DE602004022728D1 - Dielektrische Filmstruktur und Verfahren zu ihrer Herstellung, damit versehener piezoelektrischer Aktuator und Tintenstrahldruckkopf - Google Patents

Dielektrische Filmstruktur und Verfahren zu ihrer Herstellung, damit versehener piezoelektrischer Aktuator und Tintenstrahldruckkopf

Info

Publication number
DE602004022728D1
DE602004022728D1 DE200460022728 DE602004022728T DE602004022728D1 DE 602004022728 D1 DE602004022728 D1 DE 602004022728D1 DE 200460022728 DE200460022728 DE 200460022728 DE 602004022728 T DE602004022728 T DE 602004022728T DE 602004022728 D1 DE602004022728 D1 DE 602004022728D1
Authority
DE
Germany
Prior art keywords
making
ink jet
dielectric film
same
piezoelectric actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE200460022728
Other languages
English (en)
Inventor
Hiroshi Aoto
Kenichi Takeda
Tetsuro Fukui
Toshihiro Ifuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE602004022728D1 publication Critical patent/DE602004022728D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Inorganic Insulating Materials (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE200460022728 2003-02-07 2004-02-05 Dielektrische Filmstruktur und Verfahren zu ihrer Herstellung, damit versehener piezoelektrischer Aktuator und Tintenstrahldruckkopf Expired - Lifetime DE602004022728D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003031681 2003-02-07
JP2003031682 2003-02-07

Publications (1)

Publication Number Publication Date
DE602004022728D1 true DE602004022728D1 (de) 2009-10-08

Family

ID=32658644

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200460022728 Expired - Lifetime DE602004022728D1 (de) 2003-02-07 2004-02-05 Dielektrische Filmstruktur und Verfahren zu ihrer Herstellung, damit versehener piezoelektrischer Aktuator und Tintenstrahldruckkopf

Country Status (7)

Country Link
US (3) US7059711B2 (de)
EP (1) EP1445354B1 (de)
JP (1) JP4208734B2 (de)
KR (1) KR100651046B1 (de)
CN (1) CN100469577C (de)
DE (1) DE602004022728D1 (de)
RU (1) RU2335826C2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100672883B1 (ko) * 2003-01-31 2007-01-24 캐논 가부시끼가이샤 압전 소자
JP4717344B2 (ja) * 2003-12-10 2011-07-06 キヤノン株式会社 誘電体薄膜素子、圧電アクチュエータおよび液体吐出ヘッド
US7453188B2 (en) * 2004-02-27 2008-11-18 Canon Kabushiki Kaisha Dielectric element, piezoelectric element, ink jet head and ink jet recording apparatus and manufacturing method of same
JP2005244133A (ja) * 2004-02-27 2005-09-08 Canon Inc 誘電体素子、圧電素子、インクジェットヘッド及びインクジェット記録装置、並びにこれらの製造方法
US7235917B2 (en) * 2004-08-10 2007-06-26 Canon Kabushiki Kaisha Piezoelectric member element and liquid discharge head comprising element thereof
US8082640B2 (en) * 2004-08-31 2011-12-27 Canon Kabushiki Kaisha Method for manufacturing a ferroelectric member element structure
JP2006069152A (ja) * 2004-09-06 2006-03-16 Canon Inc インクジェットヘッド及びその製造方法
JP2006278489A (ja) * 2005-03-28 2006-10-12 Seiko Epson Corp 圧電素子及びアクチュエータ装置並びに液体噴射ヘッド及び液体噴射装置
JP5044902B2 (ja) * 2005-08-01 2012-10-10 日立電線株式会社 圧電薄膜素子
US7591543B2 (en) * 2005-08-23 2009-09-22 Canon Kabushiki Kaisha Piezoelectric member, piezoelectric member element, liquid discharge head in use thereof, liquid discharge apparatus and method of manufacturing piezoelectric member
US7998362B2 (en) * 2005-08-23 2011-08-16 Canon Kabushiki Kaisha Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, liquid discharge apparatus, and production method of piezoelectric element
US7528530B2 (en) 2005-08-23 2009-05-05 Canon Kabushiki Kaisha Piezoelectric substance, piezoelectric substance element, liquid discharge head, liquid discharge device and method for producing piezoelectric substance
US20070046153A1 (en) * 2005-08-23 2007-03-01 Canon Kabushiki Kaisha Piezoelectric substrate, piezoelectric element, liquid discharge head and liquid discharge apparatus
US7521845B2 (en) * 2005-08-23 2009-04-21 Canon Kabushiki Kaisha Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, and liquid discharge apparatus
US7528532B2 (en) * 2005-08-23 2009-05-05 Canon Kabushiki Kaisha Piezoelectric substance and manufacturing method thereof, piezoelectric element and liquid discharge head using such piezoelectric element and liquid discharge apparatus
WO2007023985A1 (ja) 2005-08-23 2007-03-01 Canon Kabushiki Kaisha 圧電体素子、それを用いた液体吐出ヘッド、および液体吐出装置
US8142678B2 (en) * 2005-08-23 2012-03-27 Canon Kabushiki Kaisha Perovskite type oxide material, piezoelectric element, liquid discharge head and liquid discharge apparatus using the same, and method of producing perovskite type oxide material
EP2103710A4 (de) * 2006-12-20 2012-11-21 Ulvac Inc Verfahren zur bildung einer mehrschichtfolie und vorrichtung zur bildung einer mehrschichtfolie
JP5181649B2 (ja) * 2007-09-18 2013-04-10 日立電線株式会社 圧電素子
JP5448320B2 (ja) * 2007-10-04 2014-03-19 キヤノン株式会社 圧電アクチュエータ及びそれを用いた液体吐出ヘッド
JP5665161B2 (ja) * 2008-06-16 2015-02-04 パナソニックＩｐマネジメント株式会社 圧電薄膜デバイス
CN102077376B (zh) 2008-06-27 2015-04-22 松下电器产业株式会社 压电体元件和其制造方法
US9035253B2 (en) * 2008-06-27 2015-05-19 Panasonic Intellectual Property Managment Co., Ltd. Infrared sensor element
WO2010150610A1 (ja) * 2009-06-24 2010-12-29 コニカミノルタホールディングス株式会社 薄膜アクチュエータ、及びインクジェットヘッド
JP5552842B2 (ja) * 2010-03-02 2014-07-16 セイコーエプソン株式会社 圧電素子、液滴吐出ヘッド、および液滴吐出装置
JPWO2012023406A1 (ja) * 2010-08-18 2013-10-28 株式会社村田製作所 積層セラミック電子部品
US9761785B2 (en) 2011-10-17 2017-09-12 The United States Of America As Represented By The Secretary Of The Army Stylo-epitaxial piezoelectric and ferroelectric devices and method of manufacturing
US8866367B2 (en) 2011-10-17 2014-10-21 The United States Of America As Represented By The Secretary Of The Army Thermally oxidized seed layers for the production of {001} textured electrodes and PZT devices and method of making
DE102012107155B4 (de) * 2012-08-03 2017-07-13 Snaptrack, Inc. Topografische Struktur und Verfahren zu deren Herstellung
JP2014084494A (ja) * 2012-10-23 2014-05-12 Tohoku Univ 結晶配向制御装置、及びそれを備えた成膜装置、アニール装置並びに結晶配向制御方法
KR101360906B1 (ko) 2012-11-16 2014-02-11 한국표준과학연구원 고분해능 x-선 로킹 커브 측정을 이용한 단결정 웨이퍼의 면방위 측정 방법
US10263175B2 (en) 2015-09-29 2019-04-16 Seiko Epson Corporation Piezoelectric element and piezoelectric element-applied device
CN112151221B (zh) * 2020-09-27 2022-05-10 合肥工业大学 一种批量制备高温超导块材的系统及方法
CN114062406B (zh) * 2022-01-04 2022-03-22 中国工程物理研究院流体物理研究所 时间分辨多晶x射线衍射靶装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3946398A (en) * 1970-06-29 1976-03-23 Silonics, Inc. Method and apparatus for recording with writing fluids and drop projection means therefor
JPS5912828B2 (ja) 1976-07-19 1984-03-26 株式会社大林組 鉄筋コンクリ−ト構造骨組の柱・梁接合部
JPS5511811A (en) 1978-07-10 1980-01-28 Seiko Epson Corp Liquid jet device
DE3378966D1 (en) * 1982-05-28 1989-02-23 Xerox Corp Pressure pulse droplet ejector and array
JPS6222790A (ja) 1985-07-24 1987-01-30 Shin Etsu Chem Co Ltd 第３級炭化水素シリル化合物の製造方法
US4825227A (en) * 1988-02-29 1989-04-25 Spectra, Inc. Shear mode transducer for ink jet systems
US5265315A (en) * 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head
DE4304938C2 (de) * 1993-02-18 1996-04-25 Daimler Benz Ag Goniometer mit mehreren Achsen
JP3341357B2 (ja) 1993-06-08 2002-11-05 セイコーエプソン株式会社 圧電体薄膜素子
JPH0733089A (ja) 1993-07-21 1995-02-03 Mitsubishi Heavy Ind Ltd 複合材一体成型主翼
KR0147245B1 (ko) * 1993-12-01 1998-09-15 모리시타 요이찌 강유전체박막 및 그 제조방법
US6296701B1 (en) * 1998-09-30 2001-10-02 Ut-Battelle, Llc Method of depositing an electrically conductive oxide film on a textured metallic substrate and articles formed therefrom
JP4269136B2 (ja) 1999-12-10 2009-05-27 富士フイルム株式会社 インクジェットヘッドおよびインクジェットヘッドの製造方法並びに印刷装置
JP3796394B2 (ja) * 2000-06-21 2006-07-12 キヤノン株式会社 圧電素子の製造方法および液体噴射記録ヘッドの製造方法
US6783588B2 (en) * 2000-12-15 2004-08-31 Canon Kabushiki Kaisha BaTiO3-PbTiO3 series single crystal and method of manufacturing the same piezoelectric type actuator and liquid discharge head using such piezoelectric type actuator
JP3833070B2 (ja) * 2001-02-09 2006-10-11 キヤノン株式会社 液体噴射ヘッドおよび製造方法
JP3754897B2 (ja) * 2001-02-09 2006-03-15 キヤノン株式会社 半導体装置用基板およびｓｏｉ基板の製造方法
KR200286461Y1 (ko) 2002-01-28 2002-08-22 윤상범 자석수납필통
JP4086535B2 (ja) * 2002-04-18 2008-05-14 キヤノン株式会社 アクチュエータ及びインクジェットヘッドの製造方法
JP4708667B2 (ja) * 2002-08-08 2011-06-22 キヤノン株式会社 アクチュエータおよび液体噴射ヘッド

Also Published As

Publication number Publication date
US7513608B2 (en) 2009-04-07
EP1445354A3 (de) 2005-10-19
CN1530231A (zh) 2004-09-22
US7938515B2 (en) 2011-05-10
JP2004260158A (ja) 2004-09-16
KR100651046B1 (ko) 2006-12-01
US20060176342A1 (en) 2006-08-10
US20040207695A1 (en) 2004-10-21
US20090153626A1 (en) 2009-06-18
EP1445354B1 (de) 2009-08-26
RU2004103554A (ru) 2005-07-27
US7059711B2 (en) 2006-06-13
JP4208734B2 (ja) 2009-01-14
KR20040072052A (ko) 2004-08-16
EP1445354A2 (de) 2004-08-11
RU2335826C2 (ru) 2008-10-10
CN100469577C (zh) 2009-03-18

Similar Documents

Publication Publication Date Title
DE602004022728D1 (de) Dielektrische Filmstruktur und Verfahren zu ihrer Herstellung, damit versehener piezoelektrischer Aktuator und Tintenstrahldruckkopf
DE60221819D1 (de) Wasserabweisender film und verfahren zu seiner herstellung sowie damit ausgerüsteter tintenstrahlkopf und entsprechendes tintenstrahldruckverfahren
DE60220633D1 (de) Piezoelektrischer Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
DE602005011690D1 (de) Dielektrisches Element, piezoelektrisches Element, Tintenstrahlkopf und Verfahren zu Herstellung dieses Kopfes
DE60309996D1 (de) Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
DE602005024208D1 (de) Dielektrisches Element, piezoelektrisches Element, Tintenstrahlkopf, Tintenstrahlaufzeichnungsgerät sowie deren Herstellungsverfahren
DE602005013864D1 (de) Schaltungsplatte für Tintenstrahldruckkopf, Verfahren zu ihrer Herstellung und damit ausgestatteter Tintenstrahldruckkopf
DE602004008324D1 (de) Tintenstrahldrucktinte, tintenkombination und druckverfahren
DE60304525D1 (de) Tintenstrahlaufzeichnungsblatt, -verfahren, und Tinte
EP1495869B8 (de) Tintenstrahldrucker, Tintenstrahlkopf und Verfahren zur Tintenstrahlkopfherstellung
DE602005010344D1 (de) Schaltungsplatte für Tintenstrahldruckkopf, Verfahren zu ihrer Herstellung, und damit ausgestattetem Tintenstrahldruckkopf
DE60000948D1 (de) Dünnschichtiges piezoelektrisches bilaminares Element, diese benutzender mechanischer Detektor und Tintenstrahldruckkopf und Herstellungsverfahren dafür
DE69716157T2 (de) Piezolelektrischer Vibrator, diesen piezoelektrischen Vibrator verwendender Tintenstrahldruckkopf und Verfahren zur Herstellung
DE60313926D1 (de) Tintenstrahldruckverfahren und Tintenstrahltintenzusammensetzung
DE602004011218D1 (de) Tintenstrahldruckfarbenset und Aufzeichnungsverfahren hiermit
DE602005006678D1 (de) Schaltungsplatte für Tintenstrahldruckkopf, Verfahren zu ihrer Herstellung und damit ausgestatteter Tintenstrahldruckkopf
DE60312338D1 (de) Steife tintenstrahlbedruckte zwischenschicht und verfahren zur deren herstellung
DE60313233D1 (de) Tintenstrahlkopf, Verfahren für dessen Herstellung, und Tintenstrahldrucker
DE602005006913D1 (de) Schaltungsplatte für Tintenstrahldruckkopf, Verfahren zu ihrer Herstellung, und damit ausgestattetem Tintenstrahldruckkopf
DE60327379D1 (de) Piezoelektrisches Bauelement, Flüssigkeitsstrahlkopf und deren Herstellungsverfahren
DE60314774D1 (de) Tintenstrahldrucktinte und -verfahren
DE60118113D1 (de) Mit Bläschen angetriebener Tintenstrahldruckkopf, dazugehöriges Herstellungsverfahren, und Tintenausstossverfahren
DE69815470T2 (de) Tintenstrahlaufzeichnungskopf, Verfahren zu dessen Herstellung und damit versehendem Aufzeichnungsgerät
DE60319328D1 (de) Monolitischer Tintenstrahldruckkopf und Herstellungsverfahren
DE602004014210D1 (de) Tintenstrahldruckkopf und Verfahren zu dessen Herstellung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition