DE60215034D1 - Vorlaeuferverbindungen für chemische dampfphasenabscheidung - Google Patents
Vorlaeuferverbindungen für chemische dampfphasenabscheidungInfo
- Publication number
- DE60215034D1 DE60215034D1 DE60215034T DE60215034T DE60215034D1 DE 60215034 D1 DE60215034 D1 DE 60215034D1 DE 60215034 T DE60215034 T DE 60215034T DE 60215034 T DE60215034 T DE 60215034T DE 60215034 D1 DE60215034 D1 DE 60215034D1
- Authority
- DE
- Germany
- Prior art keywords
- sup
- provisional
- compounds
- phase separation
- steam phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000001875 compounds Chemical class 0.000 title 1
- 238000005191 phase separation Methods 0.000 title 1
- 238000004326 stimulated echo acquisition mode for imaging Methods 0.000 title 1
- 125000000217 alkyl group Chemical group 0.000 abstract 2
- 125000000547 substituted alkyl group Chemical group 0.000 abstract 2
- 229910052735 hafnium Inorganic materials 0.000 abstract 1
- 239000003446 ligand Substances 0.000 abstract 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000002243 precursor Substances 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
- C07F5/003—Compounds containing elements of Groups 3 or 13 of the Periodic Table without C-Metal linkages
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/003—Compounds containing elements of Groups 4 or 14 of the Periodic Table without C-Metal linkages
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Gas Separation By Absorption (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0125724 | 2001-10-26 | ||
GB0125724A GB0125724D0 (en) | 2001-10-26 | 2001-10-26 | Improved precursors for metalorganic chemical vapour deposition |
GB0129080A GB0129080D0 (en) | 2001-12-04 | 2001-12-04 | Improved precursors for chemical vapour deposition |
GB0129080 | 2001-12-04 | ||
PCT/GB2002/004822 WO2003035926A2 (en) | 2001-10-26 | 2002-10-25 | Improved precursors for chemical vapour deposition |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60215034D1 true DE60215034D1 (de) | 2006-11-09 |
DE60215034T2 DE60215034T2 (de) | 2007-04-05 |
Family
ID=26246699
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE02772548T Pending DE02772548T1 (de) | 2001-10-26 | 2002-10-25 | Vorlaeuferverbindungen für chemische dampfphasenabscheidung |
DE60215034T Expired - Lifetime DE60215034T2 (de) | 2001-10-26 | 2002-10-25 | Vorlaeuferverbindungen für chemische dampfphasenabscheidung |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE02772548T Pending DE02772548T1 (de) | 2001-10-26 | 2002-10-25 | Vorlaeuferverbindungen für chemische dampfphasenabscheidung |
Country Status (8)
Country | Link |
---|---|
US (1) | US7419698B2 (de) |
EP (1) | EP1438315B1 (de) |
JP (1) | JP4472338B2 (de) |
CN (1) | CN100379745C (de) |
AT (1) | ATE340800T1 (de) |
AU (1) | AU2002337310A1 (de) |
DE (2) | DE02772548T1 (de) |
WO (1) | WO2003035926A2 (de) |
Families Citing this family (47)
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---|---|---|---|---|
US6316797B1 (en) * | 1999-02-19 | 2001-11-13 | Advanced Technology Materials, Inc. | Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material |
GB2391555A (en) * | 2002-08-09 | 2004-02-11 | Epichem Ltd | Vapour phase deposition of silicate and oxide films |
JP4575362B2 (ja) * | 2003-03-17 | 2010-11-04 | シグマ−アルドリッチ・カンパニー | 金属酸化物層または膜を成膜するための前駆体 |
US20050056219A1 (en) * | 2003-09-16 | 2005-03-17 | Tokyo Electron Limited | Formation of a metal-containing film by sequential gas exposure in a batch type processing system |
US20070122947A1 (en) * | 2003-12-25 | 2007-05-31 | Adeka Corporation | Metal compound, material for thin film formation, and process of forming thin film |
CN100517608C (zh) * | 2004-02-28 | 2009-07-22 | 三星电子株式会社 | 非晶电介质薄膜及其制造方法 |
KR100634532B1 (ko) | 2005-01-19 | 2006-10-13 | 삼성전자주식회사 | Ti 전구체, 이의 제조 방법, 상기 Ti 전구체를 이용한Ti-함유 박막의 제조 방법 및 상기 Ti-함유 박막 |
KR100657792B1 (ko) * | 2005-01-24 | 2006-12-14 | 삼성전자주식회사 | 원자층 적층 방법과 이를 이용한 커패시터의 제조 방법 및게이트 구조물의 제조 방법 |
GB2432363B (en) * | 2005-11-16 | 2010-06-23 | Epichem Ltd | Hafnocene and zirconocene precursors, and use thereof in atomic layer deposition |
SG171683A1 (en) | 2006-05-12 | 2011-06-29 | Advanced Tech Materials | Low temperature deposition of phase change memory materials |
EP2029790A1 (de) | 2006-06-02 | 2009-03-04 | L'AIR LIQUIDE, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Verfahren zur bildung von high-k-filmen auf basis von neuen titan-, zirconium- und hafniumvorläufern und ihre verwendung für die halbleiterfertigung |
KR20120118060A (ko) | 2006-11-02 | 2012-10-25 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 금속 박막의 cvd/ald용으로 유용한 안티몬 및 게르마늄 착체 |
JP5008379B2 (ja) * | 2006-11-08 | 2012-08-22 | 株式会社Adeka | 亜鉛化合物、該亜鉛化合物を含有してなる薄膜形成用原料及び薄膜の製造方法 |
KR100852234B1 (ko) * | 2006-11-17 | 2008-08-13 | 삼성전자주식회사 | 금속 산화막의 형성 방법, 이를 이용한 게이트 구조물의제조 방법 및 커패시터의 제조 방법 |
US20120107491A1 (en) * | 2007-01-16 | 2012-05-03 | Alliance For Sustainable Energy, Llc | High Permittivity Transparent Films |
US20100112211A1 (en) * | 2007-04-12 | 2010-05-06 | Advanced Technology Materials, Inc. | Zirconium, hafnium, titanium, and silicon precursors for ald/cvd |
TWI425110B (zh) * | 2007-07-24 | 2014-02-01 | Sigma Aldrich Co | 以化學相沉積法製造含金屬薄膜之方法 |
TWI382987B (zh) * | 2007-07-24 | 2013-01-21 | Sigma Aldrich Co | 應用於化學相沉積製程的有機金屬前驅物 |
US7790628B2 (en) | 2007-08-16 | 2010-09-07 | Tokyo Electron Limited | Method of forming high dielectric constant films using a plurality of oxidation sources |
EP2201149B1 (de) | 2007-09-14 | 2013-03-13 | Sigma-Aldrich Co. | Verfahren zum herstellen dünner titanhaltiger filme mittels atomlagenabscheidung (ald) unter verwendung von auf monocyclopentadienyl titan-basierenden vorläuferverbindungen |
US20090087561A1 (en) * | 2007-09-28 | 2009-04-02 | Advanced Technology Materials, Inc. | Metal and metalloid silylamides, ketimates, tetraalkylguanidinates and dianionic guanidinates useful for cvd/ald of thin films |
US8834968B2 (en) | 2007-10-11 | 2014-09-16 | Samsung Electronics Co., Ltd. | Method of forming phase change material layer using Ge(II) source, and method of fabricating phase change memory device |
KR101458953B1 (ko) | 2007-10-11 | 2014-11-07 | 삼성전자주식회사 | Ge(Ⅱ)소오스를 사용한 상변화 물질막 형성 방법 및상변화 메모리 소자 제조 방법 |
SG152203A1 (en) * | 2007-10-31 | 2009-05-29 | Advanced Tech Materials | Amorphous ge/te deposition process |
US7964515B2 (en) | 2007-12-21 | 2011-06-21 | Tokyo Electron Limited | Method of forming high-dielectric constant films for semiconductor devices |
US20090215225A1 (en) | 2008-02-24 | 2009-08-27 | Advanced Technology Materials, Inc. | Tellurium compounds useful for deposition of tellurium containing materials |
US7816278B2 (en) | 2008-03-28 | 2010-10-19 | Tokyo Electron Limited | In-situ hybrid deposition of high dielectric constant films using atomic layer deposition and chemical vapor deposition |
TW200949939A (en) * | 2008-05-23 | 2009-12-01 | Sigma Aldrich Co | High-k dielectric films and methods of producing using titanium-based β -diketonate precursors |
TWI467045B (zh) * | 2008-05-23 | 2015-01-01 | Sigma Aldrich Co | 高介電常數電介質薄膜與使用鈰基前驅物製造高介電常數電介質薄膜之方法 |
TW200951241A (en) * | 2008-05-30 | 2009-12-16 | Sigma Aldrich Co | Methods of forming ruthenium-containing films by atomic layer deposition |
WO2010065874A2 (en) | 2008-12-05 | 2010-06-10 | Atmi | High concentration nitrogen-containing germanium telluride based memory devices and processes of making |
KR101017897B1 (ko) | 2009-03-13 | 2011-03-04 | 한국화학연구원 | 실리콘(ⅳ)알콕시알콕사이드 화합물 및 이의 제조 방법 |
WO2010123531A1 (en) * | 2009-04-24 | 2010-10-28 | Advanced Technology Materials, Inc. | Zirconium precursors useful in atomic layer deposition of zirconium-containing films |
EP3150614B1 (de) | 2009-08-07 | 2017-11-29 | Sigma-Aldrich Co. LLC | Hochmolekulare alkyl-allyl-cobalttricarbonyl-komplexe und verwendungen davon zur herstellung dielektrischer dünnschichten |
US8952188B2 (en) * | 2009-10-23 | 2015-02-10 | Air Products And Chemicals, Inc. | Group 4 metal precursors for metal-containing films |
US20110124182A1 (en) * | 2009-11-20 | 2011-05-26 | Advanced Techology Materials, Inc. | System for the delivery of germanium-based precursor |
WO2011119175A1 (en) | 2010-03-26 | 2011-09-29 | Advanced Technology Materials, Inc. | Germanium antimony telluride materials and devices incorporating same |
WO2011146913A2 (en) | 2010-05-21 | 2011-11-24 | Advanced Technology Materials, Inc. | Germanium antimony telluride materials and devices incorporating same |
EP2609102B1 (de) | 2010-08-27 | 2014-12-31 | Sigma-Aldrich Co. LLC | Molybdän (iv)-amidvorläufer und ihre verwendung in der atomlagenabscheidung |
US8927748B2 (en) | 2011-08-12 | 2015-01-06 | Sigma-Aldrich Co. Llc | Alkyl-substituted allyl carbonyl metal complexes and use thereof for preparing dielectric thin films |
CN104136448B (zh) | 2012-01-26 | 2015-12-02 | 辛格玛艾瑞契有限责任公司 | 钼烯丙基络合物和其于薄膜沉积中的用途 |
US9640757B2 (en) | 2012-10-30 | 2017-05-02 | Entegris, Inc. | Double self-aligned phase change memory device structure |
US9663547B2 (en) | 2014-12-23 | 2017-05-30 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Silicon- and Zirconium-containing compositions for vapor deposition of Zirconium-containing films |
US9499571B2 (en) | 2014-12-23 | 2016-11-22 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Germanium- and zirconium-containing compositions for vapor deposition of zirconium-containing films |
TWI753794B (zh) | 2016-03-23 | 2022-01-21 | 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 | 形成含矽膜之組成物及其製法與用途 |
US10106568B2 (en) | 2016-10-28 | 2018-10-23 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Hafnium-containing film forming compositions for vapor deposition of hafnium-containing films |
WO2019154945A1 (en) | 2018-02-12 | 2019-08-15 | Merck Patent Gmbh | Methods of vapor deposition of ruthenium using an oxygen-free co-reactant |
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US3367759A (en) * | 1965-09-30 | 1968-02-06 | Chevron Res | Alkali metal derivatives of alkanols in gasoline fuels |
US4758682A (en) * | 1983-03-17 | 1988-07-19 | California Institute Of Technology | Homogeneous coordination compounds as oxidation catalysts |
US5344948A (en) * | 1992-02-25 | 1994-09-06 | Iowa State University Research Foundation, Inc. | Single-source molecular organic chemical vapor deposition agents and use |
FR2693727B1 (fr) * | 1992-07-20 | 1994-08-19 | Ceramiques Tech Soc D | Polycondensat organo-minéral et procédé d'obtention. |
GB9300934D0 (en) * | 1993-01-19 | 1993-03-10 | Bp Chem Int Ltd | Metallocene complexes |
DE4307663A1 (de) * | 1993-03-11 | 1994-09-15 | Hoechst Ag | Flüchtige Metall-alkoholate bifunktioneller beta-Etheralkohole, Verfahren zu deren Herstellung und ihre Verwendung |
GB9315771D0 (en) * | 1993-07-30 | 1993-09-15 | Epichem Ltd | Method of depositing thin metal films |
NL9302030A (nl) * | 1993-11-24 | 1995-06-16 | Ass Octel | Vluchtige yttrium-organische verbindingen en werkwijze voor de bereiding van yttrium-bevattende gelaagde materialen uit deze verbindingen. |
US5591483A (en) * | 1994-08-31 | 1997-01-07 | Wayne State University | Process for the preparation of metal nitride coatings from single source precursors |
MY112170A (en) * | 1994-09-02 | 2001-04-30 | Sec Dep For Defence Acting Through His Defence Evaluation And Research Agency United Kingdom | Metalorganic compounds |
GB9421335D0 (en) * | 1994-10-22 | 1994-12-07 | Epichem Ltd | Chemical vapour deposition |
US5527752A (en) * | 1995-03-29 | 1996-06-18 | Union Carbide Chemicals & Plastics Technology Corporation | Catalysts for the production of polyolefins |
US5508458A (en) * | 1995-05-26 | 1996-04-16 | Hoechst Celanese Corporation | Chiral catalysts and processes for preparing the same |
US5908947A (en) * | 1996-02-09 | 1999-06-01 | Micron Technology, Inc. | Difunctional amino precursors for the deposition of films comprising metals |
US6313035B1 (en) * | 1996-05-31 | 2001-11-06 | Micron Technology, Inc. | Chemical vapor deposition using organometallic precursors |
US5698022A (en) * | 1996-08-14 | 1997-12-16 | Advanced Technology Materials, Inc. | Lanthanide/phosphorus precursor compositions for MOCVD of lanthanide/phosphorus oxide films |
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US6277436B1 (en) * | 1997-11-26 | 2001-08-21 | Advanced Technology Materials, Inc. | Liquid delivery MOCVD process for deposition of high frequency dielectric materials |
JP3680542B2 (ja) * | 1998-02-09 | 2005-08-10 | 三菱マテリアル株式会社 | Mocvdに適した有機チタン化合物 |
US6159855A (en) * | 1998-04-28 | 2000-12-12 | Micron Technology, Inc. | Organometallic compound mixtures in chemical vapor deposition |
GB9814048D0 (en) * | 1998-06-30 | 1998-08-26 | Inorgtech Ltd | Novel precursors for the growth of heterometal oxide films by MOCVD |
JP2000044240A (ja) * | 1998-07-30 | 2000-02-15 | Asahi Denka Kogyo Kk | チタン酸ビスマス強誘電体膜 |
GB9917189D0 (en) * | 1999-07-23 | 1999-09-22 | Inorgtech Ltd | Metalorganic chemical vapour deposition precursor |
US6376691B1 (en) * | 1999-09-01 | 2002-04-23 | Symetrix Corporation | Metal organic precursors for transparent metal oxide thin films and method of making same |
US6623656B2 (en) * | 1999-10-07 | 2003-09-23 | Advanced Technology Materials, Inc. | Source reagent composition for CVD formation of Zr/Hf doped gate dielectric and high dielectric constant metal oxide thin films and method of using same |
JP2001181288A (ja) * | 1999-12-24 | 2001-07-03 | Asahi Denka Kogyo Kk | 化学的気相成長用金属アルコキシド化合物及びこれを用いた複合金属酸化物薄膜 |
JP2001234343A (ja) * | 2000-02-17 | 2001-08-31 | Asahi Denka Kogyo Kk | 金属化合物溶液及びこれを用いた薄膜の製造方法 |
JP4868639B2 (ja) | 2000-06-12 | 2012-02-01 | 株式会社Adeka | 化学気相成長用原料及びこれを用いた薄膜の製造方法 |
EP1184365A3 (de) * | 2000-08-26 | 2003-08-06 | Samsung Electronics Co., Ltd. | Metall-Vorläufer der Gruppe IV und ein Chemical-Vapor-Deposition-Verfahren mit diesem |
US6642567B1 (en) * | 2000-08-31 | 2003-11-04 | Micron Technology, Inc. | Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices |
US6416814B1 (en) * | 2000-12-07 | 2002-07-09 | First Solar, Llc | Volatile organometallic complexes of lowered reactivity suitable for use in chemical vapor deposition of metal oxide films |
US6552209B1 (en) * | 2002-06-24 | 2003-04-22 | Air Products And Chemicals, Inc. | Preparation of metal imino/amino complexes for metal oxide and metal nitride thin films |
-
2002
- 2002-10-25 JP JP2003538422A patent/JP4472338B2/ja not_active Expired - Fee Related
- 2002-10-25 DE DE02772548T patent/DE02772548T1/de active Pending
- 2002-10-25 AT AT02772548T patent/ATE340800T1/de not_active IP Right Cessation
- 2002-10-25 EP EP02772548A patent/EP1438315B1/de not_active Expired - Lifetime
- 2002-10-25 DE DE60215034T patent/DE60215034T2/de not_active Expired - Lifetime
- 2002-10-25 US US10/493,667 patent/US7419698B2/en not_active Expired - Fee Related
- 2002-10-25 WO PCT/GB2002/004822 patent/WO2003035926A2/en active IP Right Grant
- 2002-10-25 CN CNB028204379A patent/CN100379745C/zh not_active Expired - Fee Related
- 2002-10-25 AU AU2002337310A patent/AU2002337310A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN100379745C (zh) | 2008-04-09 |
DE02772548T1 (de) | 2004-11-11 |
JP4472338B2 (ja) | 2010-06-02 |
ATE340800T1 (de) | 2006-10-15 |
AU2002337310A1 (en) | 2003-05-06 |
EP1438315A2 (de) | 2004-07-21 |
US20050008781A1 (en) | 2005-01-13 |
JP2005506387A (ja) | 2005-03-03 |
CN1571790A (zh) | 2005-01-26 |
DE60215034T2 (de) | 2007-04-05 |
EP1438315B1 (de) | 2006-09-27 |
WO2003035926A3 (en) | 2003-06-12 |
WO2003035926A2 (en) | 2003-05-01 |
US7419698B2 (en) | 2008-09-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |