DE68916182T2 - Halbleitereinrichtung, z.B. Feldeffekttransistor, und Verfahren zur Herstellung derselben. - Google Patents

Halbleitereinrichtung, z.B. Feldeffekttransistor, und Verfahren zur Herstellung derselben.

Info

Publication number
DE68916182T2
DE68916182T2 DE68916182T DE68916182T DE68916182T2 DE 68916182 T2 DE68916182 T2 DE 68916182T2 DE 68916182 T DE68916182 T DE 68916182T DE 68916182 T DE68916182 T DE 68916182T DE 68916182 T2 DE68916182 T2 DE 68916182T2
Authority
DE
Germany
Prior art keywords
producing
semiconductor device
same
field effect
effect transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68916182T
Other languages
English (en)
Other versions
DE68916182D1 (de
Inventor
Masahiro C O Seiko Ep Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE68916182D1 publication Critical patent/DE68916182D1/de
Publication of DE68916182T2 publication Critical patent/DE68916182T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/107—Substrate region of field-effect devices
    • H01L29/1075—Substrate region of field-effect devices of field-effect transistors
    • H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
    • H01L29/1083—Substrate region of field-effect devices of field-effect transistors with insulated gate with an inactive supplementary region, e.g. for preventing punch-through, improving capacity effect or leakage current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
    • H01L29/7836—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with a significant overlap between the lightly doped extension and the gate electrode

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
DE68916182T 1988-08-18 1989-08-10 Halbleitereinrichtung, z.B. Feldeffekttransistor, und Verfahren zur Herstellung derselben. Expired - Lifetime DE68916182T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63205535A JPH0254537A (ja) 1988-08-18 1988-08-18 半導体装置及び半導体装置の製造方法

Publications (2)

Publication Number Publication Date
DE68916182D1 DE68916182D1 (de) 1994-07-21
DE68916182T2 true DE68916182T2 (de) 1994-09-22

Family

ID=16508499

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68916182T Expired - Lifetime DE68916182T2 (de) 1988-08-18 1989-08-10 Halbleitereinrichtung, z.B. Feldeffekttransistor, und Verfahren zur Herstellung derselben.

Country Status (5)

Country Link
US (1) US5060033A (de)
EP (1) EP0368444B1 (de)
JP (1) JPH0254537A (de)
KR (1) KR0149659B1 (de)
DE (1) DE68916182T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0774355A (ja) * 1993-08-31 1995-03-17 Nec Corp 半導体装置及びその製造方法
US5463237A (en) * 1993-11-04 1995-10-31 Victor Company Of Japan, Ltd. MOSFET device having depletion layer
US5538907A (en) * 1994-05-11 1996-07-23 Lsi Logic Corporation Method for forming a CMOS integrated circuit with electrostatic discharge protection
US5773863A (en) * 1994-08-18 1998-06-30 Sun Microsystems, Inc. Low power, high performance junction transistor
US5622880A (en) * 1994-08-18 1997-04-22 Sun Microsystems, Inc. Method of making a low power, high performance junction transistor
US5516711A (en) * 1994-12-16 1996-05-14 Mosel Vitelic, Inc. Method for forming LDD CMOS with oblique implantation
JPH0955496A (ja) * 1995-08-17 1997-02-25 Oki Electric Ind Co Ltd 高耐圧ｍｏｓトランジスタ及びその製造方法
US5827747A (en) * 1996-03-28 1998-10-27 Mosel Vitelic, Inc. Method for forming LDD CMOS using double spacers and large-tilt-angle ion implantation
US5686324A (en) * 1996-03-28 1997-11-11 Mosel Vitelic, Inc. Process for forming LDD CMOS using large-tilt-angle ion implantation
TW326110B (en) * 1996-12-24 1998-02-01 Nat Science Council Manufacturing method for inversed T-type well component
US7391087B2 (en) * 1999-12-30 2008-06-24 Intel Corporation MOS transistor structure and method of fabrication
KR20030013181A (ko) 2001-08-07 2003-02-14 삼성전자주식회사 취반기능을 갖는 전자렌지 및 그 제어방법
TW548850B (en) * 2002-05-29 2003-08-21 Toppoly Optoelectronics Corp Low-temperature polysilicon TFT of LDD structure and process for producing same
US20040121524A1 (en) * 2002-12-20 2004-06-24 Micron Technology, Inc. Apparatus and method for controlling diffusion
US7297617B2 (en) * 2003-04-22 2007-11-20 Micron Technology, Inc. Method for controlling diffusion in semiconductor regions

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3921283A (en) * 1971-06-08 1975-11-25 Philips Corp Semiconductor device and method of manufacturing the device
US4016594A (en) * 1971-06-08 1977-04-05 U.S. Philips Corporation Semiconductor device and method of manufacturing the device
JPS53127273A (en) * 1977-04-13 1978-11-07 Fujitsu Ltd Mis transistor and its manufacture
JPS5836510B2 (ja) * 1977-07-07 1983-08-09 株式会社東芝 光導電タ−ゲット
US4261761A (en) * 1979-09-04 1981-04-14 Tektronix, Inc. Method of manufacturing sub-micron channel width MOS transistor
JPS5687368A (en) * 1979-12-19 1981-07-15 Nec Corp Semiconductor device
JPS5950562A (ja) * 1982-09-17 1984-03-23 Toshiba Corp 半導体装置
US4579824A (en) * 1983-05-18 1986-04-01 Louderback Allan Lee Hematology control
JPS60180167A (ja) * 1984-02-27 1985-09-13 Oki Electric Ind Co Ltd 半導体装置の製造方法
JPS60235471A (ja) * 1984-05-08 1985-11-22 Matsushita Electric Ind Co Ltd Ｍｉｓ電界効果トランジスタ及びその製造方法
IT1214615B (it) * 1985-06-19 1990-01-18 Ates Componenti Elettron Transistore mos a canale n con limitazione dell'effetto di perforazione (punch-through) erelativo processo di formazione.
JPS6235666A (ja) * 1985-08-09 1987-02-16 Nissan Motor Co Ltd Ｍｏｓトランジスタ
US4939558A (en) * 1985-09-27 1990-07-03 Texas Instruments Incorporated EEPROM memory cell and driving circuitry
JPS62217666A (ja) * 1986-03-18 1987-09-25 Nippon Denso Co Ltd Ｍｉｓトランジスタ
GB2190539A (en) * 1986-05-16 1987-11-18 Philips Electronic Associated Semiconductor devices
JPS63263767A (ja) * 1987-04-22 1988-10-31 Hitachi Ltd 半導体装置
US4928156A (en) * 1987-07-13 1990-05-22 Motorola, Inc. N-channel MOS transistors having source/drain regions with germanium
JPH01120067A (ja) * 1987-11-02 1989-05-12 Hitachi Ltd 半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPH0254537A (ja) 1990-02-23
EP0368444B1 (de) 1994-06-15
KR0149659B1 (ko) 1998-10-01
DE68916182D1 (de) 1994-07-21
EP0368444A1 (de) 1990-05-16
KR900003967A (ko) 1990-03-27
US5060033A (en) 1991-10-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee