DE60235466D1 - Keramische elektrostatische haltevorrichtung und deren verwendung - Google Patents

Keramische elektrostatische haltevorrichtung und deren verwendung

Info

Publication number
DE60235466D1
DE60235466D1 DE60235466T DE60235466T DE60235466D1 DE 60235466 D1 DE60235466 D1 DE 60235466D1 DE 60235466 T DE60235466 T DE 60235466T DE 60235466 T DE60235466 T DE 60235466T DE 60235466 D1 DE60235466 D1 DE 60235466D1
Authority
DE
Germany
Prior art keywords
electrode
esc
clamping
clamping electrode
chucking device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60235466T
Other languages
English (en)
Inventor
Shu Nakajima
Neil Benjamin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Application granted granted Critical
Publication of DE60235466D1 publication Critical patent/DE60235466D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
  • Drying Of Semiconductors (AREA)
  • Lock And Its Accessories (AREA)
DE60235466T 2001-06-28 2002-06-10 Keramische elektrostatische haltevorrichtung und deren verwendung Expired - Lifetime DE60235466D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/892,634 US6483690B1 (en) 2001-06-28 2001-06-28 Ceramic electrostatic chuck assembly and method of making
PCT/US2002/018093 WO2003003449A2 (en) 2001-06-28 2002-06-10 Ceramic electrostatic chuck and method of fabricating same

Publications (1)

Publication Number Publication Date
DE60235466D1 true DE60235466D1 (de) 2010-04-08

Family

ID=25400273

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60235466T Expired - Lifetime DE60235466D1 (de) 2001-06-28 2002-06-10 Keramische elektrostatische haltevorrichtung und deren verwendung

Country Status (11)

Country Link
US (1) US6483690B1 (de)
EP (1) EP1399964B1 (de)
JP (2) JP4349901B2 (de)
KR (2) KR20090075887A (de)
CN (1) CN1296983C (de)
AT (1) ATE459100T1 (de)
AU (1) AU2002314971A1 (de)
DE (1) DE60235466D1 (de)
IL (1) IL159528A0 (de)
TW (1) TW527264B (de)
WO (1) WO2003003449A2 (de)

Families Citing this family (117)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4034096B2 (ja) * 2002-03-19 2008-01-16 日本碍子株式会社 半導体支持装置
JP3808407B2 (ja) * 2002-07-05 2006-08-09 住友大阪セメント株式会社 電極内蔵型サセプタ及びその製造方法
TWI247551B (en) * 2003-08-12 2006-01-11 Ngk Insulators Ltd Method of manufacturing electrical resistance heating element
JP4515755B2 (ja) * 2003-12-24 2010-08-04 東京エレクトロン株式会社 処理装置
US7597816B2 (en) * 2004-09-03 2009-10-06 Lam Research Corporation Wafer bevel polymer removal
US7052553B1 (en) * 2004-12-01 2006-05-30 Lam Research Corporation Wet cleaning of electrostatic chucks
US7525787B2 (en) * 2005-09-30 2009-04-28 Lam Research Corporation Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same
JP4244229B2 (ja) * 2006-02-08 2009-03-25 Ｔｏｔｏ株式会社 静電チャック
US8013694B2 (en) * 2006-03-31 2011-09-06 Kyocera Corporation Dielectric waveguide device, phase shifter, high frequency switch, and attenuator provided with dielectric waveguide device, high frequency transmitter, high frequency receiver, high frequency transceiver, radar device, array antenna, and method of manufacturing dielectric waveguide device
DE202006007122U1 (de) 2006-05-03 2006-09-07 Retzlaff, Udo, Dr. Mobiler, transportabler, elektrostatischer Substrathalter aus Halbleitermaterial
US8284538B2 (en) * 2006-08-10 2012-10-09 Tokyo Electron Limited Electrostatic chuck device
US7619870B2 (en) * 2006-08-10 2009-11-17 Tokyo Electron Limited Electrostatic chuck
JP5233093B2 (ja) * 2006-08-10 2013-07-10 東京エレクトロン株式会社 プラズマ処理装置用の載置台及びプラズマ処理装置
US8741098B2 (en) * 2006-08-10 2014-06-03 Tokyo Electron Limited Table for use in plasma processing system and plasma processing system
JP5125024B2 (ja) * 2006-08-10 2013-01-23 東京エレクトロン株式会社 プラズマ処理装置用の載置台及びプラズマ処理装置
US20080073032A1 (en) * 2006-08-10 2008-03-27 Akira Koshiishi Stage for plasma processing apparatus, and plasma processing apparatus
US20080041312A1 (en) * 2006-08-10 2008-02-21 Shoichiro Matsuyama Stage for plasma processing apparatus, and plasma processing apparatus
US20080062609A1 (en) * 2006-08-10 2008-03-13 Shinji Himori Electrostatic chuck device
US20080062610A1 (en) * 2006-08-10 2008-03-13 Shinji Himori Electrostatic chuck device
US8097105B2 (en) * 2007-01-11 2012-01-17 Lam Research Corporation Extending lifetime of yttrium oxide as a plasma chamber material
JP5029089B2 (ja) * 2007-03-26 2012-09-19 東京エレクトロン株式会社 プラズマ処理装置用の載置台及びプラズマ処理装置
JP4898718B2 (ja) * 2008-02-08 2012-03-21 東京エレクトロン株式会社 載置台及びプラズマ処理装置
TWI475594B (zh) 2008-05-19 2015-03-01 Entegris Inc 靜電夾頭
JP5265770B2 (ja) * 2008-07-07 2013-08-14 ラム リサーチ コーポレーション プラズマ処理チャンバ内のデチャックを検出するための容量結合静電（ｃｃｅ）プローブ構成、それに関連する方法、及び、その方法を実行するコンピュータ可読コードを格納するプログラム格納媒体
CN102160167B (zh) * 2008-08-12 2013-12-04 应用材料公司 静电吸盘组件
US8291565B2 (en) * 2008-10-10 2012-10-23 Lam Research Corporation Method of refurbishing bipolar electrostatic chuck
KR100903907B1 (ko) * 2008-10-24 2009-06-19 민용준 정전척
JP5188584B2 (ja) * 2008-12-25 2013-04-24 株式会社アルバック 静電チャック用のチャックプレートの製造方法
US8139340B2 (en) * 2009-01-20 2012-03-20 Plasma-Therm Llc Conductive seal ring electrostatic chuck
WO2010090948A1 (en) * 2009-02-04 2010-08-12 Mattson Technology, Inc. Electrostatic chuck system and process for radially tuning the temperature profile across the surface of a substrate
JP5731485B2 (ja) 2009-05-15 2015-06-10 インテグリス・インコーポレーテッド ポリマー突起を有する静電チャック
US8861170B2 (en) 2009-05-15 2014-10-14 Entegris, Inc. Electrostatic chuck with photo-patternable soft protrusion contact surface
JP5328726B2 (ja) * 2009-08-25 2013-10-30 三星ディスプレイ株式會社 薄膜蒸着装置及びこれを利用した有機発光ディスプレイ装置の製造方法
JP5611718B2 (ja) * 2009-08-27 2014-10-22 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法
JP5677785B2 (ja) * 2009-08-27 2015-02-25 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法
US20110052795A1 (en) * 2009-09-01 2011-03-03 Samsung Mobile Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US8876975B2 (en) 2009-10-19 2014-11-04 Samsung Display Co., Ltd. Thin film deposition apparatus
