DE3888423D1 - Positionsfühler. - Google Patents

Positionsfühler.

Info

Publication number
DE3888423D1
DE3888423D1 DE88105743T DE3888423T DE3888423D1 DE 3888423 D1 DE3888423 D1 DE 3888423D1 DE 88105743 T DE88105743 T DE 88105743T DE 3888423 T DE3888423 T DE 3888423T DE 3888423 D1 DE3888423 D1 DE 3888423D1
Authority
DE
Germany
Prior art keywords
position sensor
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88105743T
Other languages
English (en)
Other versions
DE3888423T2 (de
Inventor
Tsutomu Miyatake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Application granted granted Critical
Publication of DE3888423D1 publication Critical patent/DE3888423D1/de
Publication of DE3888423T2 publication Critical patent/DE3888423T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7026—Focusing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Automatic Focus Adjustment (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE3888423T 1987-08-07 1988-04-11 Positionsfühler. Expired - Fee Related DE3888423T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62196174A JPS6441805A (en) 1987-08-07 1987-08-07 Position detecting apparatus of two bodies, which are separated by minute distance

Publications (2)

Publication Number Publication Date
DE3888423D1 true DE3888423D1 (de) 1994-04-21
DE3888423T2 DE3888423T2 (de) 1994-10-27

Family

ID=16353429

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3888423T Expired - Fee Related DE3888423T2 (de) 1987-08-07 1988-04-11 Positionsfühler.

Country Status (4)

Country Link
US (1) US4918301A (de)
EP (1) EP0302178B1 (de)
JP (1) JPS6441805A (de)
DE (1) DE3888423T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0355496A3 (de) * 1988-08-15 1990-10-10 Sumitomo Heavy Industries Co., Ltd. Positionsdetektor mit sektorieller fresnelscher Zonenplatte
JP2699282B2 (ja) * 1989-02-27 1998-01-19 住友重機械工業株式会社 色収差を利用した二重焦点検出装置
US5053628A (en) * 1989-07-13 1991-10-01 Matsushita Electric Industrial Co., Ltd. Position signal producing apparatus for water alignment
DE69013790T2 (de) * 1989-08-04 1995-05-04 Canon K.K., Tokio/Tokyo Verfahren und Vorrichtung zur Positionsbestimmung.
DE68923802T2 (de) * 1989-12-28 1995-12-07 Sumitomo Heavy Industries Verfahren zur beleuchtung mit zusammengesetzten farben sowie beleuchtung in vorgegebener wellenlänge in einem doppelfokusdetektor unter verwendung chromatischer aberration.
US7804587B2 (en) 2006-12-12 2010-09-28 Evident Technologies, Inc. System for the recognition of an optical signal and materials for use in such a system
US7777870B2 (en) 2006-12-12 2010-08-17 Evident Technologies, Inc. Method and system for the recognition of an optical signal
US8879058B2 (en) * 2010-11-05 2014-11-04 The University Of Ottawa Miniaturized multimodal cars endoscope
JP2012216728A (ja) * 2011-04-01 2012-11-08 V Technology Co Ltd 露光装置のアライメント装置
JP5747306B2 (ja) * 2011-05-23 2015-07-15 株式会社ブイ・テクノロジー 露光装置のアライメント装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635066B2 (de) * 1973-09-06 1981-08-14
US3990798A (en) * 1975-03-07 1976-11-09 Bell Telephone Laboratories, Incorporated Method and apparatus for aligning mask and wafer
JPS6042725A (ja) * 1983-08-18 1985-03-07 Olympus Optical Co Ltd 焦点検出装置
US4650983A (en) * 1983-11-07 1987-03-17 Nippon Kogaku K. K. Focusing apparatus for projection optical system
DE3413374A1 (de) * 1984-04-10 1985-10-17 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Optisches justierverfahren
US4734570A (en) * 1985-11-20 1988-03-29 Olympus Optical Co., Ltd. Active focus detecting device with infrared source
JP2614843B2 (ja) * 1985-12-02 1997-05-28 オリンパス光学工業株式会社 自動焦点顕微鏡
JP2797250B2 (ja) * 1987-05-14 1998-09-17 株式会社ニコン 投影露光装置

Also Published As

Publication number Publication date
EP0302178B1 (de) 1994-03-16
JPH054601B2 (de) 1993-01-20
JPS6441805A (en) 1989-02-14
US4918301A (en) 1990-04-17
EP0302178A2 (de) 1989-02-08
DE3888423T2 (de) 1994-10-27
EP0302178A3 (en) 1989-11-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee