JP2006125917A - Angular velocity sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To detect angular velocity in two or more axial directions by a vibrator of an easily formed shape. <P>SOLUTION: This angular velocity sensor comprises the vibrator 100 equipped with two leg parts 102 and 103 disposed so as to extend in one direction from a base part 101 and three leg parts 104, 105 and 106 disposed so as to extend in the other direction from the base part 101. The leg part 102 is provided with Y-axis excitation electrodes 121, 122, 123 and 124. The leg part 103 is provided with Y-axis detection electrodes 131, 132, 133 and 134. The leg part 104 is provided with Z-axis excitation electrodes 141, 142, 143 and 144. The leg part 105 is provided with Z-axis excitation electrodes 151, 152, 153 and 154. The leg part 106 is provided with Z-axis detection electrodes 161, 162, 163 and 164. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an angular velocity sensor applicable to a sensor that detects a rotational angular velocity in a rotating system used for attitude control and position detection of an aircraft, a ship, an automobile, and the like.

  Although there are various types of angular velocity sensors, there is a vibration-type angular velocity sensor that satisfies the requirement of being thin, small and lightweight for incorporation. Conventional vibration-type angular velocity sensors detect a Coriolis force that works with rotation by vibrating a vibrator processed into a square pole.

  As such a conventional angular velocity sensor, there is one using a tuning fork type vibrator (see Patent Documents 1 and 2). There has also been proposed a vibrator including a plurality of support portions extending in a plane intersecting the rotation axis and a plurality of flexural vibration pieces supported at the tips of the support portions (Patent Document 3). reference). According to the vibrator of Patent Document 2, the rotational speed of the in-plane rotation can be detected, and the gyroscope can be reduced in height.

  On the other hand, multi-axiality is required for the degree of freedom of motion to be detected, and an angular velocity sensor for detecting each component (angular velocity) of three orthogonal axes has been proposed. For example, when three axes are to be achieved by a vibrator, the Coriolis force, which is an angular velocity detection principle, is generated for all three axes, so the element has at least two orthogonal components as drive displacement speeds. There is a need. As a technique for realizing this, a method has been proposed in which one inertial body element is circularly moved by two-phase driving that is orthogonal in time (see Non-Patent Document 1).

The applicant has not yet found prior art documents related to the present invention by the time of filing other than the prior art documents specified by the prior art document information described in this specification.
JP-A-8-128833 JP-A-10-047970 JP-A-11-281372 Hideki Tamura, Toshiya Ichimura, Yoshiro Tomikawa, “3-axis angular velocity detection gyro sensor by two-phase drive”, ultrasonic TECHNO, 2002.1-2, pp. 6-13, (2002-01)

  As described above, conventionally, since the three-axis components are detected by combining a plurality of vibrators, the configuration of the angular velocity sensor is complicated. Further, in the above-described method in which one inertial body element is circularly moved by two-phase driving that is also orthogonal in time, it is difficult to give a uniform circular motion to the plate (vibrator) of the piezoelectric vibration material. There is a problem that orthogonality with the signal is disturbed and separation of signals of different components is not easy.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to make it possible to detect angular velocities in two or more directions using a vibrator having a shape that can be easily formed. .

  The angular velocity sensor according to the present invention includes a base, prismatic first leg portions and second leg portions disposed at a predetermined interval at one end portion of the base portion, and the other end portion of the base portion. A prismatic third leg portion and a fourth leg portion disposed at a predetermined interval, and a prismatic shape disposed at the other end of the base between the third leg portion and the fourth leg portion. And a first detection electrode provided on the side of the first leg and the second leg, and a vibrator in which these members are integrally formed from a crystal exhibiting piezoelectricity, At least a second detection electrode provided on the third leg portion, the fourth leg portion, and the fifth leg portion side, and an excitation electrode provided on the vibrator, and the first to fifth leg portions are the same. The first leg and the second leg extend in the opposite direction to the third, fourth, and fifth legs. Therefore, angular velocities due to rotation around two different axes perpendicular to each other can be detected.

  In the angular velocity sensor, the first excitation electrode provided on the first leg and the Y extending in the direction in which the leg extends in a state where the bending vibration is driven by the first excitation electrode provided on the second leg. A first detection electrode for detecting a first vibration caused by rotation of the vibrator about the axis, a second excitation electrode provided on each of the third leg and the fourth leg, and a fifth leg The second vibration caused by the rotation of the vibrator about the Z axis in the normal direction of the plane on which the base and the leg are disposed in a state where the bending vibration is driven by the second excitation electrode is detected. And a second detection electrode for the vibrator, and the vibrator may be supported by the base.

  In the angular velocity sensor, the first excitation electrode provided on the tip side opposite to the base of the first leg and the second leg, respectively, and the base of the first leg and the second leg are provided respectively. A first detection electrode for detecting the first vibration caused by the rotation of the vibrator about the Y axis in the direction in which the leg extends in a state where the bending vibration is driven by the first excitation electrode; A base and legs are disposed in a state in which bending vibration is driven by a second excitation electrode provided on each of the third leg and the fourth leg, and a second excitation electrode provided on the fifth leg. And a second detection electrode for detecting a second vibration caused by the rotation of the vibrator about the Z axis in the normal direction of the plane, and the vibrator may be supported by the base.

  In the angular velocity sensor, the first excitation electrode provided on the first leg and the Y extending in the direction in which the leg extends in a state where the bending vibration is driven by the first excitation electrode provided on the second leg. A first detection electrode for detecting a first vibration caused by rotation of the vibrator about the axis, a second excitation electrode provided on each of the third leg and the fourth leg, and a fifth leg The vibrator is provided on the tip side opposite to the base, and the vibrator is centered on the Z axis in the normal direction of the plane in which the base and the leg are disposed in a state where the bending vibration is driven by the second excitation electrode. And a second detection electrode for detecting the second vibration caused by the rotation, and the vibrator may be supported by the tip of the fifth leg.

  In the angular velocity sensor, the first excitation electrode provided on the tip side opposite to the base of the first leg and the second leg, respectively, and the base of the first leg and the second leg are provided respectively. A first detection electrode for detecting the first vibration caused by the rotation of the vibrator about the Y axis in the direction in which the leg extends in a state where the bending vibration is driven by the first excitation electrode; A state in which bending vibration is driven by the second excitation electrode provided on the tip side opposite to the base part of the second leg and the fifth leg part provided on the third leg part and the fourth leg part, respectively. And a second detection electrode for detecting a second vibration caused by rotation of the vibrator about the Z axis in the normal direction of the plane on which the base and the leg are disposed. What is necessary is just to be supported by the front-end | tip part of a leg part.

  In the angular velocity sensor, the vibrator has a prismatic sixth leg portion extending in the mechanical axis direction of the crystal disposed at one end portion of the base portion between the first leg portion and the second leg portion. You may make it prepare. In the angular velocity sensor configured as described above, the common excitation electrode provided on the first leg and the second leg respectively, and the bending vibration caused by the common excitation electrode provided on the third leg and the fourth leg, respectively. A first detection electrode for detecting a first vibration caused by rotation of the vibrator about the Y axis in a direction in which the leg extends in the driven state; and a fifth leg and a sixth leg. Each of the vibrators is provided on the tip side opposite to the base, and is centered on the Z axis in the normal direction of the plane in which the base and the leg are disposed in a state where the bending vibration is driven by the common excitation electrode. A second detection electrode for detecting the second vibration caused by the rotation, and the vibrator may be supported by the distal end portion of the fifth leg portion and the distal end portion of the sixth leg portion.

  The angular velocity sensor is provided on the first excitation electrode provided on the first leg and the second leg, respectively, on the base side of the third leg and the fourth leg, and is bent by the first excitation electrode. A first detection electrode for detecting a first vibration caused by rotation of the vibrator about the Y axis in a direction in which the leg extends in a state in which the vibration is driven, and a fifth leg and a sixth leg; This is caused by the rotation of the vibrator around the Z axis in the normal direction of the plane on which the base and the leg are disposed in a state where the bending vibration is driven by the first excitation electrode. A second detection electrode for detecting the second vibration; a second excitation electrode provided on the tip side opposite to the base of the third leg and the fourth leg; and a fifth leg and a sixth leg. The Y-axis is provided in a state in which the expansion and contraction vibration is driven by the second excitation electrode. And a third detection electrode for detecting a third vibration caused by rotation of the vibrator about the X axis perpendicular to the Z axis, and the vibrator includes a tip portion of a fifth leg and a sixth electrode. You may be supported by the front-end | tip part of a leg part.

  The angular velocity sensor includes a first excitation electrode provided on each of the first leg and the second leg, and a leg provided in a state where the bending vibration is driven by the first excitation electrode provided on the sixth leg. A first detection electrode for detecting a first vibration caused by rotation of the vibrator about the Y axis in a direction in which the portion extends, and a second excitation provided on each of the third leg portion and the fourth leg portion Z in the normal direction of the plane on which the base and the leg are disposed in a state where the electrode and the base of the fifth leg are opposite to the base of the fifth leg and the bending vibration is driven by the second excitation electrode A second detection electrode for detecting second vibration caused by rotation of the vibrator about the axis, and the vibrator has a direction perpendicular to the distal end of the fifth leg and the Y and Z axes of the base. It may be supported by both end portions.

  The angular velocity sensor includes a first excitation electrode provided on each of the first leg and the second leg, and a sixth excitation provided on the sixth leg, and in a state where the expansion and contraction vibration is driven by the first excitation electrode. A first detection electrode for detecting a first vibration caused by rotation of the vibrator about the axis, a second excitation electrode provided on each of the third leg and the fourth leg, and a fifth leg The vibrator is provided on the tip side opposite to the base, and the vibrator is centered on the Z axis in the normal direction of the plane in which the base and the leg are disposed in a state where the bending vibration is driven by the second excitation electrode. A second detection electrode for detecting a second vibration caused by the rotation, the X-axis is an axis perpendicular to the Y-axis and the Z-axis in the direction in which the leg portion extends, and the vibrator is the fifth You may be supported by the front-end | tip part of a leg part, and the both ends of the direction of the X-axis of a base.

  The angular velocity sensor includes a first excitation electrode provided on each of the first leg and the second leg, and a leg provided in a state where the bending vibration is driven by the first excitation electrode provided on the sixth leg. A first detection electrode for detecting a first vibration caused by rotation of the vibrator about the Y axis in a direction in which the portion extends, and a second excitation provided on each of the third leg portion and the fourth leg portion An electrode, and a second detection electrode provided on the fifth leg for detecting second vibration caused by rotation of the vibrator about the X axis in a state where expansion and contraction vibration is driven by the second excitation electrode The X-axis is an axis perpendicular to the Y-axis and the Z-axis in the normal direction of the plane on which the base and legs are disposed, and the vibrator has the X-axis of the tip and base of the fifth leg You may be supported by the both ends of the direction of an axis | shaft.

  The angular velocity sensor includes a first excitation electrode provided on each of the first leg and the second leg, and a leg provided in a state where the bending vibration is driven by the first excitation electrode provided on the sixth leg. The first detection electrode for detecting the first vibration caused by the rotation of the vibrator about the Y axis in the direction in which the portion extends, and the base side of the third leg portion and the fourth leg portion are provided, respectively. Centered on the Z axis in the normal direction of the plane on which the base and the leg are disposed in the state where the second excitation electrode and the base side of the fifth leg are provided and the bending vibration is driven by the second excitation electrode A second detection electrode for detecting a second vibration caused by the rotation of the vibrator, a third excitation electrode provided on the opposite side to the base of the third leg and the fourth leg, and a fifth Provided on the tip side opposite to the base of the leg, the Y-axis in a state where the expansion and contraction vibration is driven by the third excitation electrode And a third detection electrode for detecting third vibration caused by rotation of the vibrator about the X axis perpendicular to the Z axis, and the vibrator has a tip end portion of the fifth leg portion and an X axis of the base portion. It may be supported at both ends in the direction. The angular velocity sensor includes a fixed portion provided at each end of the base portion in the X-axis direction, and the vibrator is supported by the tip portion of the fifth leg portion and the two fixed portions. May be. Note that, by applying excitation signals of different frequencies by different excitation electrodes, each vibration caused by rotation about different axes can be detected in a more accurately distinguished state.

  As described above, according to the present invention, the first detection electrode is provided on the first leg portion and the second leg side, and the second detection electrode includes the third leg portion, the fourth leg portion, and the first leg portion. Since it is provided on the side of the five legs, an excellent effect that an angular velocity in a direction of two or more axes can be detected by a vibrator having a shape that can be easily formed can be obtained.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view (a) and a cross-sectional view (b) showing a configuration example of an angular velocity sensor according to an embodiment of the present invention. The angular velocity sensor shown in FIG. 1 is made of crystal, and has two legs 102 and 103 that extend from the base 101 to one side and three legs that extend from the base 101 to the other side. The vibrator 100 includes the sections 104, 105, and 106. Each leg is formed in a prismatic shape. Further, the vibrator 100 is fixed (supported) on the side portion of the base 101. In the following, the vibrator may be composed of other piezoelectric crystals, not limited to quartz.

  The vibrator 100 is rotated by a predetermined angle (0 to 15 °) with respect to the electrical axis, mechanical axis, and optical axis of the crystal, and a quartz plate having a thickness of 0.10 mm with the direction rotated by the predetermined angle from the optical axis as a normal line. What is necessary is just to form by cutting out from. In the figure, X is an axis rotated by a predetermined angle from the electric axis, Y is an axis rotated by a predetermined angle from the mechanical axis, and Z is an axis rotated by a predetermined angle from the optical axis. For example, the vibrator 100 is formed with a thickness of about 0.10 mm, the legs 102 and 103 are formed with a length of about 1.65 mm and a width of about 0.08 mm, and the base 101 has a length of 0.4 mm and a width of 0. The leg portions 104 and 105 are formed to have a length of about 0.14 mm and a width of about 0.10 mm, and the leg portion 106 is formed to have a length of about 1.45 mm and a width of about 0.10 mm. .

  The central axis in the extending direction of the leg part 102 and the central axis in the extending direction of the leg part 104 coincide, and the central axis in the extending direction of the leg part 103 and the central axis in the extending direction of the leg part 105 coincide. Further, the leg portion 106 is disposed at a central portion between the leg portion 104 and the leg portion 105. In each leg portion configured in this way, first, the leg portion 102 is provided with Y-axis excitation electrodes 121, 122, 123, and 124, and the leg portion 103 is provided with Y-axis detection electrodes 131, 132, 133, and 134. Is provided. The leg 104 is provided with Z-axis excitation electrodes 141, 142, 143, and 144, and the leg 105 is provided with Z-axis excitation electrodes 151, 152, 153, and 154. In addition, the leg portion 106 is provided with Z-axis detection electrodes 161, 162, 163, and 164.

  In the leg portion 102, the Y-axis excitation electrode 121 and the Y-axis excitation electrode 123 have the same polarity, and the Y-axis excitation electrode 122 and the Y-axis excitation electrode 124 have the same polarity. In the leg portion 103, the Y-axis detection electrode 131 and the Y-axis detection electrode 133 have the same polarity, and the Y-axis detection electrode 132 and the Y-axis detection electrode 134 have the same polarity. In the leg 104, the Z-axis excitation electrode 141 and the Z-axis excitation electrode 143 have the same polarity, and the Z-axis excitation electrode 142 and the Z-axis excitation electrode 144 have the same polarity. In the leg 105, the Z-axis excitation electrode 151 and the Z-axis excitation electrode 153 have the same polarity, and the Z-axis excitation electrode 152 and the Z-axis excitation electrode 154 have the same polarity. In the leg portion 106, the Z-axis detection electrode 161 and the Z-axis detection electrode 163 have the same polarity, and the Z-axis detection electrode 162 and the Z-axis detection electrode 164 have the same polarity.

  For example, as shown in FIG. 2, the Y-axis excitation electrodes 121 and 123 and the Y-axis excitation electrodes 122 and 124 are connected to the oscillation circuit 201, and the bending vibration of the leg 102 is driven by the oscillation circuit 201. The Y-axis detection electrodes 131 and 133 and the Y-axis detection electrodes 132 and 134 are connected to the differential amplifier circuit 202. A reference phase signal based on the drive frequency of the oscillation circuit 201 is output from the phase circuit 203.

  Detection signals generated based on the angular velocities to be measured are each input to the differential amplifier circuit 202. The input detection signal is amplified by the differential amplifier circuit 202 and output to the synchronous detection circuit 204. The synchronous detection circuit 204 uses the output signal of the phase circuit 303 as a reference phase, synchronously detects the detection signal input from the differential amplifier circuit 202, and outputs it as an angular velocity signal. These configurations are the same for the Z-axis excitation electrodes 141, 142, 143, 144, the Z-axis excitation electrodes 151, 152, 153, 154, and the Z-axis detection electrodes 161, 162, 163, 164.

  In the angular velocity sensor shown in FIG. 1, when an excitation signal is applied to the leg portion 102 by the Y-axis excitation electrodes 121, 122, 123, 124, the leg portion 102 undergoes bending vibration in the XY plane due to the inverse piezoelectric effect. (Excited) Due to the bending vibration of the leg portion 102, the leg portion 103 also causes bending vibration in the XY plane. In this state of excitation, when distortion due to the Coriolis force of the rotational motion with the Y axis as the rotation axis is applied to the angular velocity sensor in FIG. 1, a charge proportional to the magnitude of the distortion (angular velocity) is detected by the Y axis. It occurs in the electrodes 131, 132, 133, 134 (piezoelectric effect). Therefore, if the electrical signals detected by the Y-axis detection electrodes 131, 132, 133, and 134 are processed by a circuit as shown in FIG. 2 and detected as an angular velocity signal, the angular velocity of the rotational motion with the Y axis as the rotational axis is detected. The size can be determined. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  Similarly, when an excitation signal is applied to the leg 104 and the leg 105 by the Z-axis excitation electrodes 141, 142, 143, 144 and the Z-axis excitation electrodes 151, 152, 153, 154, the leg 104, the leg 105 causes bending vibration (excites) in the XY plane. Here, even if the leg portion 104 and the leg portion 105 cause bending vibration, the leg portion 106 does not cause bending vibration. In this state, when distortion due to the Coriolis force of the rotational motion with the Z axis as the rotation axis is applied to the angular velocity sensor of FIG. 1, the leg portion 106 causes bending vibration in the XY plane. A charge proportional to the magnitude of the bending vibration distortion (angular velocity) is generated in the Z-axis detection electrodes 161, 162, 163, and 164 (piezoelectric effect).

  Therefore, if the electric signals detected by the Z-axis detection electrodes 161, 162, 163, and 164 are processed by a circuit as shown in FIG. 2 and detected as an angular velocity signal, the angular velocity of the rotational motion with the Z axis as the rotation axis is detected. The size can be determined. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal. As described above, according to the angular velocity sensor shown in FIG. 1, the angular velocity in the two-axis directions of the Y axis and the Z axis can be detected.

Further, in the angular velocity sensor shown in FIG. 1, first, as described above, the dimensions of the legs 102 and 103 and the dimensions of the legs 104 and 105 are made different. In addition, the frequency of the excitation signal applied to the leg portion 102 by the Y-axis excitation electrodes 121, 122, 123, and 124, and the frequency of the excitation signal applied to the leg portion 104 by the Z-axis excitation electrodes 141, 142, 143, and 144 Were in different states. Frequency F _s of the excitation signal to be applied to each leg may be determined by the equation of "F _s = k _f × (the length of the leg portion) width ÷ leg ^2, k _f is the frequency constant". In this way, the dimensions of the legs are in different states, and excitation signals of different frequencies are applied to the legs to be excited by different excitation electrodes corresponding to different axial directions, thereby centering on different axes. Each vibration caused by the rotation can be detected in a more accurately distinguished state.

  Next, another embodiment of the present invention will be described. FIG. 3 is a perspective view (a) and a sectional view (b) showing another configuration example of the angular velocity sensor according to the embodiment of the present invention. The angular velocity sensor shown in FIG. 3 includes the same vibrator 100 as the angular velocity sensor shown in FIG. 1 and is fixed (supported) on the side portion of the base 101. In each leg portion configured as described above, in the angular velocity sensor shown in FIG. 3, first, the leg portion 102 has Y-axis excitation electrodes 321, 322, 323, 324 and Y-axis detection electrodes 325, 326, 327, 328. The leg 103 is provided with Y-axis excitation electrodes 331, 332, 333, 334 and Y-axis detection electrodes 335, 336, 337, 338.

  The Y-axis excitation electrodes 321, 322, 323, and 324 are disposed on the distal end side of the leg portion 102, and the Y-axis detection electrodes 325, 326, 327, and 328 are disposed on the base portion 101 side of the leg portion 102. . Similarly, the Y-axis excitation electrodes 331, 332, 333, and 334 are disposed on the distal end side of the leg portion 103, and the Y-axis detection electrodes 335, 336, 337, and 338 are disposed on the base portion 101 side of the leg portion 103. Has been.

  3, the leg portion 104 is provided with Z-axis excitation electrodes 141, 142, 143, and 144, and the leg portion 105 is provided with the Z-axis excitation electrode, similarly to the angular velocity sensor shown in FIG. 151, 152, 153, 154 are provided, and the leg portion 106 is provided with Z-axis detection electrodes 161, 162, 163, 164.

  The Y-axis excitation electrode 321, the Y-axis excitation electrode 323, the Y-axis excitation electrode 332, and the Y-axis excitation electrode 334 have the same polarity, and the Y-axis excitation electrode 322, the Y-axis excitation electrode 324, the Y-axis excitation electrode 331, and the Y-axis excitation electrode The electrode 333 has the same polarity. On the other hand, the Y axis detection electrode 325, the Y axis detection electrode 327, the Y axis detection electrode 336, and the Y axis detection electrode 337 have the same polarity, and the Y axis detection electrode 326, the Y axis detection electrode 328, the Y axis detection electrode 335, Y The axis detection electrode 338 has the same polarity.

  Similarly to the angular velocity sensor shown in FIG. 1, in the leg 104, the Z-axis excitation electrode 141 and the Z-axis excitation electrode 143 have the same polarity, and the Z-axis excitation electrode 142 and the Z-axis excitation electrode 144 have the same polarity. ing. In the leg 105, the Z-axis excitation electrode 151 and the Z-axis excitation electrode 153 have the same polarity, and the Z-axis excitation electrode 152 and the Z-axis excitation electrode 154 have the same polarity. In the leg portion 106, the Z-axis detection electrode 161 and the Z-axis detection electrode 163 have the same polarity, and the Z-axis detection electrode 162 and the Z-axis detection electrode 164 have the same polarity. Like the angular velocity sensor shown in FIG. 1, a circuit as shown in FIG. 2 may be configured by the above-described excitation electrodes and detection electrodes.

  In the angular velocity sensor shown in FIG. 3, an excitation signal is applied to the leg portion 102 by Y-axis excitation electrodes 321, 322, 323, and 324, and to the leg portion 103 by Y-axis excitation electrodes 331, 332, 333, and 334. An excitation signal is applied, and the leg portion 102 and the leg portion 103 are excited (bending vibration). In this state, if the electrical signals detected by the Y-axis detection electrodes 325, 326, 327, and 328 and the Y-axis detection electrodes 335, 336, 337, and 338 are detected as angular velocity signals, the rotational motion with the Y axis as the rotation axis. Can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  Further, an excitation signal is applied to the leg 104 and the leg 105 by the Z-axis excitation electrodes 141, 142, 143, 144 and the Z-axis excitation electrodes 151, 152, 153, 154, and the leg 104, 105. Is excited (bending vibration). If the electrical signals detected by the Z-axis detection electrodes 161, 162, 163, and 164 are detected as angular velocity signals in this excited state, the magnitude of the angular velocity of the rotational motion with the Z axis as the rotation axis can be determined. Can be sought. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal. The angular velocity with the Z axis as the rotation axis is the same as that of the angular velocity sensor shown in FIG. As described above, according to the angular velocity sensor shown in FIG. 3, the angular velocity in the biaxial directions of the Y axis and the Z axis can be detected.

  Next, another embodiment of the present invention will be described. FIG. 4 is a perspective view (a) and a cross-sectional view (b) showing another configuration example of the angular velocity sensor according to the embodiment of the present invention. The angular velocity sensor shown in FIG. 4 includes the same vibrator 100 as the angular velocity sensor shown in FIG. However, the angular velocity sensor shown in FIG. 4 is fixed at the tip of the leg portion 106. In each leg portion configured as described above, in the angular velocity sensor shown in FIG. 4, first, similarly to the angular velocity sensor shown in FIG. 1, the leg portion 102 is provided with Y-axis excitation electrodes 121, 122, 123, and 124. The leg 103 is provided with Y-axis detection electrodes 131, 132, 133, and 134. The leg 104 is provided with Z-axis excitation electrodes 141, 142, 143, and 144, and the leg 105 is provided with Z-axis excitation electrodes 151, 152, 153, and 154.

  In addition, in the angular velocity sensor shown in FIG. 4, Z-axis detection electrodes 461, 462, 463, 464 are provided in a half region on the distal end side of the leg portion 106. Therefore, no electrode is disposed in a half region on the base 101 side of the leg portion 106. In the leg portion 102, the Y-axis excitation electrode 121 and the Y-axis excitation electrode 123 have the same polarity, and the Y-axis excitation electrode 122 and the Y-axis excitation electrode 124 have the same polarity. In the leg 103, the Y-axis detection electrode 131 and the Y-axis detection electrode 133 have the same polarity, and the Y-axis detection electrode 132 and the Y-axis detection electrode 134 have the same polarity. In the leg 104, the Z-axis excitation electrode 141 and the Z-axis excitation electrode 143 have the same polarity, and the Z-axis excitation electrode 142 and the Z-axis excitation electrode 144 have the same polarity.

  In the leg portion 105, the Z-axis excitation electrode 151 and the Z-axis excitation electrode 153 have the same polarity, and the Z-axis excitation electrode 152 and the Z-axis excitation electrode 154 have the same polarity. In the leg portion 106, the Z-axis detection electrode 461 and the Z-axis detection electrode 463 have the same polarity, and the Z-axis detection electrode 462 and the Z-axis detection electrode 464 have the same polarity. Like the angular velocity sensor shown in FIG. 1, a circuit as shown in FIG. 2 may be configured by the above-described excitation electrodes and detection electrodes.

  In the angular velocity sensor shown in FIG. 4, an excitation signal is applied to the leg portion 102 by the Y-axis excitation electrodes 121, 122, 123, and 124 so that the leg portion 102 is excited. If the electrical signals detected by the Y-axis detection electrodes 131, 132, 133, and 134 are detected as angular velocity signals in this excited state, the magnitude of the angular velocity of the rotational motion with the Y axis as the rotation axis can be determined. Can be sought. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  Similarly, an excitation signal is applied to the leg 104 and the leg 105 by the Z-axis excitation electrodes 141, 142, 143, 144 and the Z-axis excitation electrodes 151, 152, 153, 154, and the leg 104, leg 105 is an excited state. If the electrical signals detected by the Z-axis detection electrodes 461, 462, 463, and 464 are detected as angular velocity signals in this excited state, the magnitude of the angular velocity of the rotational motion with the Z axis as the rotation axis can be determined. Can be sought. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal. As described above, according to the angular velocity sensor shown in FIG. 4, the angular velocity in the two-axis directions of the Y axis and the Z axis can be detected.

  Next, another embodiment of the present invention will be described. FIG. 5 is a perspective view (a) and a sectional view (b) showing another configuration example of the angular velocity sensor according to the embodiment of the present invention. The angular velocity sensor shown in FIG. 5 includes the same vibrator 100 as the angular velocity sensor shown in FIG. However, the angular velocity sensor shown in FIG. 5 is fixed at the tip of the leg portion 106. This is the same as the angular velocity sensor shown in FIG.

  In each leg portion configured as described above, the angular velocity sensor shown in FIG. 5 first has Y-axis excitation electrodes 321, 322, 323, 324, and Y on the leg portion 102 as in the angular velocity sensor shown in FIG. 3. Axis detection electrodes 325, 326, 327, and 328 are provided, and the leg 103 is provided with Y-axis excitation electrodes 331, 332, 333, and 334 and Y-axis detection electrodes 335, 336, 337, and 338. The Y-axis excitation electrodes 321, 322, 323, and 324 are disposed on the distal end side of the leg portion 102, and the Y-axis detection electrodes 325, 326, 327, and 328 are disposed on the base portion 101 side of the leg portion 102. . Similarly, the Y-axis excitation electrodes 331, 332, 333, and 334 are disposed on the distal end side of the leg portion 103, and the Y-axis detection electrodes 335, 336, 337, and 338 are disposed on the base portion 101 side of the leg portion 103. Has been.

  In addition, in the angular velocity sensor shown in FIG. 5, Z-axis detection electrodes 461, 462, 463, 464 are provided in a half region on the distal end side of the leg portion 106. Therefore, no electrode is disposed in a half region on the base 101 side of the leg portion 106. This configuration is the same as the angular velocity sensor shown in FIG.

  In the angular velocity sensor shown in FIG. 5, an excitation signal is applied to the leg portion 102 by the Y-axis excitation electrodes 321, 322, 323, and 324, and to the leg portion 103 by the Y-axis excitation electrodes 331, 332, 333, and 334. An excitation signal is applied to excite the legs 102 and 103. In this state, if the electrical signals detected by the Y-axis detection electrodes 325, 326, 327, and 328 and the Y-axis detection electrodes 335, 336, 337, and 338 are detected as angular velocity signals, the rotational motion with the Y axis as the rotation axis. Can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  Further, an excitation signal is applied to the leg 104 and the leg 105 by the Z-axis excitation electrodes 141, 142, 143, 144 and the Z-axis excitation electrodes 151, 152, 153, 154, and the leg 104, 105. Is in an excited state. If the electrical signals detected by the Z-axis detection electrodes 461, 462, 463, and 464 are detected as angular velocity signals in this excited state, the magnitude of the angular velocity of the rotational motion with the Z axis as the rotation axis can be determined. Can be sought. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal. As described above, according to the angular velocity sensor shown in FIG. 5, the angular velocity in the two-axis directions of the Y axis and the Z axis can be detected.

  Next, another embodiment of the present invention will be described. FIG. 6 is a perspective view (a) and a sectional view (b) showing another configuration example of the angular velocity sensor according to the embodiment of the present invention. The angular velocity sensor shown in FIG. 6 is made of quartz, and has three legs 602, 603, and 604 that extend from the base 601 to one side, and 3 that extend from the base 601 to the other side. The vibrator 600 includes two leg portions 605, 606, and 607. The vibrator 600 is fixed (supported) at the tip of the leg 604 and the tip of the leg 607.

  The vibrator 600 is rotated by a predetermined angle (0 to 15 °) with respect to the electrical axis, mechanical axis, and optical axis of the crystal, and a quartz plate having a thickness of 0.10 mm with the direction rotated by the predetermined angle from the optical axis as a normal line. What is necessary is just to form by cutting out from. In the figure, X is an axis rotated by a predetermined angle from the electric axis, Y is an axis rotated by a predetermined angle from the mechanical axis, and Z is an axis rotated by a predetermined angle from the optical axis. For example, the vibrator 600 is formed to have a thickness of about 0.10 mm, the legs 602, 603, 605, and 606 are formed to have a length of about 1.45 mm and a width of about 0.10 mm, and the base 601 has a length of about 0.1 mm. The leg portions 604 and 607 are formed to have a length of about 1.5 mm and a width of about 0.10 mm. Therefore, the length from the tip of the leg 604 to the tip of the leg 607 is 3.4 mm.

  The central axis in the extending direction of the leg portion 602 and the central axis in the extending direction of the leg portion 605 are coincident, the central axis in the extending direction of the leg portion 603 and the central axis in the extending direction of the leg portion 606 are coincident, The central axis in the extending direction of the leg portion 604 coincides with the central axis in the extending direction of the leg portion 607. Further, the leg portion 604 is disposed at the center portion between the leg portion 602 and the leg portion 603, and the leg portion 607 is disposed at the center portion between the leg portion 605 and the leg portion 606. Therefore, the vibrator 600 is line symmetric with respect to the central axis passing through the leg 604 and the leg 607, and is line symmetric with respect to a line passing through the center of the base 601 perpendicular to the central axis passing through the leg 604 and the leg 607. is there.

  In each leg portion configured as described above, in the angular velocity sensor shown in FIG. 6, first, the leg portion 602 is provided with excitation electrodes 621, 622, 623, and 624, and the leg portion 603 is also provided with the excitation electrode 631. 632, 633, 634 are provided. On the other hand, the leg portion 604 is provided with Z-axis detection electrodes 641, 642, 643, 644 in a half region on the distal end side. The leg portion 605 is provided with Y-axis detection electrodes 651, 652, 653, 654, and the leg portion 606 is also provided with Y-axis detection electrodes 661, 662, 663, 664. On the other hand, the leg portion 607 is provided with Z-axis detection electrodes 671, 672, 673, 674 in a half region on the tip end side.

  In the legs 602 and 603, the excitation electrode 621, the excitation electrode 623, the excitation electrode 632, and the excitation electrode 634 have the same polarity, and the excitation electrode 622, the excitation electrode 624, the excitation electrode 631, and the excitation electrode 633 have the same polarity. . On the other hand, in the leg portion 604, the Z-axis detection electrodes 641 and 643 have the same polarity, and the Z-axis detection electrodes 642 and 644 have the same polarity. In the legs 605 and 606, the Y-axis detection electrodes 651 and 653 and the Y-axis detection electrodes 662 and 664 have the same polarity, and the Y-axis detection electrodes 652 and 654 and the Y-axis detection electrodes 661 and 663 have the same polarity. ing. On the other hand, in the leg portion 607, the Z-axis detection electrodes 671, 673 have the same polarity, and the Z-axis detection electrodes 672, 674 have the same polarity.

  In the angular velocity sensor shown in FIG. 6, an excitation signal is applied to the leg 602 by the excitation electrodes 621, 622, 623, and 624, and an excitation signal is applied to the leg 603 by the excitation electrodes 631, 632, 633, and 634. Then, the leg 602 and the leg 603 are excited. In this state, if the electrical signals detected by the Y-axis detection electrodes 651, 652, 653, 654 and the Y-axis detection electrodes 661, 662, 663, 664 are detected as angular velocity signals, the rotational motion having the Y axis as the rotation axis. Can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  In addition, the electrical signals detected by the Z-axis detection electrodes 641, 642, 643, 644 and the Z-axis detection electrodes 671, 672, 673, 674 in a state where the leg 602 and the leg 603 are excited as described above. Is detected as the angular velocity signal, the magnitude of the angular velocity of the rotational motion with the Z axis as the rotational axis can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal. As described above, according to the angular velocity sensor shown in FIG. 6, the angular velocity in the two-axis directions of the Y axis and the Z axis can be detected.

  More specifically, in the angular velocity sensor shown in FIG. 6, the dimensions of the legs 602, 603, 605, and 606 are the same as described above, and the vibrator 600 is centered on the center of the base 601. It has a symmetrical structure. In the angular velocity sensor shown in FIG. 6 configured as described above, the same excitation signal is transmitted to the leg portion 602 and the leg portion 603 by the excitation electrodes 621, 622, 623, 624 and the excitation electrodes 631, 632, 633, 634. First, the legs 602 and the legs 603 are excited to vibrate in different directions in the same plane where the legs and the base 601 are arranged.

  By such excitation, the leg portions 605 and 606 are similarly driven to bend and vibrate (target mode). Therefore, vibrations caused by the rotation of the vibrator 600 around the Y axis are detected by the Y axis detection electrodes 651 and 652. 653, 654 and the Y-axis detection electrodes 661, 662, 663, 664 can be detected. Further, bending vibration (asymmetric mode) in which almost the entire vibrator 600 vibrates around the Z-axis with the center portion of the base portion 601 as the center of gravity by the excitation of the leg portion 602 and the leg portion 603 by the same excitation signal. ) Is driven. In this driving state, vibrations caused by the rotation of the vibrator 600 around the Z axis can be detected by the Z axis detection electrodes 641, 642, 643, 644 and the Z axis detection electrodes 671, 672, 673, 674.

  Next, another embodiment of the present invention will be described. FIG. 7 is a perspective view (a) and a sectional view (b) showing another configuration example of the angular velocity sensor according to the embodiment of the present invention. The angular velocity sensor shown in FIG. 7 includes the same vibrator 600 as the angular velocity sensor shown in FIG. 6, and is fixed at the distal end portion of the leg portion 604 and the distal end portion of the leg portion 607.

  In each leg portion configured as described above, in the angular velocity sensor shown in FIG. 7, first, the leg portion 602 is provided with excitation electrodes 621, 622, 623, and 624, and the leg portion 603 is also provided with the excitation electrode 631. 632, 633, 634 are provided. These serve as excitation electrodes for the Y axis and the Z axis. On the other hand, the leg 604 is provided with Z-axis detection electrodes 741, 742, 743, and 744 in the half region on the base 601 side, and the X-axis detection electrodes 745, 746, 747, and 748 in the half region on the distal end side. Is provided.

  The leg 605 is provided with Y-axis detection electrodes 751, 752, 753, and 754 in the half area on the base 601 side, and X-axis excitation electrodes 755 and 756 in the half area on the tip side. Yes. Similarly, the leg 606 is provided with Y-axis detection electrodes 761, 762, 763, 674 in the half region on the base 601 side, and the X-axis excitation electrodes 765, 766 are provided in the half region on the tip side. ing. On the other hand, the leg 607 is provided with Z-axis detection electrodes 771, 772, 773, and 774 in the half region on the base 601 side, and the X-axis detection electrodes 775, 776, 777, and 778 in the half region on the tip side. Is provided.

  In the angular velocity sensor shown in FIG. 7, an excitation signal is applied to the leg 602 by the excitation electrodes 621, 622, 623, and 624, and an excitation signal is applied to the leg 603 by the excitation electrodes 631, 632, 633, and 634. The leg 602 and the leg 603 are excited. In this state, if the electrical signals detected by the Y-axis detection electrodes 751, 752, 753, 754 and the Y-axis detection electrodes 761, 762, 763, 774 are detected as angular velocity signals, the rotational motion with the Y axis as the rotation axis. Can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  In addition, the electrical signals detected by the Z-axis detection electrodes 741, 742, 743, and 744 and the Z-axis detection electrodes 771, 772, 773, and 774 in the state where the leg portion 602 and the leg portion 603 are excited as described above. Is detected as the angular velocity signal, the magnitude of the angular velocity of the rotational motion with the Z axis as the rotational axis can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  In addition, in the angular velocity sensor shown in FIG. 7, an excitation signal is applied to the leg portion 605 by the X-axis excitation electrodes 755 and 756, and an excitation signal is applied to the leg portion 606 by the X-axis excitation electrodes 765 and 766. The leg portion 605 and the leg portion 606 are excited (stretching vibration). In this state, if electrical signals detected by the X-axis detection electrodes 745, 746, 747, 748 and the X-axis detection electrodes 775, 776, 777, 778 are detected as angular velocity signals, the rotational motion with the X axis as the rotation axis Can be obtained. As described above, according to the angular velocity sensor shown in FIG. 7, the angular velocities in the directions of the three axes of the X axis, the Y axis, and the Z axis can be detected.

  Next, another embodiment of the present invention will be described. FIG. 8 is a perspective view (a) and a sectional view (b) showing another configuration example of the angular velocity sensor according to the embodiment of the present invention. The angular velocity sensor shown in FIG. 8 is made of quartz and has three legs 802, 803, and 804 that extend from the base 801 to one side, and 3 that extend from the base 801 to the other side. The vibrator 800 includes two leg portions 805, 806, and 807 and two fixing portions 808 and 809 provided on the base portion 801. The vibrator 800 is fixed (supported) at the distal end portions of the fixing portions 808 and 809 and the leg portion 807.

  The vibrator 800 is rotated by a predetermined angle (0 to 15 °) with respect to the electrical axis, mechanical axis, and optical axis of the crystal, and is a quartz plate having a thickness of 0.10 mm whose normal is the direction rotated by the predetermined angle from the optical axis. What is necessary is just to form by cutting out from. In the figure, X is an axis rotated by a predetermined angle from the electric axis, Y is an axis rotated by a predetermined angle from the mechanical axis, and Z is an axis rotated by a predetermined angle from the optical axis. For example, the vibrator 800 is formed to have a thickness of about 0.10 mm, the leg portions 802 and 803 are formed to have a length of about 1.45 mm and a width of about 0.08 mm, and the leg portion 804 has a length of 1.5 mm, The base portion 801 is formed with a length of about 0.4 mm and a width of about 0.7 mm, and the leg portion 805.806 is formed with a length of about 1.45 mm and a width of about 0.10 mm. The part 807 is formed with a length of about 1.5 mm and a width of about 0.10 mm. Therefore, the length from the tip of the leg 804 to the tip of the leg 807 is about 3.4 mm.

  The central axis in the extending direction of the leg portion 802 and the central axis in the extending direction of the leg portion 805 are coincident, the central axis in the extending direction of the leg portion 803 and the central axis in the extending direction of the leg portion 806 are coincident, The central axis in the extending direction of the leg portion 804 coincides with the central axis in the extending direction of the leg portion 807. Further, the leg portion 804 is disposed at the center portion between the leg portion 802 and the leg portion 803, and the leg portion 807 is disposed at the center portion between the leg portion 805 and the leg portion 806. Therefore, the vibrator 800 is line symmetric with respect to the central axis passing through the leg 804 and the leg 807, and is line symmetric with respect to a line passing through the central portion of the base 801 perpendicular to the central axis passing through the leg 804 and the leg 807. is there.

  In each leg portion configured as described above, in the angular velocity sensor shown in FIG. 8, first, the leg portion 802 is provided with Y-axis excitation electrodes 821, 822, 823, and 824, and the leg portion 803 is also provided with the Y-axis. Excitation electrodes 831, 832, 833, and 834 are provided. On the other hand, the leg portion 804 is provided with Y-axis detection electrodes 841, 842, 843, and 844. The leg portion 805 is provided with Z-axis excitation electrodes 851, 852, 853, and 854, and the leg portion 806 is also provided with Z-axis excitation electrodes 861, 862, 863, and 864. On the other hand, the leg portion 807 is provided with Z-axis detection electrodes 871, 872, 873, and 874 in a half region on the distal end side.

  In the angular velocity sensor shown in FIG. 8, an excitation signal is applied to the leg portion 802 by the Y-axis excitation electrodes 821, 822, 823, and 824, and the leg portion 803 by the Y-axis excitation electrodes 831, 832, 833, and 834. An excitation signal is applied, and the leg portion 802 and the leg portion 803 are excited. In this state, if an electrical signal detected by the Y-axis detection electrodes 841, 842, 843, 844 is detected as an angular velocity signal, the magnitude of the angular velocity of the rotational motion with the Y axis as the rotational axis can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  Further, an excitation signal is applied to the leg portion 805 by the Z-axis excitation electrodes 851, 852, 853, and 854, an excitation signal is applied to the leg portion 806 by the Z-axis excitation electrodes 861, 862, 863, and 864, Assume that the leg 805 and the leg 806 are excited. In this state, if an electrical signal detected by the Z-axis detection electrodes 871, 872, 873, 874 is detected as an angular velocity signal, the magnitude of the angular velocity of the rotational motion with the Z axis as the rotation axis can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal. As described above, according to the angular velocity sensor shown in FIG. 8, the angular velocity in the two-axis directions of the Y axis and the Z axis can be detected.

  Also in the angular velocity sensor shown in FIG. 8, the dimensions of the leg portions 802 and 803 and the leg portions 805 and 806 are different from each other as in the case of the vibrator 100 described above. Therefore, also in the angular velocity sensor shown in FIG. 8, by causing excitation signals having different frequencies to be applied to the leg portions to be excited by different excitation electrodes corresponding to different axial directions, Each vibration that occurs can be detected in a more accurately distinguished state.

  Next, another embodiment of the present invention will be described. FIG. 9 is a perspective view (a) and a sectional view (b) showing another configuration example of the angular velocity sensor in the embodiment of the present invention. The angular velocity sensor shown in FIG. 9 includes the same vibrator 800 as the angular velocity sensor shown in FIG. 8, and is fixed at the distal ends of the fixing portions 808 and 809 and the leg portion 807.

  In each leg portion configured in this manner, in the angular velocity sensor shown in FIG. 9, first, the leg portion 802 is provided with X-axis excitation electrodes 921, 922, and the leg portion 803 is also provided with the X-axis excitation electrode 931, 932 is provided. On the other hand, the leg portion 804 is provided with X-axis detection electrodes 941, 942, 943, 944. The leg portion 805 is provided with Z-axis excitation electrodes 851, 852, 853, and 854, and the leg portion 806 is also provided with Z-axis excitation electrodes 861, 862, 863, and 864. On the other hand, the leg portion 807 is provided with Z-axis detection electrodes 871, 872, 873, and 874 in a half region on the distal end side.

  In the angular velocity sensor shown in FIG. 9, an excitation signal is applied to the leg 802 by the X-axis excitation electrodes 921, 922, and an excitation signal is applied to the leg 803 by the X-axis excitation electrodes 931, 932. 802 and the leg 803 are excited (stretching vibration). In this state, if an electrical signal detected by the X-axis detection electrodes 941, 942, 943, 944 is detected as an angular velocity signal, the magnitude of the angular velocity of the rotational motion with the X axis as the rotation axis can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  Further, an excitation signal is applied to the leg portion 805 by the Z-axis excitation electrodes 851, 852, 853, and 854, an excitation signal is applied to the leg portion 806 by the Z-axis excitation electrodes 861, 862, 863, and 864, Assume that the leg 805 and the leg 806 are excited (bending vibration). In this state, if an electrical signal detected by the Z-axis detection electrodes 871, 872, 873, 874 is detected as an angular velocity signal, the magnitude of the angular velocity of the rotational motion with the Z axis as the rotation axis can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal. As described above, according to the angular velocity sensor shown in FIG. 9, the angular velocity in the two-axis directions of the X axis and the Z axis can be detected.

  Next, another embodiment of the present invention will be described. FIG. 10 is a perspective view (a) and a sectional view (b) showing another configuration example of the angular velocity sensor according to the embodiment of the present invention. The angular velocity sensor shown in FIG. 10 includes the same vibrator 800 as the angular velocity sensor shown in FIG. 8, and is fixed at the distal ends of the fixing portions 808 and 809 and the leg portion 807.

  In each leg portion configured in this manner, in the angular velocity sensor shown in FIG. 10, first, the leg portion 802 is provided with Y-axis excitation electrodes 821, 822, 823, and 824, and the leg portion 803 is also provided with the Y-axis. Excitation electrodes 831, 832, 833, and 834 are provided. On the other hand, the leg portion 804 is provided with Y-axis detection electrodes 841, 842, 843, and 844. The leg portion 805 is provided with X-axis excitation electrodes 951 and 952, and the leg portion 806 is also provided with X-axis excitation electrodes 961 and 962. On the other hand, the leg portion 807 is provided with X-axis detection electrodes 971, 972, 973, and 974 in a half region on the distal end side.

  In the angular velocity sensor shown in FIG. 10, an excitation signal is applied to the leg portion 802 by the Y-axis excitation electrodes 821, 822, 823, and 824, and the leg portion 803 by the Y-axis excitation electrodes 831, 832, 833, and 834. An excitation signal is applied so that the leg 802 and the leg 803 are excited (flexed vibration). In this state, if an electrical signal detected by the Y-axis detection electrodes 841, 842, 843, 844 is detected as an angular velocity signal, the magnitude of the angular velocity of the rotational motion with the Y axis as the rotational axis can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  Further, an excitation signal is applied to the leg 805 by the X-axis excitation electrodes 951 and 952, and an excitation signal is applied to the leg 806 by the X-axis excitation electrodes 961 and 962, so that the leg 805 and the leg 806 It is in a state of being excited (stretching vibration). In this state, if an electrical signal detected by the X axis detection electrodes 971, 972, 973, 974 is detected as an angular velocity signal, the magnitude of the angular velocity of the rotational motion with the X axis as the rotation axis can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal. As described above, according to the angular velocity sensor shown in FIG. 10, it is possible to detect the angular velocity in the two-axis directions of the X axis and the Y axis.

  Next, another embodiment of the present invention will be described. FIG. 11 is a perspective view (a) and a sectional view (b) showing another configuration example of the angular velocity sensor according to the embodiment of the present invention. The angular velocity sensor shown in FIG. 11 includes the same vibrator 800 as the angular velocity sensor shown in FIG. 8 and is fixed at the distal ends of the fixing portions 808 and 809 and the leg portion 807.

  In each leg portion configured as described above, in the angular velocity sensor shown in FIG. 11, first, the leg portion 802 is provided with Y-axis excitation electrodes 821, 822, 823, and 824, and the leg portion 803 is also provided with the Y-axis. Excitation electrodes 831, 832, 833, and 834 are provided. On the other hand, the leg portion 804 is provided with Y-axis detection electrodes 841, 842, 843, and 844. Further, the leg portion 805 is provided with Z-axis excitation electrodes 851 ′, 852 ′, 853 ′, and 854 ′ in the half region on the base 801 side, and the X-axis excitation electrodes 951 ′, 854 ′ in the half region on the distal end side. 952 'is provided. The leg 806 is also provided with Z-axis excitation electrodes 861 ′, 862 ′, 863 ′, and 864 ′ in a half region on the base 801 side, and X-axis excitation electrodes 961 ′ and 962 ′ in a half region on the tip side. Is provided. On the other hand, the leg portion 807 is provided with Z-axis detection electrodes 871 ′, 872 ′, 873 ′, and 874 ′ in the half area on the base 801 side, and the X-axis detection electrodes 971 ′, 971 ′, in the half area on the distal end side. 972 ′, 973 ′, and 974 ′ are provided.

  In the angular velocity sensor shown in FIG. 11, an excitation signal is applied to the leg portion 802 by the Y-axis excitation electrodes 821, 822, 823, and 824, and the leg portion 803 by the Y-axis excitation electrodes 831, 832, 833, and 834. An excitation signal is applied, and the leg portion 802 and the leg portion 803 are excited. In this state, if an electrical signal detected by the Y-axis detection electrodes 841, 842, 843, 844 is detected as an angular velocity signal, the magnitude of the angular velocity of the rotational motion with the Y axis as the rotational axis can be obtained. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  Further, an excitation signal is applied to the tip region of the leg 805 by the X-axis excitation electrodes 951 ′ and 952 ′, and an excitation signal is applied to the tip region of the leg 806 by the X-axis excitation electrodes 961 ′ and 962 ′. Is applied and the leg portions 805 and the distal end portions of the leg portions 806 are excited. In this state, if the electrical signals detected by the X axis detection electrodes 971 ′, 972 ′, 973 ′, and 974 ′ are detected as angular velocity signals, the magnitude of the angular velocity of the rotational motion with the X axis as the rotation axis can be obtained. Can do. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal.

  Further, an excitation signal is applied to the base 801 side of the leg 805 by the Z-axis excitation electrodes 851 ′, 852 ′, 853 ′, and 854 ′, and by the Z-axis excitation electrodes 861 ′, 862 ′, 863 ′, and 864 ′. An excitation signal is applied to the base 801 side of the leg 806, and the leg 805 and the base 801 side of the leg 806 are excited. In this state, if the electrical signals detected by the Z-axis detection electrodes 871 ′, 872 ′, 873 ′, and 874 ′ are detected as angular velocity signals, the magnitude of the angular velocity of the rotational motion with the Z axis as the rotation axis can be obtained. Can do. Further, the direction in which the angular velocity is generated can be detected by comparing the polarity of the detected charge with the phase of the excitation signal. As described above, according to the angular velocity sensor shown in FIG. 11, the angular velocities in the directions of the three axes of the X axis, the Y axis, and the Z axis can be detected.

It is the perspective view (a) and sectional drawing (b) which show the structural example of the angular velocity sensor in embodiment of this invention. It is a block diagram which shows the circuit example for each speed detection. It is the perspective view (a) and sectional drawing (b) which show the other structural example of the angular velocity sensor in embodiment of this invention. It is the perspective view (a) and sectional drawing (b) which show the other structural example of the angular velocity sensor in embodiment of this invention. It is the perspective view (a) and sectional drawing (b) which show the other structural example of the angular velocity sensor in embodiment of this invention. It is the perspective view (a) and sectional drawing (b) which show the other structural example of the angular velocity sensor in embodiment of this invention. It is the perspective view (a) and sectional drawing (b) which show the other structural example of the angular velocity sensor in embodiment of this invention. It is the perspective view (a) and sectional drawing (b) which show the other structural example of the angular velocity sensor in embodiment of this invention. It is the perspective view (a) and sectional drawing (b) which show the other structural example of the angular velocity sensor in embodiment of this invention. It is the perspective view (a) and sectional drawing (b) which show the other structural example of the angular velocity sensor in embodiment of this invention. It is the perspective view (a) and sectional drawing (b) which show the other structural example of the angular velocity sensor in embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Vibrator, 101 ... Base part, 102, 103, 104, 105 ... Leg part, 121, 122, 123, 124 ... Y-axis excitation electrode, 131, 132, 133, 134 ... Y-axis detection electrode, 141, 142, 143, 144 ... Z-axis excitation electrode, 151, 152, 163, 154 ... Z-axis excitation electrode, 161, 162, 163, 164 ... Z-axis detection electrode.

Claims (14)

A base, a prismatic first leg and a second leg arranged at a predetermined interval at one end of the base, and the other end of the base at a predetermined interval. A prismatic third leg and a fourth leg provided, and a prismatic fifth leg disposed at the other end of the base between the third leg and the fourth leg. And a vibrator formed integrally from a crystal in which these members exhibit piezoelectricity,
A first detection electrode provided on a side of the first leg and the second leg;
A second detection electrode provided on the third leg, the fourth leg, and the fifth leg side;
At least an excitation electrode provided on the vibrator,
The first to fifth legs are arranged in the same plane,
The angular velocity sensor, wherein the first leg and the second leg extend in a direction opposite to the third, fourth, and fifth legs. The angular velocity sensor according to claim 1.
A first excitation electrode provided on the first leg,
The first vibration caused by the rotation of the vibrator about the Y axis in the direction in which the leg extends in a state where the bending vibration is driven by the first excitation electrode provided on the second leg. A first detection electrode for detection;
A second excitation electrode provided on each of the third leg and the fourth leg;
By rotation of the vibrator about the Z axis in the normal direction of the plane on which the leg portion is disposed in a state in which bending vibration is driven by the second excitation electrode provided on the fifth leg portion A second detection electrode for detecting the second vibration that occurs,
The angular velocity sensor, wherein the vibrator is supported by the base. The angular velocity sensor according to claim 1.
A first excitation electrode provided on each of the first leg and the second leg on the tip side opposite to the base;
Centered on the Y axis in the direction in which the leg extends in a state where the first leg and the second leg are respectively provided on the base side and the bending vibration is driven by the first excitation electrode. A first detection electrode for detecting a first vibration caused by rotation of the vibrator;
A second excitation electrode provided on each of the third leg and the fourth leg;
The vibrator centered on the Z axis in the normal direction of the plane on which the base and the leg are disposed in a state in which bending vibration is driven by the second excitation electrode provided on the fifth leg A second detection electrode for detecting a second vibration caused by the rotation of
The angular velocity sensor, wherein the vibrator is supported by the base. The angular velocity sensor according to claim 1.
A first excitation electrode provided on the first leg,
The first vibration caused by the rotation of the vibrator about the Y axis in the direction in which the leg extends in a state where the bending vibration is driven by the first excitation electrode provided on the second leg. A first detection electrode for detection;
A second excitation electrode provided on each of the third leg and the fourth leg;
A normal direction of a plane in which the base and the leg are disposed in a state in which bending vibration is driven by the second excitation electrode, provided on the tip side opposite to the base of the fifth leg A second detection electrode for detecting second vibration caused by rotation of the vibrator about the Z axis of
The angular velocity sensor, wherein the vibrator is supported by a tip portion of the fifth leg portion. The angular velocity sensor according to claim 1.
A first excitation electrode provided on each of the first leg and the second leg on the tip side opposite to the base;
Centered on the Y axis in the direction in which the leg extends in a state where the first leg and the second leg are respectively provided on the base side and the bending vibration is driven by the first excitation electrode. A first detection electrode for detecting a first vibration caused by rotation of the vibrator;
A second excitation electrode provided on each of the third leg and the fourth leg;
A normal direction of a plane in which the base and the leg are disposed in a state in which bending vibration is driven by the second excitation electrode, provided on the tip side opposite to the base of the fifth leg A second detection electrode for detecting second vibration caused by rotation of the vibrator about the Z axis of
The angular velocity sensor, wherein the vibrator is supported by a tip portion of the fifth leg portion. The angular velocity sensor according to claim 1.
The vibrator includes an angular columnar sixth leg disposed at one end of the base between the first leg and the second leg. The angular velocity sensor. The angular velocity sensor according to claim 6.
A common excitation electrode provided on each of the first leg and the second leg;
Rotating the vibrator around the Y-axis in the direction in which the leg extends in a state where bending vibration is driven by the common excitation electrode, provided on the third leg and the fourth leg, respectively. A first detection electrode for detecting the first vibration that occurs;
The base and the leg are disposed in a state where the fifth leg and the sixth leg are respectively provided on the tip side opposite to the base, and bending vibration is driven by the common excitation electrode. A second detection electrode for detecting a second vibration caused by the rotation of the vibrator about the Z axis in the normal direction of the plane,
The vibrator is supported by a tip portion of the fifth leg portion and a tip portion of the sixth leg portion. The angular velocity sensor according to claim 6.
A first excitation electrode provided on each of the first leg and the second leg;
The third leg and the fourth leg are provided on the base side, respectively, and the Y axis in the direction in which the leg extends in the state where the bending vibration is driven by the first excitation electrode is used. A first detection electrode for detecting a first vibration caused by rotation of the vibrator;
A normal direction of a plane in which the base and the leg are disposed in a state in which bending vibration is driven by the first excitation electrode, provided on the base side of the fifth leg and the sixth leg, respectively. A second detection electrode for detecting a second vibration caused by rotation of the vibrator about the Z axis of
A second excitation electrode provided on a tip side opposite to the base of the third leg and the fourth leg,
The fifth leg portion and the sixth leg portion are provided on the tip side opposite to the base portion, and are perpendicular to the Y-axis and the Z-axis in a state in which expansion and contraction vibration is driven by the second excitation electrode. A third detection electrode for detecting a third vibration caused by the rotation of the vibrator about the X axis,
The vibrator is supported by a tip portion of the fifth leg portion and a tip portion of the sixth leg portion. The angular velocity sensor according to claim 6.
A first excitation electrode provided on each of the first leg and the second leg;
A first vibration generated by rotation of the vibrator about the Y axis in a direction in which the leg extends in a state where the bending vibration is driven by the first excitation electrode provided on the sixth leg; A first detection electrode for detection;
A second excitation electrode provided on each of the third leg and the fourth leg;
A normal direction of a plane in which the base and the leg are disposed in a state in which bending vibration is driven by the second excitation electrode, provided on the tip side opposite to the base of the fifth leg A second detection electrode for detecting second vibration caused by rotation of the vibrator about the Z axis of
The angular velocity sensor, wherein the vibrator is supported by a distal end portion of the fifth leg portion and both end portions of the base portion in a direction perpendicular to the Y axis and the Z axis. The angular velocity sensor according to claim 6.
A first excitation electrode provided on each of the first leg and the second leg;
A first detection electrode provided on the sixth leg for detecting first vibration caused by rotation of the vibrator about the X axis in a state in which expansion and contraction vibration is driven by the first excitation electrode; ,
A second excitation electrode provided on each of the third leg and the fourth leg;
A normal direction of a plane in which the base and the leg are disposed in a state in which bending vibration is driven by the second excitation electrode, provided on the tip side opposite to the base of the fifth leg A second detection electrode for detecting second vibration caused by rotation of the vibrator about the Z axis of
The X-axis is an axis perpendicular to the Y-axis and the Z-axis in the direction in which the leg portion extends,
The vibrator is supported by a distal end portion of the fifth leg portion and both end portions of the base portion in the X-axis direction. The angular velocity sensor according to claim 6.
A first excitation electrode provided on each of the first leg and the second leg;
A first vibration generated by rotation of the vibrator about the Y axis in a direction in which the leg extends in a state where the bending vibration is driven by the first excitation electrode provided on the sixth leg; A first detection electrode for detection;
A second excitation electrode provided on each of the third leg and the fourth leg;
A second detection electrode provided on the fifth leg for detecting a second vibration caused by the rotation of the vibrator about the X axis in a state where the stretching vibration by the second excitation electrode is driven; With
The X-axis is an axis perpendicular to the Y-axis and the Z-axis in the normal direction of the plane on which the base and the leg are disposed,
The vibrator is supported by a distal end portion of the fifth leg portion and both end portions of the base portion in the X-axis direction. The angular velocity sensor according to claim 6.
A first excitation electrode provided on each of the first leg and the second leg;
A first vibration generated by rotation of the vibrator about the Y axis in a direction in which the leg extends in a state where the bending vibration is driven by the first excitation electrode provided on the sixth leg; A first detection electrode for detection;
A second excitation electrode provided on the base side of each of the third leg and the fourth leg;
Centered on the Z-axis in the normal direction of the plane on which the base and the leg are disposed in a state in which bending vibration is driven by the second excitation electrode, provided on the base side of the fifth leg. A second detection electrode for detecting a second vibration caused by the rotation of the vibrator,
A third excitation electrode provided on each side of the third leg and the fourth leg opposite to the base;
The fifth leg portion is provided on the tip side opposite to the base portion, and is centered on the X-axis perpendicular to the Y-axis and the Z-axis in a state in which expansion and contraction vibration is driven by the third excitation electrode. A third detection electrode for detecting a third vibration caused by the rotation of the vibrator,
The vibrator is supported by a distal end portion of the fifth leg portion and both end portions of the base portion in the X-axis direction. The angular velocity sensor according to any one of claims 9 to 12,
A fixing portion provided at each end of the base in the X-axis direction;
The vibrator is supported by a tip end portion of the fifth leg portion and two fixing portions. The angular velocity sensor according to any one of claims 1 to 13,
An angular velocity sensor, wherein excitation signals having different frequencies are applied by the different excitation electrodes.

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