DE69115082D1 - Halbleitervorrichtung mit vielschichtiger Verdrahtungsstruktur und Verfahren zu ihrer Herstellung. - Google Patents
Halbleitervorrichtung mit vielschichtiger Verdrahtungsstruktur und Verfahren zu ihrer Herstellung.Info
- Publication number
- DE69115082D1 DE69115082D1 DE69115082T DE69115082T DE69115082D1 DE 69115082 D1 DE69115082 D1 DE 69115082D1 DE 69115082 T DE69115082 T DE 69115082T DE 69115082 T DE69115082 T DE 69115082T DE 69115082 D1 DE69115082 D1 DE 69115082D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- semiconductor device
- same
- wiring structure
- layer wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/298—Semiconductor material, e.g. amorphous silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5226—Via connections in a multilevel interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4950090 | 1990-03-02 | ||
JP3112658A JPH04226054A (ja) | 1990-03-02 | 1991-02-20 | 多層配線構造を有する半導体装置及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69115082D1 true DE69115082D1 (de) | 1996-01-18 |
DE69115082T2 DE69115082T2 (de) | 1996-05-15 |
Family
ID=26389898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69115082T Expired - Fee Related DE69115082T2 (de) | 1990-03-02 | 1991-03-01 | Halbleitervorrichtung mit vielschichtiger Verdrahtungsstruktur und Verfahren zu ihrer Herstellung. |
Country Status (4)
Country | Link |
---|---|
US (2) | US5462893A (de) |
EP (1) | EP0444695B1 (de) |
JP (1) | JPH04226054A (de) |
DE (1) | DE69115082T2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5321211A (en) * | 1992-04-30 | 1994-06-14 | Sgs-Thomson Microelectronics, Inc. | Integrated circuit via structure |
JPH06104341A (ja) * | 1992-09-18 | 1994-04-15 | Toshiba Corp | 半導体集積回路およびその製造方法 |
US5471094A (en) * | 1994-02-24 | 1995-11-28 | Integrated Device Technology, Inc. | Self-aligned via structure |
JP2616706B2 (ja) * | 1994-08-04 | 1997-06-04 | 日本電気株式会社 | 半導体装置およびその製造方法 |
US5736457A (en) | 1994-12-09 | 1998-04-07 | Sematech | Method of making a damascene metallization |
US5757077A (en) * | 1995-02-03 | 1998-05-26 | National Semiconductor Corporation | Integrated circuits with borderless vias |
US5858875A (en) * | 1995-02-03 | 1999-01-12 | National Semiconductor Corporation | Integrated circuits with borderless vias |
US5656543A (en) * | 1995-02-03 | 1997-08-12 | National Semiconductor Corporation | Fabrication of integrated circuits with borderless vias |
US5619072A (en) * | 1995-02-09 | 1997-04-08 | Advanced Micro Devices, Inc. | High density multi-level metallization and interconnection structure |
US5759867A (en) * | 1995-04-21 | 1998-06-02 | International Business Machines Corporation | Method of making a disposable corner etch stop-spacer for borderless contacts |
US5547892A (en) * | 1995-04-27 | 1996-08-20 | Taiwan Semiconductor Manufacturing Company | Process for forming stacked contacts and metal contacts on static random access memory having thin film transistors |
US5654231A (en) * | 1996-03-25 | 1997-08-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of eliminating buried contact trench in SRAM technology |
US5756396A (en) * | 1996-05-06 | 1998-05-26 | Taiwan Semiconductor Manufacturing Company Ltd | Method of making a multi-layer wiring structure having conductive sidewall etch stoppers and a stacked plug interconnect |
JP3068462B2 (ja) * | 1996-05-29 | 2000-07-24 | 日本電気株式会社 | 半導体装置の製造方法 |
US5869393A (en) * | 1996-06-19 | 1999-02-09 | Vanguard International Semiconductor Corp. | Method for fabricating multi-level interconnection |
US5891805A (en) * | 1996-12-13 | 1999-04-06 | Intel Corporation | Method of forming contacts |
JP2897827B2 (ja) | 1997-04-08 | 1999-05-31 | 日本電気株式会社 | 半導体装置の多層配線構造 |
US6074943A (en) * | 1997-04-16 | 2000-06-13 | Texas Instruments Incorporated | Sidewalls for guiding the via etch |
WO1999000840A1 (en) * | 1997-06-26 | 1999-01-07 | Advanced Micro Devices, Inc. | Interconnect spacer structures |
US6015751A (en) * | 1998-04-06 | 2000-01-18 | Taiwan Semiconductor Manufacturing Company | Self-aligned connection to underlayer metal lines through unlanded via holes |
US6214737B1 (en) * | 1999-01-20 | 2001-04-10 | Advanced Micro Devices, Inc. | Simplified sidewall formation for sidewall patterning of sub 100 nm structures |
US7482278B1 (en) | 1999-02-11 | 2009-01-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Key-hole free process for high aspect ratio gap filling with reentrant spacer |
CA2826823A1 (en) | 2011-02-11 | 2012-08-16 | Halliburton Energy Services, Inc. | Broadband flex joint isolator for acoustic tools |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4433004A (en) * | 1979-07-11 | 1984-02-21 | Tokyo Shibaura Denki Kabushiki Kaisha | Semiconductor device and a method for manufacturing the same |
JPS58137231A (ja) * | 1982-02-09 | 1983-08-15 | Nec Corp | 集積回路装置 |
JPS59154040A (ja) * | 1983-02-22 | 1984-09-03 | Toshiba Corp | 半導体装置の製造方法 |
JPS59200439A (ja) * | 1983-04-27 | 1984-11-13 | Toshiba Corp | 半導体装置の製造方法 |
JPS6080264A (ja) * | 1983-10-07 | 1985-05-08 | Toshiba Corp | 半導体装置 |
JPS60115245A (ja) * | 1983-11-28 | 1985-06-21 | Toshiba Corp | 半導体装置の製造方法 |
JPS60115221A (ja) * | 1983-11-28 | 1985-06-21 | Toshiba Corp | 半導体装置の製造方法 |
US4807013A (en) * | 1984-10-17 | 1989-02-21 | American Telephone And Telegraph Company At&T Bell Laboratories | Polysilicon fillet |
JPS6196734A (ja) * | 1984-10-17 | 1986-05-15 | アメリカン テレフォン アンド テレグラフ カムパニー | ポリシリコン フイレツト |
JPS6450443A (en) * | 1987-08-20 | 1989-02-27 | Toshiba Corp | Semiconductor device |
JPH02222148A (ja) * | 1989-02-22 | 1990-09-04 | Yamaha Corp | 半導体装置 |
US4931353A (en) * | 1989-03-01 | 1990-06-05 | The Boeing Company | Structure and method for selectively producing a conductive region on a substrate |
US4933303A (en) * | 1989-07-25 | 1990-06-12 | Standard Microsystems Corporation | Method of making self-aligned tungsten interconnection in an integrated circuit |
US5286674A (en) * | 1992-03-02 | 1994-02-15 | Motorola, Inc. | Method for forming a via structure and semiconductor device having the same |
-
1991
- 1991-02-20 JP JP3112658A patent/JPH04226054A/ja active Pending
- 1991-03-01 EP EP91103083A patent/EP0444695B1/de not_active Expired - Lifetime
- 1991-03-01 DE DE69115082T patent/DE69115082T2/de not_active Expired - Fee Related
-
1994
- 1994-04-20 US US08/231,974 patent/US5462893A/en not_active Expired - Lifetime
-
1995
- 1995-06-05 US US08/464,126 patent/US5543360A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0444695A2 (de) | 1991-09-04 |
EP0444695A3 (en) | 1992-04-15 |
DE69115082T2 (de) | 1996-05-15 |
JPH04226054A (ja) | 1992-08-14 |
US5543360A (en) | 1996-08-06 |
EP0444695B1 (de) | 1995-12-06 |
US5462893A (en) | 1995-10-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |