GB0321409D0 - Precursors for chemical vapour deposition - Google Patents
Precursors for chemical vapour depositionInfo
- Publication number
- GB0321409D0 GB0321409D0 GB0321409A GB0321409A GB0321409D0 GB 0321409 D0 GB0321409 D0 GB 0321409D0 GB 0321409 A GB0321409 A GB 0321409A GB 0321409 A GB0321409 A GB 0321409A GB 0321409 D0 GB0321409 D0 GB 0321409D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- precursors
- vapour deposition
- chemical vapour
- chemical
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (13)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0321409A GB0321409D0 (en) | 2003-09-12 | 2003-09-12 | Precursors for chemical vapour deposition |
PCT/GB2004/001047 WO2004083479A2 (en) | 2003-03-17 | 2004-03-11 | Alcoholates of rare earth mtals a precursors for metaloxide layers or films |
JP2006505949A JP4575362B2 (en) | 2003-03-17 | 2004-03-11 | Precursor for forming metal oxide layer or film |
AT04719537T ATE397612T1 (en) | 2003-03-17 | 2004-03-11 | ALCOHOLATES OF RARE EARTH METALS AS PRECURSORS FOR METAL OXIDE LAYERS AND FILM |
GB0405441A GB2399568B (en) | 2003-03-17 | 2004-03-11 | Precursors for deposition of metal oxide layers or films |
EP04719537A EP1603924B1 (en) | 2003-03-17 | 2004-03-11 | Alcoholates of rare earth mtals a precursors for metaloxides layers or films |
DE04719537T DE04719537T1 (en) | 2003-03-17 | 2004-03-11 | ALCOHOLS OF RARE METALS AS PRE-GROUNDS FOR METAL OXYGEN LAYERS AND FILMS |
DE602004014258T DE602004014258D1 (en) | 2003-03-17 | 2004-03-11 | ALCOHOLS OF RARE METALS AS PRE-GROUNDS FOR METAL OXYGEN LAYERS AND FILMS |
KR1020117023671A KR20110118735A (en) | 2003-03-17 | 2004-03-11 | Precursors for deposition of metal oxide layers or films |
US10/548,946 US7927661B2 (en) | 2003-03-17 | 2004-03-11 | Methods of depositing a metal oxide layer or film using a rare earth metal precursor |
KR1020057017513A KR101120150B1 (en) | 2003-03-17 | 2004-03-11 | Precursors for deposition of metal oxide layers or films |
TW093107221A TWI327176B (en) | 2003-03-17 | 2004-03-17 | Precursors for deposition of metal oxide layers or films |
US13/036,602 US20110184156A1 (en) | 2003-03-17 | 2011-04-12 | Precursors for deposition of metal oxide layers or films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0321409A GB0321409D0 (en) | 2003-09-12 | 2003-09-12 | Precursors for chemical vapour deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0321409D0 true GB0321409D0 (en) | 2003-10-15 |
Family
ID=29226980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0321409A Ceased GB0321409D0 (en) | 2003-03-17 | 2003-09-12 | Precursors for chemical vapour deposition |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB0321409D0 (en) |
-
2003
- 2003-09-12 GB GB0321409A patent/GB0321409D0/en not_active Ceased
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |