DE60237354D1 - Integrierte toroidspuleninduktoren für ic-bauelemente und herstellungsverfahren - Google Patents

Integrierte toroidspuleninduktoren für ic-bauelemente und herstellungsverfahren

Info

Publication number
DE60237354D1
DE60237354D1 DE60237354T DE60237354T DE60237354D1 DE 60237354 D1 DE60237354 D1 DE 60237354D1 DE 60237354 T DE60237354 T DE 60237354T DE 60237354 T DE60237354 T DE 60237354T DE 60237354 D1 DE60237354 D1 DE 60237354D1
Authority
DE
Germany
Prior art keywords
coil
solenoidal
beol
fabrication
embedded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60237354T
Other languages
English (en)
Inventor
Raul E Acosta
Melanie L Carasso
Steven A Cordes
Robert A Groves
Jennifer L Lund
Joanna Rosner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE60237354D1 publication Critical patent/DE60237354D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/10—Inductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/0006—Printed inductances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041—Printed circuit coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/0006—Printed inductances
    • H01F17/0033—Printed inductances with the coil helically wound around a magnetic core

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
DE60237354T 2001-03-14 2002-03-13 Integrierte toroidspuleninduktoren für ic-bauelemente und herstellungsverfahren Expired - Lifetime DE60237354D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/808,381 US6492708B2 (en) 2001-03-14 2001-03-14 Integrated coil inductors for IC devices
PCT/US2002/007992 WO2002073702A1 (en) 2001-03-14 2002-03-13 Integrated toroidal coil inductors for ic devices

Publications (1)

Publication Number Publication Date
DE60237354D1 true DE60237354D1 (de) 2010-09-30

Family

ID=25198608

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60237354T Expired - Lifetime DE60237354D1 (de) 2001-03-14 2002-03-13 Integrierte toroidspuleninduktoren für ic-bauelemente und herstellungsverfahren

Country Status (9)

Country Link
US (2) US6492708B2 (de)
EP (1) EP1374314B1 (de)
JP (1) JP4299543B2 (de)
KR (1) KR100629063B1 (de)
CN (1) CN100466294C (de)
AT (1) ATE478438T1 (de)
DE (1) DE60237354D1 (de)
TW (1) TW556235B (de)
WO (1) WO2002073702A1 (de)

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US7247544B1 (en) * 2002-04-12 2007-07-24 National Semiconductor Corporation High Q inductor integration
TWI288443B (en) 2002-05-17 2007-10-11 Semiconductor Energy Lab SiN film, semiconductor device, and the manufacturing method thereof
US6894593B2 (en) * 2003-02-12 2005-05-17 Moog Inc. Torque motor
JP4324952B2 (ja) * 2003-02-26 2009-09-02 Ｔｄｋラムダ株式会社 インダクタンス素子の製造方法
US7609763B2 (en) * 2003-07-18 2009-10-27 Microsoft Corporation Advanced bi-directional predictive coding of video frames
US7517791B2 (en) * 2004-11-30 2009-04-14 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
US7985677B2 (en) * 2004-11-30 2011-07-26 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing semiconductor device
US7696625B2 (en) * 2004-11-30 2010-04-13 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US7732349B2 (en) * 2004-11-30 2010-06-08 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of insulating film and semiconductor device
KR100683866B1 (ko) * 2004-12-03 2007-02-15 삼성전자주식회사 감광성 필름 및 공동(空洞)을 이용하여 제조된 인덕터 및그 제조방법
US7687326B2 (en) * 2004-12-17 2010-03-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US7579224B2 (en) * 2005-01-21 2009-08-25 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a thin film semiconductor device
US10522279B2 (en) 2005-09-22 2019-12-31 Radial Electronics, Inc. Embedded high voltage transformer components and methods
US10431367B2 (en) 2005-09-22 2019-10-01 Radial Electronics, Inc. Method for gapping an embedded magnetic device
US10049803B2 (en) 2005-09-22 2018-08-14 Radial Electronics, Inc. Arrayed embedded magnetic components and methods
WO2011014200A1 (en) 2009-07-31 2011-02-03 Radial Electronics, Inc Embedded magnetic components and methods
US7477128B2 (en) 2005-09-22 2009-01-13 Radial Electronics, Inc. Magnetic components
US9754712B2 (en) 2005-09-22 2017-09-05 Radial Electronics, Inc. Embedded magnetic components and methods
US7531407B2 (en) 2006-07-18 2009-05-12 International Business Machines Corporation Semiconductor integrated circuit devices having high-Q wafer backside inductors and methods of fabricating same
US20080052110A1 (en) * 2006-08-23 2008-02-28 Cambridge Software Solutions Corp. Referral system
US20100327406A1 (en) 2009-06-26 2010-12-30 Stats Chippac, Ltd. Semiconductor Device and Method of Forming Inductor Over Insulating Material Filled Trench In Substrate
US8313659B2 (en) * 2009-07-10 2012-11-20 Seagate Technology Llc Fabrication of multi-dimensional microstructures
US8664745B2 (en) * 2010-07-20 2014-03-04 Triune Ip Llc Integrated inductor
CN102738128B (zh) * 2011-03-30 2015-08-26 香港科技大学 大电感值集成磁性感应器件及其制造方法
US8742539B2 (en) * 2012-07-27 2014-06-03 Infineon Technologies Austria Ag Semiconductor component and method for producing a semiconductor component
DE102012018013B4 (de) 2012-09-12 2014-09-18 X-Fab Semiconductor Foundries Ag Spiralförmige, integrierbare Spulen mit zentrischen Anschlüssen in planarer grabenisolierter Siliziumhalbleitertechnologie
KR20140083577A (ko) * 2012-12-26 2014-07-04 삼성전기주식회사 공통모드필터 및 이의 제조방법
KR20150025859A (ko) * 2013-08-30 2015-03-11 삼성전기주식회사 코일 부품 및 이를 이용하는 전자 모듈
US9355972B2 (en) 2014-03-04 2016-05-31 International Business Machines Corporation Method for making a dielectric region in a bulk silicon substrate providing a high-Q passive resonator
US9893141B2 (en) 2015-02-26 2018-02-13 Taiwan Semiconductor Manufacturing Co., Ltd. Magnetic core, inductor, and method for fabricating the magnetic core
US10431377B2 (en) 2015-03-26 2019-10-01 Toyota Motor Engineering & Manufacturing North America, Inc. High efficiency magnetic component
US10304603B2 (en) * 2016-06-29 2019-05-28 International Business Machines Corporation Stress control in magnetic inductor stacks
US10811177B2 (en) 2016-06-30 2020-10-20 International Business Machines Corporation Stress control in magnetic inductor stacks
US10283249B2 (en) 2016-09-30 2019-05-07 International Business Machines Corporation Method for fabricating a magnetic material stack

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US6534843B2 (en) * 2001-02-10 2003-03-18 International Business Machines Corporation High Q inductor with faraday shield and dielectric well buried in substrate
US20030122175A1 (en) * 2001-12-28 2003-07-03 Buskirk Peter Van Integrated passive devices formed by demascene processing

Also Published As

Publication number Publication date
CN1526171A (zh) 2004-09-01
US6492708B2 (en) 2002-12-10
TW556235B (en) 2003-10-01
EP1374314B1 (de) 2010-08-18
KR20040072022A (ko) 2004-08-16
EP1374314A1 (de) 2004-01-02
US20020130386A1 (en) 2002-09-19
JP2004524696A (ja) 2004-08-12
ATE478438T1 (de) 2010-09-15
WO2002073702A9 (en) 2003-03-20
US6720230B2 (en) 2004-04-13
EP1374314A4 (de) 2008-03-12
WO2002073702A1 (en) 2002-09-19
KR100629063B1 (ko) 2006-09-26
JP4299543B2 (ja) 2009-07-22
CN100466294C (zh) 2009-03-04
US20030011041A1 (en) 2003-01-16

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Legal Events

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