DE602005025765D1 - Vibrationswellenantrieb und vibrator - Google Patents

Vibrationswellenantrieb und vibrator

Info

Publication number
DE602005025765D1
DE602005025765D1 DE602005025765T DE602005025765T DE602005025765D1 DE 602005025765 D1 DE602005025765 D1 DE 602005025765D1 DE 602005025765 T DE602005025765 T DE 602005025765T DE 602005025765 T DE602005025765 T DE 602005025765T DE 602005025765 D1 DE602005025765 D1 DE 602005025765D1
Authority
DE
Germany
Prior art keywords
vibrator
wave drive
vibratory wave
vibratory
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005025765T
Other languages
English (en)
Inventor
Nobuyuki Kojima
Satoru Kitajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE602005025765D1 publication Critical patent/DE602005025765D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
DE602005025765T 2004-06-09 2005-06-09 Vibrationswellenantrieb und vibrator Active DE602005025765D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004171641A JP4072518B2 (ja) 2004-06-09 2004-06-09 振動波駆動装置
PCT/JP2005/010989 WO2005122381A1 (en) 2004-06-09 2005-06-09 Vibration wave driven apparatus and vibrator

Publications (1)

Publication Number Publication Date
DE602005025765D1 true DE602005025765D1 (de) 2011-02-17

Family

ID=35503428

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005025765T Active DE602005025765D1 (de) 2004-06-09 2005-06-09 Vibrationswellenantrieb und vibrator

Country Status (6)

Country Link
US (2) US7518286B2 (de)
EP (1) EP1759451B1 (de)
JP (1) JP4072518B2 (de)
CN (1) CN100566115C (de)
DE (1) DE602005025765D1 (de)
WO (1) WO2005122381A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008076719A (ja) * 2006-09-21 2008-04-03 Canon Inc 光学機器
JP5188061B2 (ja) * 2006-12-08 2013-04-24 キヤノン株式会社 振動波駆動装置
JP5137406B2 (ja) * 2007-01-11 2013-02-06 キヤノン株式会社 振動型駆動装置
JP5349768B2 (ja) * 2007-06-27 2013-11-20 キヤノン株式会社 振動波駆動装置
JP5159452B2 (ja) * 2007-07-20 2013-03-06 キヤノン株式会社 アクチュエータ
TWI408888B (zh) * 2008-08-07 2013-09-11 Ind Tech Res Inst 超音波線性馬達
US7969065B2 (en) * 2008-09-09 2011-06-28 Canon Kabushiki Kaisha Vibration wave driving device
JP5701020B2 (ja) * 2010-11-24 2015-04-15 キヤノン株式会社 振動型駆動装置における振動体とその製造方法、振動型駆動装置とその振動子
JP5979817B2 (ja) * 2010-03-16 2016-08-31 キヤノン株式会社 振動波駆動装置
JP5656429B2 (ja) * 2010-03-23 2015-01-21 キヤノン株式会社 振動波駆動装置
US8643252B2 (en) 2010-05-11 2014-02-04 Canon Kabushiki Kaisha Vibration wave actuator
JP5814543B2 (ja) 2010-12-06 2015-11-17 キヤノン株式会社 駆動装置、レンズ鏡筒及びレンズ鏡筒を有する光学機器
JP5765993B2 (ja) * 2011-03-31 2015-08-19 キヤノン株式会社 振動型駆動装置
JP5722145B2 (ja) * 2011-07-08 2015-05-20 オリンパス株式会社 慣性駆動アクチュエータ
JP6525640B2 (ja) * 2015-03-02 2019-06-05 キヤノン株式会社 振動型アクチュエータ、超音波モータおよびレンズ鏡筒
JP6639243B2 (ja) 2016-01-14 2020-02-05 キヤノン株式会社 振動型アクチュエータ及び電子機器
JP2018107437A (ja) * 2016-12-27 2018-07-05 キヤノン株式会社 振動子、振動波駆動装置、振動波モータおよび電子機器
CN114257122B (zh) 2020-09-23 2024-01-30 精工爱普生株式会社 压电驱动装置以及机器人

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06106028B2 (ja) 1987-02-02 1994-12-21 リオン株式会社 圧電共振モ−タ
JPH0624395U (ja) * 1992-08-24 1994-03-29 株式会社ケンウッド 超音波モータの振動体構造
JPH06106028A (ja) 1992-09-24 1994-04-19 Mitsui Mining Co Ltd 亜酸化窒素含有ガスを処理する方法
JPH06165539A (ja) 1992-11-20 1994-06-10 Asmo Co Ltd リニア型超音波モータ
US5698930A (en) * 1993-11-15 1997-12-16 Nikon Corporation Ultrasonic wave motor and method of manufacture
US5672930A (en) * 1993-12-21 1997-09-30 Nikon Corporation Vibration motor
JPH07274552A (ja) * 1994-04-01 1995-10-20 Nikon Corp リニアモータ
DE69507857T2 (de) * 1994-07-05 1999-08-19 Nikon Corp Durch Vibrationen angetriebener Motor
JP3276100B2 (ja) * 1995-05-15 2002-04-22 松下電器産業株式会社 超音波モータ
US5850117A (en) 1995-06-15 1998-12-15 Nikon Corporation Vibration Actuator and adjustment method therefor
JPH09182468A (ja) * 1995-12-28 1997-07-11 Nikon Corp 振動アクチュエータ
JP3492163B2 (ja) 1997-09-16 2004-02-03 セイコーインスツルメンツ株式会社 圧電アクチュエータ
JP3190633B2 (ja) 1998-01-05 2001-07-23 セイコーインスツルメンツ株式会社 圧電アクチュエ−タ
JP2001111128A (ja) 1999-10-08 2001-04-20 Seiko Instruments Inc 圧電アクチュエータ
JP4691752B2 (ja) * 2000-03-10 2011-06-01 株式会社ニコン 振動アクチュエータの駆動装置
CN1314192C (zh) * 2002-11-05 2007-05-02 南京航空航天大学 压电行波型环状超声电机
JP4697929B2 (ja) * 2003-11-13 2011-06-08 キヤノン株式会社 積層圧電素子及び振動波駆動装置

Also Published As

Publication number Publication date
EP1759451B1 (de) 2011-01-05
CN100566115C (zh) 2009-12-02
US7583008B2 (en) 2009-09-01
EP1759451A1 (de) 2007-03-07
CN1943101A (zh) 2007-04-04
JP2005354787A (ja) 2005-12-22
US20090015100A1 (en) 2009-01-15
WO2005122381A1 (en) 2005-12-22
US7518286B2 (en) 2009-04-14
EP1759451A4 (de) 2009-06-03
US20070069609A1 (en) 2007-03-29
JP4072518B2 (ja) 2008-04-09

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