US8637794B2 (en) * 2009-10-21 2014-01-28 Lam Research Corporation Heating plate with planar heating zones for semiconductor processing
KR20120116923A (ko) * 2009-11-30 2012-10-23 램 리써치 코포레이션 각진 측벽을 가진 정전 척
CN102652352B (zh) 2009-12-15 2015-12-02 朗姆研究公司 调节基板温度来改进关键尺寸（cd）的均匀性
US8593779B2 (en) 2010-01-05 2013-11-26 Nikon Corporation Hybrid electrostatic chuck
KR101084184B1 (ko) 2010-01-11 2011-11-17 삼성모바일디스플레이주식회사 박막 증착 장치
KR101174875B1 (ko) * 2010-01-14 2012-08-17 삼성디스플레이 주식회사 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR101193186B1 (ko) 2010-02-01 2012-10-19 삼성디스플레이 주식회사 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR101156441B1 (ko) * 2010-03-11 2012-06-18 삼성모바일디스플레이주식회사 박막 증착 장치
KR101202348B1 (ko) 2010-04-06 2012-11-16 삼성디스플레이 주식회사 박막 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법
US8894458B2 (en) 2010-04-28 2014-11-25 Samsung Display Co., Ltd. Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
KR101731136B1 (ko) 2010-05-28 2017-04-27 엔테그리스, 아이엔씨. 표면저항이 높은 정전 척
US8941968B2 (en) * 2010-06-08 2015-01-27 Axcelis Technologies, Inc. Heated electrostatic chuck including mechanical clamp capability at high temperature
CN102934218B (zh) * 2010-06-08 2016-05-04 艾克塞利斯科技公司 高温下具有机械夹持能力的受热静电夹头
KR101223723B1 (ko) 2010-07-07 2013-01-18 삼성디스플레이 주식회사 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR101678056B1 (ko) 2010-09-16 2016-11-22 삼성디스플레이 주식회사 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
US8791392B2 (en) 2010-10-22 2014-07-29 Lam Research Corporation Methods of fault detection for multiplexed heater array
KR101738531B1 (ko) 2010-10-22 2017-05-23 삼성디스플레이 주식회사 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR101723506B1 (ko) 2010-10-22 2017-04-19 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR20120045865A (ko) 2010-11-01 2012-05-09 삼성모바일디스플레이주식회사 유기층 증착 장치
US8546732B2 (en) 2010-11-10 2013-10-01 Lam Research Corporation Heating plate with planar heater zones for semiconductor processing
KR20120065789A (ko) 2010-12-13 2012-06-21 삼성모바일디스플레이주식회사 유기층 증착 장치
KR101760897B1 (ko) 2011-01-12 2017-07-25 삼성디스플레이 주식회사 증착원 및 이를 구비하는 유기막 증착 장치
US9105705B2 (en) 2011-03-14 2015-08-11 Plasma-Therm Llc Method and apparatus for plasma dicing a semi-conductor wafer
US8802545B2 (en) * 2011-03-14 2014-08-12 Plasma-Therm Llc Method and apparatus for plasma dicing a semi-conductor wafer
KR101840654B1 (ko) 2011-05-25 2018-03-22 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR101852517B1 (ko) 2011-05-25 2018-04-27 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR101857249B1 (ko) 2011-05-27 2018-05-14 삼성디스플레이 주식회사 패터닝 슬릿 시트 어셈블리, 유기막 증착 장치, 유기 발광 표시장치제조 방법 및 유기 발광 표시 장치
KR101826068B1 (ko) 2011-07-04 2018-02-07 삼성디스플레이 주식회사 유기층 증착 장치
KR20130004830A (ko) 2011-07-04 2013-01-14 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법
US9307578B2 (en) 2011-08-17 2016-04-05 Lam Research Corporation System and method for monitoring temperatures of and controlling multiplexed heater array
US10388493B2 (en) * 2011-09-16 2019-08-20 Lam Research Corporation Component of a substrate support assembly producing localized magnetic fields
TWI424523B (zh) * 2011-10-25 2014-01-21 Leading Prec Inc 靜電式吸盤之電極
US9277958B2 (en) * 2012-02-22 2016-03-08 Candela Corporation Reduction of RF electrode edge effect
US9324589B2 (en) 2012-02-28 2016-04-26 Lam Research Corporation Multiplexed heater array using AC drive for semiconductor processing
KR101800072B1 (ko) * 2012-03-07 2017-11-21 니뽄 도쿠슈 도교 가부시키가이샤 반송 장치 및 세라믹 부재
TWI455792B (zh) * 2012-03-21 2014-10-11 Intelligence Develop Engineering Aid Ltd 可透視靜電吸板
US8809747B2 (en) 2012-04-13 2014-08-19 Lam Research Corporation Current peak spreading schemes for multiplexed heated array
US9281226B2 (en) * 2012-04-26 2016-03-08 Applied Materials, Inc. Electrostatic chuck having reduced power loss
KR101959974B1 (ko) 2012-07-10 2019-07-16 삼성디스플레이 주식회사 유기층 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
US9496524B2 (en) 2012-07-10 2016-11-15 Samsung Display Co., Ltd. Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method
JP5441019B1 (ja) * 2012-08-29 2014-03-12 Ｔｏｔｏ株式会社 静電チャック
KR102013318B1 (ko) 2012-09-20 2019-08-23 삼성디스플레이 주식회사 유기층 증착 장치, 이를 이용한 유기 발광 표시 장치의 제조 방법 및 유기 발광 표시 장치
US9018022B2 (en) 2012-09-24 2015-04-28 Lam Research Corporation Showerhead electrode assembly in a capacitively coupled plasma processing apparatus
US10049948B2 (en) 2012-11-30 2018-08-14 Lam Research Corporation Power switching system for ESC with array of thermal control elements
TWI514457B (zh) * 2013-02-07 2015-12-21 Lextar Electronics Corp 無接縫分板裝置及利用此裝置製造基板的方法
US9142438B2 (en) * 2013-02-28 2015-09-22 Varian Semiconductor Equipment Associates, Inc. Techniques for clamping and declamping a substrate
KR101319765B1 (ko) * 2013-04-04 2013-10-17 주식회사 야스 미세전극 구조의 정전 척
KR102108361B1 (ko) 2013-06-24 2020-05-11 삼성디스플레이 주식회사 증착률 모니터링 장치, 이를 구비하는 유기층 증착 장치, 증착률 모니터링 방법, 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
US9623503B2 (en) * 2013-10-31 2017-04-18 Semes Co., Ltd. Support unit and substrate treating device including the same
CN105706351B (zh) * 2013-11-22 2019-07-19 应用材料公司 用于静电卡盘表面的垫设计
US9101038B2 (en) 2013-12-20 2015-08-04 Lam Research Corporation Electrostatic chuck including declamping electrode and method of declamping
KR102162797B1 (ko) 2013-12-23 2020-10-08 삼성디스플레이 주식회사 유기 발광 디스플레이 장치의 제조 방법
US9633885B2 (en) * 2014-02-12 2017-04-25 Axcelis Technologies, Inc. Variable electrode pattern for versatile electrostatic clamp operation
US9543171B2 (en) 2014-06-17 2017-01-10 Lam Research Corporation Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element
US10002782B2 (en) 2014-10-17 2018-06-19 Lam Research Corporation ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough
JP5798677B2 (ja) * 2014-10-29 2015-10-21 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP6278277B2 (ja) * 2015-01-09 2018-02-14 住友大阪セメント株式会社 静電チャック装置
US9999947B2 (en) * 2015-05-01 2018-06-19 Component Re-Engineering Company, Inc. Method for repairing heaters and chucks used in semiconductor processing
US10083853B2 (en) * 2015-10-19 2018-09-25 Lam Research Corporation Electrostatic chuck design for cooling-gas light-up prevention
CN107154375B (zh) * 2016-03-03 2023-11-24 北京华卓精科科技股份有限公司 静电卡盘装置及其集成工艺
DE102016206193A1 (de) * 2016-04-13 2017-10-19 Trumpf Gmbh + Co. Kg Elektroadhäsionsgreifer mit fraktalen Elektroden
US10770270B2 (en) * 2016-06-07 2020-09-08 Applied Materials, Inc. High power electrostatic chuck with aperture-reducing plug in a gas hole
US11532497B2 (en) * 2016-06-07 2022-12-20 Applied Materials, Inc. High power electrostatic chuck design with radio frequency coupling
JP6741548B2 (ja) * 2016-10-14 2020-08-19 日本碍子株式会社 半導体製造装置用部材及びその製法
KR102644272B1 (ko) 2016-10-31 2024-03-06 삼성전자주식회사 정전척 어셈블리
US10079168B2 (en) * 2016-11-08 2018-09-18 Lam Research Corporation Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control
JP6955904B2 (ja) * 2017-05-26 2021-10-27 東京エレクトロン株式会社 基板処理装置
US11289355B2 (en) 2017-06-02 2022-03-29 Lam Research Corporation Electrostatic chuck for use in semiconductor processing
CN116581081A (zh) * 2017-09-29 2023-08-11 住友大阪水泥股份有限公司 静电卡盘装置
TWI735364B (zh) * 2018-07-30 2021-08-01 日商Ｔｏｔｏ股份有限公司 靜電吸盤
US11410867B2 (en) 2018-07-30 2022-08-09 Toto Ltd. Electrostatic chuck
JP6587223B1 (ja) 2018-07-30 2019-10-09 Toto株式会社 静電チャック
US11328906B2 (en) 2018-07-30 2022-05-10 Toto Ltd. Electrostatic chuck
CN110783162B (zh) 2018-07-30 2024-02-13 Toto株式会社 静电吸盘
TWI819046B (zh) * 2018-08-02 2023-10-21 日商創意科技股份有限公司 靜電吸附體
DE102019101657A1 (de) 2019-01-23 2020-07-23 Berliner Glas Kgaa Herbert Kubatz Gmbh & Co Haltevorrichtung zur elektrostatischen Halterung eines Bauteils mit einem durch Diffusionsbonden gefügten Grundkörper und Verfahren zu deren Herstellung
JP7110482B2 (ja) * 2019-03-18 2022-08-01 日本碍子株式会社 静電チャック
JP6705550B1 (ja) * 2019-03-22 2020-06-03 Toto株式会社 静電チャック
JP6873178B2 (ja) * 2019-03-26 2021-05-19 日本碍子株式会社 半導体製造装置用部材、その製法及び成形型
US20210159048A1 (en) * 2019-11-25 2021-05-27 Applied Materials, Inc. Dual rf for controllable film deposition

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196211A (en) * 1981-05-29 1982-12-02 Hitachi Ltd Sample holding device
JPS57206088A (en) 1981-06-12 1982-12-17 Ngk Spark Plug Co Ceramic metallized ink
JPH0679988B2 (ja) 1984-11-30 1994-10-12 京セラ株式会社 窒化物セラミツク体へのメタライズ方法
US4677254A (en) 1985-08-07 1987-06-30 International Business Machines Corporation Process for minimizing distortion in multilayer ceramic substrates and the intermediate unsintered green ceramic substrate produced thereby
GB8526397D0 (en) 1985-10-25 1985-11-27 Oxley Dev Co Ltd Metallising paste
JPS6372877A (ja) * 1986-09-12 1988-04-02 Tokuda Seisakusho Ltd 真空処理装置
US4835039A (en) 1986-11-26 1989-05-30 Ceramics Process Systems Corporation Tungsten paste for co-sintering with pure alumina and method for producing same
US4861641A (en) 1987-05-22 1989-08-29 Ceramics Process Systems Corporation Substrates with dense metal vias
US4894273A (en) 1987-05-22 1990-01-16 Ceramics Process Systems Corp. Bonding additives for refractory metallization inks
US4920640A (en) 1988-01-27 1990-05-01 W. R. Grace & Co.-Conn. Hot pressing dense ceramic sheets for electronic substrates and for multilayer electronic substrates
JP2665242B2 (ja) * 1988-09-19 1997-10-22 東陶機器株式会社 静電チャック
US5292552A (en) 1989-12-20 1994-03-08 Sumitomo Electric Industries, Ltd. Method for forming metallized layer on an aluminum nitride sintered body
US5055964A (en) 1990-09-07 1991-10-08 International Business Machines Corporation Electrostatic chuck having tapered electrodes
JP3238925B2 (ja) * 1990-11-17 2001-12-17 株式会社東芝 静電チャック
US5155652A (en) 1991-05-02 1992-10-13 International Business Machines Corporation Temperature cycling ceramic electrostatic chuck
US5191506A (en) 1991-05-02 1993-03-02 International Business Machines Corporation Ceramic electrostatic chuck
US5207437A (en) 1991-10-29 1993-05-04 International Business Machines Corporation Ceramic electrostatic wafer chuck
US5800618A (en) 1992-11-12 1998-09-01 Ngk Insulators, Ltd. Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof
US6074893A (en) 1993-09-27 2000-06-13 Sumitomo Metal Industries, Ltd. Process for forming fine thick-film conductor patterns
US5801915A (en) * 1994-01-31 1998-09-01 Applied Materials, Inc. Electrostatic chuck having a unidirectionally conducting coupler layer
WO1995020838A1 (en) * 1994-01-31 1995-08-03 Applied Materials, Inc. Electrostatic chuck with conformal insulator film
WO1996025834A1 (fr) * 1995-02-17 1996-08-22 Hitachi, Ltd. Appareil de traitement du plasma
US5671116A (en) * 1995-03-10 1997-09-23 Lam Research Corporation Multilayered electrostatic chuck and method of manufacture thereof
US5886863A (en) 1995-05-09 1999-03-23 Kyocera Corporation Wafer support member
US5838529A (en) 1995-12-22 1998-11-17 Lam Research Corporation Low voltage electrostatic clamp for substrates such as dielectric substrates
JPH09213777A (ja) 1996-01-31 1997-08-15 Kyocera Corp 静電チャック
US6071630A (en) 1996-03-04 2000-06-06 Shin-Etsu Chemical Co., Ltd. Electrostatic chuck
JPH1051088A (ja) 1996-05-28 1998-02-20 Ngk Spark Plug Co Ltd セラミック配線基板およびその製造方法
JP3693077B2 (ja) * 1996-09-02 2005-09-07 信越化学工業株式会社 静電チャック
US5958813A (en) 1996-11-26 1999-09-28 Kyocera Corporation Semi-insulating aluminum nitride sintered body
US5986874A (en) 1997-06-03 1999-11-16 Watkins-Johnson Company Electrostatic support assembly having an integral ion focus ring
JPH11176920A (ja) 1997-12-12 1999-07-02 Shin Etsu Chem Co Ltd 静電吸着装置
US5969934A (en) 1998-04-10 1999-10-19 Varian Semiconductor Equipment Associats, Inc. Electrostatic wafer clamp having low particulate contamination of wafers
WO2001004945A1 (en) 1999-07-08 2001-01-18 Lam Research Corporation Electrostatic chuck and its manufacturing method
JP3685962B2 (ja) * 1999-09-13 2005-08-24 住友大阪セメント株式会社 サセプタ及びその製造方法
US6744618B2 (en) * 1999-12-09 2004-06-01 Saint-Gobain Ceramics & Plastics, Inc. Electrostatic chucks with flat film electrode

Also Published As

Publication number Publication date
EP1399964B1 (de) 2010-02-24
JP4349901B2 (ja) 2009-10-21
EP1399964A2 (de) 2004-03-24
WO2003003449A2 (en) 2003-01-09
US6483690B1 (en) 2002-11-19
IL159528A0 (en) 2004-06-01
ATE459100T1 (de) 2010-03-15
TW527264B (en) 2003-04-11
JP2004531907A (ja) 2004-10-14
KR100916953B1 (ko) 2009-09-14
AU2002314971A1 (en) 2003-03-03
JP5021567B2 (ja) 2012-09-12
WO2003003449A3 (en) 2003-12-24
CN1529908A (zh) 2004-09-15
KR20090075887A (ko) 2009-07-09
KR20040012970A (ko) 2004-02-11
JP2008277847A (ja) 2008-11-13
CN1296983C (zh) 2007-01-24

Similar Documents

Publication Publication Date Title
DE60235466D1 (de) Keramische elektrostatische haltevorrichtung und deren verwendung
KR100803253B1 (ko) 결합 전극을 구비한 플라즈마 챔버 지지 부재
TWI344683B (en) Electrostatic chuck with heater and manufacturing method thereof
JP2938679B2 (ja) セラミックス製静電チャック
US6351367B1 (en) Electrostatic holding apparatus having insulating layer with enables easy attachment and detachment of semiconductor object
KR101727637B1 (ko) 유전체 재료
US20080037196A1 (en) Electrostatic chuck
KR101644000B1 (ko) 정전 척
JPH07211767A (ja) 静電クランプ及び方法
WO1999029001A2 (en) Electrostatic chuck capable of rapidly dechucking a substrate
US6122159A (en) Electrostatic holding apparatus
WO2004012235A3 (en) Atmospheric pressure plasma processing reactor
JP2003179128A (ja) 静電チャック
CN106796909A (zh) 具有射频分路的静电卡盘
US6982125B2 (en) ALN material and electrostatic chuck incorporating same
KR100979684B1 (ko) 개선된 정전 웨이퍼 클램핑 장치용 플래튼
GB2293689A (en) Electrostatic chuck
US20230282507A1 (en) Conductive electrostatic chuck lift pin, electrostatic chuck comprising the same, and semiconductor manufacturing method using the same
JP2003188247A (ja) 静電チャック及びその製造方法
KR20030020072A (ko) 유니폴라 정전척
JP4439102B2 (ja) 静電チャック
JPH1187479A (ja) 静電チャック
JP4934907B2 (ja) 静電チャック
JP2960566B2 (ja) 静電チャック基板および静電チャック
JP2004022585A (ja) 静電チャック

Legal Events

Date Code Title Description
8364 No opposition during term of opposition