DE68929489T2 - Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen - Google Patents

Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen Download PDF

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Publication number
DE68929489T2
DE68929489T2 DE1989629489 DE68929489T DE68929489T2 DE 68929489 T2 DE68929489 T2 DE 68929489T2 DE 1989629489 DE1989629489 DE 1989629489 DE 68929489 T DE68929489 T DE 68929489T DE 68929489 T2 DE68929489 T2 DE 68929489T2
Authority
DE
Germany
Prior art keywords
plate
ink
ejection
holes
recording head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1989629489
Other languages
German (de)
English (en)
Other versions
DE68929489D1 (de
Inventor
Kazuaki Ohta-ku Masuda
Nobuyuki Ohta-ku Kuwabara
Takashi Yokohama-shi Watanabe
Akira Goto
Hiroshi Yokohama-shi Kono
Toshio Chigasaki-shi Kashino
Akio Saito
Koyo Midorikawa
Toru Yokohama-shi Okumura
Masami Ikeda
Takashi Yokohama-shi Kanzaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP27579488A external-priority patent/JPH02121843A/ja
Priority claimed from JP63275800A external-priority patent/JP2771557B2/ja
Priority claimed from JP27579788A external-priority patent/JPH02121842A/ja
Priority claimed from JP1007403A external-priority patent/JP2763563B2/ja
Priority claimed from JP1007470A external-priority patent/JP2831368B2/ja
Priority claimed from JP741089A external-priority patent/JP2633943B2/ja
Priority claimed from JP740989A external-priority patent/JPH02187345A/ja
Priority claimed from JP918489A external-priority patent/JPH02188257A/ja
Priority claimed from JP918189A external-priority patent/JPH02188255A/ja
Priority claimed from JP1018079A external-priority patent/JP2764418B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE68929489D1 publication Critical patent/DE68929489D1/de
Application granted granted Critical
Publication of DE68929489T2 publication Critical patent/DE68929489T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/162Manufacturing of the nozzle plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14024Assembling head parts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/1433Structure of nozzle plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1604Production of bubble jet print heads of the edge shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1606Coating the nozzle area or the ink chamber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • B41J2/1634Manufacturing processes machining laser machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14379Edge shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE1989629489 1988-10-31 1989-10-30 Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen Expired - Lifetime DE68929489T2 (de)

Applications Claiming Priority (20)

Application Number Priority Date Filing Date Title
JP27579488 1988-10-31
JP27580088 1988-10-31
JP27579488A JPH02121843A (ja) 1988-10-31 1988-10-31 液体噴射記録ヘッドおよび該ヘッドの製造方法
JP27579788A JPH02121842A (ja) 1988-10-31 1988-10-31 インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法
JP63275800A JP2771557B2 (ja) 1988-10-31 1988-10-31 インクジェット記録ヘッドの製造方法
JP27579788 1988-10-31
JP1007470A JP2831368B2 (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッド用吐出口形成部材の製造方法
JP747089 1989-01-13
JP740989 1989-01-13
JP740389 1989-01-13
JP1007403A JP2763563B2 (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッドの製造方法
JP741089 1989-01-13
JP741089A JP2633943B2 (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッドおよび該ヘッドの製造方法
JP740989A JPH02187345A (ja) 1989-01-13 1989-01-13 インクジェット記録ヘッドおよび該ヘッドの製造方法
JP918489 1989-01-18
JP918489A JPH02188257A (ja) 1989-01-18 1989-01-18 インクジェットヘッドの製造方法
JP918189 1989-01-18
JP918189A JPH02188255A (ja) 1989-01-18 1989-01-18 吐出口板の製造方法
JP1807989 1989-01-28
JP1018079A JP2764418B2 (ja) 1989-01-28 1989-01-28 インクジェット記録ヘッドの製造方法および該方法によって製造されたインクジェット記録ヘッド

Publications (2)

Publication Number Publication Date
DE68929489D1 DE68929489D1 (de) 2003-11-13
DE68929489T2 true DE68929489T2 (de) 2004-08-19

Family

ID=27579561

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1989629489 Expired - Lifetime DE68929489T2 (de) 1988-10-31 1989-10-30 Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen
DE1989618663 Expired - Fee Related DE68918663T2 (de) 1988-10-31 1989-10-30 Verfahren zur Herstellung eines Tintenstrahldruckkopfes.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1989618663 Expired - Fee Related DE68918663T2 (de) 1988-10-31 1989-10-30 Verfahren zur Herstellung eines Tintenstrahldruckkopfes.

Country Status (3)

Country Link
EP (3) EP0937579B1 (cg-RX-API-DMAC7.html)
DE (2) DE68929489T2 (cg-RX-API-DMAC7.html)
ES (2) ES2060789T3 (cg-RX-API-DMAC7.html)

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GB9010289D0 (en) * 1990-05-08 1990-06-27 Xaar Ltd Drop-on-demand printing apparatus and method of manufacture
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JP3179834B2 (ja) * 1991-07-19 2001-06-25 株式会社リコー 液体飛翔記録装置
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US5278584A (en) * 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
US5703631A (en) * 1992-05-05 1997-12-30 Compaq Computer Corporation Method of forming an orifice array for a high density ink jet printhead
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US5350616A (en) * 1993-06-16 1994-09-27 Hewlett-Packard Company Composite orifice plate for ink jet printer and method for the manufacture thereof
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US6561623B1 (en) * 1995-08-31 2003-05-13 Canon Kabushiki Kaisha Method for producing ink jet recording head and ink jet recording head produced by same
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US6259463B1 (en) 1997-10-30 2001-07-10 Hewlett-Packard Company Multi-drop merge on media printing system
US6193347B1 (en) 1997-02-06 2001-02-27 Hewlett-Packard Company Hybrid multi-drop/multi-pass printing system
US6234613B1 (en) 1997-10-30 2001-05-22 Hewlett-Packard Company Apparatus for generating small volume, high velocity ink droplets in an inkjet printer
US6193345B1 (en) 1997-10-30 2001-02-27 Hewlett-Packard Company Apparatus for generating high frequency ink ejection and ink chamber refill
US6361145B1 (en) * 1998-01-27 2002-03-26 Canon Kabushiki Kaisha Ink jet recording head, method of producing same, and ink jet recording apparatus
US6416155B1 (en) 1998-10-27 2002-07-09 Canon Kabushiki Kaisha Ink jet recording head, ink jet recording cartridge, and recording apparatus
US6261742B1 (en) 1999-02-01 2001-07-17 Hewlett-Packard Company Method for manufacturing a printhead with re-entrant nozzles
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US6747244B1 (en) 1999-11-30 2004-06-08 Canon Kabushiki Kaisha Laser working apparatus, laser working method, method for producing ink jet recording head utilizing such laser working apparatus or method, and ink jet recording head formed by such producing method
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JP5404331B2 (ja) * 2008-12-17 2014-01-29 キヤノン株式会社 インクジェット記録ヘッド、記録素子基板、インクジェット記録ヘッドの製造方法、および記録素子基板の製造方法

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Also Published As

Publication number Publication date
EP0937579A3 (en) 1999-11-03
ES2060789T3 (es) 1994-12-01
EP0937579A2 (en) 1999-08-25
EP0367541A2 (en) 1990-05-09
DE68929489D1 (de) 2003-11-13
EP0367541B1 (en) 1994-10-05
EP0367541A3 (en) 1990-11-14
DE68918663D1 (de) 1994-11-10
ES2207908T3 (es) 2004-06-01
EP0937579B1 (en) 2003-10-08
DE68918663T2 (de) 1995-03-16
EP0602021A2 (en) 1994-06-15
EP0602021A3 (cg-RX-API-DMAC7.html) 1994-08-31

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