DE69413162D1 - Piezoelektrischer Schwingungssensor mit eingebauter Prüfschaltung - Google Patents

Piezoelektrischer Schwingungssensor mit eingebauter Prüfschaltung

Info

Publication number
DE69413162D1
DE69413162D1 DE69413162T DE69413162T DE69413162D1 DE 69413162 D1 DE69413162 D1 DE 69413162D1 DE 69413162 T DE69413162 T DE 69413162T DE 69413162 T DE69413162 T DE 69413162T DE 69413162 D1 DE69413162 D1 DE 69413162D1
Authority
DE
Germany
Prior art keywords
built
vibration sensor
test circuit
piezoelectric vibration
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69413162T
Other languages
English (en)
Other versions
DE69413162T2 (de
Inventor
Alvin V Florida
Piyush K Gupta
David F Macy
Harold D Morris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New SD Inc
Original Assignee
New SD Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New SD Inc filed Critical New SD Inc
Application granted granted Critical
Publication of DE69413162D1 publication Critical patent/DE69413162D1/de
Publication of DE69413162T2 publication Critical patent/DE69413162T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69413162T 1993-08-02 1994-07-07 Piezoelektrischer Schwingungssensor mit eingebauter Prüfschaltung Expired - Fee Related DE69413162T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/100,759 US5426970A (en) 1993-08-02 1993-08-02 Rotation rate sensor with built in test circuit

Publications (2)

Publication Number Publication Date
DE69413162D1 true DE69413162D1 (de) 1998-10-15
DE69413162T2 DE69413162T2 (de) 1999-03-11

Family

ID=22281391

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69413162T Expired - Fee Related DE69413162T2 (de) 1993-08-02 1994-07-07 Piezoelektrischer Schwingungssensor mit eingebauter Prüfschaltung

Country Status (4)

Country Link
US (1) US5426970A (de)
EP (1) EP0638782B1 (de)
JP (1) JP2935810B2 (de)
DE (1) DE69413162T2 (de)

Families Citing this family (68)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5517431A (en) * 1994-02-28 1996-05-14 Alliedsignal Truck Brake Systems Speed sensor and conditioning circuit
US5481914A (en) * 1994-03-28 1996-01-09 The Charles Stark Draper Laboratory, Inc. Electronics for coriolis force and other sensors
US5554904A (en) * 1994-07-05 1996-09-10 Akai Electric Co., Ltd. Vibration control apparatus having automatic gain control
US5942686A (en) * 1994-09-15 1999-08-24 Bei Electronics, Inc. Ratiometric transducer and method
US5719460A (en) * 1994-11-28 1998-02-17 Nippondenso Co., Ltd Angular velocity sensor
DE4447005A1 (de) * 1994-12-29 1996-07-04 Bosch Gmbh Robert Vorrichtung zur Ermittlung einer Drehrate
JP3492010B2 (ja) * 1995-03-29 2004-02-03 キヤノン株式会社 振動ジャイロおよび防振装置
US6705151B2 (en) * 1995-05-30 2004-03-16 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
US6912901B1 (en) 1995-05-30 2005-07-05 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
CN1142436C (zh) * 1995-05-30 2004-03-17 松下电器产业株式会社 具有自检功能的角速度传感器
US5531115A (en) * 1995-06-29 1996-07-02 Erdley; Harold F. Self-calibrating three axis angular rate sensor
JP3603501B2 (ja) * 1996-09-25 2004-12-22 株式会社村田製作所 角速度検出装置
US6437483B2 (en) 1996-11-26 2002-08-20 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US5998911A (en) * 1996-11-26 1999-12-07 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6747393B2 (en) 1996-11-26 2004-06-08 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6018212A (en) 1996-11-26 2000-01-25 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
DE19653020A1 (de) * 1996-12-19 1998-06-25 Bosch Gmbh Robert Vorrichtung zur Ermittlung einer Drehrate
JP3191742B2 (ja) * 1997-09-25 2001-07-23 株式会社村田製作所 振動ジャイロ
DE19853063B4 (de) 1997-11-18 2011-07-28 DENSO CORPORATION, Aichi-pref. Winkelgeschwindigkeitssensor und Diagnosesystem dafür
US6205857B1 (en) 1998-02-25 2001-03-27 Citizen Watch Co., Ltd. Angular velocity sensing device
JP2000009469A (ja) * 1998-06-18 2000-01-14 Fujitsu Ltd 圧電ジャイロおよびその駆動方法
DE19835578A1 (de) * 1998-08-06 2000-02-10 Bosch Gmbh Robert Vorrichtung zur Ermittlung einer Drehrate
DE19845185B4 (de) * 1998-10-01 2005-05-04 Eads Deutschland Gmbh Sensor mit Resonanzstruktur sowie Vorrichtung und Verfahren zum Selbsttest eines derartigen Sensors
DE19910415B4 (de) * 1999-03-10 2010-12-09 Robert Bosch Gmbh Verfahren und Vorrichtung zum Abstimmen eines ersten Oszillators mit einem zweiten Oszillator
US6516651B1 (en) * 1999-07-22 2003-02-11 Analog Devices, Inc. Coriolis effect transducer
US6615937B2 (en) 1999-07-30 2003-09-09 Invacare Corporation Motorized wheelchairs
JP4449110B2 (ja) * 1999-08-18 2010-04-14 パナソニック株式会社 角速度センサ
US6262520B1 (en) * 1999-09-15 2001-07-17 Bei Technologies, Inc. Inertial rate sensor tuning fork
US6553835B1 (en) * 2000-09-15 2003-04-29 Bei Technologies, Inc. Inertial rate sensor and method with improved clocking
US6497146B1 (en) 2000-09-15 2002-12-24 Bei Technologies, Inc. Inertial rate sensor and method with built-in testing
JP2002213961A (ja) * 2001-01-15 2002-07-31 Murata Mfg Co Ltd 振動ジャイロおよび振動ジャイロの自己診断方法
JP4843855B2 (ja) * 2001-03-09 2011-12-21 パナソニック株式会社 角速度センサ
US6714070B1 (en) 2002-02-07 2004-03-30 Bei Technologies, Inc. Differential charge amplifier with built-in testing for rotation rate sensor
US6858972B2 (en) * 2002-06-21 2005-02-22 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
KR20060017648A (ko) * 2003-06-30 2006-02-24 지멘스 악티엔게젤샤프트 회전 속도 센서 모니터링 방법
JP4352975B2 (ja) * 2003-07-25 2009-10-28 セイコーエプソン株式会社 圧電振動片、圧電振動片の支持構造、圧電振動子及び振動型圧電ジャイロスコープ
US7458263B2 (en) * 2003-10-20 2008-12-02 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
JP4529444B2 (ja) * 2004-01-13 2010-08-25 パナソニック株式会社 角速度センサ
US20050268716A1 (en) * 2004-06-08 2005-12-08 Honeywell International Inc. Built in test for mems vibratory type inertial sensors
US7237169B2 (en) * 2004-07-26 2007-06-26 Bei Technologies, Inc. Cross-monitoring sensor system and method
DE102005043560A1 (de) * 2005-09-12 2007-03-15 Siemens Ag Verfahren zum Betrieb eines Vibrationskreisels und Sensoranordnung
DE102005043592A1 (de) * 2005-09-12 2007-03-15 Siemens Ag Verfahren zum Betrieb eines Vibrationskreisels und Sensoranordnung
DE102005043559A1 (de) * 2005-09-12 2007-03-15 Siemens Ag Verfahren und Anordnung zur Überwachung einer Sensoranordnung
JP4830488B2 (ja) * 2005-12-28 2011-12-07 パナソニック株式会社 角速度センサ
EP1972486A1 (de) 2007-03-19 2008-09-24 Invacare International Sàrl Motorisierter Rollstuhl
US8315770B2 (en) * 2007-11-19 2012-11-20 Invacare Corporation Motorized wheelchair
JP2009186305A (ja) 2008-02-06 2009-08-20 Epson Toyocom Corp 物理量センサ
JP4640459B2 (ja) * 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
JP2010286371A (ja) * 2009-06-12 2010-12-24 Seiko Epson Corp 物理量検出装置、物理量検出装置の異常診断システム及び物理量検出装置の異常診断方法
JP5016652B2 (ja) * 2009-10-14 2012-09-05 日本航空電子工業株式会社 音叉型振動ジャイロ
JP5671699B2 (ja) * 2010-01-18 2015-02-18 パナソニックＩｐマネジメント株式会社 角速度センサ装置
DE112010005045T5 (de) * 2010-02-17 2012-10-25 Asahi Kasei Microdevices Corp. Oszillationstyp-Trägheitskraftsensor
US9278846B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
KR101352827B1 (ko) 2010-09-18 2014-01-17 페어차일드 세미컨덕터 코포레이션 단일 프루프 매스를 가진 미세기계화 3축 가속도계
US9156673B2 (en) 2010-09-18 2015-10-13 Fairchild Semiconductor Corporation Packaging to reduce stress on microelectromechanical systems
EP2619536B1 (de) 2010-09-20 2016-11-02 Fairchild Semiconductor Corporation Mikroelektromechanischer drucksensor mit einem bezugskondensator
KR20120133899A (ko) * 2011-06-01 2012-12-11 삼성전기주식회사 관성센서의 구동제어모듈 및 구동제어방법
KR101319712B1 (ko) * 2011-12-26 2013-10-17 삼성전기주식회사 자이로센서 구동회로, 자이로센서 시스템 및 자이로센서 구동 방법
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
EP2648334B1 (de) 2012-04-05 2020-06-10 Fairchild Semiconductor Corporation Front-end-Ladungsverstärker einer MEMS-Vorrichtung
EP2647955B8 (de) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS-Vorrichtung mit Quadraturphasenverschiebungsauslöschung
US9069006B2 (en) * 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
EP2647952B1 (de) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Automatische Verstärkungsregelungsschleife einer MEMS-Vorrichtung für mechanischen Amplitudenantrieb
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
US10864127B1 (en) 2017-05-09 2020-12-15 Pride Mobility Products Corporation System and method for correcting steering of a vehicle
CN111190029B (zh) * 2019-12-20 2022-02-18 福建福清核电有限公司 一种核电厂汽动泵转速传感器交叉比较的系统及方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4654663A (en) * 1981-11-16 1987-03-31 Piezoelectric Technology Investors, Ltd. Angular rate sensor system
US4628734A (en) * 1982-01-21 1986-12-16 Watson Industries, Inc. Angular rate sensor apparatus
GB2158579B (en) * 1984-01-23 1988-07-13 Piezoelectric Technology Inves Angular rate sensor system
USRE32931E (en) * 1984-01-23 1989-05-30 Piezoelectric Technology Investors, Inc. Vibratory angular rate sensor system
US4538461A (en) * 1984-01-23 1985-09-03 Piezoelectric Technology Investors, Inc. Vibratory angular rate sensing system
US4899587A (en) * 1984-01-23 1990-02-13 Piezoelectric Technology Investors, Limited Method for sensing rotation using vibrating piezoelectric elements
US4699006A (en) * 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
JPH0752105B2 (ja) * 1984-04-26 1995-06-05 松下電器産業株式会社 角速度センサ−
JPH0654235B2 (ja) * 1985-01-16 1994-07-20 横河電機株式会社 振動式角速度計
JPS6293668A (ja) * 1985-10-21 1987-04-30 Hitachi Ltd 角速度・加速度検出器
GB8716047D0 (en) * 1987-07-08 1987-08-12 Thorn Emi Electronics Ltd Rate sensor
US4930351A (en) * 1988-03-24 1990-06-05 Wjm Corporation Vibratory linear acceleration and angular rate sensing system
US5056366A (en) * 1989-12-26 1991-10-15 Litton Systems, Inc. Piezoelectric vibratory rate sensor
JP2666505B2 (ja) * 1990-01-31 1997-10-22 松下電器産業株式会社 角速度センサ駆動装置
JPH0526894A (ja) * 1991-07-19 1993-02-02 Mitsubishi Petrochem Co Ltd 自己診断回路付き加速度センサ
EP0534366B1 (de) * 1991-09-24 1996-06-05 Murata Manufacturing Co., Ltd. Beschleunigungsmessaufnehmer
JPH05133755A (ja) * 1991-11-13 1993-05-28 Akai Electric Co Ltd 診断機能付振動ジヤイロ

Also Published As

Publication number Publication date
EP0638782A1 (de) 1995-02-15
US5426970A (en) 1995-06-27
JP2935810B2 (ja) 1999-08-16
DE69413162T2 (de) 1999-03-11
JPH0777538A (ja) 1995-03-20
EP0638782B1 (de) 1998-09-09

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee