DE602005001044T2 - Emitterelektroden hergestellt aus einem Karbidmaterial für Gasionisatoren - Google Patents

Emitterelektroden hergestellt aus einem Karbidmaterial für Gasionisatoren Download PDF

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Publication number
DE602005001044T2
DE602005001044T2 DE602005001044T DE602005001044T DE602005001044T2 DE 602005001044 T2 DE602005001044 T2 DE 602005001044T2 DE 602005001044 T DE602005001044 T DE 602005001044T DE 602005001044 T DE602005001044 T DE 602005001044T DE 602005001044 T2 DE602005001044 T2 DE 602005001044T2
Authority
DE
Germany
Prior art keywords
emitter electrode
electrode
carbide
silicon carbide
ionizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602005001044T
Other languages
German (de)
English (en)
Other versions
DE602005001044D1 (de
Inventor
James R. Curtis
John A. Gorczyca
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Illinois Tool Works Inc
Original Assignee
Illinois Tool Works Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Illinois Tool Works Inc filed Critical Illinois Tool Works Inc
Publication of DE602005001044D1 publication Critical patent/DE602005001044D1/de
Application granted granted Critical
Publication of DE602005001044T2 publication Critical patent/DE602005001044T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge
    • H01T19/04—Devices providing for corona discharge having pointed electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Elimination Of Static Electricity (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Plasma Technology (AREA)
  • Ceramic Products (AREA)
DE602005001044T 2004-10-01 2005-08-12 Emitterelektroden hergestellt aus einem Karbidmaterial für Gasionisatoren Expired - Lifetime DE602005001044T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US956316 1978-10-31
US10/956,316 US7501765B2 (en) 2004-10-01 2004-10-01 Emitter electrodes formed of chemical vapor deposition silicon carbide

Publications (2)

Publication Number Publication Date
DE602005001044D1 DE602005001044D1 (de) 2007-06-14
DE602005001044T2 true DE602005001044T2 (de) 2008-01-10

Family

ID=35447546

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005001044T Expired - Lifetime DE602005001044T2 (de) 2004-10-01 2005-08-12 Emitterelektroden hergestellt aus einem Karbidmaterial für Gasionisatoren

Country Status (6)

Country Link
US (2) US7501765B2 (https=)
EP (1) EP1650844B1 (https=)
JP (1) JP5021198B2 (https=)
CN (1) CN1764028B (https=)
DE (1) DE602005001044T2 (https=)
TW (1) TWI281191B (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8885317B2 (en) 2011-02-08 2014-11-11 Illinois Tool Works Inc. Micropulse bipolar corona ionizer and method
US8773837B2 (en) 2007-03-17 2014-07-08 Illinois Tool Works Inc. Multi pulse linear ionizer
US9380689B2 (en) * 2008-06-18 2016-06-28 Illinois Tool Works Inc. Silicon based charge neutralization systems
US20090316325A1 (en) * 2008-06-18 2009-12-24 Mks Instruments Silicon emitters for ionizers with high frequency waveforms
US8482898B2 (en) 2010-04-30 2013-07-09 Tessera, Inc. Electrode conditioning in an electrohydrodynamic fluid accelerator device
US9125284B2 (en) 2012-02-06 2015-09-01 Illinois Tool Works Inc. Automatically balanced micro-pulsed ionizing blower
USD743017S1 (en) 2012-02-06 2015-11-10 Illinois Tool Works Inc. Linear ionizing bar
US9918374B2 (en) 2012-02-06 2018-03-13 Illinois Tool Works Inc. Control system of a balanced micro-pulsed ionizer blower
RU2693560C2 (ru) * 2013-06-21 2019-07-03 Смитс Детекшен Монреаль Инк. Способ и устройство для покрытого оболочкой источника ионизации коронного разряда
JP6673931B2 (ja) * 2015-03-23 2020-03-25 イリノイ トゥール ワークス インコーポレイティド シリコンベース電荷中和システム
KR101787446B1 (ko) 2016-08-09 2017-10-18 송방원 정전방전 자동 테스트 시스템
AU2018280166A1 (en) * 2017-06-07 2019-11-21 Lawrence Livermore National Security, Llc. Plasma confinement system and methods for use
CN116598895A (zh) * 2023-06-05 2023-08-15 东莞松山湖国际机器人研究院有限公司 一种离子风发生装置的改性放电电极及其改性方法和应用

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Publication number Priority date Publication date Assignee Title
DE3579966D1 (de) * 1984-05-14 1990-11-08 Telecommunications Sa Gaslaser.
US5229625A (en) * 1986-08-18 1993-07-20 Sharp Kabushiki Kaisha Schottky barrier gate type field effect transistor
JPS63130149A (ja) 1986-11-19 1988-06-02 Fuji Electric Co Ltd 電気集塵装置
US5008594A (en) * 1989-02-16 1991-04-16 Chapman Corporation Self-balancing circuit for convection air ionizers
JPH03188699A (ja) 1989-09-05 1991-08-16 Tetsuo Motohashi 除電装置用放電電極
US5447763A (en) * 1990-08-17 1995-09-05 Ion Systems, Inc. Silicon ion emitter electrodes
SE468195B (sv) 1991-03-04 1992-11-23 Holmbergs Fab Ab Brdr Laas till bilbaelte, saerskilt barnbaelte
JPH05152054A (ja) 1991-11-29 1993-06-18 Tokyo Tekko Kk 除電装置用放電電極とその製造方法
JP2703151B2 (ja) * 1992-07-01 1998-01-26 清二 加川 コロナ放電用電極、コロナ放電処理装置および多孔質フィルムの製造装置
JPH0636857A (ja) 1992-07-13 1994-02-10 Tokyo Tekko Co Ltd 除電装置用放電電極とその製造方法
JPH0770348B2 (ja) 1992-09-02 1995-07-31 東京鐵鋼株式会社 イオナイザー用放電電極の製造方法
JP3455984B2 (ja) * 1993-02-15 2003-10-14 東レ株式会社 帯電走行体の除電方法
JPH10208848A (ja) * 1997-01-22 1998-08-07 Kazuo Okano イオン発生装置用放電電極
US5938823A (en) * 1997-04-18 1999-08-17 Carrier Corporation Integrated electrostatic collection and microwave sterilization for bioaerosol air purification
US6215248B1 (en) 1997-07-15 2001-04-10 Illinois Tool Works Inc. Germanium emitter electrodes for gas ionizers
US6451157B1 (en) * 1999-09-23 2002-09-17 Lam Research Corporation Gas distribution apparatus for semiconductor processing
US7018947B2 (en) * 2000-02-24 2006-03-28 Shipley Company, L.L.C. Low resistivity silicon carbide
US20020127853A1 (en) * 2000-12-29 2002-09-12 Hubacek Jerome S. Electrode for plasma processes and method for manufacture and use thereof
JP4060577B2 (ja) * 2001-11-26 2008-03-12 サンクス株式会社 被除電対象物の除電方法および除電装置
JP2004288547A (ja) * 2003-03-24 2004-10-14 Matsushita Electric Ind Co Ltd 電界放出型電子源およびその製造方法および画像表示装置

Also Published As

Publication number Publication date
EP1650844B1 (en) 2007-05-02
CN1764028A (zh) 2006-04-26
TWI281191B (en) 2007-05-11
US7501765B2 (en) 2009-03-10
EP1650844A1 (en) 2006-04-26
JP5021198B2 (ja) 2012-09-05
DE602005001044D1 (de) 2007-06-14
CN1764028B (zh) 2010-05-12
US8067892B2 (en) 2011-11-29
US20060071599A1 (en) 2006-04-06
JP2006108101A (ja) 2006-04-20
US20090176431A1 (en) 2009-07-09
TW200612467A (en) 2006-04-16

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