point or edge
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7946491A JP2550798B2 (ja) | 1991-04-12 | 1991-04-12 | 微小冷陰極の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69203510D1 true DE69203510D1 (de) | 1995-08-24 |
DE69203510T2 DE69203510T2 (de) | 1995-12-21 |
Family
ID=13690609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69203510T Expired - Fee Related DE69203510T2 (de) | 1991-04-12 | 1992-04-08 | Verfahren zur Herstellung einer metallischen Kaltkathode in mikroskopischer Grösse. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5389026A (de) |
EP (1) | EP0508737B1 (de) |
JP (1) | JP2550798B2 (de) |
KR (1) | KR960000315B1 (de) |
DE (1) | DE69203510T2 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9216647D0 (en) * | 1992-08-05 | 1992-09-16 | Isis Innovation | Cold cathodes |
KR950008756B1 (ko) * | 1992-11-25 | 1995-08-04 | 삼성전관주식회사 | 실리콘 전자방출소자 및 그의 제조방법 |
KR950008758B1 (ko) * | 1992-12-11 | 1995-08-04 | 삼성전관주식회사 | 실리콘 전계방출 소자 및 그의 제조방법 |
US5494179A (en) * | 1993-01-22 | 1996-02-27 | Matsushita Electric Industrial Co., Ltd. | Field-emitter having a sharp apex and small-apertured gate and method for fabricating emitter |
US5462467A (en) * | 1993-09-08 | 1995-10-31 | Silicon Video Corporation | Fabrication of filamentary field-emission device, including self-aligned gate |
US7025892B1 (en) | 1993-09-08 | 2006-04-11 | Candescent Technologies Corporation | Method for creating gated filament structures for field emission displays |
US5564959A (en) | 1993-09-08 | 1996-10-15 | Silicon Video Corporation | Use of charged-particle tracks in fabricating gated electron-emitting devices |
US5559389A (en) * | 1993-09-08 | 1996-09-24 | Silicon Video Corporation | Electron-emitting devices having variously constituted electron-emissive elements, including cones or pedestals |
KR970007786B1 (ko) * | 1993-11-08 | 1997-05-16 | 이종덕 | 실리콘 필드 에미터 어레이의 제조방법 |
US5607335A (en) * | 1994-06-29 | 1997-03-04 | Silicon Video Corporation | Fabrication of electron-emitting structures using charged-particle tracks and removal of emitter material |
DE69517700T2 (de) * | 1994-11-04 | 2000-11-23 | Micron Technology, Inc. | Schärfungsverfahren für emissionstellen durch oxydation bei niedriger temperatur |
JPH08148084A (ja) * | 1994-11-24 | 1996-06-07 | Nec Corp | 電界放出型冷陰極の製造方法 |
US6033277A (en) * | 1995-02-13 | 2000-03-07 | Nec Corporation | Method for forming a field emission cold cathode |
JPH08222126A (ja) * | 1995-02-13 | 1996-08-30 | Nec Kansai Ltd | 電界放出冷陰極の製造方法 |
US5865657A (en) * | 1996-06-07 | 1999-02-02 | Candescent Technologies Corporation | Fabrication of gated electron-emitting device utilizing distributed particles to form gate openings typically beveled and/or combined with lift-off or electrochemical removal of excess emitter material |
US5755944A (en) * | 1996-06-07 | 1998-05-26 | Candescent Technologies Corporation | Formation of layer having openings produced by utilizing particles deposited under influence of electric field |
US6187603B1 (en) | 1996-06-07 | 2001-02-13 | Candescent Technologies Corporation | Fabrication of gated electron-emitting devices utilizing distributed particles to define gate openings, typically in combination with lift-off of excess emitter material |
US5865659A (en) * | 1996-06-07 | 1999-02-02 | Candescent Technologies Corporation | Fabrication of gated electron-emitting device utilizing distributed particles to define gate openings and utilizing spacer material to control spacing between gate layer and electron-emissive elements |
US5857885A (en) * | 1996-11-04 | 1999-01-12 | Laou; Philips | Methods of forming field emission devices with self-aligned gate structure |
FR2766011B1 (fr) * | 1997-07-10 | 1999-09-24 | Alsthom Cge Alcatel | Cathode froide a micropointes |
US6008062A (en) * | 1997-10-31 | 1999-12-28 | Candescent Technologies Corporation | Undercutting technique for creating coating in spaced-apart segments |
US6010383A (en) * | 1997-10-31 | 2000-01-04 | Candescent Technologies Corporation | Protection of electron-emissive elements prior to removing excess emitter material during fabrication of electron-emitting device |
JP3211752B2 (ja) * | 1997-11-10 | 2001-09-25 | 日本電気株式会社 | Mim又はmis電子源の構造及びその製造方法 |
US6171164B1 (en) | 1998-02-19 | 2001-01-09 | Micron Technology, Inc. | Method for forming uniform sharp tips for use in a field emission array |
KR100513652B1 (ko) * | 1998-08-24 | 2005-12-26 | 비오이 하이디스 테크놀로지 주식회사 | 전계 방출 소자 및 그 제조방법 |
US6064145A (en) | 1999-06-04 | 2000-05-16 | Winbond Electronics Corporation | Fabrication of field emitting tips |
KR20010091420A (ko) * | 2000-03-15 | 2001-10-23 | 윤덕용 | 금속실리사이드가 코팅된 실리콘 팁의 제조방법 |
US6921684B2 (en) * | 2003-10-17 | 2005-07-26 | Intel Corporation | Method of sorting carbon nanotubes including protecting metallic nanotubes and removing the semiconducting nanotubes |
US8866068B2 (en) | 2012-12-27 | 2014-10-21 | Schlumberger Technology Corporation | Ion source with cathode having an array of nano-sized projections |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3833435A (en) * | 1972-09-25 | 1974-09-03 | Bell Telephone Labor Inc | Dielectric optical waveguides and technique for fabricating same |
US3921022A (en) * | 1974-09-03 | 1975-11-18 | Rca Corp | Field emitting device and method of making same |
JPS5166769A (de) * | 1974-12-06 | 1976-06-09 | Hitachi Ltd | |
JPS529371A (en) * | 1975-07-12 | 1977-01-24 | Ise Electronics Corp | Fluorescent display tube manufactruing process |
US4244792A (en) * | 1980-02-26 | 1981-01-13 | Hixson Metal Finishing | Method for stripping anodized aluminum and aluminum alloys |
JPS62105459A (ja) * | 1985-11-01 | 1987-05-15 | Hitachi Ltd | 半導体構造物 |
JPH02257635A (ja) * | 1989-03-30 | 1990-10-18 | Toshiba Corp | パターン形成方法 |
JPH02288128A (ja) * | 1989-04-28 | 1990-11-28 | Matsushita Electric Ind Co Ltd | 電子放出素子の製造方法 |
JPH0371529A (ja) * | 1989-08-09 | 1991-03-27 | Seiko Epson Corp | 電界放出電極の製造方法 |
JPH03223719A (ja) * | 1989-10-03 | 1991-10-02 | Sharp Corp | 電極の形成方法 |
-
1991
- 1991-04-12 JP JP7946491A patent/JP2550798B2/ja not_active Expired - Fee Related
-
1992
- 1992-04-08 DE DE69203510T patent/DE69203510T2/de not_active Expired - Fee Related
- 1992-04-08 EP EP92303096A patent/EP0508737B1/de not_active Expired - Lifetime
- 1992-04-11 KR KR1019920006041A patent/KR960000315B1/ko not_active IP Right Cessation
-
1993
- 1993-06-28 US US08/082,170 patent/US5389026A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2550798B2 (ja) | 1996-11-06 |
KR960000315B1 (ko) | 1996-01-04 |
EP0508737A1 (de) | 1992-10-14 |
JPH04312739A (ja) | 1992-11-04 |
EP0508737B1 (de) | 1995-07-19 |
DE69203510T2 (de) | 1995-12-21 |
US5389026A (en) | 1995-02-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |