DE69032845D1 - Josephsoneffektbauelement des Typs mit Tunnelverbindung und Verfahren zu seiner Herstellung - Google Patents
Josephsoneffektbauelement des Typs mit Tunnelverbindung und Verfahren zu seiner HerstellungInfo
- Publication number
- DE69032845D1 DE69032845D1 DE69032845T DE69032845T DE69032845D1 DE 69032845 D1 DE69032845 D1 DE 69032845D1 DE 69032845 T DE69032845 T DE 69032845T DE 69032845 T DE69032845 T DE 69032845T DE 69032845 D1 DE69032845 D1 DE 69032845D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacture
- effect device
- connection type
- tunnel connection
- type josephson
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005668 Josephson effect Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
- H10N60/0604—Monocrystalline substrates, e.g. epitaxial growth
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/10—Junction-based devices
- H10N60/12—Josephson-effect devices
- H10N60/124—Josephson-effect devices comprising high-Tc ceramic materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/80—Constructional details
- H10N60/85—Superconducting active materials
- H10N60/855—Ceramic superconductors
- H10N60/857—Ceramic superconductors comprising copper oxide
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1082690A JPH02260674A (ja) | 1989-03-31 | 1989-03-31 | トンネル型ジョセフソン素子とその作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69032845D1 true DE69032845D1 (de) | 1999-02-04 |
DE69032845T2 DE69032845T2 (de) | 1999-07-08 |
Family
ID=13781413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69032845T Expired - Fee Related DE69032845T2 (de) | 1989-03-31 | 1990-04-02 | Josephsoneffektbauelement des Typs mit Tunnelverbindung und Verfahren zu seiner Herstellung |
Country Status (8)
Country | Link |
---|---|
US (1) | US6157044A (de) |
EP (1) | EP0390704B1 (de) |
JP (1) | JPH02260674A (de) |
KR (1) | KR900015364A (de) |
CN (1) | CN1022654C (de) |
AU (1) | AU625159B2 (de) |
CA (1) | CA2013643C (de) |
DE (1) | DE69032845T2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3924022C2 (de) * | 1989-07-20 | 1995-01-05 | Siemens Ag | Verfahren zur Herstellung eines Josephson-Tunnelelementes mit metalloxidischem Supraleitermaterial |
AU643286B2 (en) * | 1990-05-30 | 1993-11-11 | Sumitomo Electric Industries, Ltd. | Process for preparing superconducting junction of oxide superconductor |
EP0468868B1 (de) * | 1990-07-19 | 1996-02-28 | Sumitomo Electric Industries, Ltd. | Supraleitende Einrichtung mit geschichteter Struktur, zusammengesetzt aus oxidischem Supraleiter und Isolatordünnschicht und deren Herstellungsmethode |
JPH0812937B2 (ja) * | 1990-08-31 | 1996-02-07 | 株式会社日立製作所 | 超電導体膜を含む多層膜の作製方法 |
DE4124048C2 (de) * | 1991-07-19 | 1995-02-02 | Mueller Paul | Supraleitfähiges Bauelement mit einem Josephsonkontakt in einem monokristallinen Hochtemperatursupraleiter und Verfahren zu dessen Herstellung |
JP2698254B2 (ja) * | 1991-11-15 | 1998-01-19 | 財団法人国際超電導産業技術研究センター | 酸化物薄膜の成膜方法 |
US5747427A (en) * | 1991-11-15 | 1998-05-05 | Hokkaido Electric Power Co., Inc. | Process for forming a semiconductive thin film containing a junction |
US5274249A (en) * | 1991-12-20 | 1993-12-28 | University Of Maryland | Superconducting field effect devices with thin channel layer |
DE19619585C2 (de) * | 1996-05-15 | 1999-11-11 | Bosch Gmbh Robert | Schaltbarer planarer Hochfrequenzresonator und Filter |
DE19733921A1 (de) * | 1997-08-06 | 1999-02-25 | Forschungszentrum Juelich Gmbh | Bauelement mit Gleichrichtungsfunktion mit Hilfe von Ladungstransport durch Ionen |
US6541136B1 (en) * | 1998-09-14 | 2003-04-01 | The Regents Of The University Of California | Superconducting structure |
US6624122B1 (en) * | 2000-06-21 | 2003-09-23 | The Regents Of The University Of California | High critical current superconducting tapes |
US6580102B2 (en) * | 2001-06-05 | 2003-06-17 | D-Wave Systems, Inc. | Four-terminal system for reading the state of a phase qubit |
US6926921B2 (en) * | 2003-05-05 | 2005-08-09 | Hewlett-Packard Development Company, L.P. | Imprint lithography for superconductor devices |
CN102368533A (zh) * | 2011-10-26 | 2012-03-07 | 中国科学院电工研究所 | 电子束退火制备二硼化镁超导约瑟夫森结的方法 |
US11790259B2 (en) | 2019-09-06 | 2023-10-17 | D-Wave Systems Inc. | Systems and methods for tuning capacitance in quantum devices |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4316785A (en) * | 1979-11-05 | 1982-02-23 | Nippon Telegraph & Telephone Public Corporation | Oxide superconductor Josephson junction and fabrication method therefor |
JPS5846198B2 (ja) * | 1980-07-25 | 1983-10-14 | 日本電信電話株式会社 | 酸化物超伝導体ジョセフソン素子の製造方法 |
US4888202A (en) * | 1986-07-31 | 1989-12-19 | Nippon Telegraph And Telephone Corporation | Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film |
EP0284489B2 (de) * | 1987-03-14 | 2002-04-10 | Sumitomo Electric Industries Limited | Verfahren zur Abscheidung eines supraleitenden dünnen Filmes |
JPS63269585A (ja) * | 1987-04-27 | 1988-11-07 | Fujikura Ltd | ジヨセフソン接合素子 |
DE3886586T2 (de) * | 1987-05-26 | 1994-04-28 | Sumitomo Electric Industries | Verfahren zur Herstellung einer dünnen Schicht aus supraleitendem Mischoxid. |
JPS63306676A (ja) * | 1987-06-08 | 1988-12-14 | Matsushita Electric Ind Co Ltd | ジョセフソン素子 |
JPS63308977A (ja) * | 1987-06-11 | 1988-12-16 | Toshiba Corp | 超電導素子 |
JPS6411378A (en) * | 1987-07-06 | 1989-01-13 | Hitachi Ltd | Formation of josephson element |
JPS6412585A (en) * | 1987-07-07 | 1989-01-17 | Mitsubishi Electric Corp | Josephson junction device |
JPS6435972A (en) * | 1987-07-30 | 1989-02-07 | Mitsubishi Electric Corp | Superconductor device |
JPS6439783A (en) * | 1987-08-06 | 1989-02-10 | Matsushita Electric Ind Co Ltd | Manufacture of superconducting element |
JPS6446990A (en) * | 1987-08-17 | 1989-02-21 | Matsushita Electric Ind Co Ltd | Josephson element and manufacture thereof |
JPS6451685A (en) * | 1987-08-22 | 1989-02-27 | Sumitomo Electric Industries | Formation of superconducting circuit |
JPS6451680A (en) * | 1987-08-22 | 1989-02-27 | Sumitomo Electric Industries | Oxide ceramics laminated layer structure and its manufacture |
FR2626715B1 (fr) * | 1988-02-02 | 1990-05-18 | Thomson Csf | Dispositif en couches minces de materiau supraconducteur et procede de realisation |
EP0342039B1 (de) * | 1988-05-11 | 1994-08-31 | Canon Kabushiki Kaisha | Josephson-Einrichtung und Verfahren zu ihrer Herstellung |
EP0349444A3 (de) * | 1988-06-20 | 1991-04-10 | EASTMAN KODAK COMPANY (a New Jersey corporation) | Dünnschicht-Supraleiter mit hohem Tc aus Y-Ba-Cu-O |
JPH0262082A (ja) * | 1988-08-29 | 1990-03-01 | Fujitsu Ltd | 超伝導トランジスタ |
JPH02234480A (ja) * | 1989-03-07 | 1990-09-17 | Nec Corp | 酸化物超伝導トンネル接合素子 |
US5087605A (en) * | 1989-06-01 | 1992-02-11 | Bell Communications Research, Inc. | Layered lattice-matched superconducting device and method of making |
-
1989
- 1989-03-31 JP JP1082690A patent/JPH02260674A/ja active Pending
-
1990
- 1990-03-30 KR KR1019900004284A patent/KR900015364A/ko not_active Application Discontinuation
- 1990-03-31 CN CN90102462A patent/CN1022654C/zh not_active Expired - Fee Related
- 1990-04-02 CA CA002013643A patent/CA2013643C/en not_active Expired - Fee Related
- 1990-04-02 DE DE69032845T patent/DE69032845T2/de not_active Expired - Fee Related
- 1990-04-02 AU AU52495/90A patent/AU625159B2/en not_active Ceased
- 1990-04-02 EP EP90400899A patent/EP0390704B1/de not_active Expired - Lifetime
-
1993
- 1993-03-10 US US08/029,361 patent/US6157044A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1047418A (zh) | 1990-11-28 |
CA2013643A1 (en) | 1990-09-30 |
CN1022654C (zh) | 1993-11-03 |
EP0390704A3 (de) | 1991-10-02 |
AU5249590A (en) | 1990-10-18 |
EP0390704B1 (de) | 1998-12-23 |
US6157044A (en) | 2000-12-05 |
EP0390704A2 (de) | 1990-10-03 |
DE69032845T2 (de) | 1999-07-08 |
AU625159B2 (en) | 1992-07-02 |
JPH02260674A (ja) | 1990-10-23 |
CA2013643C (en) | 1996-07-09 |
KR900015364A (ko) | 1990-10-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |