SE8900666A - - Google Patents

Info

Publication number
SE8900666A
SE8900666A SE8900666A SE8900666A SE8900666A SE 8900666 A SE8900666 A SE 8900666A SE 8900666 A SE8900666 A SE 8900666A SE 8900666 A SE8900666 A SE 8900666A SE 8900666 A SE8900666 A SE 8900666A
Authority
SE
Sweden
Prior art keywords
pct
plane
elongated
drive
elongated element
Prior art date
Application number
SE8900666A
Other languages
English (en)
Other versions
SE8900666D0 (sv
SE466817B (sv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to SE8900666A priority Critical patent/SE466817B/sv
Publication of SE8900666D0 publication Critical patent/SE8900666D0/xx
Priority to AT90904469T priority patent/ATE104429T1/de
Priority to JP2504587A priority patent/JP2977136B2/ja
Priority to EP90904469A priority patent/EP0460089B1/de
Priority to PCT/SE1990/000112 priority patent/WO1990010196A1/en
Priority to CA002047727A priority patent/CA2047727A1/en
Priority to US07/743,338 priority patent/US5251483A/en
Priority to DE69008165T priority patent/DE69008165T2/de
Publication of SE8900666A publication Critical patent/SE8900666A/xx
Priority to NO91913347A priority patent/NO913347L/no
Publication of SE466817B publication Critical patent/SE466817B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
SE8900666A 1989-02-27 1989-02-27 Foer gyro avsett sensorelement SE466817B (sv)

Priority Applications (9)

Application Number Priority Date Filing Date Title
SE8900666A SE466817B (sv) 1989-02-27 1989-02-27 Foer gyro avsett sensorelement
DE69008165T DE69008165T2 (de) 1989-02-27 1990-02-20 Fühlelement für ein gyroskop.
PCT/SE1990/000112 WO1990010196A1 (en) 1989-02-27 1990-02-20 A sensor element intended for a gyro
JP2504587A JP2977136B2 (ja) 1989-02-27 1990-02-20 ジャイロに意図されたセンサー素子
EP90904469A EP0460089B1 (de) 1989-02-27 1990-02-20 Fühlelement für ein gyroskop
AT90904469T ATE104429T1 (de) 1989-02-27 1990-02-20 Fuehlelement fuer ein gyroskop.
CA002047727A CA2047727A1 (en) 1989-02-27 1990-02-20 Sensor element intended for a gyro
US07/743,338 US5251483A (en) 1989-02-27 1990-02-20 Piezoelectric sensor element intended for a gyro
NO91913347A NO913347L (no) 1989-02-27 1991-08-26 Sensorelement for gyroskop.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8900666A SE466817B (sv) 1989-02-27 1989-02-27 Foer gyro avsett sensorelement

Publications (3)

Publication Number Publication Date
SE8900666D0 SE8900666D0 (sv) 1989-02-27
SE8900666A true SE8900666A (de) 1990-08-28
SE466817B SE466817B (sv) 1992-04-06

Family

ID=20375173

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8900666A SE466817B (sv) 1989-02-27 1989-02-27 Foer gyro avsett sensorelement

Country Status (7)

Country Link
US (1) US5251483A (de)
EP (1) EP0460089B1 (de)
JP (1) JP2977136B2 (de)
CA (1) CA2047727A1 (de)
DE (1) DE69008165T2 (de)
SE (1) SE466817B (de)
WO (1) WO1990010196A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE512378C2 (sv) * 1991-01-08 2000-03-06 Colibri Pro Dev Ab För stämgaffelgyro avsett elektrodmönster
EP0503807B1 (de) * 1991-03-12 1996-09-25 New Sd, Inc. Stimmgabelinertialsensor mit einem Ende und Verfahren
US5388458A (en) * 1992-11-24 1995-02-14 The Charles Stark Draper Laboratory, Inc. Quartz resonant gyroscope or quartz resonant tuning fork gyroscope
US5861705A (en) * 1994-11-01 1999-01-19 Fujitsu Limited Tuning-fork vibratory gyro and sensor system using the same
JP3392959B2 (ja) * 1994-11-01 2003-03-31 富士通株式会社 音叉形振動ジャイロ及びこれを用いたセンサシステム
SE514499C2 (sv) * 1995-01-13 2001-03-05 Colibri Pro Dev Ab Metod och anordning för kompensering av elektriska störningar
FR2736153B1 (fr) * 1995-06-29 1997-08-22 Asulab Sa Dispositif de mesure d'une vitesse angulaire
US5531115A (en) * 1995-06-29 1996-07-02 Erdley; Harold F. Self-calibrating three axis angular rate sensor
JP3739492B2 (ja) * 1996-02-21 2006-01-25 富士通株式会社 音叉型圧電振動ジャイロ
US5970793A (en) 1996-07-08 1999-10-26 Citizen Watch Co., Ltd. Angular velocity sensor and angular velocity sensing system
JPH1073437A (ja) * 1996-08-30 1998-03-17 Fujitsu Ltd 振動ジャイロの検出回路及びこれを用いた振動ジャイロ装置
DE19756552B4 (de) * 1996-12-18 2008-02-14 Denso Corp., Kariya Winkelgeschwindigkeitssensor
SE9604671L (sv) 1996-12-19 1998-06-20 Volvo Ab Säkerhetsanordning för fordon
JP3336451B2 (ja) * 1997-08-22 2002-10-21 富士通株式会社 音叉型振動ジャイロ
JP3825152B2 (ja) * 1997-10-09 2006-09-20 株式会社東海理化電機製作所 Ｐｚｔ薄膜を備えた振動ジャイロ
JP3335122B2 (ja) 1998-05-06 2002-10-15 松下電器産業株式会社 角速度センサ
JP4449128B2 (ja) * 1999-12-14 2010-04-14 パナソニック株式会社 角速度センサ
AU763549B2 (en) * 2000-08-30 2003-07-24 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
JP3778809B2 (ja) * 2001-04-13 2006-05-24 富士通メディアデバイス株式会社 音叉型振動ジャイロ及びその電極トリミング方法
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP2007240540A (ja) * 2001-11-27 2007-09-20 Matsushita Electric Ind Co Ltd 薄膜微小機械式共振子ジャイロ
JP2006125917A (ja) * 2004-10-27 2006-05-18 Kyocera Kinseki Corp 角速度センサ
JP2008157748A (ja) * 2006-12-22 2008-07-10 Fujitsu Media Device Kk 角速度センサ
JP2008157810A (ja) * 2006-12-25 2008-07-10 Tdk Corp 角速度センサ素子および角速度センサ装置
JP5652155B2 (ja) * 2010-11-24 2015-01-14 セイコーエプソン株式会社 振動片、センサーユニット、電子機器、振動片の製造方法、および、センサーユニットの製造方法
US8955382B2 (en) * 2011-03-10 2015-02-17 Honeywell International Inc. High performance double-ended tuning fork
WO2013061558A1 (ja) * 2011-10-24 2013-05-02 パナソニック株式会社 角速度センサとそれに用いられる検出素子
CN103245339B (zh) 2012-02-14 2017-05-24 精工爱普生株式会社 振动片、传感器单元以及电子设备
JP5982896B2 (ja) * 2012-03-13 2016-08-31 セイコーエプソン株式会社 センサー素子、センサーデバイスおよび電子機器
JP6007541B2 (ja) * 2012-03-28 2016-10-12 セイコーエプソン株式会社 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体
CN105865666B (zh) * 2016-05-03 2018-11-20 成都皆为科技有限公司 一种一体式双石英音叉谐振敏感元件及测力模块

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480809A (en) * 1968-07-09 1969-11-25 Philamon Inc Tuning fork resonator with reed-mode damping and reed signal cancellation
US4628734A (en) * 1982-01-21 1986-12-16 Watson Industries, Inc. Angular rate sensor apparatus
JPS6073414A (ja) * 1983-09-30 1985-04-25 Yokogawa Hokushin Electric Corp 振動式角速度計
GB2158579B (en) * 1984-01-23 1988-07-13 Piezoelectric Technology Inves Angular rate sensor system
CA1234705A (en) * 1984-03-22 1988-04-05 Suzushi Kimura Angular velocity sensor
JPS60239613A (ja) * 1984-05-14 1985-11-28 ピエゾエレクトリツク　テクノロジ−　インヴエスタ−ズ　リミテツド 角速度感知装置
US4674331A (en) * 1984-07-27 1987-06-23 Watson Industries Inc. Angular rate sensor
JPS61191917A (ja) * 1985-02-20 1986-08-26 Tadashi Konno 音叉型振動ジヤイロ
JPS6342417A (ja) * 1986-08-08 1988-02-23 Japan Storage Battery Co Ltd 圧電体角速度センサ−
JPS63154915A (ja) * 1986-12-19 1988-06-28 Hitachi Ltd 振動子の駆動・検出回路装置
GB8716047D0 (en) * 1987-07-08 1987-08-12 Thorn Emi Electronics Ltd Rate sensor

Also Published As

Publication number Publication date
CA2047727A1 (en) 1990-08-28
SE8900666D0 (sv) 1989-02-27
US5251483A (en) 1993-10-12
DE69008165D1 (de) 1994-05-19
EP0460089B1 (de) 1994-04-13
SE466817B (sv) 1992-04-06
EP0460089A1 (de) 1991-12-11
WO1990010196A1 (en) 1990-09-07
DE69008165T2 (de) 1994-10-06
JPH04504617A (ja) 1992-08-13
JP2977136B2 (ja) 1999-11-10

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