DE69202385T2 - Tintenstrahldruckkopf mit zwei photogemusterten, gehärteten Sperrschichten. - Google Patents

Tintenstrahldruckkopf mit zwei photogemusterten, gehärteten Sperrschichten.

Info

Publication number
DE69202385T2
DE69202385T2 DE69202385T DE69202385T DE69202385T2 DE 69202385 T2 DE69202385 T2 DE 69202385T2 DE 69202385 T DE69202385 T DE 69202385T DE 69202385 T DE69202385 T DE 69202385T DE 69202385 T2 DE69202385 T2 DE 69202385T2
Authority
DE
Germany
Prior art keywords
patterned
photo
barrier layers
inkjet printhead
hardened barrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69202385T
Other languages
English (en)
Other versions
DE69202385D1 (de
Inventor
Winthrop D Childers
Hai Quang Tran
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of DE69202385D1 publication Critical patent/DE69202385D1/de
Application granted granted Critical
Publication of DE69202385T2 publication Critical patent/DE69202385T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
DE69202385T 1991-04-02 1992-03-13 Tintenstrahldruckkopf mit zwei photogemusterten, gehärteten Sperrschichten. Expired - Lifetime DE69202385T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/679,378 US5198834A (en) 1991-04-02 1991-04-02 Ink jet print head having two cured photoimaged barrier layers

Publications (2)

Publication Number Publication Date
DE69202385D1 DE69202385D1 (de) 1995-06-14
DE69202385T2 true DE69202385T2 (de) 1995-10-12

Family

ID=24726687

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69202385T Expired - Lifetime DE69202385T2 (de) 1991-04-02 1992-03-13 Tintenstrahldruckkopf mit zwei photogemusterten, gehärteten Sperrschichten.

Country Status (3)

Country Link
US (1) US5198834A (de)
EP (1) EP0507134B1 (de)
DE (1) DE69202385T2 (de)

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US5568171A (en) * 1992-04-02 1996-10-22 Hewlett-Packard Company Compact inkjet substrate with a minimal number of circuit interconnects located at the end thereof
US5563642A (en) * 1992-04-02 1996-10-08 Hewlett-Packard Company Inkjet printhead architecture for high speed ink firing chamber refill
US5278584A (en) * 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
US5604519A (en) * 1992-04-02 1997-02-18 Hewlett-Packard Company Inkjet printhead architecture for high frequency operation
US5648806A (en) * 1992-04-02 1997-07-15 Hewlett-Packard Company Stable substrate structure for a wide swath nozzle array in a high resolution inkjet printer
US5594481A (en) * 1992-04-02 1997-01-14 Hewlett-Packard Company Ink channel structure for inkjet printhead
US5638101A (en) * 1992-04-02 1997-06-10 Hewlett-Packard Company High density nozzle array for inkjet printhead
US5648804A (en) * 1992-04-02 1997-07-15 Hewlett-Packard Company Compact inkjet substrate with centrally located circuitry and edge feed ink channels
US5648805A (en) * 1992-04-02 1997-07-15 Hewlett-Packard Company Inkjet printhead architecture for high speed and high resolution printing
US5387314A (en) * 1993-01-25 1995-02-07 Hewlett-Packard Company Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining
US5635966A (en) * 1994-01-11 1997-06-03 Hewlett-Packard Company Edge feed ink delivery thermal inkjet printhead structure and method of fabrication
US5808640A (en) * 1994-04-19 1998-09-15 Hewlett-Packard Company Special geometry ink jet resistor for high dpi/high frequency structures
EP0698490B1 (de) * 1994-08-25 1999-06-16 Seiko Epson Corporation Flüssigkeitsstrahlkopf
US5602574A (en) * 1994-08-31 1997-02-11 Hewlett-Packard Company Matrix pen arrangement for inkjet printing
US5896153A (en) * 1994-10-04 1999-04-20 Hewlett-Packard Company Leak resistant two-material frame for ink-jet print cartridge
US5751323A (en) * 1994-10-04 1998-05-12 Hewlett-Packard Company Adhesiveless printhead attachment for ink-jet pen
US5686949A (en) * 1994-10-04 1997-11-11 Hewlett-Packard Company Compliant headland design for thermal ink-jet pen
US5637166A (en) * 1994-10-04 1997-06-10 Hewlett-Packard Company Similar material thermal tab attachment process for ink-jet pen
US5538586A (en) * 1994-10-04 1996-07-23 Hewlett-Packard Company Adhesiveless encapsulation of tab circuit traces for ink-jet pen
JP2727982B2 (ja) * 1994-10-28 1998-03-18 日本電気株式会社 インクジェット式プリントヘッド
US5736998A (en) * 1995-03-06 1998-04-07 Hewlett-Packard Company Inkjet cartridge design for facilitating the adhesive sealing of a printhead to an ink reservoir
US5852460A (en) * 1995-03-06 1998-12-22 Hewlett-Packard Company Inkjet print cartridge design to decrease deformation of the printhead when adhesively sealing the printhead to the print cartridge
JPH08267758A (ja) * 1995-03-28 1996-10-15 Sony Corp オリフィスプレート、オリフィスプレートの製造方法、液体混合装置およびプリンタ装置
US6305790B1 (en) 1996-02-07 2001-10-23 Hewlett-Packard Company Fully integrated thermal inkjet printhead having multiple ink feed holes per nozzle
US6162589A (en) * 1998-03-02 2000-12-19 Hewlett-Packard Company Direct imaging polymer fluid jet orifice
US6336714B1 (en) 1996-02-07 2002-01-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having thin film layer shelf
US6543884B1 (en) 1996-02-07 2003-04-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having etched back PSG layer
US5940096A (en) * 1996-06-03 1999-08-17 Lexmark International, Inc. Ink jet printhead assembly with non-emitting orifices
US5847737A (en) * 1996-06-18 1998-12-08 Kaufman; Micah Abraham Filter for ink jet printhead
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
KR100209515B1 (ko) * 1997-02-05 1999-07-15 윤종용 자성잉크를 이용한 잉크젯 프린터의 분사 장치 및 방법
US6259463B1 (en) 1997-10-30 2001-07-10 Hewlett-Packard Company Multi-drop merge on media printing system
US6158843A (en) * 1997-03-28 2000-12-12 Lexmark International, Inc. Ink jet printer nozzle plates with ink filtering projections
US6120135A (en) * 1997-07-03 2000-09-19 Lexmark International, Inc. Printhead having heating element conductors arranged in spaced apart planes and including heating elements having a substantially constant cross-sectional area in the direction of current flow
US6045215A (en) * 1997-08-28 2000-04-04 Hewlett-Packard Company High durability ink cartridge printhead and method for making the same
US6155676A (en) * 1997-10-16 2000-12-05 Hewlett-Packard Company High-durability rhodium-containing ink cartridge printhead and method for making the same
US6193345B1 (en) 1997-10-30 2001-02-27 Hewlett-Packard Company Apparatus for generating high frequency ink ejection and ink chamber refill
US6234613B1 (en) 1997-10-30 2001-05-22 Hewlett-Packard Company Apparatus for generating small volume, high velocity ink droplets in an inkjet printer
US6179413B1 (en) 1997-10-31 2001-01-30 Hewlett-Packard Company High durability polymide-containing printhead system and method for making the same
US6010208A (en) * 1998-01-08 2000-01-04 Lexmark International Inc. Nozzle array for printhead
US6079819A (en) * 1998-01-08 2000-06-27 Xerox Corporation Ink jet printhead having a low cross talk ink channel structure
US6183069B1 (en) 1998-01-08 2001-02-06 Xerox Corporation Ink jet printhead having a patternable ink channel structure
US6126277A (en) * 1998-04-29 2000-10-03 Hewlett-Packard Company Non-kogating, low turn on energy thin film structure for very low drop volume thermal ink jet pens
US6161923A (en) * 1998-07-22 2000-12-19 Hewlett-Packard Company Fine detail photoresist barrier
RU2143343C1 (ru) 1998-11-03 1999-12-27 Самсунг Электроникс Ко., Лтд. Микроинжектор и способ изготовления микроинжектора
KR100536088B1 (ko) * 1999-04-23 2005-12-12 제일모직주식회사 폴리이미드와 금속의 다층박막으로 이루어진 잉크젯 프린터 헤드의 멤브레인
US6331055B1 (en) 1999-08-30 2001-12-18 Hewlett-Packard Company Inkjet printhead with top plate bubble management
US6283584B1 (en) 2000-04-18 2001-09-04 Lexmark International, Inc. Ink jet flow distribution system for ink jet printer
US6520627B2 (en) 2000-06-26 2003-02-18 Hewlett-Packard Company Direct imaging polymer fluid jet orifice
SG126682A1 (en) * 2000-08-09 2006-11-29 Sony Corp Print head, manufacturing method therefor, and printer
US6666947B2 (en) * 2001-01-31 2003-12-23 Hewlett-Packard Development Company, L.P. Method for producing an inkjet printhead element; and an inkjet printhead element
TW526142B (en) * 2001-08-28 2003-04-01 Nanodynamics Inc Ink supply structure of ink-jet print head
US6951622B2 (en) * 2002-08-08 2005-10-04 Industrial Technology Research Institute Method for fabricating an integrated nozzle plate and multi-level micro-fluidic devices fabricated
US6709805B1 (en) 2003-04-24 2004-03-23 Lexmark International, Inc. Inkjet printhead nozzle plate
US7255425B2 (en) * 2004-12-02 2007-08-14 Taiwan Semiconductor Manufacturing Co., Ltd. Ink-channel wafer integrated with CMOS wafer for inkjet printhead and fabrication method thereof
US7364268B2 (en) * 2005-09-30 2008-04-29 Lexmark International, Inc. Nozzle members, compositions and methods for micro-fluid ejection heads
EP2026973B1 (de) * 2006-04-28 2011-04-06 Telecom Italia S.p.A. Tintenstrahldruckkopfplatte und herstellungsverfahren dafür
EP2869994B1 (de) * 2012-09-19 2019-11-13 Hewlett-Packard Development Company, L.P. Flüssigkeitsausstossanordnung mit kontrollierter klebeverbindung

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US4417251A (en) * 1980-03-06 1983-11-22 Canon Kabushiki Kaisha Ink jet head
JPS57102366A (en) * 1980-12-18 1982-06-25 Canon Inc Ink jet head
US4394670A (en) * 1981-01-09 1983-07-19 Canon Kabushiki Kaisha Ink jet head and method for fabrication thereof
US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
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US4438191A (en) * 1982-11-23 1984-03-20 Hewlett-Packard Company Monolithic ink jet print head
US4535343A (en) * 1983-10-31 1985-08-13 Hewlett-Packard Company Thermal ink jet printhead with self-passivating elements
US4683481A (en) * 1985-12-06 1987-07-28 Hewlett-Packard Company Thermal ink jet common-slotted ink feed printhead
EP0244214B1 (de) * 1986-04-28 1991-07-10 Hewlett-Packard Company Thermischer Tintenstrahldruckkopf
US4882595A (en) * 1987-10-30 1989-11-21 Hewlett-Packard Company Hydraulically tuned channel architecture
EP0317171A3 (de) * 1987-11-13 1990-07-18 Hewlett-Packard Company Integrales Dünnschicht-Injektionssystem für einen thermischen Tintenspritzdruckkopf und Arbeitsmethoden
US4809428A (en) * 1987-12-10 1989-03-07 Hewlett-Packard Company Thin film device for an ink jet printhead and process for the manufacturing same
JPH0284343A (ja) * 1988-03-16 1990-03-26 Canon Inc 液体噴射記録ヘッド

Also Published As

Publication number Publication date
US5198834A (en) 1993-03-30
DE69202385D1 (de) 1995-06-14
EP0507134A3 (en) 1992-11-19
EP0507134A2 (de) 1992-10-07
EP0507134B1 (de) 1995-05-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD CO. (N.D.GES.D.STAATES DELAWARE),

8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE