GB0119224D0 - Precursors for metalorganic chemical vapour deposition - Google Patents

Precursors for metalorganic chemical vapour deposition

Info

Publication number
GB0119224D0
GB0119224D0 GBGB0119224.4A GB0119224A GB0119224D0 GB 0119224 D0 GB0119224 D0 GB 0119224D0 GB 0119224 A GB0119224 A GB 0119224A GB 0119224 D0 GB0119224 D0 GB 0119224D0
Authority
GB
United Kingdom
Prior art keywords
precursors
vapour deposition
chemical vapour
metalorganic chemical
metalorganic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0119224.4A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inorgtech Ltd
Original Assignee
Inorgtech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inorgtech Ltd filed Critical Inorgtech Ltd
Priority to GBGB0119224.4A priority Critical patent/GB0119224D0/en
Publication of GB0119224D0 publication Critical patent/GB0119224D0/en
Priority to PCT/GB2002/003657 priority patent/WO2003014134A1/en
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/005—Compounds of elements of Group 5 of the Periodic Table without metal-carbon linkages
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/003—Compounds containing elements of Groups 4 or 14 of the Periodic Table without C-Metal linkages

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
GBGB0119224.4A 2001-08-07 2001-08-07 Precursors for metalorganic chemical vapour deposition Ceased GB0119224D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB0119224.4A GB0119224D0 (en) 2001-08-07 2001-08-07 Precursors for metalorganic chemical vapour deposition
PCT/GB2002/003657 WO2003014134A1 (en) 2001-08-07 2002-08-07 Precursors for metalorganic chemical vapour deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0119224.4A GB0119224D0 (en) 2001-08-07 2001-08-07 Precursors for metalorganic chemical vapour deposition

Publications (1)

Publication Number Publication Date
GB0119224D0 true GB0119224D0 (en) 2001-09-26

Family

ID=9919944

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0119224.4A Ceased GB0119224D0 (en) 2001-08-07 2001-08-07 Precursors for metalorganic chemical vapour deposition

Country Status (2)

Country Link
GB (1) GB0119224D0 (en)
WO (1) WO2003014134A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005004222A1 (en) * 2003-07-04 2005-01-13 Koninklijke Philips Electronics N.V. Precursor solution, method of preparation thereof and use thereof
DE102007058571B4 (en) * 2007-12-05 2012-02-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Substrate with a copper-containing coating and method for their preparation by means of atomic layer deposition and use of the method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3153000A (en) * 1960-09-28 1964-10-13 Hughes Aircraft Co Ordered organo-silicon-chelated titanium oxide copolymers and methods of making same
HU199679B (en) * 1983-02-09 1990-03-28 Byk Gulden Lomberg Chem Fab Process for producing new complex compounds and antineoplastic compositions containing them
US6184403B1 (en) * 1999-05-19 2001-02-06 Research Foundation Of State University Of New York MOCVD precursors based on organometalloid ligands
US6099903A (en) * 1999-05-19 2000-08-08 Research Foundation Of State University Of New York MOCVD processes using precursors based on organometalloid ligands

Also Published As

Publication number Publication date
WO2003014134A1 (en) 2003-02-20

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)