DE68928564D1 - Josephson-Einrichtungen und Verfahren zu deren Herstellung - Google Patents

Josephson-Einrichtungen und Verfahren zu deren Herstellung

Info

Publication number
DE68928564D1
DE68928564D1 DE68928564T DE68928564T DE68928564D1 DE 68928564 D1 DE68928564 D1 DE 68928564D1 DE 68928564 T DE68928564 T DE 68928564T DE 68928564 T DE68928564 T DE 68928564T DE 68928564 D1 DE68928564 D1 DE 68928564D1
Authority
DE
Germany
Prior art keywords
manufacture
processes
josephson devices
josephson
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68928564T
Other languages
English (en)
Other versions
DE68928564T2 (de
Inventor
Hidetaka Higashino
Koichi Mizuno
Hideaki Adachi
Kentaro Setsune
Akira Enokihara
Shinichiro Hatta
Kiyotaka Wasa
Shigemi Kohiki
Tomoaki Matsuchima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63249206A external-priority patent/JP2796099B2/ja
Priority claimed from JP63291219A external-priority patent/JP2667231B2/ja
Priority claimed from JP63293859A external-priority patent/JPH02139978A/ja
Priority claimed from JP1005208A external-priority patent/JPH02186509A/ja
Priority claimed from JP1021402A external-priority patent/JPH02202075A/ja
Priority claimed from JP1058324A external-priority patent/JPH02237180A/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE68928564D1 publication Critical patent/DE68928564D1/de
Publication of DE68928564T2 publication Critical patent/DE68928564T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • H10N60/0941—Manufacture or treatment of Josephson-effect devices comprising high-Tc ceramic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/873—Active solid-state device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/825—Apparatus per se, device per se, or process of making or operating same
    • Y10S505/873—Active solid-state device
    • Y10S505/874—Active solid-state device with josephson junction, e.g. squid

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
DE68928564T 1988-10-03 1989-10-02 Josephson-Einrichtungen und Verfahren zu deren Herstellung Expired - Fee Related DE68928564T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP63249206A JP2796099B2 (ja) 1988-10-03 1988-10-03 超電導素子
JP63291219A JP2667231B2 (ja) 1988-11-17 1988-11-17 ジョセフソン素子の製造方法
JP63293859A JPH02139978A (ja) 1988-11-21 1988-11-21 ジョセフソン素子およびその製造方法
JP1005208A JPH02186509A (ja) 1989-01-12 1989-01-12 薄膜超電導体
JP1021402A JPH02202075A (ja) 1989-01-31 1989-01-31 ジョセフソン素子の製造方法
JP1058324A JPH02237180A (ja) 1989-03-10 1989-03-10 薄膜超伝導体およびその製造方法

Publications (2)

Publication Number Publication Date
DE68928564D1 true DE68928564D1 (de) 1998-03-05
DE68928564T2 DE68928564T2 (de) 1998-07-23

Family

ID=27547899

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68928564T Expired - Fee Related DE68928564T2 (de) 1988-10-03 1989-10-02 Josephson-Einrichtungen und Verfahren zu deren Herstellung

Country Status (3)

Country Link
US (1) US5047390A (de)
EP (1) EP0366949B1 (de)
DE (1) DE68928564T2 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5034359A (en) * 1988-04-08 1991-07-23 Kabushiki Kaisha Toshiba Insulating composition
DE3924022C2 (de) * 1989-07-20 1995-01-05 Siemens Ag Verfahren zur Herstellung eines Josephson-Tunnelelementes mit metalloxidischem Supraleitermaterial
CA2027067C (en) * 1989-10-06 1996-07-23 Saburo Tanaka Method for forming a continuous oxide superconductor layer having different thickness portions for superconductor device
JP2790494B2 (ja) * 1989-10-13 1998-08-27 松下電器産業株式会社 超伝導素子
JPH03259576A (ja) * 1990-03-09 1991-11-19 Sumitomo Electric Ind Ltd ジョセフソン接合
CA2047139C (en) * 1990-07-16 1997-12-09 Mitsuchika Saitoh Method for manufacturing superconducting device composed of oxide superconductor material and superconducting device manufactured thereby
JP3096050B2 (ja) * 1990-08-09 2000-10-10 富士通株式会社 半導体装置の製造方法
US5627139A (en) * 1990-09-24 1997-05-06 The Regents Of The University Of California High-temperature superconducting josephson devices having a barrier layer of a doped, cubic crystalline, conductive oxide material
US5055158A (en) * 1990-09-25 1991-10-08 International Business Machines Corporation Planarization of Josephson integrated circuit
CA2053549A1 (en) * 1990-11-15 1992-05-16 John A. Agostinelli Construction of high temperature josephson junction device
CA2064428A1 (en) * 1991-03-28 1992-09-29 So Tanaka Process for preparing layered thin films
FR2675951B1 (fr) * 1991-04-23 1997-08-29 Thomson Csf Structure de jonction josephson.
EP0643400B1 (de) * 1991-06-04 1998-01-21 Matsushita Electric Industrial Co., Ltd. Herstellungsverfahren für Dünnschicht-Supraleiter
US5286336A (en) * 1991-07-23 1994-02-15 Trw Inc. Submicron Josephson junction and method for its fabrication
US5274249A (en) * 1991-12-20 1993-12-28 University Of Maryland Superconducting field effect devices with thin channel layer
FR2687012A1 (fr) * 1992-02-03 1993-07-30 France Telecom Dispositif josephson et son procede de fabrication.
US5945383A (en) * 1992-03-19 1999-08-31 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method producing an SNS superconducting junction with weak link barrier
US6251530B1 (en) * 1992-08-18 2001-06-26 Varian, Inc. Thin-film of a high-temperature superconductor compound and method
US5399881A (en) * 1993-04-30 1995-03-21 Varian Associates, Inc. High-temperature Josephson junction and method
WO1995001870A1 (en) * 1993-07-07 1995-01-19 Arthur D. Little, Inc. Design and fabrication of synthetic superconductors
US5458086A (en) * 1993-10-13 1995-10-17 Superconductor Technologies, Inc. Apparatus for growing metal oxides using organometallic vapor phase epitaxy
JPH1126823A (ja) * 1997-07-07 1999-01-29 Kokusai Chodendo Sangyo Gijutsu Kenkyu Center 超電導体一定電流間隔電圧ステップ素子及び超電導体装置
US5889289A (en) * 1997-08-28 1999-03-30 The United States Of America As Represented By The Secretary Of The Navy High temperature superconductor/insulator composite thin films with Josephson coupled grains
US6350643B1 (en) * 1997-12-18 2002-02-26 Advanced Technology Materials, Inc. Reduced degradation of metal oxide ceramic due to diffusion of a mobile specie therefrom
JPH11189874A (ja) * 1997-12-25 1999-07-13 Tdk Corp 薄膜形成方法および装置
US6613463B1 (en) * 1999-09-06 2003-09-02 International Superconductivity Technology Center Superconducting laminated oxide substrate and superconducting integrated circuit
US7252852B1 (en) 2003-12-12 2007-08-07 International Business Machines Corporation Mg-Zn oxide tunnel barriers and method of formation
US7615385B2 (en) 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
US11563162B2 (en) * 2020-01-09 2023-01-24 International Business Machines Corporation Epitaxial Josephson junction transmon device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582082A (ja) * 1981-06-29 1983-01-07 Nec Corp ジヨセフソン接合素子
JPS5877265A (ja) * 1981-11-04 1983-05-10 Hitachi Ltd ジヨセフソン接合素子
JPS58128780A (ja) * 1982-01-27 1983-08-01 Nippon Telegr & Teleph Corp <Ntt> トンネル接合型ジヨセフソン素子
US4499119A (en) * 1983-07-06 1985-02-12 Sperry Corporation Method of manufacturing super-conductive tunnel junction devices with precise junction area control
JPS61220385A (ja) * 1985-03-26 1986-09-30 Agency Of Ind Science & Technol ジヨセフソン接合素子
JPS63224273A (ja) * 1987-03-12 1988-09-19 Fujitsu Ltd ジヨセフソン接合素子とその作製方法
JP2740260B2 (ja) * 1988-05-11 1998-04-15 キヤノン株式会社 ジョセフソン素子

Also Published As

Publication number Publication date
US5047390A (en) 1991-09-10
EP0366949A1 (de) 1990-05-09
DE68928564T2 (de) 1998-07-23
EP0366949B1 (de) 1998-01-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee