DE69417199D1 - LC-Element, Halbleiteranordnung, und Verfahren zur Herstellung des LC-Elements - Google Patents
LC-Element, Halbleiteranordnung, und Verfahren zur Herstellung des LC-ElementsInfo
- Publication number
- DE69417199D1 DE69417199D1 DE69417199T DE69417199T DE69417199D1 DE 69417199 D1 DE69417199 D1 DE 69417199D1 DE 69417199 T DE69417199 T DE 69417199T DE 69417199 T DE69417199 T DE 69417199T DE 69417199 D1 DE69417199 D1 DE 69417199D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- semiconductor device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/01—Frequency selective two-port networks
- H03H7/0115—Frequency selective two-port networks comprising only inductors and capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H1/00—Constructional details of impedance networks whose electrical mode of operation is not specified or applicable to more than one type of network
- H03H2001/0021—Constructional details
- H03H2001/0064—Constructional details comprising semiconductor material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H1/00—Constructional details of impedance networks whose electrical mode of operation is not specified or applicable to more than one type of network
- H03H2001/0021—Constructional details
- H03H2001/0078—Constructional details comprising spiral inductor on a substrate
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Coils Or Transformers For Communication (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP35182393A JP3461886B2 (ja) | 1993-12-29 | 1993-12-29 | Lc素子,半導体装置及びlc素子の製造方法 |
JP25753794A JPH0897373A (ja) | 1994-09-27 | 1994-09-27 | Lc素子,半導体装置及びlc素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69417199D1 true DE69417199D1 (de) | 1999-04-22 |
DE69417199T2 DE69417199T2 (de) | 1999-11-25 |
Family
ID=26543252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69417199T Expired - Fee Related DE69417199T2 (de) | 1993-12-29 | 1994-12-21 | LC-Element, Halbleiteranordnung, und Verfahren zur Herstellung des LC-Elements |
Country Status (6)
Country | Link |
---|---|
US (1) | US5705963A (de) |
EP (1) | EP0661805B1 (de) |
KR (1) | KR100315267B1 (de) |
DE (1) | DE69417199T2 (de) |
FI (1) | FI116008B (de) |
TW (1) | TW267260B (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6008713A (en) * | 1996-02-29 | 1999-12-28 | Texas Instruments Incorporated | Monolithic inductor |
JP3942264B2 (ja) | 1998-03-11 | 2007-07-11 | 富士通株式会社 | 半導体基板上に形成されるインダクタンス素子 |
JPH11317621A (ja) | 1998-05-07 | 1999-11-16 | Tif:Kk | Lc発振器 |
US6310393B1 (en) * | 1998-10-09 | 2001-10-30 | Matsushita Electric Industrial Co., Ltd. | Electric circuit and package for semiconductor |
FR2792775B1 (fr) * | 1999-04-20 | 2001-11-23 | France Telecom | Dispositif de circuit integre comprenant une inductance a haut coefficient de qualite |
EP1211799B1 (de) * | 1999-05-18 | 2004-08-25 | Niigata Seimitsu Co., Ltd. | Oszillator |
US6133079A (en) * | 1999-07-22 | 2000-10-17 | Chartered Semiconductor Manufacturing Ltd. | Method for reducing substrate capacitive coupling of a thin film inductor by reverse P/N junctions |
JP2001044754A (ja) * | 1999-07-26 | 2001-02-16 | Niigata Seimitsu Kk | Lc発振器 |
GB2353139B (en) * | 1999-08-12 | 2001-08-29 | United Microelectronics Corp | Inductor and method of manufacturing the same |
GB2361123A (en) | 2000-04-04 | 2001-10-10 | Nokia Mobile Phones Ltd | Polyphase filters in silicon integrated circuit technology |
US6917095B1 (en) | 2000-05-30 | 2005-07-12 | Altera Corporation | Integrated radio frequency circuits |
EP1160842A3 (de) * | 2000-05-30 | 2003-09-17 | Programmable Silicon Solutions | Integrierte Radiofrequenz-Schaltkreise |
US6441442B1 (en) * | 2000-05-30 | 2002-08-27 | Programmable Silicon Solutions | Integrated inductive circuits |
JP4256575B2 (ja) * | 2000-08-15 | 2009-04-22 | パナソニック株式会社 | バイアホールを備えた高周波受動回路および高周波増幅器 |
FR2851078A1 (fr) * | 2003-02-07 | 2004-08-13 | St Microelectronics Sa | Inductance integree et circuit electronique l'incorporant |
US7288417B2 (en) * | 2005-01-06 | 2007-10-30 | International Business Machines Corporation | On-chip signal transformer for ground noise isolation |
US8129817B2 (en) * | 2008-12-31 | 2012-03-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Reducing high-frequency signal loss in substrates |
US8546907B2 (en) * | 2009-04-15 | 2013-10-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Enhanced transmission lines for radio frequency applications |
US9698214B1 (en) * | 2016-03-31 | 2017-07-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Capacitor structure of integrated circuit chip and method of fabricating the same |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3022472A (en) * | 1958-01-22 | 1962-02-20 | Bell Telephone Labor Inc | Variable equalizer employing semiconductive element |
US3258723A (en) * | 1962-01-30 | 1966-06-28 | Osafune ia | |
US3328600A (en) * | 1964-02-06 | 1967-06-27 | Halliburton Co | Solid-state relay for mark-space system employing oscillator intercoupling input andoutput filters providing signal isolation and interference-free output |
US3778643A (en) * | 1972-05-18 | 1973-12-11 | Gen Motors Corp | A solid state variable delay line using reversed biased pn junctions |
JPS60225449A (ja) * | 1984-04-24 | 1985-11-09 | Sumitomo Electric Ind Ltd | 半導体集積回路パツケ−ジ |
FR2567325B1 (fr) * | 1984-07-03 | 1986-11-14 | Thomson Csf | Element a capacite variable, commandable par une tension continue |
US5023578A (en) * | 1987-08-11 | 1991-06-11 | Murata Manufacturing Co., Ltd. | Filter array having a plurality of capacitance elements |
JP3280019B2 (ja) * | 1989-10-26 | 2002-04-30 | 新潟精密株式会社 | Lcノイズフィルタ |
US5420553A (en) * | 1991-01-16 | 1995-05-30 | Murata Manufacturing Co., Ltd. | Noise filter |
US5283462A (en) * | 1991-11-04 | 1994-02-01 | Motorola, Inc. | Integrated distributed inductive-capacitive network |
TW275152B (de) * | 1993-11-01 | 1996-05-01 | Ikeda Takeshi | |
US5497028A (en) * | 1993-11-10 | 1996-03-05 | Ikeda; Takeshi | LC element and semiconductor device having a signal transmission line and LC element manufacturing method |
-
1994
- 1994-12-17 TW TW083111799A patent/TW267260B/zh active
- 1994-12-19 US US08/358,770 patent/US5705963A/en not_active Expired - Fee Related
- 1994-12-21 DE DE69417199T patent/DE69417199T2/de not_active Expired - Fee Related
- 1994-12-21 EP EP94120305A patent/EP0661805B1/de not_active Expired - Lifetime
- 1994-12-22 FI FI946026A patent/FI116008B/fi not_active IP Right Cessation
- 1994-12-27 KR KR1019940037280A patent/KR100315267B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0661805A1 (de) | 1995-07-05 |
FI946026A (fi) | 1995-06-30 |
FI116008B (fi) | 2005-08-31 |
KR950021507A (ko) | 1995-07-26 |
KR100315267B1 (ko) | 2002-04-24 |
EP0661805B1 (de) | 1999-03-17 |
FI946026A0 (fi) | 1994-12-22 |
US5705963A (en) | 1998-01-06 |
TW267260B (de) | 1996-01-01 |
DE69417199T2 (de) | 1999-11-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: NIIGATA SEIMITSU CO., LTD., JOUETSU, NIIGATA, JP |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: KRAMER - BARSKE - SCHMIDTCHEN, 81245 MUENCHEN |
|
8339 | Ceased/non-payment of the annual fee |