DE68905735D1 - Synthetisches geschmolzenes quarzglas und verfahren zu dessen herstellung. - Google Patents

Synthetisches geschmolzenes quarzglas und verfahren zu dessen herstellung.

Info

Publication number
DE68905735D1
DE68905735D1 DE8989402471T DE68905735T DE68905735D1 DE 68905735 D1 DE68905735 D1 DE 68905735D1 DE 8989402471 T DE8989402471 T DE 8989402471T DE 68905735 T DE68905735 T DE 68905735T DE 68905735 D1 DE68905735 D1 DE 68905735D1
Authority
DE
Germany
Prior art keywords
production
quartz glass
molten quartz
synthetic molten
synthetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989402471T
Other languages
English (en)
Other versions
DE68905735T2 (de
Inventor
Masatoshi Takita
Takaaki Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP22933388A external-priority patent/JPH0280329A/ja
Priority claimed from JP32562688A external-priority patent/JPH02172832A/ja
Priority claimed from JP33507088A external-priority patent/JPH02180723A/ja
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Application granted granted Critical
Publication of DE68905735D1 publication Critical patent/DE68905735D1/de
Publication of DE68905735T2 publication Critical patent/DE68905735T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C03C1/006—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/20—Wet processes, e.g. sol-gel process
    • C03C2203/26—Wet processes, e.g. sol-gel process using alkoxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/20—Wet processes, e.g. sol-gel process
    • C03C2203/30—Additives
    • C03C2203/32—Catalysts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/90—Drying, dehydration, minimizing oh groups
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/901—Liquid phase reaction process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Glass Compositions (AREA)
DE8989402471T 1988-09-13 1989-09-11 Synthetisches geschmolzenes quarzglas und verfahren zu dessen herstellung. Expired - Lifetime DE68905735T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP22933388A JPH0280329A (ja) 1988-09-13 1988-09-13 合成石英ガラスの製造方法
JP32562688A JPH02172832A (ja) 1988-12-22 1988-12-22 合成石英ガラスおよびその製造方法
JP33507088A JPH02180723A (ja) 1988-12-28 1988-12-28 合成石英ガラスの製造方法

Publications (2)

Publication Number Publication Date
DE68905735D1 true DE68905735D1 (de) 1993-05-06
DE68905735T2 DE68905735T2 (de) 1993-08-05

Family

ID=27331515

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989402471T Expired - Lifetime DE68905735T2 (de) 1988-09-13 1989-09-11 Synthetisches geschmolzenes quarzglas und verfahren zu dessen herstellung.

Country Status (3)

Country Link
US (1) US4979973A (de)
EP (1) EP0360659B1 (de)
DE (1) DE68905735T2 (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02124739A (ja) * 1988-10-31 1990-05-14 Shin Etsu Chem Co Ltd 合成石英ガラスおよびその製造方法
US5141786A (en) * 1989-02-28 1992-08-25 Shin-Etsu Chemical Co., Ltd. Synthetic silica glass articles and a method for manufacturing them
JP2933404B2 (ja) * 1990-06-25 1999-08-16 信越石英 株式会社 シリコン単結晶引き上げ用石英ガラスルツボとその製造方法
US5330941A (en) * 1991-07-24 1994-07-19 Asahi Glass Company Ltd. Quartz glass substrate for polysilicon thin film transistor liquid crystal display
US5192351A (en) * 1991-12-17 1993-03-09 Alfred University Production of dehydroxylated glass
JP2888079B2 (ja) * 1993-02-04 1999-05-10 信越半導体株式会社 シリコン単結晶引上げ用ルツボ
US5613995A (en) * 1993-04-23 1997-03-25 Lucent Technologies Inc. Method for making planar optical waveguides
DE69508473T2 (de) * 1994-07-06 1999-10-28 Shinetsu Handotai Kk Verfahren zur Herstellung von Silizium-Einkristall und Tiegel aus geschmolzenem Silika dafür
JPH0826742A (ja) * 1994-07-11 1996-01-30 Mitsubishi Chem Corp 合成石英ガラス粉
KR100414962B1 (ko) * 1994-12-26 2004-04-13 미쓰비시 가가꾸 가부시키가이샤 합성석영분말의제조방법
EP0728709B1 (de) * 1995-02-22 1998-04-29 Heraeus Quarzglas GmbH Opakes Quarzglas und Verfahren zu dessen Herstellung
EP1170253A1 (de) * 1996-11-20 2002-01-09 Mitsubishi Chemical Corporation Synthetisches Quartzpulver und Kieselsäuregelpulver
DE19706515A1 (de) * 1997-02-19 1998-08-20 Inst Neue Mat Gemein Gmbh Hydroxylgruppen-arme organisch/anorganische Komposite, Verfahren zu deren Herstellung und deren Verwendung
US5944866A (en) * 1997-09-26 1999-08-31 Lucent Technologies Inc. Fabrication including sol-gel processing
GB2331985B (en) * 1997-12-03 2001-11-21 Tosoh Corp High purity transparent silica glass and process for producing same
US5913975A (en) * 1998-02-03 1999-06-22 Memc Electronic Materials, Inc. Crucible and method of preparation thereof
US6582826B1 (en) 1998-03-23 2003-06-24 Kabushiki Kaisha Ohara Glass-ceramics
JP4648512B2 (ja) * 2000-03-07 2011-03-09 セイコーインスツル株式会社 近視野光発生素子の製造方法
JP4117641B2 (ja) * 2001-11-26 2008-07-16 ジャパンスーパークォーツ株式会社 合成石英粉の処理方法およびその石英ガラス製品
DE10211958A1 (de) * 2002-03-18 2003-10-16 Wacker Chemie Gmbh Hochreines Silica-Pulver, Verfahren und Vorrichtung zu seiner Herstellung
JP2004292190A (ja) * 2003-03-25 2004-10-21 Univ Shinshu 二酸化ケイ素薄膜とその製造法
EP1700824A1 (de) 2005-03-09 2006-09-13 Degussa AG Granulate basierend auf pyrogen hergestelles silicon dioxid, sowie Verfahren zu deren Herstellung und Verwendung dergleichen
JP5213356B2 (ja) * 2007-05-31 2013-06-19 信越石英株式会社 シリコン単結晶引上用石英ガラスルツボおよびその製造方法
JP5388691B2 (ja) * 2008-05-23 2014-01-15 キヤノン株式会社 触媒層および膜電極接合体の製造方法
US9249028B2 (en) 2010-02-08 2016-02-02 Momentive Performance Materials Inc. Method for making high purity metal oxide particles and materials made thereof
US8197782B2 (en) 2010-02-08 2012-06-12 Momentive Performance Materials Method for making high purity metal oxide particles and materials made thereof
PL409679A1 (pl) * 2014-10-06 2016-04-11 Wrocławskie Centrum Badań Eit + Spółka Z Ograniczoną Odpowiedzialnością Sposób wytwarzania pianosilikatów z domieszkami o właściwościach magnetycznych oraz pianosilikat wytworzony tym sposobem
CN108698883A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 石英玻璃制备中的二氧化硅的喷雾造粒
CN109153593A (zh) * 2015-12-18 2019-01-04 贺利氏石英玻璃有限两合公司 合成石英玻璃粉粒的制备
KR20180095616A (ko) 2015-12-18 2018-08-27 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 용융 가열로에서 이슬점 조절을 이용한 실리카 유리체의 제조
TWI794150B (zh) 2015-12-18 2023-03-01 德商何瑞斯廓格拉斯公司 自二氧化矽顆粒製備石英玻璃體
US11952303B2 (en) 2015-12-18 2024-04-09 Heraeus Quarzglas Gmbh & Co. Kg Increase in silicon content in the preparation of quartz glass
JP7044454B2 (ja) 2015-12-18 2022-03-30 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 石英ガラス調製時の中間体としての炭素ドープ二酸化ケイ素造粒体の調製
TW201731782A (zh) 2015-12-18 2017-09-16 何瑞斯廓格拉斯公司 在多腔式爐中製備石英玻璃體
CN108698887B (zh) 2015-12-18 2022-01-21 贺利氏石英玻璃有限两合公司 由均质石英玻璃制得的玻璃纤维和预成形品
EP3390290B1 (de) * 2015-12-18 2023-03-15 Heraeus Quarzglas GmbH & Co. KG Herstellung eines opaken quarzglaskörpers
TWI812586B (zh) 2015-12-18 2023-08-21 德商何瑞斯廓格拉斯公司 石英玻璃體、其製備方法與應用、及用於控制烘箱出口處之露點
WO2018229151A1 (en) * 2017-06-14 2018-12-20 Heraeus Quarzglas Gmbh & Co. Kg Preparation of a quartz glass body
WO2020181490A1 (zh) * 2019-03-12 2020-09-17 湖州五爻硅基材料研究院有限公司 一种球形二氧化硅粉体填料的制备方法和由此得到的球形二氧化硅粉体填料及其应用

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1596839B1 (de) * 1966-05-07 1970-11-26 Jenaer Glaswerk Schott & Gen Verfahren zur Herstellung von Formkoerpern aus Glaesern bei einer Temperatur unterhalb der ueblichen Schmelztemperatur
US4266978A (en) * 1979-06-25 1981-05-12 General Electric Company Synthesis of mixed oxide composition
GB2075003B (en) * 1980-04-28 1984-01-04 Hitachi Ltd Method for producing optical glass
GB2113200B (en) * 1982-01-08 1985-06-19 Hitachi Ltd Process for producing optical glass
US4500657A (en) * 1982-08-02 1985-02-19 Johnson & Johnson Dental Products Company Dental restorative compositions having improved mechanical properties and hydrolytic stability
DE3302745A1 (de) * 1983-01-27 1984-08-02 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verfahren zur herstellung von gegenstaenden aus hochreinem synthetischem quarzglas
GB2165234B (en) * 1984-10-05 1988-09-01 Suwa Seikosha Kk Methods of preparing doped silica glass
DE3522194A1 (de) * 1985-06-21 1987-01-02 Philips Patentverwaltung Verfahren zur herstellung von glaskoerpern
US4767433A (en) * 1986-05-22 1988-08-30 Asahi Glass Company Ltd. Spherical silica glass powder particles and process for their production
US4872895A (en) * 1986-12-11 1989-10-10 American Telephone And Telegraph Company, At&T Bell Laboratories Method for fabricating articles which include high silica glass bodies

Also Published As

Publication number Publication date
DE68905735T2 (de) 1993-08-05
EP0360659A1 (de) 1990-03-28
EP0360659B1 (de) 1993-03-31
US4979973A (en) 1990-12-25

Similar Documents

Publication Publication Date Title
DE68905735T2 (de) Synthetisches geschmolzenes quarzglas und verfahren zu dessen herstellung.
DE3880869D1 (de) Verstaerkter glasgegenstand und verfahren zu dessen herstellung.
ATA197488A (de) Optischer sensor und verfahren zu dessen herstellung
DE59007338D1 (de) Optisches Bauelement und Verfahren zu dessen Herstellung.
DE3879320D1 (de) Copolyester und verfahren zu dessen herstellung.
DE3867858D1 (de) Vorformling und geblasener behaelter und verfahren zu dessen herstellung.
DE3667779D1 (de) Glasspinnfaden und verfahren zu seiner herstellung.
DE69120534T2 (de) Glasfaserseparator und verfahren zu dessen herstellung
DE68912932T2 (de) Glas-Keramik-Gegenstand und Verfahren zu dessen Herstellung.
DE3888233D1 (de) Optisches Mehrfaserbauteil und Verfahren zu dessen Herstellung.
DE3688604D1 (de) Optisches geraet und verfahren zu dessen herstellung.
DE69319642D1 (de) Glasgarn, Verfahren und Vorrichtung zu dessen Herstellung
DE3878475D1 (de) Organopolysiloxanemulsion und verfahren zu ihrer herstellung.
DE3876275D1 (de) Optischer koppler und verfahren zu dessen herstellung.
DE3879536D1 (de) Supraleitender keramischer film und verfahren zu dessen herstellung.
DE3668613D1 (de) Chemisch bestaendiges poroeses glas und verfahren zu dessen herstellung.
DE68903980D1 (de) Elektroleitendes glas und verfahren zu seiner herstellung.
DE3881765D1 (de) Schaltanzeige und verfahren zu deren herstellung.
DE69005063T2 (de) Synthetisches Quarzglas und Verfahren zu dessen Herstellung.
DE3779946T2 (de) Antibiotikum a42125 und verfahren zu dessen herstellung.
DE3770795D1 (de) Radierer und verfahren zu dessen herstellung.
AT399879B (de) Dihydro-pyrimido-thiazin-derivate und verfahren zu ihrer herstellung
DE3777245D1 (de) Protein und verfahren zu dessen herstellung.
DE3860496D1 (de) Cyanoguanidinderivate und verfahren zu deren herstellung.
DE3672966D1 (de) Polyallocimen und verfahren zu dessen herstellung.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee