DE69025237D1 - Supraleitende Mehrlagen-Schaltung und Verfahren zu deren Herstellung - Google Patents

Supraleitende Mehrlagen-Schaltung und Verfahren zu deren Herstellung

Info

Publication number
DE69025237D1
DE69025237D1 DE69025237T DE69025237T DE69025237D1 DE 69025237 D1 DE69025237 D1 DE 69025237D1 DE 69025237 T DE69025237 T DE 69025237T DE 69025237 T DE69025237 T DE 69025237T DE 69025237 D1 DE69025237 D1 DE 69025237D1
Authority
DE
Germany
Prior art keywords
production
multilayer circuit
superconducting multilayer
superconducting
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69025237T
Other languages
English (en)
Other versions
DE69025237T2 (de
Inventor
Shoji Shiga
Nakahiro Harada
Kiyoshi C O The Furuk Yamamoto
Koki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Application granted granted Critical
Publication of DE69025237D1 publication Critical patent/DE69025237D1/de
Publication of DE69025237T2 publication Critical patent/DE69025237T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0884—Treatment of superconductor layers by irradiation, e.g. ion-beam, electron-beam, laser beam or X-rays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/85—Superconducting active materials
    • H10N60/855—Ceramic superconductors
    • H10N60/857—Ceramic superconductors comprising copper oxide
    • H10N60/858—Ceramic superconductors comprising copper oxide having multilayered structures, e.g. superlattices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/703—Microelectronic device with superconducting conduction line
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/731—Sputter coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/732—Evaporative coating with superconducting material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/742—Annealing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
DE69025237T 1989-07-25 1990-07-24 Supraleitende Mehrlagen-Schaltung und Verfahren zu deren Herstellung Expired - Fee Related DE69025237T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1191956A JPH0355889A (ja) 1989-07-25 1989-07-25 超電導多層回路の製造方法

Publications (2)

Publication Number Publication Date
DE69025237D1 true DE69025237D1 (de) 1996-03-21
DE69025237T2 DE69025237T2 (de) 1996-07-25

Family

ID=16283245

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69025237T Expired - Fee Related DE69025237T2 (de) 1989-07-25 1990-07-24 Supraleitende Mehrlagen-Schaltung und Verfahren zu deren Herstellung

Country Status (5)

Country Link
US (1) US5194419A (de)
EP (1) EP0410374B1 (de)
JP (1) JPH0355889A (de)
KR (1) KR940002412B1 (de)
DE (1) DE69025237T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0475838B1 (de) * 1990-09-10 1996-03-06 Sumitomo Electric Industries, Ltd. Supraleitende Einrichtung mit einer reduzierten Dicke der supraleitenden Schicht und Methode zu deren Herstellung
EP0484248B1 (de) * 1990-10-31 1997-01-08 Sumitomo Electric Industries, Ltd. Supraleitende Schaltung und Verfahren zu ihrer Herstellung
DE69219816T2 (de) * 1991-03-11 1997-10-23 Sumitomo Electric Industries Supraleitende Dünnschicht mit mindestens einer isolierten Region, gebildet aus oxydisch supraleitendem Material und Verfahren zu ihrer Herstellung
JP2827572B2 (ja) * 1991-05-24 1998-11-25 日本電気株式会社 層状超伝導体回路とその製造方法
DE69218895T2 (de) * 1991-12-02 1997-11-20 Sumitomo Electric Industries Supraleitende Mehrschichtenverschaltung aus supraleitendem oxidischen Material und Verfahren zu ihrer Herstellung
AU6674794A (en) * 1993-05-14 1994-12-12 University Of British Columbia, The Fabrication of oxide superconductor devices by impurity ion implantation
JPH07263767A (ja) 1994-01-14 1995-10-13 Trw Inc イオンインプランテーションを用いたプレーナ型の高温超伝導集積回路
US6188919B1 (en) 1999-05-19 2001-02-13 Trw Inc. Using ion implantation to create normal layers in superconducting-normal-superconducting Josephson junctions
CN101460243B (zh) * 2006-07-05 2012-11-21 卡塔勒公司 排气净化用催化剂及其制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3854626T2 (de) * 1987-03-12 1996-07-04 Semiconductor Energy Lab Verfahren zur Herstellung von Komponenten aus supraleitenden oxidkeramischen Materialien.
JPS63250880A (ja) * 1987-04-08 1988-10-18 Semiconductor Energy Lab Co Ltd 酸化物超電導材料
US5096882A (en) * 1987-04-08 1992-03-17 Hitachi, Ltd. Process for controlling oxygen content of superconductive oxide, superconductive device and process for production thereof
JPH0634418B2 (ja) * 1987-09-07 1994-05-02 株式会社半導体エネルギー研究所 超電導素子の作製方法
EP0292382B1 (de) * 1987-05-18 1994-09-14 Sumitomo Electric Industries Limited Verfahren zur Herstellung eines supraleitenden Materials des Oxydverbundtyps
JPS63291436A (ja) * 1987-05-25 1988-11-29 Hitachi Ltd 半導体装置の製造方法
JPS63304678A (ja) * 1987-06-03 1988-12-12 Fujikura Ltd 酸化物超電導回路の製造方法
CA1331951C (en) * 1987-06-22 1994-09-13 Takahiro Imai Method for producing a superconducting circuit
JPS6443916A (en) * 1987-08-08 1989-02-16 Mitsubishi Electric Corp Characteristic control for compound system superconductor
JPS6489342A (en) * 1987-09-29 1989-04-03 Sony Corp Manufacture of semiconductor device
JPH01181444A (ja) * 1988-01-08 1989-07-19 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
JPH01183138A (ja) * 1988-01-18 1989-07-20 Fujitsu Ltd 半導体装置
JPH01250880A (ja) * 1988-03-31 1989-10-05 Hoya Corp 角速度計
EP0358879A3 (de) * 1988-09-13 1991-02-27 Hewlett-Packard Company Verfahren zur Herstellung hochintegrierter Verbindungen

Also Published As

Publication number Publication date
US5194419A (en) 1993-03-16
DE69025237T2 (de) 1996-07-25
EP0410374A2 (de) 1991-01-30
KR910003822A (ko) 1991-02-28
KR940002412B1 (ko) 1994-03-24
EP0410374B1 (de) 1996-02-07
EP0410374A3 (en) 1991-07-03
JPH0355889A (ja) 1991-03-11

Similar Documents

Publication Publication Date Title
DE69331416D1 (de) Verbindungsstruktur fur integrierte schaltung und verfahren zu deren herstellung
DE69431723D1 (de) Leiterplatte und verfahren zu deren herstellung
DE69411438D1 (de) Schaltungsanordnungen und Verfahren zu deren Herstellung
DE3786600D1 (de) Mehrschichtige gedruckte schaltung und verfahren zu ihrer herstellung.
DE69128334D1 (de) Integrierte Schaltung und Verfahren zu deren Herstellung
DE69211697D1 (de) Antischmelzsicherungsstruktur und verfahren zu ihrer herstellung
KR900012988A (ko) 프리프레그(prepreg) 및 그 제조방법
DE68928564D1 (de) Josephson-Einrichtungen und Verfahren zu deren Herstellung
DE69222586D1 (de) Mehrlagige Verbindungsstruktur für eine Halbleiter- vorrichtung und Verfahren zu ihrer Herstellung
DE3683196D1 (de) Zusammengesetzte mehrschichtige hohlfasern und verfahren zu deren herstellung.
DE68917798D1 (de) Anschlussstruktur und Verfahren zu deren Herstellung.
DE3889989D1 (de) Supraleitende Dünnschicht und Verfahren zu deren Herstellung.
DE3888217D1 (de) Supraleitende Zusammensetzungen und Verfahren zu deren Herstellung.
DE4091418T1 (de) Mehrschichtkondensator und Verfahren zu seiner Herstellung
DE59410240D1 (de) Folienleiterplatten und verfahren zu deren herstellung
DE69032446D1 (de) Halbleiterbauelement und Verfahren zu dessen Herstellung
DE68927993D1 (de) Supraleiter mit laminierten Einschnürungszentren und Verfahren zu deren Herstellung
DE3685969D1 (de) Integrierte schaltung mit halbleiterkondensator und verfahren zu ihrer herstellung.
DE59209470D1 (de) Halbleiterbauelement und Verfahren zu seiner Herstellung
DE59108343D1 (de) Elektrische Schaltungsanordnung und Verfahren zu deren Herstellung
DE69219799D1 (de) Multifilamentäre Oxyd-supraleitende Drähte und Verfahren zu deren Herstellung
DE59108784D1 (de) Mehrlagenleiterplatte und verfahren zu ihrer herstellung
DE69232348D1 (de) Integrierte Halbleiterschaltungsanordnung und Verfahren zu ihrer Herstellung
DE69025237D1 (de) Supraleitende Mehrlagen-Schaltung und Verfahren zu deren Herstellung
DE69027566D1 (de) Halbleiteranordnung mit einer Mehrschichten-Gateelektrode und Verfahren zu ihrer Herstellung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee