GB0321409D0 - Precursors for chemical vapour deposition - Google Patents

Precursors for chemical vapour deposition

Info

Publication number
GB0321409D0
GB0321409D0 GB0321409A GB0321409A GB0321409D0 GB 0321409 D0 GB0321409 D0 GB 0321409D0 GB 0321409 A GB0321409 A GB 0321409A GB 0321409 A GB0321409 A GB 0321409A GB 0321409 D0 GB0321409 D0 GB 0321409D0
Authority
GB
United Kingdom
Prior art keywords
precursors
vapour deposition
chemical vapour
chemical
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0321409A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Epichem Ltd
Original Assignee
Epichem Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epichem Ltd filed Critical Epichem Ltd
Priority to GB0321409A priority Critical patent/GB0321409D0/en
Publication of GB0321409D0 publication Critical patent/GB0321409D0/en
Priority to DE602004014258T priority patent/DE602004014258D1/en
Priority to AT04719537T priority patent/ATE397612T1/en
Priority to GB0405441A priority patent/GB2399568B/en
Priority to EP04719537A priority patent/EP1603924B1/en
Priority to DE04719537T priority patent/DE04719537T1/en
Priority to JP2006505949A priority patent/JP4575362B2/en
Priority to KR1020117023671A priority patent/KR20110118735A/en
Priority to US10/548,946 priority patent/US7927661B2/en
Priority to KR1020057017513A priority patent/KR101120150B1/en
Priority to PCT/GB2004/001047 priority patent/WO2004083479A2/en
Priority to TW093107221A priority patent/TWI327176B/en
Priority to US13/036,602 priority patent/US20110184156A1/en
Ceased legal-status Critical Current

Links

GB0321409A 2003-03-17 2003-09-12 Precursors for chemical vapour deposition Ceased GB0321409D0 (en)

Priority Applications (13)

Application Number Priority Date Filing Date Title
GB0321409A GB0321409D0 (en) 2003-09-12 2003-09-12 Precursors for chemical vapour deposition
PCT/GB2004/001047 WO2004083479A2 (en) 2003-03-17 2004-03-11 Alcoholates of rare earth mtals a precursors for metaloxide layers or films
JP2006505949A JP4575362B2 (en) 2003-03-17 2004-03-11 Precursor for forming metal oxide layer or film
AT04719537T ATE397612T1 (en) 2003-03-17 2004-03-11 ALCOHOLATES OF RARE EARTH METALS AS PRECURSORS FOR METAL OXIDE LAYERS AND FILM
GB0405441A GB2399568B (en) 2003-03-17 2004-03-11 Precursors for deposition of metal oxide layers or films
EP04719537A EP1603924B1 (en) 2003-03-17 2004-03-11 Alcoholates of rare earth mtals a precursors for metaloxides layers or films
DE04719537T DE04719537T1 (en) 2003-03-17 2004-03-11 ALCOHOLS OF RARE METALS AS PRE-GROUNDS FOR METAL OXYGEN LAYERS AND FILMS
DE602004014258T DE602004014258D1 (en) 2003-03-17 2004-03-11 ALCOHOLS OF RARE METALS AS PRE-GROUNDS FOR METAL OXYGEN LAYERS AND FILMS
KR1020117023671A KR20110118735A (en) 2003-03-17 2004-03-11 Precursors for deposition of metal oxide layers or films
US10/548,946 US7927661B2 (en) 2003-03-17 2004-03-11 Methods of depositing a metal oxide layer or film using a rare earth metal precursor
KR1020057017513A KR101120150B1 (en) 2003-03-17 2004-03-11 Precursors for deposition of metal oxide layers or films
TW093107221A TWI327176B (en) 2003-03-17 2004-03-17 Precursors for deposition of metal oxide layers or films
US13/036,602 US20110184156A1 (en) 2003-03-17 2011-04-12 Precursors for deposition of metal oxide layers or films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0321409A GB0321409D0 (en) 2003-09-12 2003-09-12 Precursors for chemical vapour deposition

Publications (1)

Publication Number Publication Date
GB0321409D0 true GB0321409D0 (en) 2003-10-15

Family

ID=29226980

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0321409A Ceased GB0321409D0 (en) 2003-03-17 2003-09-12 Precursors for chemical vapour deposition

Country Status (1)

Country Link
GB (1) GB0321409D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)