DE69716157T2 - Piezolelektrischer Vibrator, diesen piezoelektrischen Vibrator verwendender Tintenstrahldruckkopf und Verfahren zur Herstellung - Google Patents

Piezolelektrischer Vibrator, diesen piezoelektrischen Vibrator verwendender Tintenstrahldruckkopf und Verfahren zur Herstellung

Info

Publication number
DE69716157T2
DE69716157T2 DE69716157T DE69716157T DE69716157T2 DE 69716157 T2 DE69716157 T2 DE 69716157T2 DE 69716157 T DE69716157 T DE 69716157T DE 69716157 T DE69716157 T DE 69716157T DE 69716157 T2 DE69716157 T2 DE 69716157T2
Authority
DE
Germany
Prior art keywords
vibrator
piezolelectric
manufacturing
ink jet
print head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69716157T
Other languages
English (en)
Other versions
DE69716157T3 (de
DE69716157D1 (de
Inventor
Munehide Kanaya
Minoru Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27312660&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69716157(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP11413696A external-priority patent/JP3407535B2/ja
Priority claimed from JP22933496A external-priority patent/JP3484889B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69716157D1 publication Critical patent/DE69716157D1/de
Application granted granted Critical
Publication of DE69716157T2 publication Critical patent/DE69716157T2/de
Publication of DE69716157T3 publication Critical patent/DE69716157T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B41J2002/14225—Finger type piezoelectric element on only one side of the chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69716157T 1996-04-11 1997-04-11 Piezolelektrischer Vibrator, diesen piezoelektrischen Vibrator verwendender Tintenstrahldruckkopf und Verfahren zur Herstellung Expired - Lifetime DE69716157T3 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP11413696A JP3407535B2 (ja) 1996-04-11 1996-04-11 積層型インクジェット式記録ヘッド、及びその製造方法
JP11413696 1996-04-11
JP15007396 1996-05-21
JP15007396 1996-05-21
JP22933496 1996-08-12
JP22933496A JP3484889B2 (ja) 1996-05-21 1996-08-12 圧電振動子ユニット、これの製造方法、及びインクジェット式記録ヘッド

Publications (3)

Publication Number Publication Date
DE69716157D1 DE69716157D1 (de) 2002-11-14
DE69716157T2 true DE69716157T2 (de) 2003-05-28
DE69716157T3 DE69716157T3 (de) 2011-05-19

Family

ID=27312660

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69716157T Expired - Lifetime DE69716157T3 (de) 1996-04-11 1997-04-11 Piezolelektrischer Vibrator, diesen piezoelektrischen Vibrator verwendender Tintenstrahldruckkopf und Verfahren zur Herstellung

Country Status (3)

Country Link
US (1) US6217158B1 (de)
EP (1) EP0803918B2 (de)
DE (1) DE69716157T3 (de)

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EP0968825B1 (de) * 1998-06-30 2005-09-14 Canon Kabushiki Kaisha Zeilendruckkopf für Tintenstrahldrucker
US6361154B1 (en) * 1998-09-03 2002-03-26 Matsushita Electric Industrial Co., Ltd. Ink-jet head with piezoelectric actuator
JP3241334B2 (ja) * 1998-11-16 2001-12-25 松下電器産業株式会社 インクジェットヘッド及びその製造方法
CN1170681C (zh) 1999-05-24 2004-10-13 松下电器产业株式会社 一种墨水喷射头
US6726312B1 (en) * 1999-10-12 2004-04-27 Kabushiki Kaisha Giken Ink jet head for use in a printer
US6450626B2 (en) 1999-12-24 2002-09-17 Matsushita Electric Industrial Co., Ltd. Ink jet head, method for producing the same, and ink jet type recording apparatus
KR100499118B1 (ko) * 2000-02-24 2005-07-04 삼성전자주식회사 단결정 실리콘 웨이퍼를 이용한 일체형 유체 노즐어셈블리 및 그 제작방법
JP4300565B2 (ja) 2000-03-27 2009-07-22 富士フイルム株式会社 マルチノズルインクジェットヘッド及びその製造方法
JP4032283B2 (ja) * 2000-03-27 2008-01-16 富士フイルム株式会社 マルチノズルインクジェットヘッド及びその製造方法
FR2821291B1 (fr) * 2001-02-27 2003-04-25 Imaje Sa Tete d'impression et imprimante a electrodes de deflexion ameliorees
US7204586B2 (en) * 2001-12-18 2007-04-17 Dimatix, Inc. Ink jet printing module
US6824253B2 (en) 2001-12-18 2004-11-30 Spectra, Inc. Low voltage ink jet printing module
JP4305016B2 (ja) * 2002-03-18 2009-07-29 セイコーエプソン株式会社 圧電アクチュエータユニット、及び、それを用いた液体噴射ヘッド
JP3931823B2 (ja) * 2002-03-18 2007-06-20 セイコーエプソン株式会社 圧電アクチュエータ及びその製造方法、並びに、液体噴射ヘッド及びその製造方法
TWI222408B (en) * 2002-12-03 2004-10-21 Nanodynamics Inc Pressure chamber of a piezoelectric ink jet print head and fabrication method thereof
DE60324654D1 (de) * 2002-12-13 2008-12-24 Xerox Corp Piezoelektrische Wandler
US6987348B2 (en) 2002-12-13 2006-01-17 Palo Alto Research Center Inc. Piezoelectric transducers
US6967431B2 (en) 2002-12-13 2005-11-22 Palo Alto Research Center Inc. Piezoelectric transducers and methods of manufacture
KR100481996B1 (ko) * 2003-06-17 2005-04-14 주식회사 피에조닉스 압전방식 잉크젯 프린터헤드와 제조방법
JP3864953B2 (ja) * 2003-12-25 2007-01-10 ブラザー工業株式会社 インクジェットヘッド、インクジェットヘッドアセンブリ及びそれを含んだインクジェットプリンタ
DE102005028970A1 (de) * 2005-06-22 2006-12-28 Siemens Ag Piezoakter mit gesteigertem Hubvermögen
US7686433B2 (en) * 2007-08-21 2010-03-30 Xerox Corporation Membrane stiffener for electrostatic inkjet actuator
JP4924336B2 (ja) * 2007-09-28 2012-04-25 ブラザー工業株式会社 液体移送装置及び圧電アクチュエータ
US8969105B2 (en) 2010-07-26 2015-03-03 Fujifilm Corporation Forming a device having a curved piezoelectric membrane
CN106269451B (zh) 2011-02-15 2020-02-21 富士胶卷迪马蒂克斯股份有限公司 使用微圆顶阵列的压电式换能器
US8404132B2 (en) * 2011-03-31 2013-03-26 Fujifilm Corporation Forming a membrane having curved features
JP2014162038A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 流路ユニット、液体噴射ヘッド、液体噴射装置、流路ユニットの製造方法
JP7166865B2 (ja) * 2018-10-01 2022-11-08 株式会社ニューフレアテクノロジー 荷電粒子ビーム装置

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US4825227A (en) 1988-02-29 1989-04-25 Spectra, Inc. Shear mode transducer for ink jet systems
JPH0236578A (ja) † 1988-07-26 1990-02-06 Mitsubishi Kasei Corp 積層型圧電素子
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Also Published As

Publication number Publication date
US6217158B1 (en) 2001-04-17
DE69716157T3 (de) 2011-05-19
EP0803918B2 (de) 2010-10-20
EP0803918B1 (de) 2002-10-09
DE69716157D1 (de) 2002-11-14
EP0803918A1 (de) 1997-10-29

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings