DE60227207D1 - Verfahren zur Filmabscheidung - Google Patents
Verfahren zur FilmabscheidungInfo
- Publication number
- DE60227207D1 DE60227207D1 DE60227207T DE60227207T DE60227207D1 DE 60227207 D1 DE60227207 D1 DE 60227207D1 DE 60227207 T DE60227207 T DE 60227207T DE 60227207 T DE60227207 T DE 60227207T DE 60227207 D1 DE60227207 D1 DE 60227207D1
- Authority
- DE
- Germany
- Prior art keywords
- film deposition
- deposition
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001030061A JP4822378B2 (ja) | 2001-02-06 | 2001-02-06 | 成膜装置および成膜方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60227207D1 true DE60227207D1 (de) | 2008-08-07 |
Family
ID=18894328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60227207T Expired - Fee Related DE60227207D1 (de) | 2001-02-06 | 2002-02-05 | Verfahren zur Filmabscheidung |
Country Status (5)
Country | Link |
---|---|
US (1) | US6875478B2 (de) |
EP (1) | EP1231292B1 (de) |
JP (1) | JP4822378B2 (de) |
DE (1) | DE60227207D1 (de) |
ES (1) | ES2309134T3 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060065517A1 (en) * | 2002-06-14 | 2006-03-30 | Tosoh Smd, Inc. | Target and method of diffusion bonding target to backing plate |
US7294391B2 (en) * | 2003-01-09 | 2007-11-13 | Kabushiki Kaisha Suzutora | Contamination resistant fiber sheet |
AU2004215240C1 (en) * | 2003-02-25 | 2010-10-07 | Chemetall Gmbh | Method for coating metallic surfaces with a silane-rich composition |
BRPI0418931B1 (pt) * | 2004-06-30 | 2018-09-25 | Nv Bekaert Sa | métodos para produzir um fio metálico revestido e um cordonel metálico, fio de metal revestido e cordonel metálico |
BRPI0513098A (pt) * | 2004-08-03 | 2008-04-29 | Chemetall Gmbh | processo para revestimento de superfìcies metálicas com um revistimento protetor contra corrosão |
KR101101918B1 (ko) * | 2004-09-15 | 2012-01-02 | 세키스이나노코토테크노로지 가부시키가이샤 | 금속-코팅된 직물 |
US20080127859A1 (en) * | 2004-11-10 | 2008-06-05 | Thomas Kolberg | Method for Coating Metallic Surfaces with an Aqueous Multi-Component Composition |
US8101014B2 (en) * | 2004-11-10 | 2012-01-24 | Chemetall Gmbh | Process for coating metallic surfaces with a multicomponent aqueous composition |
US20060099332A1 (en) | 2004-11-10 | 2006-05-11 | Mats Eriksson | Process for producing a repair coating on a coated metallic surface |
US9997338B2 (en) * | 2005-03-24 | 2018-06-12 | Oerlikon Surface Solutions Ag, Pfäffikon | Method for operating a pulsed arc source |
US20080138615A1 (en) * | 2005-04-04 | 2008-06-12 | Thomas Kolberg | Method for Coating Metallic Surfaces with an Aqueous Composition and Said Composition |
TWI328050B (en) * | 2005-05-10 | 2010-08-01 | Ulvac Inc | Reeling type plasma cvd device |
JP5483919B2 (ja) * | 2009-04-14 | 2014-05-07 | 国立大学法人信州大学 | 導電体被覆装置 |
US20110143019A1 (en) * | 2009-12-14 | 2011-06-16 | Amprius, Inc. | Apparatus for Deposition on Two Sides of the Web |
US20130022658A1 (en) * | 2011-07-23 | 2013-01-24 | Synos Technology, Inc. | Depositing material with antimicrobial properties on permeable substrate using atomic layer deposition |
FR3019708B1 (fr) | 2014-04-04 | 2016-05-06 | Hydromecanique & Frottement | Procede et dispositif pour generer un plasma excite par une energie micro-onde dans le domaine de la resonnance cyclonique electronique (rce), pour realiser un traitement de surface ou revetement autour d'un element filiforme. |
JP2016087841A (ja) * | 2014-10-31 | 2016-05-23 | 正尚 曹 | 複合混合物の製造方法 |
WO2019014854A1 (zh) * | 2017-07-18 | 2019-01-24 | 纳狮新材料股份有限公司 | 功能复合粒子及其制备方法 |
GB2588949B (en) * | 2019-11-15 | 2022-09-07 | Dyson Technology Ltd | Method and apparatus for sputter deposition |
GB2588946B (en) | 2019-11-15 | 2022-08-17 | Dyson Technology Ltd | Method of manufacturing crystalline material from different materials |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2996412A (en) * | 1958-10-10 | 1961-08-15 | Continental Can Co | Art of depositing metals |
US3959104A (en) * | 1974-09-30 | 1976-05-25 | Surface Activation Corporation | Electrode structure for generating electrical discharge plasma |
US4419381A (en) * | 1982-01-12 | 1983-12-06 | Semiconductor Energy Laboratory Co., Ltd. | Method of making magnetic material layer |
JPS6011150B2 (ja) * | 1982-01-06 | 1985-03-23 | 株式会社山東鉄工所 | 布帛の低温プラズマ連続処理装置 |
JPS5939649A (ja) * | 1982-08-30 | 1984-03-05 | Shimadzu Corp | フイルム条帯の連続形処理装置 |
EP0142083A3 (de) * | 1983-11-11 | 1987-04-29 | Hoesch Aktiengesellschaft | Verfahren und Einrichtung zum Herstellen metallischer Überzüge |
JPS61208624A (ja) * | 1985-03-13 | 1986-09-17 | Hitachi Maxell Ltd | 両面記録型磁気記録媒体の製造方法および両面同時スパツタ装置 |
JPS61260425A (ja) * | 1985-05-15 | 1986-11-18 | Hitachi Ltd | 磁気記録媒体製造装置 |
JPS61266570A (ja) * | 1985-05-21 | 1986-11-26 | Toyoda Gosei Co Ltd | スパツタリング装置 |
DE3635121B4 (de) * | 1985-10-15 | 2004-03-04 | Bridgestone Corp. | Verfahren zur Herstellung eines gummiartigen Verbundmaterials |
DE3740483A1 (de) * | 1987-11-28 | 1989-06-08 | Leybold Ag | Verfahren und vorrichtung zum beschichten von materialbahnen mit einer offenen tiefenstruktur |
JPH0661926B2 (ja) * | 1990-02-14 | 1994-08-17 | 株式会社鈴寅整染工場 | 印刷用スクリーンの製造方法 |
JPH04136167A (ja) * | 1990-09-27 | 1992-05-11 | Showa Shinku:Kk | 連続式スパッタリング装置 |
FR2667616B1 (fr) * | 1990-10-05 | 1993-01-15 | Aerospatiale | Procede et installation de metallisation en continu d'une meche de fibres etalee. |
US5198033A (en) * | 1991-10-31 | 1993-03-30 | Medtronic, Inc. | Continuous plasma surface treatment apparatus for running length polymeric tubing |
DE4333825C1 (de) * | 1993-09-28 | 1995-02-23 | Mat Gmbh | Vorrichtung zum Beschichten von langgestreckten biegsamen Erzeugnissen |
JPH0863746A (ja) * | 1994-08-24 | 1996-03-08 | Fuji Photo Film Co Ltd | 磁気記録媒体の製造方法及び装置 |
JP3208639B2 (ja) * | 1995-03-10 | 2001-09-17 | ヒラノ光音株式会社 | 連続シート状材料の表面処理方法及び表面処理装置 |
JP3610991B2 (ja) * | 1995-04-24 | 2005-01-19 | 株式会社ブリヂストン | ゴム系複合材の製造方法 |
US5711994A (en) * | 1995-12-08 | 1998-01-27 | Kimberly-Clark Worldwide, Inc. | Treated nonwoven fabrics |
US6028016A (en) * | 1996-09-04 | 2000-02-22 | Kimberly-Clark Worldwide, Inc. | Nonwoven Fabric Substrates Having a Durable Treatment |
DE19712043A1 (de) * | 1997-03-21 | 1998-10-01 | Statex Gmbh | Abschirmung gegen elektromagnetische Störquellen |
-
2001
- 2001-02-06 JP JP2001030061A patent/JP4822378B2/ja not_active Expired - Fee Related
-
2002
- 2002-02-05 DE DE60227207T patent/DE60227207D1/de not_active Expired - Fee Related
- 2002-02-05 EP EP02250764A patent/EP1231292B1/de not_active Expired - Lifetime
- 2002-02-05 US US10/066,380 patent/US6875478B2/en not_active Expired - Fee Related
- 2002-02-05 ES ES02250764T patent/ES2309134T3/es not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ES2309134T3 (es) | 2008-12-16 |
JP4822378B2 (ja) | 2011-11-24 |
EP1231292B1 (de) | 2008-06-25 |
US20020144656A1 (en) | 2002-10-10 |
US6875478B2 (en) | 2005-04-05 |
EP1231292A1 (de) | 2002-08-14 |
JP2002235171A (ja) | 2002-08-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |