GB0129080D0 - Improved precursors for chemical vapour deposition - Google Patents
Improved precursors for chemical vapour depositionInfo
- Publication number
- GB0129080D0 GB0129080D0 GB0129080A GB0129080A GB0129080D0 GB 0129080 D0 GB0129080 D0 GB 0129080D0 GB 0129080 A GB0129080 A GB 0129080A GB 0129080 A GB0129080 A GB 0129080A GB 0129080 D0 GB0129080 D0 GB 0129080D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- vapour deposition
- chemical vapour
- improved precursors
- precursors
- improved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0129080A GB0129080D0 (en) | 2001-12-04 | 2001-12-04 | Improved precursors for chemical vapour deposition |
PCT/GB2002/004822 WO2003035926A2 (en) | 2001-10-26 | 2002-10-25 | Improved precursors for chemical vapour deposition |
DE02772548T DE02772548T1 (en) | 2001-10-26 | 2002-10-25 | PRECURSOR CONNECTIONS FOR CHEMICAL VAPOR PHASE DEPOSITION |
DE60215034T DE60215034T2 (en) | 2001-10-26 | 2002-10-25 | PROVISIONAL COMPOUNDS FOR CHEMICAL STEAM PHASE SEPARATION |
EP02772548A EP1438315B1 (en) | 2001-10-26 | 2002-10-25 | Improved precursors for chemical vapour deposition |
US10/493,667 US7419698B2 (en) | 2001-10-26 | 2002-10-25 | Precursors for chemical vapor deposition |
JP2003538422A JP4472338B2 (en) | 2001-10-26 | 2002-10-25 | An improved precursor for chemical vapor deposition. |
CNB028204379A CN100379745C (en) | 2001-10-26 | 2002-10-25 | Improved precursors for chemical vapour deposition |
AT02772548T ATE340800T1 (en) | 2001-10-26 | 2002-10-25 | PRECURSOR COMPOUNDS FOR CHEMICAL VAPOR DEPOSITION |
AU2002337310A AU2002337310A1 (en) | 2001-10-26 | 2002-10-25 | Improved precursors for chemical vapour deposition |
TW91134964A TWI275657B (en) | 2001-10-26 | 2002-12-02 | Improved precursors for chemical vapour deposition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0129080A GB0129080D0 (en) | 2001-12-04 | 2001-12-04 | Improved precursors for chemical vapour deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0129080D0 true GB0129080D0 (en) | 2002-01-23 |
Family
ID=9927019
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0129080A Ceased GB0129080D0 (en) | 2001-10-26 | 2001-12-04 | Improved precursors for chemical vapour deposition |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB0129080D0 (en) |
TW (1) | TWI275657B (en) |
-
2001
- 2001-12-04 GB GB0129080A patent/GB0129080D0/en not_active Ceased
-
2002
- 2002-12-02 TW TW91134964A patent/TWI275657B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI275657B (en) | 2007-03-11 |
TW200300801A (en) | 2003-06-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |