DE68922117T2 - Halbleiterphotodiode. - Google Patents
Halbleiterphotodiode.Info
- Publication number
- DE68922117T2 DE68922117T2 DE68922117T DE68922117T DE68922117T2 DE 68922117 T2 DE68922117 T2 DE 68922117T2 DE 68922117 T DE68922117 T DE 68922117T DE 68922117 T DE68922117 T DE 68922117T DE 68922117 T2 DE68922117 T2 DE 68922117T2
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor photodiode
- photodiode
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0304—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L31/03042—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds characterised by the doping material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0304—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L31/03046—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes
- H01L31/1075—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes in which the active layers, e.g. absorption or multiplication layers, form an heterostructure, e.g. SAM structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63007702A JPH01183174A (ja) | 1988-01-18 | 1988-01-18 | 半導体受光素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68922117D1 DE68922117D1 (de) | 1995-05-18 |
DE68922117T2 true DE68922117T2 (de) | 1995-08-24 |
Family
ID=11673086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68922117T Expired - Fee Related DE68922117T2 (de) | 1988-01-18 | 1989-01-18 | Halbleiterphotodiode. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4984032A (de) |
EP (1) | EP0325532B1 (de) |
JP (1) | JPH01183174A (de) |
KR (1) | KR910009357B1 (de) |
DE (1) | DE68922117T2 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5179430A (en) * | 1988-05-24 | 1993-01-12 | Nec Corporation | Planar type heterojunction avalanche photodiode |
JPH01296676A (ja) * | 1988-05-24 | 1989-11-30 | Nec Corp | 半導体受光装置 |
US5138416A (en) * | 1991-07-12 | 1992-08-11 | Xerox Corporation | Multi-color photosensitive element with heterojunctions |
US5148251A (en) * | 1991-11-25 | 1992-09-15 | The United States Of America As Represented By The Secretary Of The Army | Photoconductive avalanche GaAs switch |
GB0030204D0 (en) | 2000-12-12 | 2001-01-24 | Secr Defence | Reduced noise semiconductor photodetector |
US6914314B2 (en) * | 2003-01-31 | 2005-07-05 | Foveon, Inc. | Vertical color filter sensor group including semiconductor other than crystalline silicon and method for fabricating same |
JP5015494B2 (ja) * | 2006-05-22 | 2012-08-29 | 住友電工デバイス・イノベーション株式会社 | 半導体受光素子 |
EP2073277A1 (de) * | 2007-12-19 | 2009-06-24 | Alcatel Lucent | Lawinenphotodiode |
FR3000610B1 (fr) | 2012-12-31 | 2015-03-06 | Commissariat Energie Atomique | Structure semiconductrice du type photodiode a avalanche a faible temps de reponse et procede de fabrication d'une telle photodiode |
FR3000608B1 (fr) * | 2012-12-31 | 2015-03-06 | Commissariat Energie Atomique | Structure semiconductrice du type photodiode a avalanche et procede de fabrication d'une telle structure |
FR3000609B1 (fr) | 2012-12-31 | 2015-01-30 | Commissariat Energie Atomique | Structure semiconductrice du type photodiode a avalanche a haut rapport signal sur bruit et procede de fabrication d'une telle photodiode |
US9893227B2 (en) * | 2013-05-24 | 2018-02-13 | The United States Of America As Represented By The Secretary Of The Army | Enhanced deep ultraviolet photodetector and method thereof |
FR3021807B1 (fr) | 2014-05-27 | 2017-09-29 | Commissariat A L Energie Atomique Et Aux Energies Alternatives | Matrice de photodiodes mesa a ftm amelioree |
US10381502B2 (en) * | 2015-09-09 | 2019-08-13 | Teledyne Scientific & Imaging, Llc | Multicolor imaging device using avalanche photodiode |
CN106887469B (zh) * | 2017-03-22 | 2019-05-07 | 武汉光谷量子技术有限公司 | 一种雪崩二极管的外延结构及雪崩二极管的制造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4110778A (en) * | 1977-06-21 | 1978-08-29 | The United States Of America As Represented By The Secretary Of The Air Force | Narrow-band inverted homo-heterojunction avalanche photodiode |
US4203124A (en) * | 1978-10-06 | 1980-05-13 | Bell Telephone Laboratories, Incorporated | Low noise multistage avalanche photodetector |
US4403397A (en) * | 1981-07-13 | 1983-09-13 | The United States Of America As Represented By The Secretary Of The Navy | Method of making avalanche photodiodes |
KR900000074B1 (ko) * | 1981-10-02 | 1990-01-19 | 미쓰다 가쓰시게 | 광 검출용 반도체장치 |
JPS60105281A (ja) * | 1983-11-11 | 1985-06-10 | Fujitsu Ltd | 半導体受光装置 |
CA1228662A (en) * | 1984-04-10 | 1987-10-27 | Paul P. Webb | Double mesa avalanche photodetector |
JPS611064A (ja) * | 1984-05-31 | 1986-01-07 | Fujitsu Ltd | 半導体受光装置 |
JPS62259481A (ja) * | 1986-04-15 | 1987-11-11 | Fujitsu Ltd | 半導体受光装置 |
-
1988
- 1988-01-18 JP JP63007702A patent/JPH01183174A/ja active Pending
-
1989
- 1989-01-07 KR KR1019890000138A patent/KR910009357B1/ko not_active IP Right Cessation
- 1989-01-17 US US07/297,391 patent/US4984032A/en not_active Expired - Fee Related
- 1989-01-18 EP EP89400148A patent/EP0325532B1/de not_active Expired - Lifetime
- 1989-01-18 DE DE68922117T patent/DE68922117T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US4984032A (en) | 1991-01-08 |
JPH01183174A (ja) | 1989-07-20 |
KR890012403A (ko) | 1989-08-26 |
EP0325532B1 (de) | 1995-04-12 |
KR910009357B1 (ko) | 1991-11-12 |
EP0325532A3 (en) | 1990-05-23 |
EP0325532A2 (de) | 1989-07-26 |
DE68922117D1 (de) | 1995-05-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8339 | Ceased/non-payment of the annual fee |