DE69010020D1 - Verfahren und Vorrichtung zum Transport von Halbleiterplättchen in einem vertikalen Diffusionsapparat mit chemischer Aufdampfung. - Google Patents
Verfahren und Vorrichtung zum Transport von Halbleiterplättchen in einem vertikalen Diffusionsapparat mit chemischer Aufdampfung.Info
- Publication number
- DE69010020D1 DE69010020D1 DE69010020T DE69010020T DE69010020D1 DE 69010020 D1 DE69010020 D1 DE 69010020D1 DE 69010020 T DE69010020 T DE 69010020T DE 69010020 T DE69010020 T DE 69010020T DE 69010020 D1 DE69010020 D1 DE 69010020D1
- Authority
- DE
- Germany
- Prior art keywords
- vapor deposition
- chemical vapor
- semiconductor wafers
- vertical diffusion
- diffusion apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1019230A JPH07105357B2 (ja) | 1989-01-28 | 1989-01-28 | 縦型cvd拡散装置に於けるウェーハ移載方法及び装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69010020D1 true DE69010020D1 (de) | 1994-07-28 |
DE69010020T2 DE69010020T2 (de) | 1994-12-08 |
Family
ID=11993581
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69010020T Expired - Fee Related DE69010020T2 (de) | 1989-01-28 | 1990-01-18 | Verfahren und Vorrichtung zum Transport von Halbleiterplättchen in einem vertikalen Diffusionsapparat mit chemischer Aufdampfung. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5112641A (de) |
EP (1) | EP0381338B1 (de) |
JP (1) | JPH07105357B2 (de) |
KR (1) | KR930001285B1 (de) |
DE (1) | DE69010020T2 (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2644912B2 (ja) | 1990-08-29 | 1997-08-25 | 株式会社日立製作所 | 真空処理装置及びその運転方法 |
USRE39756E1 (en) | 1990-08-29 | 2007-08-07 | Hitachi, Ltd. | Vacuum processing operating method with wafers, substrates and/or semiconductors |
USRE39824E1 (en) | 1990-08-29 | 2007-09-11 | Hitachi, Ltd. | Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors |
US7089680B1 (en) | 1990-08-29 | 2006-08-15 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
CH687987A5 (de) * | 1993-05-03 | 1997-04-15 | Balzers Hochvakuum | Verfahren zur Erhoehung der Beschichtungsrate in einem Plasmaentladungsraum und Plasmakammer. |
US6296735B1 (en) | 1993-05-03 | 2001-10-02 | Unaxis Balzers Aktiengesellschaft | Plasma treatment apparatus and method for operation same |
CH687986A5 (de) * | 1993-05-03 | 1997-04-15 | Balzers Hochvakuum | Plasmabehandlungsanlage und Verfahren zu deren Betrieb. |
JP3654684B2 (ja) * | 1995-05-01 | 2005-06-02 | 東京エレクトロン株式会社 | 処理方法及び処理装置 |
US6481956B1 (en) * | 1995-10-27 | 2002-11-19 | Brooks Automation Inc. | Method of transferring substrates with two different substrate holding end effectors |
US5829969A (en) * | 1996-04-19 | 1998-11-03 | Tokyo Electron Ltd. | Vertical heat treating apparatus |
JP3225431B2 (ja) * | 1996-12-25 | 2001-11-05 | 住友イートンノバ株式会社 | イオン注入装置におけるウエハ搬送装置 |
US6450755B1 (en) | 1998-07-10 | 2002-09-17 | Equipe Technologies | Dual arm substrate handling robot with a batch loader |
US6119673A (en) * | 1998-12-02 | 2000-09-19 | Tokyo Seimitsu Co., Ltd. | Wafer retrieval method in multiple slicing wire saw |
JP4232307B2 (ja) * | 1999-03-23 | 2009-03-04 | 東京エレクトロン株式会社 | バッチ式熱処理装置の運用方法 |
US20010048867A1 (en) * | 2000-03-29 | 2001-12-06 | Lebar Technology, Inc. | Method and apparatus for processing semiconductor wafers |
US6303398B1 (en) * | 2000-05-04 | 2001-10-16 | Advanced Micro Devices, Inc. | Method and system of managing wafers in a semiconductor device production facility |
JP3497450B2 (ja) * | 2000-07-06 | 2004-02-16 | 東京エレクトロン株式会社 | バッチ式熱処理装置及びその制御方法 |
JP2002043229A (ja) * | 2000-07-25 | 2002-02-08 | Hitachi Kokusai Electric Inc | 半導体製造装置 |
EP1219397A1 (de) * | 2000-12-27 | 2002-07-03 | Optical Technologies Italia S.p.A. | Verfahren und Vorrichtung zum Laden, Entladen und Übertragen von Halbleiterstäben |
US6828218B2 (en) | 2001-05-31 | 2004-12-07 | Samsung Electronics Co., Ltd. | Method of forming a thin film using atomic layer deposition |
US6975917B2 (en) * | 2001-08-08 | 2005-12-13 | Tokyo Electron Limited | Heat treatment method and heat treatment device |
KR100672634B1 (ko) * | 2001-12-19 | 2007-02-09 | 엘지.필립스 엘시디 주식회사 | 액정표시소자의 기판 반송 장치 및 방법 |
US20040013503A1 (en) * | 2002-07-22 | 2004-01-22 | Jaswant Sandhu | Robotic hand with multi-wafer end effector |
JP2004103990A (ja) * | 2002-09-12 | 2004-04-02 | Hitachi Kokusai Electric Inc | 半導体製造装置および半導体装置の製造方法 |
US6849131B2 (en) * | 2002-10-05 | 2005-02-01 | Taiwan Semiconductor Manufacturing Co., Ltd | Truncated dummy plate for process furnace |
KR101229132B1 (ko) * | 2003-07-11 | 2013-02-01 | 테크-셈 아크티엔게젤샤프트 | 전자부품들을 제조하는 동안 판형상의 기질들을 저장하고 전달하기 위한 장치 |
DE10340511B3 (de) * | 2003-09-03 | 2004-11-11 | Infineon Technologies Ag | Verfahren zur Kontrolle von Batch-Anlagen |
US8747052B2 (en) * | 2006-11-22 | 2014-06-10 | Beijing Sevenstar Electronics Co., Ltd. | Automation for high throughput semiconductor batch-wafer processing equipment |
JP5581669B2 (ja) * | 2009-03-10 | 2014-09-03 | 株式会社日立製作所 | 水処理方法、水処理部材及び水処理設備 |
US8759084B2 (en) * | 2010-01-22 | 2014-06-24 | Michael J. Nichols | Self-sterilizing automated incubator |
JP5715904B2 (ja) * | 2011-07-29 | 2015-05-13 | 東京エレクトロン株式会社 | 熱処理装置、及びこれに基板を搬送する基板搬送方法 |
CN103515266B (zh) * | 2012-06-18 | 2016-06-08 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 用于整理料盒内晶片的整理装置及具有其的半导体设备 |
KR20140033911A (ko) | 2012-09-11 | 2014-03-19 | 에이에스엠 아이피 홀딩 비.브이. | 증착 장치 및 증착 방법 |
US10553471B2 (en) * | 2014-01-28 | 2020-02-04 | Kawasaki Jukogyo Kabushiki Kaisha | Substrate conveying system and method |
CN111033714B (zh) * | 2017-09-27 | 2023-12-29 | 株式会社国际电气 | 基板处理装置、半导体器件的制造方法及记录介质 |
CN112384056A (zh) * | 2020-11-23 | 2021-02-19 | 桂平悠品智能科技有限公司 | 一种半导体器件自动夹持安装机构 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4969073A (de) * | 1972-11-08 | 1974-07-04 | ||
US4402613A (en) * | 1979-03-29 | 1983-09-06 | Advanced Semiconductor Materials America | Surface inspection system |
JPS58218115A (ja) * | 1982-06-14 | 1983-12-19 | Sony Corp | 熱処理装置 |
JPS60182735A (ja) * | 1984-02-29 | 1985-09-18 | Tomuko:Kk | ウエ−ハの配列ピツチ変更装置 |
US4645401A (en) * | 1984-06-13 | 1987-02-24 | Disc Technology Corporation | Magnetic disc handling system |
US4759681A (en) * | 1985-01-22 | 1988-07-26 | Nissin Electric Co. Ltd. | End station for an ion implantation apparatus |
JPS61291335A (ja) * | 1985-06-19 | 1986-12-22 | Denkoo:Kk | 半導体移換え装置 |
US4966519A (en) * | 1985-10-24 | 1990-10-30 | Texas Instruments Incorporated | Integrated circuit processing system |
JPS62130534A (ja) * | 1985-12-02 | 1987-06-12 | Deisuko Saiyaa Japan:Kk | 縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置 |
JPS62130524A (ja) * | 1985-12-02 | 1987-06-12 | Hitachi Ltd | プラズマ処理装置 |
US4770590A (en) * | 1986-05-16 | 1988-09-13 | Silicon Valley Group, Inc. | Method and apparatus for transferring wafers between cassettes and a boat |
US4775281A (en) * | 1986-12-02 | 1988-10-04 | Teradyne, Inc. | Apparatus and method for loading and unloading wafers |
JPS63155632A (ja) * | 1986-12-18 | 1988-06-28 | Nitto Electric Ind Co Ltd | 半導体ウエハの自動貼付け装置 |
JPH0666376B2 (ja) * | 1987-06-17 | 1994-08-24 | 国際電気株式会社 | 縦形半導体製造装置におけるウェ−ハ搬送方法 |
DE3725358A1 (de) * | 1987-07-30 | 1989-02-09 | Telog Systems Gmbh | Vorrichtung und verfahren zur oberflaechenbehandlung von materialien |
US4955775A (en) * | 1987-12-12 | 1990-09-11 | Tel Sagami Limited | Semiconductor wafer treating apparatus |
US4957406A (en) * | 1989-05-08 | 1990-09-18 | Intelmatec Corporation | Apparatus for transferring disks from one cassette to another with different pitch |
-
1989
- 1989-01-28 JP JP1019230A patent/JPH07105357B2/ja not_active Expired - Lifetime
-
1990
- 1990-01-09 KR KR1019900000180A patent/KR930001285B1/ko not_active IP Right Cessation
- 1990-01-18 DE DE69010020T patent/DE69010020T2/de not_active Expired - Fee Related
- 1990-01-18 US US07/466,973 patent/US5112641A/en not_active Expired - Lifetime
- 1990-01-18 EP EP90300534A patent/EP0381338B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69010020T2 (de) | 1994-12-08 |
KR900012329A (ko) | 1990-08-03 |
EP0381338B1 (de) | 1994-06-22 |
EP0381338A2 (de) | 1990-08-08 |
JPH02297925A (ja) | 1990-12-10 |
KR930001285B1 (ko) | 1993-02-25 |
EP0381338A3 (de) | 1991-11-13 |
JPH07105357B2 (ja) | 1995-11-13 |
US5112641A (en) | 1992-05-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN |
|
8339 | Ceased/non-payment of the annual fee |