SE8900666A - - Google Patents

Info

Publication number
SE8900666A
SE8900666A SE8900666A SE8900666A SE8900666A SE 8900666 A SE8900666 A SE 8900666A SE 8900666 A SE8900666 A SE 8900666A SE 8900666 A SE8900666 A SE 8900666A SE 8900666 A SE8900666 A SE 8900666A
Authority
SE
Sweden
Prior art keywords
pct
plane
elongated
drive
elongated element
Prior art date
Application number
SE8900666A
Other versions
SE8900666D0 (en
SE466817B (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to SE8900666A priority Critical patent/SE466817B/en
Publication of SE8900666D0 publication Critical patent/SE8900666D0/en
Priority to PCT/SE1990/000112 priority patent/WO1990010196A1/en
Priority to EP90904469A priority patent/EP0460089B1/en
Priority to DE69008165T priority patent/DE69008165T2/en
Priority to JP2504587A priority patent/JP2977136B2/en
Priority to CA002047727A priority patent/CA2047727A1/en
Priority to AT90904469T priority patent/ATE104429T1/en
Priority to US07/743,338 priority patent/US5251483A/en
Publication of SE8900666A publication Critical patent/SE8900666A/xx
Priority to NO91913347A priority patent/NO913347L/en
Publication of SE466817B publication Critical patent/SE466817B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

PCT No. PCT/SE90/00112 Sec. 371 Date Aug. 27, 1991 Sec. 102(e) Date Aug. 27, 1991 PCT Filed Feb. 20, 1990 PCT Pub. No. WO90/10196 PCT Pub. Date Sep. 7, 1990.A sensor element intended for a gyro, comprises an elongated body including at least one elongated element defining a tine and having a first and a second end. The first end is freely vibratable in two planes perpendicular to each other, designated as the X-Y plane and the Y-Z plane. The second end is fixedly secured in a body rotatable about a longitudinal axis which coincides with the planes. Drive and sensor electrodes are provided for piezoelectrically detecting vibrations of the first end, the drive electrodes providing vibrations in a plane perpendicular to the plane in which the sensor electrodes detect the vibrations, the drive and sensor electrodes covering substantial portions of the first vibratable end of the elongated element. The elongated element, at its second, fixedly secured end includes a transitional portion and an anchorage portion which do not participate in the vibration to any appreciable degree. The anchorage portion includes a connection which through connectors coupled to the connection means connects the sensor element to outer electronics. The elongated body including the elongated element, the transitional portion and the anchorage portion is manufactured as one common piece of piezoelectric material.
SE8900666A 1989-02-27 1989-02-27 BEFORE GYRO PROVIDES SENSOR ELEMENTS SE466817B (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
SE8900666A SE466817B (en) 1989-02-27 1989-02-27 BEFORE GYRO PROVIDES SENSOR ELEMENTS
US07/743,338 US5251483A (en) 1989-02-27 1990-02-20 Piezoelectric sensor element intended for a gyro
JP2504587A JP2977136B2 (en) 1989-02-27 1990-02-20 Sensor element intended for gyro
EP90904469A EP0460089B1 (en) 1989-02-27 1990-02-20 A sensor element intended for a gyro
DE69008165T DE69008165T2 (en) 1989-02-27 1990-02-20 SENSING ELEMENT FOR A GYROSCOPE.
PCT/SE1990/000112 WO1990010196A1 (en) 1989-02-27 1990-02-20 A sensor element intended for a gyro
CA002047727A CA2047727A1 (en) 1989-02-27 1990-02-20 Sensor element intended for a gyro
AT90904469T ATE104429T1 (en) 1989-02-27 1990-02-20 SENSING ELEMENT FOR A GYROSCOPE.
NO91913347A NO913347L (en) 1989-02-27 1991-08-26 GYROSCOPE SENSOR ELEMENT.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8900666A SE466817B (en) 1989-02-27 1989-02-27 BEFORE GYRO PROVIDES SENSOR ELEMENTS

Publications (3)

Publication Number Publication Date
SE8900666D0 SE8900666D0 (en) 1989-02-27
SE8900666A true SE8900666A (en) 1990-08-28
SE466817B SE466817B (en) 1992-04-06

Family

ID=20375173

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8900666A SE466817B (en) 1989-02-27 1989-02-27 BEFORE GYRO PROVIDES SENSOR ELEMENTS

Country Status (7)

Country Link
US (1) US5251483A (en)
EP (1) EP0460089B1 (en)
JP (1) JP2977136B2 (en)
CA (1) CA2047727A1 (en)
DE (1) DE69008165T2 (en)
SE (1) SE466817B (en)
WO (1) WO1990010196A1 (en)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE512378C2 (en) * 1991-01-08 2000-03-06 Colibri Pro Dev Ab Electrode pattern intended for tuning fork gyro
EP0503807B1 (en) * 1991-03-12 1996-09-25 New Sd, Inc. Single ended tuning fork inertial sensor and method
US5388458A (en) * 1992-11-24 1995-02-14 The Charles Stark Draper Laboratory, Inc. Quartz resonant gyroscope or quartz resonant tuning fork gyroscope
US5861705A (en) * 1994-11-01 1999-01-19 Fujitsu Limited Tuning-fork vibratory gyro and sensor system using the same
JP3392959B2 (en) * 1994-11-01 2003-03-31 富士通株式会社 Tuning fork vibrating gyroscope and sensor system using the same
SE514499C2 (en) * 1995-01-13 2001-03-05 Colibri Pro Dev Ab Method and apparatus for compensating electrical interference
US5531115A (en) * 1995-06-29 1996-07-02 Erdley; Harold F. Self-calibrating three axis angular rate sensor
FR2736153B1 (en) * 1995-06-29 1997-08-22 Asulab Sa ANGULAR SPEED MEASURING DEVICE
JP3739492B2 (en) * 1996-02-21 2006-01-25 富士通株式会社 Tuning fork type piezoelectric vibration gyro
US5970793A (en) 1996-07-08 1999-10-26 Citizen Watch Co., Ltd. Angular velocity sensor and angular velocity sensing system
JPH1073437A (en) * 1996-08-30 1998-03-17 Fujitsu Ltd Oscillation gyro and detection circuit thereof
DE19756552B4 (en) * 1996-12-18 2008-02-14 Denso Corp., Kariya Angular rate sensor
SE9604671L (en) * 1996-12-19 1998-06-20 Volvo Ab Vehicle safety device
JP3336451B2 (en) * 1997-08-22 2002-10-21 富士通株式会社 Tuning fork type vibration gyro
JP3825152B2 (en) * 1997-10-09 2006-09-20 株式会社東海理化電機製作所 Vibration gyro with PZT thin film
JP3335122B2 (en) 1998-05-06 2002-10-15 松下電器産業株式会社 Angular velocity sensor
JP4449128B2 (en) * 1999-12-14 2010-04-14 パナソニック株式会社 Angular velocity sensor
WO2002018875A1 (en) * 2000-08-30 2002-03-07 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
JP3778809B2 (en) 2001-04-13 2006-05-24 富士通メディアデバイス株式会社 Tuning fork type vibration gyro and electrode trimming method thereof
JP3972790B2 (en) 2001-11-27 2007-09-05 松下電器産業株式会社 Thin film micromechanical resonator and thin film micromechanical resonator gyro
JP2007240540A (en) * 2001-11-27 2007-09-20 Matsushita Electric Ind Co Ltd Thin-film micromechanical resonator gyro
JP2006125917A (en) * 2004-10-27 2006-05-18 Kyocera Kinseki Corp Angular velocity sensor
JP2008157748A (en) * 2006-12-22 2008-07-10 Fujitsu Media Device Kk Angular velocity sensor
JP2008157810A (en) * 2006-12-25 2008-07-10 Tdk Corp Angular velocity sensor element and angular velocity sensor device
JP5652155B2 (en) 2010-11-24 2015-01-14 セイコーエプソン株式会社 Vibrating piece, sensor unit, electronic device, manufacturing method of vibrating piece, and manufacturing method of sensor unit
US8955382B2 (en) * 2011-03-10 2015-02-17 Honeywell International Inc. High performance double-ended tuning fork
US20140238129A1 (en) * 2011-10-24 2014-08-28 Panasonic Corporation Angular velocity sensor and detection element used in same
CN103245339B (en) 2012-02-14 2017-05-24 精工爱普生株式会社 Vibrator element, sensor unit, and electronic device
JP5982896B2 (en) * 2012-03-13 2016-08-31 セイコーエプソン株式会社 Sensor element, sensor device and electronic device
JP6007541B2 (en) * 2012-03-28 2016-10-12 セイコーエプソン株式会社 Vibrating piece, manufacturing method thereof, gyro sensor, electronic device, and moving body
CN105865666B (en) * 2016-05-03 2018-11-20 成都皆为科技有限公司 A kind of integral type biquartz tuning fork resonant sensitive element and force-measuring module

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3480809A (en) * 1968-07-09 1969-11-25 Philamon Inc Tuning fork resonator with reed-mode damping and reed signal cancellation
US4628734A (en) * 1982-01-21 1986-12-16 Watson Industries, Inc. Angular rate sensor apparatus
JPS6073414A (en) * 1983-09-30 1985-04-25 Yokogawa Hokushin Electric Corp Oscillation type angular speed meter
GB2158579B (en) * 1984-01-23 1988-07-13 Piezoelectric Technology Inves Angular rate sensor system
CA1234705A (en) * 1984-03-22 1988-04-05 Suzushi Kimura Angular velocity sensor
JPS60239613A (en) * 1984-05-14 1985-11-28 ピエゾエレクトリツク　テクノロジ−　インヴエスタ−ズ　リミテツド Angular velocity sensor
US4674331A (en) * 1984-07-27 1987-06-23 Watson Industries Inc. Angular rate sensor
JPS61191917A (en) * 1985-02-20 1986-08-26 Tadashi Konno Tuning fork type vibration gyroscope
JPS6342417A (en) * 1986-08-08 1988-02-23 Japan Storage Battery Co Ltd Piezoelectric body angular velocity sensor
JPS63154915A (en) * 1986-12-19 1988-06-28 Hitachi Ltd Drive-detection circuit of vibrator
GB8716047D0 (en) * 1987-07-08 1987-08-12 Thorn Emi Electronics Ltd Rate sensor

Also Published As

Publication number Publication date
DE69008165T2 (en) 1994-10-06
EP0460089A1 (en) 1991-12-11
CA2047727A1 (en) 1990-08-28
EP0460089B1 (en) 1994-04-13
US5251483A (en) 1993-10-12
SE8900666D0 (en) 1989-02-27
JP2977136B2 (en) 1999-11-10
SE466817B (en) 1992-04-06
JPH04504617A (en) 1992-08-13
WO1990010196A1 (en) 1990-09-07
DE69008165D1 (en) 1994-05-19

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