DE602007001819D1 - Trägheitsantriebsaktuator - Google Patents

Trägheitsantriebsaktuator

Info

Publication number
DE602007001819D1
DE602007001819D1 DE602007001819T DE602007001819T DE602007001819D1 DE 602007001819 D1 DE602007001819 D1 DE 602007001819D1 DE 602007001819 T DE602007001819 T DE 602007001819T DE 602007001819 T DE602007001819 T DE 602007001819T DE 602007001819 D1 DE602007001819 D1 DE 602007001819D1
Authority
DE
Germany
Prior art keywords
electrode
vibrating substrate
mobile object
plane
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007001819T
Other languages
English (en)
Inventor
Kaoru Matsuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of DE602007001819D1 publication Critical patent/DE602007001819D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
DE602007001819T 2006-04-12 2007-04-11 Trägheitsantriebsaktuator Active DE602007001819D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006109834A JP4912728B2 (ja) 2006-04-12 2006-04-12 慣性駆動アクチュエータ

Publications (1)

Publication Number Publication Date
DE602007001819D1 true DE602007001819D1 (de) 2009-09-17

Family

ID=38222231

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007001819T Active DE602007001819D1 (de) 2006-04-12 2007-04-11 Trägheitsantriebsaktuator

Country Status (5)

Country Link
US (1) US7535661B2 (de)
EP (1) EP1845608B1 (de)
JP (1) JP4912728B2 (de)
AT (1) ATE438949T1 (de)
DE (1) DE602007001819D1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007108466A1 (ja) * 2006-03-22 2007-09-27 Nikon Corporation 振動子、振動アクチュエータ、レンズ鏡筒、カメラシステム及び振動アクチュエータの駆動方法
JP2008125229A (ja) * 2006-11-10 2008-05-29 Olympus Corp 慣性駆動アクチュエータ
JP4951318B2 (ja) * 2006-11-16 2012-06-13 ペンタックスリコーイメージング株式会社 移動装置
JP2009022067A (ja) * 2007-07-10 2009-01-29 Olympus Corp 慣性駆動アクチュエータ
JP5185640B2 (ja) * 2008-01-25 2013-04-17 オリンパス株式会社 慣性駆動アクチュエータ
JP5155731B2 (ja) * 2008-05-08 2013-03-06 オリンパス株式会社 慣性駆動アクチュエータ
JP2009296797A (ja) * 2008-06-05 2009-12-17 Olympus Corp 慣性駆動アクチュエータ
JP5522960B2 (ja) * 2009-03-17 2014-06-18 オリンパス株式会社 慣性駆動アクチュエータのキャリブレーション方法、慣性駆動アクチュエータ装置及び移動体の位置算出方法
JP5722145B2 (ja) * 2011-07-08 2015-05-20 オリンパス株式会社 慣性駆動アクチュエータ
JP5808000B2 (ja) * 2011-07-08 2015-11-10 オリンパス株式会社 慣性駆動アクチュエータ
JP5851210B2 (ja) 2011-11-11 2016-02-03 オリンパス株式会社 慣性駆動アクチュエータ
JP5784461B2 (ja) 2011-11-11 2015-09-24 オリンパス株式会社 慣性駆動アクチュエータ
JP5889100B2 (ja) * 2012-05-01 2016-03-22 オリンパス株式会社 慣性駆動アクチュエータ
US9892837B2 (en) 2015-05-21 2018-02-13 Adicep Technologies, Inc Energy efficient actuator
US11606045B2 (en) 2018-01-19 2023-03-14 Thorlabs, Inc. Compact piezoelectric inertial drive stage
CN111954976B (zh) 2018-01-19 2023-10-13 统雷有限公司 紧凑型压电惯性驱动台
CN110032116B (zh) * 2019-04-25 2020-10-27 中国科学技术大学 一种闭环控制压电驱动在线监测装置
CA3103330A1 (en) 2020-11-17 2022-05-17 Thorlabs, Inc. Compact piezoelectric inertial drive stage

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225941A (en) * 1990-07-03 1993-07-06 Canon Kabushiki Kaisha Driving device
JPH05137352A (ja) * 1991-11-15 1993-06-01 Ricoh Co Ltd 駆動機構
US5589723A (en) 1994-03-29 1996-12-31 Minolta Co., Ltd. Driving apparatus using transducer
US5629577A (en) 1994-07-15 1997-05-13 Micro Medical Devices Miniature linear motion actuator
JPH11285279A (ja) * 1998-03-30 1999-10-15 Tdk Corp 弾性表面波アクチュエータ
DE19950271A1 (de) 1998-10-21 2001-02-15 Univ Ilmenau Tech Linearantrieb nach biologischen Vorbild
JP2001054290A (ja) * 1999-08-06 2001-02-23 Minolta Co Ltd 弾性表面波モータ
JP3417390B2 (ja) * 2000-08-01 2003-06-16 ミノルタ株式会社 電気機械変換素子を使用したアクチエータ
JP3759508B2 (ja) 2003-03-31 2006-03-29 オリンパス株式会社 アクチュエータ及びアクチュエータ駆動方法並びにアクチュエータシステム
JP2007129821A (ja) * 2005-11-02 2007-05-24 Olympus Corp インパクト駆動アクチュエータ及びこれを用いたレンズ駆動装置

Also Published As

Publication number Publication date
US7535661B2 (en) 2009-05-19
EP1845608B1 (de) 2009-08-05
EP1845608A3 (de) 2008-11-05
US20070241640A1 (en) 2007-10-18
JP2007288828A (ja) 2007-11-01
EP1845608A2 (de) 2007-10-17
ATE438949T1 (de) 2009-08-15
JP4912728B2 (ja) 2012-04-11

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Legal Events

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