DE602008002784D1 - Halbleiterbauelement - Google Patents
HalbleiterbauelementInfo
- Publication number
- DE602008002784D1 DE602008002784D1 DE602008002784T DE602008002784T DE602008002784D1 DE 602008002784 D1 DE602008002784 D1 DE 602008002784D1 DE 602008002784 T DE602008002784 T DE 602008002784T DE 602008002784 T DE602008002784 T DE 602008002784T DE 602008002784 D1 DE602008002784 D1 DE 602008002784D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007130980A JP4961260B2 (ja) | 2007-05-16 | 2007-05-16 | 半導体装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602008002784D1 true DE602008002784D1 (de) | 2010-11-11 |
Family
ID=39650507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602008002784T Active DE602008002784D1 (de) | 2007-05-16 | 2008-05-16 | Halbleiterbauelement |
Country Status (4)
Country | Link |
---|---|
US (1) | US7923795B2 (de) |
EP (1) | EP1992421B1 (de) |
JP (1) | JP4961260B2 (de) |
DE (1) | DE602008002784D1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5329408B2 (ja) * | 2007-07-11 | 2013-10-30 | 株式会社日立メディコ | 超音波探触子及び超音波診断装置 |
JP5409251B2 (ja) * | 2008-11-19 | 2014-02-05 | キヤノン株式会社 | 電気機械変換装置およびその製造方法 |
JP5286369B2 (ja) | 2009-01-16 | 2013-09-11 | 株式会社日立メディコ | 超音波探触子の製造方法および超音波探触子 |
US20110316383A1 (en) * | 2009-03-05 | 2011-12-29 | Hitachi Medical Corporation | Ultrasonic transducer, method of producing same, and ultrasonic probe using same |
JP5409138B2 (ja) * | 2009-06-19 | 2014-02-05 | キヤノン株式会社 | 電気機械変換装置、電気機械変換装置の感度ばらつき検出方法、及び補正方法 |
WO2011039798A1 (ja) * | 2009-09-29 | 2011-04-07 | パイオニア株式会社 | Memsセンサおよびこれを備えたセンサアレイ |
WO2011039799A1 (ja) * | 2009-09-29 | 2011-04-07 | パイオニア株式会社 | センサアレイ |
WO2011039797A1 (ja) * | 2009-09-29 | 2011-04-07 | パイオニア株式会社 | Memsセンサ |
US8617078B2 (en) | 2010-03-12 | 2013-12-31 | Hitachi Medical Corporation | Ultrasonic transducer and ultrasonic diagnostic device using same |
JP5875243B2 (ja) | 2011-04-06 | 2016-03-02 | キヤノン株式会社 | 電気機械変換装置及びその作製方法 |
JP5875244B2 (ja) * | 2011-04-06 | 2016-03-02 | キヤノン株式会社 | 電気機械変換装置及びその作製方法 |
US9828236B2 (en) | 2012-01-27 | 2017-11-28 | Koninklijke Philips N.V. | Capacitive micro-machined transducer and method of manufacturing the same |
MX2014008859A (es) | 2012-01-27 | 2014-10-06 | Koninkl Philips Nv | Transductor micro-mecanizado capacitivo y metodo para la fabricacion del mismo. |
JP6064342B2 (ja) * | 2012-03-12 | 2017-01-25 | セイコーエプソン株式会社 | 振動片および電子機器 |
JP2013219303A (ja) * | 2012-04-12 | 2013-10-24 | Hitachi Ltd | 半導体装置およびその製造方法 |
US9364862B2 (en) | 2012-11-02 | 2016-06-14 | University Of Windsor | Ultrasonic sensor microarray and method of manufacturing same |
US9035532B2 (en) * | 2012-11-02 | 2015-05-19 | University Of Windsor | Ultrasonic sensor microarray and method of manufacturing same |
US9857457B2 (en) | 2013-03-14 | 2018-01-02 | University Of Windsor | Ultrasonic sensor microarray and its method of manufacture |
CA2856917A1 (en) | 2013-07-19 | 2015-01-19 | University Of Windsor | Ultrasonic sensor microarray and method of manufacturing same |
JP2016101417A (ja) | 2014-11-28 | 2016-06-02 | キヤノン株式会社 | 静電容量型音響波トランスデューサ及びこれを備えた被検体情報取得装置 |
JP2016122759A (ja) * | 2014-12-25 | 2016-07-07 | キヤノン株式会社 | 貫通配線を有する電子デバイスの作製方法 |
US9997425B2 (en) | 2015-07-14 | 2018-06-12 | University Of Windsor | Layered benzocyclobutene interconnected circuit and method of manufacturing same |
JP6184534B2 (ja) * | 2016-01-18 | 2017-08-23 | キヤノン株式会社 | 電気機械変換装置及びその作製方法 |
JP6904814B2 (ja) | 2017-06-30 | 2021-07-21 | キヤノン株式会社 | 中空構造体の製造方法、及び中空構造体 |
JP2019075831A (ja) * | 2019-02-12 | 2019-05-16 | キヤノン株式会社 | 静電容量型音響波トランスデューサ及びこれを備えた被検体情報取得装置 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3029624B2 (ja) * | 1989-06-21 | 2000-04-04 | トキコ株式会社 | 給油装置 |
JPH04356979A (ja) * | 1991-05-27 | 1992-12-10 | Matsushita Electric Works Ltd | 赤外線センサ |
JP3525563B2 (ja) * | 1995-06-28 | 2004-05-10 | 株式会社デンソー | 半導体力学量センサの製造方法 |
US6727170B2 (en) * | 1998-02-16 | 2004-04-27 | Renesas Technology Corp. | Semiconductor device having an improved interlayer conductor connections and a manufacturing method thereof |
US6271620B1 (en) * | 1999-05-20 | 2001-08-07 | Sen Corporation | Acoustic transducer and method of making the same |
JP4296731B2 (ja) * | 2001-07-18 | 2009-07-15 | 株式会社デンソー | 静電容量型圧力センサの製造方法 |
US7087023B2 (en) * | 2003-02-14 | 2006-08-08 | Sensant Corporation | Microfabricated ultrasonic transducers with bias polarity beam profile control and method of operating the same |
JP4229122B2 (ja) * | 2003-05-26 | 2009-02-25 | 株式会社村田製作所 | 圧電電子部品、およびその製造方法、通信機 |
JP2004361115A (ja) * | 2003-06-02 | 2004-12-24 | Denso Corp | 半導体力学量センサ |
JP4545401B2 (ja) * | 2003-07-22 | 2010-09-15 | パナソニック株式会社 | 半導体装置の製造方法 |
JP4419563B2 (ja) * | 2003-12-25 | 2010-02-24 | パナソニック株式会社 | エレクトレットコンデンサー |
EP1761998A4 (de) * | 2004-02-27 | 2011-05-11 | Georgia Tech Res Inst | Harmonische cmut-vorrichtungen und herstellungsverfahren |
EP1779784B1 (de) * | 2004-06-07 | 2015-10-14 | Olympus Corporation | Ultraschallwandler vom elektrostatischen kapazitätstyp |
JP4746291B2 (ja) * | 2004-08-05 | 2011-08-10 | オリンパス株式会社 | 静電容量型超音波振動子、及びその製造方法 |
JP4244885B2 (ja) * | 2004-08-31 | 2009-03-25 | パナソニック株式会社 | エレクトレットコンデンサー |
KR100611768B1 (ko) * | 2004-10-11 | 2006-08-10 | 삼성에스디아이 주식회사 | 유기전계발광표시장치 및 그 제조방법 |
JP4503423B2 (ja) * | 2004-11-29 | 2010-07-14 | 富士フイルム株式会社 | 容量性マイクロマシン超音波振動子及びその製造方法、並びに、超音波トランスデューサアレイ |
JP4434109B2 (ja) | 2005-09-05 | 2010-03-17 | 株式会社日立製作所 | 電気・音響変換素子 |
JP4724501B2 (ja) * | 2005-09-06 | 2011-07-13 | 株式会社日立製作所 | 超音波トランスデューサおよびその製造方法 |
JP4724505B2 (ja) * | 2005-09-09 | 2011-07-13 | 株式会社日立製作所 | 超音波探触子およびその製造方法 |
US20070180916A1 (en) | 2006-02-09 | 2007-08-09 | General Electric Company | Capacitive micromachined ultrasound transducer and methods of making the same |
-
2007
- 2007-05-16 JP JP2007130980A patent/JP4961260B2/ja not_active Expired - Fee Related
-
2008
- 2008-05-15 US US12/121,736 patent/US7923795B2/en not_active Expired - Fee Related
- 2008-05-16 EP EP08009129A patent/EP1992421B1/de not_active Expired - Fee Related
- 2008-05-16 DE DE602008002784T patent/DE602008002784D1/de active Active
Also Published As
Publication number | Publication date |
---|---|
US20080283945A1 (en) | 2008-11-20 |
JP4961260B2 (ja) | 2012-06-27 |
JP2008288813A (ja) | 2008-11-27 |
EP1992421A1 (de) | 2008-11-19 |
US7923795B2 (en) | 2011-04-12 |
EP1992421B1 (de) | 2010-09-29 |
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