GB0129080D0 - Improved precursors for chemical vapour deposition - Google Patents

Improved precursors for chemical vapour deposition

Info

Publication number
GB0129080D0
GB0129080D0 GB0129080A GB0129080A GB0129080D0 GB 0129080 D0 GB0129080 D0 GB 0129080D0 GB 0129080 A GB0129080 A GB 0129080A GB 0129080 A GB0129080 A GB 0129080A GB 0129080 D0 GB0129080 D0 GB 0129080D0
Authority
GB
United Kingdom
Prior art keywords
vapour deposition
chemical vapour
improved precursors
precursors
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0129080A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inorgtech Ltd
Original Assignee
Inorgtech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inorgtech Ltd filed Critical Inorgtech Ltd
Priority to GB0129080A priority Critical patent/GB0129080D0/en
Publication of GB0129080D0 publication Critical patent/GB0129080D0/en
Priority to US10/493,667 priority patent/US7419698B2/en
Priority to DE60215034T priority patent/DE60215034T2/en
Priority to EP02772548A priority patent/EP1438315B1/en
Priority to DE02772548T priority patent/DE02772548T1/en
Priority to JP2003538422A priority patent/JP4472338B2/en
Priority to CNB028204379A priority patent/CN100379745C/en
Priority to AT02772548T priority patent/ATE340800T1/en
Priority to AU2002337310A priority patent/AU2002337310A1/en
Priority to PCT/GB2002/004822 priority patent/WO2003035926A2/en
Priority to TW91134964A priority patent/TWI275657B/en
Ceased legal-status Critical Current

Links

GB0129080A 2001-10-26 2001-12-04 Improved precursors for chemical vapour deposition Ceased GB0129080D0 (en)

Priority Applications (11)

Application Number Priority Date Filing Date Title
GB0129080A GB0129080D0 (en) 2001-12-04 2001-12-04 Improved precursors for chemical vapour deposition
PCT/GB2002/004822 WO2003035926A2 (en) 2001-10-26 2002-10-25 Improved precursors for chemical vapour deposition
DE02772548T DE02772548T1 (en) 2001-10-26 2002-10-25 PRECURSOR CONNECTIONS FOR CHEMICAL VAPOR PHASE DEPOSITION
DE60215034T DE60215034T2 (en) 2001-10-26 2002-10-25 PROVISIONAL COMPOUNDS FOR CHEMICAL STEAM PHASE SEPARATION
EP02772548A EP1438315B1 (en) 2001-10-26 2002-10-25 Improved precursors for chemical vapour deposition
US10/493,667 US7419698B2 (en) 2001-10-26 2002-10-25 Precursors for chemical vapor deposition
JP2003538422A JP4472338B2 (en) 2001-10-26 2002-10-25 An improved precursor for chemical vapor deposition.
CNB028204379A CN100379745C (en) 2001-10-26 2002-10-25 Improved precursors for chemical vapour deposition
AT02772548T ATE340800T1 (en) 2001-10-26 2002-10-25 PRECURSOR COMPOUNDS FOR CHEMICAL VAPOR DEPOSITION
AU2002337310A AU2002337310A1 (en) 2001-10-26 2002-10-25 Improved precursors for chemical vapour deposition
TW91134964A TWI275657B (en) 2001-10-26 2002-12-02 Improved precursors for chemical vapour deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0129080A GB0129080D0 (en) 2001-12-04 2001-12-04 Improved precursors for chemical vapour deposition

Publications (1)

Publication Number Publication Date
GB0129080D0 true GB0129080D0 (en) 2002-01-23

Family

ID=9927019

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0129080A Ceased GB0129080D0 (en) 2001-10-26 2001-12-04 Improved precursors for chemical vapour deposition

Country Status (2)

Country Link
GB (1) GB0129080D0 (en)
TW (1) TWI275657B (en)

Also Published As

Publication number Publication date
TWI275657B (en) 2007-03-11
TW200300801A (en) 2003-06-16

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)