DE69507857T2 - Durch Vibrationen angetriebener Motor - Google Patents

Durch Vibrationen angetriebener Motor

Info

Publication number
DE69507857T2
DE69507857T2 DE69507857T DE69507857T DE69507857T2 DE 69507857 T2 DE69507857 T2 DE 69507857T2 DE 69507857 T DE69507857 T DE 69507857T DE 69507857 T DE69507857 T DE 69507857T DE 69507857 T2 DE69507857 T2 DE 69507857T2
Authority
DE
Germany
Prior art keywords
driven motor
vibration driven
vibration
motor
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69507857T
Other languages
English (en)
Other versions
DE69507857D1 (de
Inventor
Tadao Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP15347294A external-priority patent/JP3448783B2/ja
Priority claimed from JP6253609A external-priority patent/JPH08126358A/ja
Priority claimed from JP6253820A external-priority patent/JPH08126359A/ja
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of DE69507857D1 publication Critical patent/DE69507857D1/de
Publication of DE69507857T2 publication Critical patent/DE69507857T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
DE69507857T 1994-07-05 1995-07-04 Durch Vibrationen angetriebener Motor Expired - Lifetime DE69507857T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15347294A JP3448783B2 (ja) 1994-07-05 1994-07-05 超音波モータ
JP6253609A JPH08126358A (ja) 1994-10-19 1994-10-19 超音波モータ
JP6253820A JPH08126359A (ja) 1994-10-19 1994-10-19 超音波モータ

Publications (2)

Publication Number Publication Date
DE69507857D1 DE69507857D1 (de) 1999-03-25
DE69507857T2 true DE69507857T2 (de) 1999-08-19

Family

ID=27320472

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69507857T Expired - Lifetime DE69507857T2 (de) 1994-07-05 1995-07-04 Durch Vibrationen angetriebener Motor

Country Status (3)

Country Link
US (1) US5917268A (de)
EP (1) EP0691692B1 (de)
DE (1) DE69507857T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08280185A (ja) * 1995-04-07 1996-10-22 Nikon Corp 超音波アクチュエータ
JPH09219980A (ja) * 1995-12-04 1997-08-19 Nikon Corp 多自由度形駆動装置
JP4054092B2 (ja) * 1997-09-30 2008-02-27 オリンパス株式会社 アクチュエータ
IL137206A0 (en) 1999-10-31 2001-07-24 Nanomotion Ltd Piezoelectric motors and motor driving configurations
JP4704537B2 (ja) * 2000-01-31 2011-06-15 セイコーインスツル株式会社 超音波モータ及び超音波モータ付き電子機器
US6936951B1 (en) 2000-11-27 2005-08-30 Grq Instruments, Inc. Smart sonic bearings and method for frictional force reduction and switching
JP4726167B2 (ja) * 2001-03-12 2011-07-20 キヤノン株式会社 振動波駆動装置
JP4289845B2 (ja) * 2002-08-26 2009-07-01 キヤノン株式会社 駆動装置および光学機器
JP4478407B2 (ja) * 2003-06-30 2010-06-09 キヤノン株式会社 制御装置およびプログラム
JP4072518B2 (ja) 2004-06-09 2008-04-09 キヤノン株式会社 振動波駆動装置
KR100773852B1 (ko) 2004-06-09 2007-11-06 캐논 가부시끼가이샤 진동파 구동장치 및 진동자
US7813771B2 (en) 2005-01-06 2010-10-12 Qnx Software Systems Co. Vehicle-state based parameter adjustment system
JP4756916B2 (ja) * 2005-05-31 2011-08-24 キヤノン株式会社 振動波モータ
UA84563C2 (ru) * 2005-11-29 2008-11-10 Сергей Федорович Петренко Моторный клапан с поворотной пробкой
US10355623B1 (en) 2006-12-07 2019-07-16 Dmitriy Yavid Generator employing piezolectric and resonating elements with synchronized heat delivery
US9590534B1 (en) 2006-12-07 2017-03-07 Dmitriy Yavid Generator employing piezoelectric and resonating elements
US7696673B1 (en) 2006-12-07 2010-04-13 Dmitriy Yavid Piezoelectric generators, motor and transformers
JP2015211604A (ja) * 2014-04-30 2015-11-24 セイコーエプソン株式会社 圧電アクチュエーター
JP2018030107A (ja) * 2016-08-26 2018-03-01 レノボ・シンガポール・プライベート・リミテッド 触覚フィードバック・システム、電子機器および触覚フィードバックの生成方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1591330B2 (de) * 1966-09-30 1972-05-25 Nippon Electric Co. Ltd., Tokio Piezoelektrischer biegeschwinger
US3873947A (en) * 1974-04-22 1975-03-25 Rockwell International Corp Multiple frequency flexure-mode resonator
US4727278A (en) * 1985-10-04 1988-02-23 Micro Pulse Systems, Inc. Piezoelectric multiaxis micropositioner
JPH06106028B2 (ja) * 1987-02-02 1994-12-21 リオン株式会社 圧電共振モ−タ
US4928030A (en) * 1988-09-30 1990-05-22 Rockwell International Corporation Piezoelectric actuator
JPH02188169A (ja) * 1989-01-13 1990-07-24 Sony Corp 超音波モータ
JPH0345173A (ja) * 1989-07-11 1991-02-26 Brother Ind Ltd 超音波モータ
EP0424609A1 (de) * 1989-09-28 1991-05-02 Rockwell International Corporation Piezoelektrischer Antrieb
US5073739A (en) * 1990-02-27 1991-12-17 Nisca Corporation Vibration-coupling type ultrasonic actuator and method for operating the same
JPH03251088A (ja) * 1990-02-27 1991-11-08 Kazuma Suzuki 超音波モータ
JPH0421371A (ja) * 1990-05-15 1992-01-24 Canon Inc 振動波モータ
JPH0591766A (ja) * 1991-09-27 1993-04-09 Toko Inc 圧電アクチユエータ
JPH0591765A (ja) * 1991-09-27 1993-04-09 Toko Inc 圧電アクチユエータ
US5424596A (en) * 1992-10-05 1995-06-13 Trw Inc. Activated structure
JPH0741207B2 (ja) * 1993-02-18 1995-05-10 インターナショナル・ビジネス・マシーンズ・コーポレイション マイクロアクチュエータ
IL106296A0 (en) * 1993-07-09 1993-12-28 Nanomotion Ltd Ceramic motor

Also Published As

Publication number Publication date
US5917268A (en) 1999-06-29
EP0691692B1 (de) 1999-02-17
EP0691692A1 (de) 1996-01-10
DE69507857D1 (de) 1999-03-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition