DE69008165D1 - Fühlelement für ein gyroskop. - Google Patents

Fühlelement für ein gyroskop.

Info

Publication number
DE69008165D1
DE69008165D1 DE69008165T DE69008165T DE69008165D1 DE 69008165 D1 DE69008165 D1 DE 69008165D1 DE 69008165 T DE69008165 T DE 69008165T DE 69008165 T DE69008165 T DE 69008165T DE 69008165 D1 DE69008165 D1 DE 69008165D1
Authority
DE
Germany
Prior art keywords
gyroscope
sensing element
sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69008165T
Other languages
English (en)
Other versions
DE69008165T2 (de
Inventor
Jan Soederkvist
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
COLIBRI PRO DEVELOPMENT TAEBY SE AB
Original Assignee
Bofors AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bofors AB filed Critical Bofors AB
Application granted granted Critical
Publication of DE69008165D1 publication Critical patent/DE69008165D1/de
Publication of DE69008165T2 publication Critical patent/DE69008165T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
DE69008165T 1989-02-27 1990-02-20 Fühlelement für ein gyroskop. Expired - Fee Related DE69008165T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE8900666A SE466817B (sv) 1989-02-27 1989-02-27 Foer gyro avsett sensorelement
PCT/SE1990/000112 WO1990010196A1 (en) 1989-02-27 1990-02-20 A sensor element intended for a gyro

Publications (2)

Publication Number Publication Date
DE69008165D1 true DE69008165D1 (de) 1994-05-19
DE69008165T2 DE69008165T2 (de) 1994-10-06

Family

ID=20375173

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69008165T Expired - Fee Related DE69008165T2 (de) 1989-02-27 1990-02-20 Fühlelement für ein gyroskop.

Country Status (7)

Country Link
US (1) US5251483A (de)
EP (1) EP0460089B1 (de)
JP (1) JP2977136B2 (de)
CA (1) CA2047727A1 (de)
DE (1) DE69008165T2 (de)
SE (1) SE466817B (de)
WO (1) WO1990010196A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE512378C2 (sv) * 1991-01-08 2000-03-06 Colibri Pro Dev Ab För stämgaffelgyro avsett elektrodmönster
EP0503807B1 (de) * 1991-03-12 1996-09-25 New Sd, Inc. Stimmgabelinertialsensor mit einem Ende und Verfahren
US5388458A (en) * 1992-11-24 1995-02-14 The Charles Stark Draper Laboratory, Inc. Quartz resonant gyroscope or quartz resonant tuning fork gyroscope
JP3392959B2 (ja) * 1994-11-01 2003-03-31 富士通株式会社 音叉形振動ジャイロ及びこれを用いたセンサシステム
US5861705A (en) * 1994-11-01 1999-01-19 Fujitsu Limited Tuning-fork vibratory gyro and sensor system using the same
SE514499C2 (sv) * 1995-01-13 2001-03-05 Colibri Pro Dev Ab Metod och anordning för kompensering av elektriska störningar
FR2736153B1 (fr) * 1995-06-29 1997-08-22 Asulab Sa Dispositif de mesure d'une vitesse angulaire
US5531115A (en) * 1995-06-29 1996-07-02 Erdley; Harold F. Self-calibrating three axis angular rate sensor
JP3739492B2 (ja) * 1996-02-21 2006-01-25 富士通株式会社 音叉型圧電振動ジャイロ
US5970793A (en) 1996-07-08 1999-10-26 Citizen Watch Co., Ltd. Angular velocity sensor and angular velocity sensing system
JPH1073437A (ja) * 1996-08-30 1998-03-17 Fujitsu Ltd 振動ジャイロの検出回路及びこれを用いた振動ジャイロ装置
DE19756552B4 (de) * 1996-12-18 2008-02-14 Denso Corp., Kariya Winkelgeschwindigkeitssensor
SE9604671L (sv) * 1996-12-19 1998-06-20 Volvo Ab Säkerhetsanordning för fordon
JP3336451B2 (ja) * 1997-08-22 2002-10-21 富士通株式会社 音叉型振動ジャイロ
JP3825152B2 (ja) * 1997-10-09 2006-09-20 株式会社東海理化電機製作所 Ｐｚｔ薄膜を備えた振動ジャイロ
JP3335122B2 (ja) 1998-05-06 2002-10-15 松下電器産業株式会社 角速度センサ
JP4449128B2 (ja) * 1999-12-14 2010-04-14 パナソニック株式会社 角速度センサ
CA2389316C (en) * 2000-08-30 2005-10-11 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
JP3778809B2 (ja) 2001-04-13 2006-05-24 富士通メディアデバイス株式会社 音叉型振動ジャイロ及びその電極トリミング方法
JP2007240540A (ja) * 2001-11-27 2007-09-20 Matsushita Electric Ind Co Ltd 薄膜微小機械式共振子ジャイロ
JP3972790B2 (ja) 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP2006125917A (ja) * 2004-10-27 2006-05-18 Kyocera Kinseki Corp 角速度センサ
JP2008157748A (ja) * 2006-12-22 2008-07-10 Fujitsu Media Device Kk 角速度センサ
JP2008157810A (ja) * 2006-12-25 2008-07-10 Tdk Corp 角速度センサ素子および角速度センサ装置
JP5652155B2 (ja) * 2010-11-24 2015-01-14 セイコーエプソン株式会社 振動片、センサーユニット、電子機器、振動片の製造方法、および、センサーユニットの製造方法
US8955382B2 (en) * 2011-03-10 2015-02-17 Honeywell International Inc. High performance double-ended tuning fork
WO2013061558A1 (ja) * 2011-10-24 2013-05-02 パナソニック株式会社 角速度センサとそれに用いられる検出素子
CN103245339B (zh) 2012-02-14 2017-05-24 精工爱普生株式会社 振动片、传感器单元以及电子设备
JP5982896B2 (ja) * 2012-03-13 2016-08-31 セイコーエプソン株式会社 センサー素子、センサーデバイスおよび電子機器
JP6007541B2 (ja) * 2012-03-28 2016-10-12 セイコーエプソン株式会社 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体
CN105865666B (zh) * 2016-05-03 2018-11-20 成都皆为科技有限公司 一种一体式双石英音叉谐振敏感元件及测力模块

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480809A (en) * 1968-07-09 1969-11-25 Philamon Inc Tuning fork resonator with reed-mode damping and reed signal cancellation
US4628734A (en) * 1982-01-21 1986-12-16 Watson Industries, Inc. Angular rate sensor apparatus
JPS6073414A (ja) * 1983-09-30 1985-04-25 Yokogawa Hokushin Electric Corp 振動式角速度計
GB2158579B (en) * 1984-01-23 1988-07-13 Piezoelectric Technology Inves Angular rate sensor system
CA1234705A (en) * 1984-03-22 1988-04-05 Suzushi Kimura Angular velocity sensor
JPS60239613A (ja) * 1984-05-14 1985-11-28 ピエゾエレクトリツク　テクノロジ−　インヴエスタ−ズ　リミテツド 角速度感知装置
US4674331A (en) * 1984-07-27 1987-06-23 Watson Industries Inc. Angular rate sensor
JPS61191917A (ja) * 1985-02-20 1986-08-26 Tadashi Konno 音叉型振動ジヤイロ
JPS6342417A (ja) * 1986-08-08 1988-02-23 Japan Storage Battery Co Ltd 圧電体角速度センサ−
JPS63154915A (ja) * 1986-12-19 1988-06-28 Hitachi Ltd 振動子の駆動・検出回路装置
GB8716047D0 (en) * 1987-07-08 1987-08-12 Thorn Emi Electronics Ltd Rate sensor

Also Published As

Publication number Publication date
SE8900666A (de) 1990-08-28
EP0460089B1 (de) 1994-04-13
CA2047727A1 (en) 1990-08-28
US5251483A (en) 1993-10-12
SE466817B (sv) 1992-04-06
SE8900666D0 (sv) 1989-02-27
DE69008165T2 (de) 1994-10-06
EP0460089A1 (de) 1991-12-11
JPH04504617A (ja) 1992-08-13
JP2977136B2 (ja) 1999-11-10
WO1990010196A1 (en) 1990-09-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: COLIBRI PRO DEVELOPMENT AB, TAEBY, SE

8339 Ceased/non-payment of the annual fee