DE69032031D1 - Messaufnehmer mit Selbsteichfunktion - Google Patents
Messaufnehmer mit SelbsteichfunktionInfo
- Publication number
- DE69032031D1 DE69032031D1 DE69032031T DE69032031T DE69032031D1 DE 69032031 D1 DE69032031 D1 DE 69032031D1 DE 69032031 T DE69032031 T DE 69032031T DE 69032031 T DE69032031 T DE 69032031T DE 69032031 D1 DE69032031 D1 DE 69032031D1
- Authority
- DE
- Germany
- Prior art keywords
- self
- sensor
- calibration function
- calibration
- function
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/002—Automatic recalibration
- G01D18/006—Intermittent recalibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Combined Controls Of Internal Combustion Engines (AREA)
- Micromachines (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1271666A JPH03134552A (ja) | 1989-10-20 | 1989-10-20 | 自己較正機能付検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69032031D1 true DE69032031D1 (de) | 1998-03-12 |
DE69032031T2 DE69032031T2 (de) | 1998-10-01 |
Family
ID=17503194
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69016346T Expired - Fee Related DE69016346T3 (de) | 1989-10-20 | 1990-10-11 | Messaufnehmer mit Selbsteichfunktion. |
DE69032031T Expired - Fee Related DE69032031T2 (de) | 1989-10-20 | 1990-10-11 | Messaufnehmer mit Selbsteichfunktion |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69016346T Expired - Fee Related DE69016346T3 (de) | 1989-10-20 | 1990-10-11 | Messaufnehmer mit Selbsteichfunktion. |
Country Status (5)
Country | Link |
---|---|
US (4) | US5174884A (de) |
EP (2) | EP0606115B1 (de) |
JP (1) | JPH03134552A (de) |
KR (1) | KR0175300B1 (de) |
DE (2) | DE69016346T3 (de) |
Families Citing this family (63)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3844333A1 (de) * | 1988-12-30 | 1990-07-05 | Bosch Gmbh Robert | Verfahren und vorrichtung zur korrektur von bauteiltoleranzen bei der verarbeitung von signalen |
JPH03134552A (ja) * | 1989-10-20 | 1991-06-07 | Hitachi Ltd | 自己較正機能付検出装置 |
US5461916A (en) | 1992-08-21 | 1995-10-31 | Nippondenso Co., Ltd. | Mechanical force sensing semiconductor device |
DE4318891A1 (de) * | 1993-06-07 | 1994-12-08 | Mannesmann Ag | Elektrochemisches Gasspurenmeßsystem mit Funktionskontrolle |
DE69410803T2 (de) * | 1993-08-24 | 1999-02-11 | Brueel & Kjaer As | Vorrichtung zur entdeckung fehlerhaften funktionierens eines beschleunigungsmessaufnehmers |
US5450328A (en) * | 1994-03-21 | 1995-09-12 | Square D Company | System for measuring line to ground impedance |
US5446682A (en) * | 1994-03-21 | 1995-08-29 | Square D Company | System for calibrating a line isolation monitor |
US5448491A (en) * | 1994-03-21 | 1995-09-05 | Square D Company | Monitor for an ungrounded system |
JP2586406B2 (ja) * | 1994-10-27 | 1997-02-26 | 日本電気株式会社 | 静電容量型加速度センサ |
US5565625A (en) * | 1994-12-01 | 1996-10-15 | Analog Devices, Inc. | Sensor with separate actuator and sense fingers |
GB9426220D0 (en) * | 1994-12-23 | 1995-02-22 | Lucas Ind Plc | Vehicle load measuring systems |
US5587518A (en) * | 1994-12-23 | 1996-12-24 | Ford Motor Company | Accelerometer with a combined self-test and ground electrode |
JP3433401B2 (ja) * | 1995-05-18 | 2003-08-04 | アイシン精機株式会社 | 静電容量型加速度センサ |
US5621157A (en) * | 1995-06-07 | 1997-04-15 | Analog Devices, Inc. | Method and circuitry for calibrating a micromachined sensor |
US5596144A (en) * | 1995-08-04 | 1997-01-21 | Delco Electronics Corporation | Piezoresistive force rebalance accelerometer |
DE19601078C2 (de) * | 1996-01-13 | 2000-01-05 | Bosch Gmbh Robert | Druckkraftsensor |
DE19606826A1 (de) * | 1996-02-23 | 1997-08-28 | Knorr Bremse Electronic Gmbh | Verfahren und Vorrichtung zur Überprüfung eines Sensors |
JP3125675B2 (ja) * | 1996-03-29 | 2001-01-22 | 三菱電機株式会社 | 容量型センサインターフェース回路 |
JPH10132848A (ja) * | 1996-10-31 | 1998-05-22 | Akebono Brake Ind Co Ltd | 半導体加速度センサー |
USRE41847E1 (en) | 1997-07-14 | 2010-10-19 | Panasonic Corporation | Sensor provided with adjusting function |
DE19739903A1 (de) * | 1997-09-11 | 1999-04-01 | Bosch Gmbh Robert | Sensorvorrichtung |
US6758080B1 (en) | 1999-03-17 | 2004-07-06 | Input/Output, Inc. | Calibration of sensors |
WO2000055648A1 (en) * | 1999-03-17 | 2000-09-21 | Input/Output, Inc. | Hydrophone assembly |
US6836238B1 (en) * | 2001-10-09 | 2004-12-28 | Escort Inc. | Police radar/laser detector with integral vehicle parameter display using a vehicle interface |
DE50008129D1 (de) * | 1999-06-15 | 2004-11-11 | Siemens Ag | Messumformer |
DE10046958B4 (de) * | 1999-09-27 | 2009-01-02 | Denso Corp., Kariya-shi | Kapazitive Vorrichtung zum Erfassen einer physikalischen Grösse |
NO313605B1 (no) | 1999-12-13 | 2002-10-28 | Optoplan As | Fremgangsmate og system for kalibrering av en konverteringsenhet i et fiberoptisk sensorhode |
DE10065833C2 (de) * | 2000-12-28 | 2002-11-14 | Balluff Gmbh | Parametrierbarer Sensor und Verfahren zur Parametrierung eines Sensors |
DE10131760B4 (de) * | 2001-06-30 | 2012-06-21 | Robert Bosch Gmbh | Verfahren zum Testen eines Sensors |
US6510628B1 (en) * | 2001-10-31 | 2003-01-28 | Caterpillar Inc | Method and apparatus for determining a contact force of a work tool |
DE10162334A1 (de) * | 2001-12-18 | 2003-07-03 | Endress & Hauser Gmbh & Co Kg | Feldgerät und ein Verfahren zur Kalibrierung eines Feldgerätes |
US7004030B2 (en) * | 2002-09-27 | 2006-02-28 | Oki Electric Industry Co., Ltd. | Acceleration sensor |
DE10357870B4 (de) * | 2003-12-11 | 2013-02-07 | Robert Bosch Gmbh | Sensor mit symmetrischer Begrenzung eines Signals |
US7043960B1 (en) * | 2004-06-17 | 2006-05-16 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Self-calibrating pressure transducer |
DE102004039463A1 (de) * | 2004-08-14 | 2006-02-23 | Hella Kgaa Hueck & Co. | Sensor und Verfahren zur Kalibrierung eines Sensors |
EP1707954B1 (de) * | 2005-04-01 | 2008-05-07 | Mettler-Toledo AG | Verfahren und Vorrichtung zur Funktionskontrolle eines Sensors |
JP2008542619A (ja) * | 2005-05-31 | 2008-11-27 | ボーグワーナー・インコーポレーテッド | アクチュエータの制御方法 |
JP4758145B2 (ja) * | 2005-06-03 | 2011-08-24 | シチズンホールディングス株式会社 | 接触燃焼式ガスセンサ |
US7293466B2 (en) * | 2005-07-19 | 2007-11-13 | Hitachi, Ltd. | Bolt with function of measuring strain |
DE102006005835A1 (de) * | 2006-02-08 | 2007-08-16 | Logicdata Electronic & Software Entwicklungs Gmbh | Schaltungsanordnung und Verfahren zur Kalibrierung einer Sensoranordnung, insbesondere für motorisch verstellbare Möbel, sowie Messverstärker und Sensoranordnung |
JP2007212292A (ja) * | 2006-02-09 | 2007-08-23 | Mitsubishi Electric Corp | 磁気検出装置 |
CN100514010C (zh) * | 2006-03-28 | 2009-07-15 | 中国科学院声学研究所 | 具有在线自标定功能的水听器 |
CN101000249B (zh) * | 2007-01-04 | 2011-01-26 | 钟胜 | 柔性铰链电容传感器机芯及使用该机芯的传感器 |
DE602007010581D1 (de) * | 2007-02-21 | 2010-12-30 | Em Microelectronic Marin Sa | Automatischer Test einer elektronischen Schaltungsanordnung eines kapazitiven Sensors, und elektronische Schaltungsanordnung zur Ausführung des Testes |
DE102007051885A1 (de) * | 2007-10-30 | 2009-05-07 | Lucas Automotive Gmbh | Technik zum Überprüfen eines Kraftfahrzeug-Sensors |
DE102008040529B4 (de) * | 2008-07-18 | 2021-05-06 | Robert Bosch Gmbh | Fehlerkorrekturverfahren und Fehlerkorrekturvorrichtung für einen Beschleunigungssensor |
JP4894840B2 (ja) * | 2008-10-08 | 2012-03-14 | 株式会社デンソー | 物理量検出装置 |
US8554615B2 (en) * | 2009-02-24 | 2013-10-08 | Board Of Trustees Of Michigan State University | Context-induced wireless network transport for content and profile information |
DE102010029903A1 (de) * | 2010-06-10 | 2011-12-15 | Robert Bosch Gmbh | Sensoranordnung und Verfahren zur Online-Überwachung einer Sensoranordnung |
US9065358B2 (en) * | 2011-07-11 | 2015-06-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | MEMS structure and method of forming same |
JP2013122380A (ja) * | 2011-12-09 | 2013-06-20 | Seiko Instruments Inc | 加速度信号処理装置 |
US9335396B2 (en) * | 2013-03-12 | 2016-05-10 | Freescale Semiconductor, Inc. | MCU-based compensation and calibration for MEMS devices |
US10269171B2 (en) * | 2013-05-30 | 2019-04-23 | Tech4Imaging Llc | Interactive and adaptive data acquisition system for use with electrical capacitance volume tomography |
DE202014006185U1 (de) * | 2013-08-12 | 2014-11-26 | Horiba Ltd. | Kraftstoffverbrauch-Berechnungseinheit, Kraftstoffverbrauch-Berechnungsprogramm, Kraftstoffverbrauch-Messgerät und Abgas-Messgerät |
US9110115B2 (en) | 2013-08-13 | 2015-08-18 | Tech4Imaging Llc | Modular stretchable and flexible capacitance sensors for use with electrical capacitance volume tomography and capacitance sensing applications |
US9901282B2 (en) | 2015-04-27 | 2018-02-27 | Tech4Imaging Llc | Multi-phase flow decomposition using electrical capacitance volume tomography sensors |
US10488236B2 (en) | 2016-02-23 | 2019-11-26 | Tech4Imaging Llc | Velocity vector field mapping using electrical capacitance sensors |
US9958408B2 (en) | 2016-05-11 | 2018-05-01 | Tech4Imaging Llc | Smart capacitance sensors for use with electrical capacitance volume tomography and capacitance sensing applications |
KR101663815B1 (ko) * | 2016-06-03 | 2016-10-10 | (주)테크윈시스템 | 초음파 레벨 자동 측정장치 |
US10281422B2 (en) | 2016-09-12 | 2019-05-07 | Tech4Imaging Llc | Displacement current phase tomography for imaging of lossy medium |
US10502655B2 (en) | 2017-03-07 | 2019-12-10 | Tech4Imaging Llc | Magnetic pressure sensors system for measurement and imaging of steel mass |
DE102018111380A1 (de) * | 2017-05-24 | 2018-11-29 | HELLA GmbH & Co. KGaA | Verfahren zur Kalibrierung mindestens eines Sensors |
US10705043B2 (en) | 2017-05-31 | 2020-07-07 | Tech4Imaging Llc | Multi-dimensional approach to imaging, monitoring, or measuring systems and processes utilizing capacitance sensors |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4225851A (en) * | 1979-03-22 | 1980-09-30 | General Electric Company | Self-calibrated subcarrier telemetry system |
JPS562548A (en) * | 1979-06-22 | 1981-01-12 | Nissan Motor Co Ltd | Controller for air fuel ratio of internal combustion engine |
US4556472A (en) * | 1982-04-19 | 1985-12-03 | Board Of Governors For Higher Education, State Of Ri | Computerized device for pulsed potential voltammetric measurement of oxygen using a membrance covered polarographic electrode |
JPS6131952A (ja) * | 1984-07-25 | 1986-02-14 | Horiba Ltd | 自動校正機能付濃度計 |
FR2578323B1 (fr) * | 1985-03-01 | 1987-11-20 | Metravib Sa | Capteur integre de grandeurs mecaniques a effet capacitif et procede de fabrication. |
JPS61212753A (ja) * | 1985-03-18 | 1986-09-20 | Fujikura Ltd | 酸素センサ−の自己診断方法 |
US4702816A (en) * | 1985-03-19 | 1987-10-27 | Honda Giken Kogyo Kabushiki Kaisha | Oxygen concentration detection system |
US4638669A (en) * | 1985-05-07 | 1987-01-27 | Massachusetts Institute Of Technology | Quantum tunneling cantilever accelerometer |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
US4673870A (en) * | 1985-08-07 | 1987-06-16 | The United States Of America As Represented By The Secretary Of The Army | Automated calibration technique for non-field perturbing (electrically small) electromagnetic field sensors |
DE3542397A1 (de) * | 1985-11-30 | 1987-06-04 | Philips Patentverwaltung | Anordnung zur funktionspruefung von piezoelektrischen beschleunigungsaufnehmern |
IT1213111B (it) * | 1986-07-24 | 1989-12-07 | Nicotra Sistemi | Trasduttore singolo/multiplo, atto a rilevare una o piu' grandezze fisiche di diversa natura o variabili elettriche convenzionali. |
DE3627241A1 (de) * | 1986-08-12 | 1988-02-18 | Bosch Gmbh Robert | Schaltung und verfahren zur ueberpruefung elektronischer sensoren |
GB8723339D0 (en) * | 1987-10-05 | 1987-11-11 | Kellett M A | Transducer control circuits |
JPH0827247B2 (ja) * | 1987-11-04 | 1996-03-21 | 株式会社豊田中央研究所 | 広帯域空燃比センサおよび検出装置 |
DE68910641T2 (de) * | 1988-09-23 | 1994-04-28 | Automotive Systems Lab | Selbsteichender Beschleunigungsmesser. |
US5163325A (en) * | 1988-09-23 | 1992-11-17 | Automotive Systems Laboratory, Inc. | Self-compensating accelerometer |
JPH0623782B2 (ja) * | 1988-11-15 | 1994-03-30 | 株式会社日立製作所 | 静電容量式加速度センサ及び半導体圧力センサ |
US5103667A (en) * | 1989-06-22 | 1992-04-14 | Ic Sensors, Inc. | Self-testable micro-accelerometer and method |
JPH03134552A (ja) * | 1989-10-20 | 1991-06-07 | Hitachi Ltd | 自己較正機能付検出装置 |
-
1989
- 1989-10-20 JP JP1271666A patent/JPH03134552A/ja active Pending
-
1990
- 1990-10-10 US US07/595,824 patent/US5174884A/en not_active Expired - Lifetime
- 1990-10-11 EP EP94103628A patent/EP0606115B1/de not_active Expired - Lifetime
- 1990-10-11 EP EP90119524A patent/EP0423622B2/de not_active Expired - Lifetime
- 1990-10-11 DE DE69016346T patent/DE69016346T3/de not_active Expired - Fee Related
- 1990-10-11 DE DE69032031T patent/DE69032031T2/de not_active Expired - Fee Related
- 1990-10-18 KR KR1019900016579A patent/KR0175300B1/ko not_active IP Right Cessation
-
1992
- 1992-12-07 US US07/985,654 patent/US5391283A/en not_active Expired - Lifetime
-
1994
- 1994-11-14 US US08/339,709 patent/US5429736A/en not_active Expired - Lifetime
-
1995
- 1995-05-30 US US08/452,698 patent/US5574211A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0423622B1 (de) | 1995-01-25 |
US5391283A (en) | 1995-02-21 |
DE69016346T2 (de) | 1995-05-24 |
US5174884A (en) | 1992-12-29 |
EP0423622A1 (de) | 1991-04-24 |
US5429736A (en) | 1995-07-04 |
KR0175300B1 (ko) | 1999-05-15 |
DE69016346T3 (de) | 2000-02-03 |
KR910008380A (ko) | 1991-05-31 |
JPH03134552A (ja) | 1991-06-07 |
US5574211A (en) | 1996-11-12 |
DE69032031T2 (de) | 1998-10-01 |
DE69016346D1 (de) | 1995-03-09 |
EP0606115A1 (de) | 1994-07-13 |
EP0423622B2 (de) | 1999-06-02 |
EP0606115B1 (de) | 1998-02-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |