CN1764028B - 碳化物材料形成或涂敷的气体电离器发射电极 - Google Patents

碳化物材料形成或涂敷的气体电离器发射电极 Download PDF

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Publication number
CN1764028B
CN1764028B CN2005100983899A CN200510098389A CN1764028B CN 1764028 B CN1764028 B CN 1764028B CN 2005100983899 A CN2005100983899 A CN 2005100983899A CN 200510098389 A CN200510098389 A CN 200510098389A CN 1764028 B CN1764028 B CN 1764028B
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China
Prior art keywords
emitter electrode
corona
electrode
emission electrode
ionizer
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Expired - Lifetime
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CN2005100983899A
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English (en)
Chinese (zh)
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CN1764028A (zh
Inventor
詹姆斯R·柯蒂斯
约翰A·戈齐扎克
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Illinois Tool Works Inc
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Illinois Tool Works Inc
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Publication of CN1764028A publication Critical patent/CN1764028A/zh
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Publication of CN1764028B publication Critical patent/CN1764028B/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge
    • H01T19/04—Devices providing for corona discharge having pointed electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Elimination Of Static Electricity (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Plasma Technology (AREA)
  • Ceramic Products (AREA)
CN2005100983899A 2004-10-01 2005-09-09 碳化物材料形成或涂敷的气体电离器发射电极 Expired - Lifetime CN1764028B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/956,316 2004-10-01
US10/956,316 US7501765B2 (en) 2004-10-01 2004-10-01 Emitter electrodes formed of chemical vapor deposition silicon carbide

Publications (2)

Publication Number Publication Date
CN1764028A CN1764028A (zh) 2006-04-26
CN1764028B true CN1764028B (zh) 2010-05-12

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CN2005100983899A Expired - Lifetime CN1764028B (zh) 2004-10-01 2005-09-09 碳化物材料形成或涂敷的气体电离器发射电极

Country Status (6)

Country Link
US (2) US7501765B2 (https=)
EP (1) EP1650844B1 (https=)
JP (1) JP5021198B2 (https=)
CN (1) CN1764028B (https=)
DE (1) DE602005001044T2 (https=)
TW (1) TWI281191B (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8885317B2 (en) 2011-02-08 2014-11-11 Illinois Tool Works Inc. Micropulse bipolar corona ionizer and method
US8773837B2 (en) 2007-03-17 2014-07-08 Illinois Tool Works Inc. Multi pulse linear ionizer
US20090316325A1 (en) * 2008-06-18 2009-12-24 Mks Instruments Silicon emitters for ionizers with high frequency waveforms
US9380689B2 (en) * 2008-06-18 2016-06-28 Illinois Tool Works Inc. Silicon based charge neutralization systems
US8482898B2 (en) 2010-04-30 2013-07-09 Tessera, Inc. Electrode conditioning in an electrohydrodynamic fluid accelerator device
US9918374B2 (en) 2012-02-06 2018-03-13 Illinois Tool Works Inc. Control system of a balanced micro-pulsed ionizer blower
USD743017S1 (en) 2012-02-06 2015-11-10 Illinois Tool Works Inc. Linear ionizing bar
US9125284B2 (en) 2012-02-06 2015-09-01 Illinois Tool Works Inc. Automatically balanced micro-pulsed ionizing blower
JP6526641B2 (ja) * 2013-06-21 2019-06-05 スミスズ ディテクション モントリオール インコーポレイティド 被覆したコロナイオン化源のための方法及び装置
EP3275060B1 (en) 2015-03-23 2018-12-12 Illinois Tool Works Inc. Silicon based charge neutralization systems
KR101787446B1 (ko) 2016-08-09 2017-10-18 송방원 정전방전 자동 테스트 시스템
CN110945599B (zh) * 2017-06-07 2023-10-10 华盛顿大学 等离子体约束系统及使用方法
CN116598895A (zh) * 2023-06-05 2023-08-15 东莞松山湖国际机器人研究院有限公司 一种离子风发生装置的改性放电电极及其改性方法和应用

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0167746B1 (fr) * 1984-05-14 1990-10-03 SAT (Société Anonyme de Télécommunications) Generateur laser a gaz
US5229625A (en) * 1986-08-18 1993-07-20 Sharp Kabushiki Kaisha Schottky barrier gate type field effect transistor
JPS63130149A (ja) 1986-11-19 1988-06-02 Fuji Electric Co Ltd 電気集塵装置
US5008594A (en) * 1989-02-16 1991-04-16 Chapman Corporation Self-balancing circuit for convection air ionizers
JPH03188699A (ja) 1989-09-05 1991-08-16 Tetsuo Motohashi 除電装置用放電電極
US5447763A (en) * 1990-08-17 1995-09-05 Ion Systems, Inc. Silicon ion emitter electrodes
SE468195B (sv) 1991-03-04 1992-11-23 Holmbergs Fab Ab Brdr Laas till bilbaelte, saerskilt barnbaelte
JPH05152054A (ja) 1991-11-29 1993-06-18 Tokyo Tekko Kk 除電装置用放電電極とその製造方法
JP2703151B2 (ja) * 1992-07-01 1998-01-26 清二 加川 コロナ放電用電極、コロナ放電処理装置および多孔質フィルムの製造装置
JPH0636857A (ja) 1992-07-13 1994-02-10 Tokyo Tekko Co Ltd 除電装置用放電電極とその製造方法
JPH0770348B2 (ja) 1992-09-02 1995-07-31 東京鐵鋼株式会社 イオナイザー用放電電極の製造方法
JP3455984B2 (ja) * 1993-02-15 2003-10-14 東レ株式会社 帯電走行体の除電方法
JPH10208848A (ja) * 1997-01-22 1998-08-07 Kazuo Okano イオン発生装置用放電電極
US5938823A (en) * 1997-04-18 1999-08-17 Carrier Corporation Integrated electrostatic collection and microwave sterilization for bioaerosol air purification
US6215248B1 (en) * 1997-07-15 2001-04-10 Illinois Tool Works Inc. Germanium emitter electrodes for gas ionizers
US6451157B1 (en) * 1999-09-23 2002-09-17 Lam Research Corporation Gas distribution apparatus for semiconductor processing
US7018947B2 (en) * 2000-02-24 2006-03-28 Shipley Company, L.L.C. Low resistivity silicon carbide
US20020127853A1 (en) * 2000-12-29 2002-09-12 Hubacek Jerome S. Electrode for plasma processes and method for manufacture and use thereof
JP4060577B2 (ja) * 2001-11-26 2008-03-12 サンクス株式会社 被除電対象物の除電方法および除電装置
JP2004288547A (ja) * 2003-03-24 2004-10-14 Matsushita Electric Ind Co Ltd 電界放出型電子源およびその製造方法および画像表示装置

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
JP平6－36857A 1994.02.10
JP平6－84581A 1994.03.25
JP昭63-130149A 1988.06.02

Also Published As

Publication number Publication date
US7501765B2 (en) 2009-03-10
JP5021198B2 (ja) 2012-09-05
EP1650844A1 (en) 2006-04-26
TWI281191B (en) 2007-05-11
JP2006108101A (ja) 2006-04-20
DE602005001044D1 (de) 2007-06-14
EP1650844B1 (en) 2007-05-02
US20060071599A1 (en) 2006-04-06
CN1764028A (zh) 2006-04-26
US20090176431A1 (en) 2009-07-09
DE602005001044T2 (de) 2008-01-10
TW200612467A (en) 2006-04-16
US8067892B2 (en) 2011-11-29

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Granted publication date: 20100512