DE69016346T2 - Messaufnehmer mit Selbsteichfunktion. - Google Patents

Messaufnehmer mit Selbsteichfunktion.

Info

Publication number
DE69016346T2
DE69016346T2 DE69016346T DE69016346T DE69016346T2 DE 69016346 T2 DE69016346 T2 DE 69016346T2 DE 69016346 T DE69016346 T DE 69016346T DE 69016346 T DE69016346 T DE 69016346T DE 69016346 T2 DE69016346 T2 DE 69016346T2
Authority
DE
Germany
Prior art keywords
self
sensor
calibration function
calibration
function
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69016346T
Other languages
English (en)
Other versions
DE69016346D1 (de
DE69016346T3 (de
Inventor
Satoshi Shimada
Seiko Suzuki
Shigeki Tsuchitani
Seiichi Ugai
Masayoshi Kaneyasu
Hiroshi Kuroiwa
Yoshihiro Yokota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17503194&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69016346(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE69016346D1 publication Critical patent/DE69016346D1/de
Application granted granted Critical
Publication of DE69016346T2 publication Critical patent/DE69016346T2/de
Publication of DE69016346T3 publication Critical patent/DE69016346T3/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/002—Automatic recalibration
    • G01D18/006—Intermittent recalibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
DE69016346T 1989-10-20 1990-10-11 Messaufnehmer mit Selbsteichfunktion. Expired - Fee Related DE69016346T3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1271666A JPH03134552A (ja) 1989-10-20 1989-10-20 自己較正機能付検出装置

Publications (3)

Publication Number Publication Date
DE69016346D1 DE69016346D1 (de) 1995-03-09
DE69016346T2 true DE69016346T2 (de) 1995-05-24
DE69016346T3 DE69016346T3 (de) 2000-02-03

Family

ID=17503194

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69032031T Expired - Fee Related DE69032031T2 (de) 1989-10-20 1990-10-11 Messaufnehmer mit Selbsteichfunktion
DE69016346T Expired - Fee Related DE69016346T3 (de) 1989-10-20 1990-10-11 Messaufnehmer mit Selbsteichfunktion.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69032031T Expired - Fee Related DE69032031T2 (de) 1989-10-20 1990-10-11 Messaufnehmer mit Selbsteichfunktion

Country Status (5)

Country Link
US (4) US5174884A (de)
EP (2) EP0606115B1 (de)
JP (1) JPH03134552A (de)
KR (1) KR0175300B1 (de)
DE (2) DE69032031T2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10131760B4 (de) * 2001-06-30 2012-06-21 Robert Bosch Gmbh Verfahren zum Testen eines Sensors
DE10357870B4 (de) * 2003-12-11 2013-02-07 Robert Bosch Gmbh Sensor mit symmetrischer Begrenzung eines Signals

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US5450328A (en) * 1994-03-21 1995-09-12 Square D Company System for measuring line to ground impedance
US5448491A (en) * 1994-03-21 1995-09-05 Square D Company Monitor for an ungrounded system
JP2586406B2 (ja) * 1994-10-27 1997-02-26 日本電気株式会社 静電容量型加速度センサ
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DE102004039463A1 (de) * 2004-08-14 2006-02-23 Hella Kgaa Hueck & Co. Sensor und Verfahren zur Kalibrierung eines Sensors
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EP1894072B1 (de) * 2005-05-31 2018-11-21 BorgWarner, Inc. Verfahren zur steuerung eines aktuators
JP4758145B2 (ja) * 2005-06-03 2011-08-24 シチズンホールディングス株式会社 接触燃焼式ガスセンサ
US7293466B2 (en) * 2005-07-19 2007-11-13 Hitachi, Ltd. Bolt with function of measuring strain
DE102006005835A1 (de) * 2006-02-08 2007-08-16 Logicdata Electronic & Software Entwicklungs Gmbh Schaltungsanordnung und Verfahren zur Kalibrierung einer Sensoranordnung, insbesondere für motorisch verstellbare Möbel, sowie Messverstärker und Sensoranordnung
JP2007212292A (ja) * 2006-02-09 2007-08-23 Mitsubishi Electric Corp 磁気検出装置
CN100514010C (zh) * 2006-03-28 2009-07-15 中国科学院声学研究所 具有在线自标定功能的水听器
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ATE488747T1 (de) 2007-02-21 2010-12-15 Em Microelectronic Marin Sa Automatischer test einer elektronischen schaltungsanordnung eines kapazitiven sensors, und elektronische schaltungsanordnung zur ausführung des testes
DE102007051885A1 (de) * 2007-10-30 2009-05-07 Lucas Automotive Gmbh Technik zum Überprüfen eines Kraftfahrzeug-Sensors
DE102008040529B4 (de) * 2008-07-18 2021-05-06 Robert Bosch Gmbh Fehlerkorrekturverfahren und Fehlerkorrekturvorrichtung für einen Beschleunigungssensor
JP4894840B2 (ja) * 2008-10-08 2012-03-14 株式会社デンソー 物理量検出装置
US8554615B2 (en) * 2009-02-24 2013-10-08 Board Of Trustees Of Michigan State University Context-induced wireless network transport for content and profile information
DE102010029903A1 (de) * 2010-06-10 2011-12-15 Robert Bosch Gmbh Sensoranordnung und Verfahren zur Online-Überwachung einer Sensoranordnung
US9065358B2 (en) * 2011-07-11 2015-06-23 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS structure and method of forming same
JP2013122380A (ja) * 2011-12-09 2013-06-20 Seiko Instruments Inc 加速度信号処理装置
US9335396B2 (en) * 2013-03-12 2016-05-10 Freescale Semiconductor, Inc. MCU-based compensation and calibration for MEMS devices
US10269171B2 (en) * 2013-05-30 2019-04-23 Tech4Imaging Llc Interactive and adaptive data acquisition system for use with electrical capacitance volume tomography
DE202014006185U1 (de) * 2013-08-12 2014-11-26 Horiba Ltd. Kraftstoffverbrauch-Berechnungseinheit, Kraftstoffverbrauch-Berechnungsprogramm, Kraftstoffverbrauch-Messgerät und Abgas-Messgerät
US9110115B2 (en) 2013-08-13 2015-08-18 Tech4Imaging Llc Modular stretchable and flexible capacitance sensors for use with electrical capacitance volume tomography and capacitance sensing applications
US9901282B2 (en) 2015-04-27 2018-02-27 Tech4Imaging Llc Multi-phase flow decomposition using electrical capacitance volume tomography sensors
US10488236B2 (en) 2016-02-23 2019-11-26 Tech4Imaging Llc Velocity vector field mapping using electrical capacitance sensors
US9958408B2 (en) 2016-05-11 2018-05-01 Tech4Imaging Llc Smart capacitance sensors for use with electrical capacitance volume tomography and capacitance sensing applications
KR101663815B1 (ko) * 2016-06-03 2016-10-10 (주)테크윈시스템 초음파 레벨 자동 측정장치
US10281422B2 (en) 2016-09-12 2019-05-07 Tech4Imaging Llc Displacement current phase tomography for imaging of lossy medium
US10502655B2 (en) 2017-03-07 2019-12-10 Tech4Imaging Llc Magnetic pressure sensors system for measurement and imaging of steel mass
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10131760B4 (de) * 2001-06-30 2012-06-21 Robert Bosch Gmbh Verfahren zum Testen eines Sensors
DE10357870B4 (de) * 2003-12-11 2013-02-07 Robert Bosch Gmbh Sensor mit symmetrischer Begrenzung eines Signals

Also Published As

Publication number Publication date
EP0606115A1 (de) 1994-07-13
DE69032031D1 (de) 1998-03-12
EP0423622B1 (de) 1995-01-25
US5174884A (en) 1992-12-29
EP0423622A1 (de) 1991-04-24
US5574211A (en) 1996-11-12
US5391283A (en) 1995-02-21
DE69032031T2 (de) 1998-10-01
EP0606115B1 (de) 1998-02-04
US5429736A (en) 1995-07-04
DE69016346D1 (de) 1995-03-09
DE69016346T3 (de) 2000-02-03
JPH03134552A (ja) 1991-06-07
KR0175300B1 (ko) 1999-05-15
EP0423622B2 (de) 1999-06-02
KR910008380A (ko) 1991-05-31

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8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8339 Ceased/non-payment of the annual fee