DE602004020916D1 - Verfahren zum Herstellen von hochreinem Hafnium - Google Patents

Verfahren zum Herstellen von hochreinem Hafnium

Info

Publication number
DE602004020916D1
DE602004020916D1 DE602004020916T DE602004020916T DE602004020916D1 DE 602004020916 D1 DE602004020916 D1 DE 602004020916D1 DE 602004020916 T DE602004020916 T DE 602004020916T DE 602004020916 T DE602004020916 T DE 602004020916T DE 602004020916 D1 DE602004020916 D1 DE 602004020916D1
Authority
DE
Germany
Prior art keywords
high purity
producing high
purity hafnium
hafnium
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004020916T
Other languages
English (en)
Inventor
Yuichiro Shindo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Mining Holdings Inc
Eneos Corp
Original Assignee
Nippon Mining and Metals Co Ltd
Nippon Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mining and Metals Co Ltd, Nippon Mining Co Ltd filed Critical Nippon Mining and Metals Co Ltd
Publication of DE602004020916D1 publication Critical patent/DE602004020916D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B34/00—Obtaining refractory metals
    • C22B34/10—Obtaining titanium, zirconium or hafnium
    • C22B34/14—Obtaining zirconium or hafnium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Physical Vapour Deposition (AREA)
DE602004020916T 2003-11-19 2004-10-25 Verfahren zum Herstellen von hochreinem Hafnium Active DE602004020916D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003388737 2003-11-19
PCT/JP2004/015777 WO2005049882A1 (ja) 2003-11-19 2004-10-25 高純度ハフニウム、同高純度ハフニウムからなるターゲット及び薄膜並びに高純度ハフニウムの製造方法

Publications (1)

Publication Number Publication Date
DE602004020916D1 true DE602004020916D1 (de) 2009-06-10

Family

ID=34616230

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004020916T Active DE602004020916D1 (de) 2003-11-19 2004-10-25 Verfahren zum Herstellen von hochreinem Hafnium

Country Status (8)

Country Link
US (1) US20060266158A1 (de)
EP (2) EP2017360B1 (de)
JP (2) JP4749862B2 (de)
KR (1) KR100766275B1 (de)
CN (2) CN1882711B (de)
DE (1) DE602004020916D1 (de)
TW (1) TWI275653B (de)
WO (1) WO2005049882A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3995082B2 (ja) * 2001-07-18 2007-10-24 日鉱金属株式会社 ゲート酸化膜形成用ハフニウムシリサイドターゲット及びその製造方法
CN100445420C (zh) * 2003-03-07 2008-12-24 日矿金属株式会社 铪合金靶及其制造方法
DE602004027052D1 (de) * 2003-07-25 2010-06-17 Nikko Materials Co Ltd Hochreines hafniummaterial, targetdünnfilm daraus und verfahren zur herstellung von hochreinem hafnium
US20050214458A1 (en) * 2004-03-01 2005-09-29 Meiere Scott H Low zirconium hafnium halide compositions
US20060062910A1 (en) * 2004-03-01 2006-03-23 Meiere Scott H Low zirconium, hafnium-containing compositions, processes for the preparation thereof and methods of use thereof
JP5032316B2 (ja) * 2005-07-07 2012-09-26 Ｊｘ日鉱日石金属株式会社 高純度ハフニウム、高純度ハフニウムからなるターゲット及び薄膜並びに高純度ハフニウムの製造方法
EP2383354B1 (de) * 2009-01-29 2018-03-07 JX Nippon Mining & Metals Corporation Verfahren zur herstellung von hochreinem erbium, hochreines erbium, sputtering-target aus dem hochreinen erbium
JP5395545B2 (ja) * 2009-07-15 2014-01-22 株式会社神戸製鋼所 超高純度合金鋳塊の製造方法
EP2455501B1 (de) * 2009-07-15 2019-04-03 Kabushiki Kaisha Kobe Seiko Sho Verfahren zur herstellung eines blockgusses
JP5881741B2 (ja) * 2011-12-20 2016-03-09 株式会社東芝 タングステン合金、およびそれを用いたタングステン合金部品、放電ランプ、送信管並びにマグネトロン
EP3763839A1 (de) * 2012-01-07 2021-01-13 Kabushiki Kaisha Toshiba Wolframlegierung, wolframlegierungsteil damit, entladungslampe, übertragungsröhre und magnetron
JP5881826B2 (ja) 2012-05-29 2016-03-09 株式会社東芝 タングステン合金部品、ならびにそれを用いた放電ランプ、送信管およびマグネトロン
CN104646659B (zh) * 2013-11-22 2017-06-20 北京有色金属研究总院 一种低氧高纯金属铪粉的制造方法
CN111235400B (zh) * 2020-03-11 2021-02-09 西北有色金属研究院 一种铪的分切重组熔炼工艺

Family Cites Families (30)

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Publication number Priority date Publication date Assignee Title
US2782116A (en) * 1946-09-06 1957-02-19 Frank H Spedding Method of preparing metals from their halides
US4637831A (en) * 1985-05-30 1987-01-20 Westinghouse Electric Corp. Process for reduction of zirconium, hafnium or titanium using a zinc or tin seal
US4722827A (en) * 1985-09-26 1988-02-02 Westinghouse Electric Corp. Zirconium and hafnium with low oxygen and iron
US4668287A (en) * 1985-09-26 1987-05-26 Westinghouse Electric Corp. Process for producing high purity zirconium and hafnium
JPH0723526B2 (ja) * 1986-01-13 1995-03-15 株式会社日立製作所 耐食ハフニウム基体およびその製造方法
US4897116A (en) * 1988-05-25 1990-01-30 Teledyne Industries, Inc. High purity Zr and Hf metals and their manufacture
US4923531A (en) * 1988-09-23 1990-05-08 Rmi Company Deoxidation of titanium and similar metals using a deoxidant in a molten metal carrier
KR940008936B1 (ko) * 1990-02-15 1994-09-28 가부시끼가이샤 도시바 고순도 금속재와 그 성질을 이용한 반도체 장치 및 그 제조방법
JP2921799B2 (ja) * 1990-02-15 1999-07-19 株式会社 東芝 半導体素子形成用高純度スパッタターゲットの製造方法
JPH0814009B2 (ja) * 1990-08-14 1996-02-14 京都大学長 極低酸素チタンの製造方法
US5112493A (en) * 1990-12-10 1992-05-12 Westinghouse Electric Corp. Zirconium-hafnium production in a zero liquid discharge process
JP2794382B2 (ja) * 1993-05-07 1998-09-03 株式会社ジャパンエナジー スパッタリング用シリサイドターゲット及びその製造方法
WO1995004167A1 (fr) * 1993-07-27 1995-02-09 Kabushiki Kaisha Toshiba Cible en siliciure metallique a point de fusion eleve, son procede de production, couche en siliciure metallique a point de fusion eleve, et dispositif a semi-conducteurs
JPH07316681A (ja) * 1994-05-25 1995-12-05 Japan Energy Corp 金属材料又は合金材料の製造方法及び精製剤、並びに耐食性に優れた金属材料又は合金材料
JP3591756B2 (ja) * 1997-04-04 2004-11-24 日本電信電話株式会社 金属フッ化物の製造方法
US6309595B1 (en) * 1997-04-30 2001-10-30 The Altalgroup, Inc Titanium crystal and titanium
JP3607532B2 (ja) * 1999-06-03 2005-01-05 住友チタニウム株式会社 チタン材料の脱酸素方法
JP4501250B2 (ja) * 2000-06-19 2010-07-14 日鉱金属株式会社 耐脆化性に優れたゲート酸化膜形成用シリサイドターゲット
JP2002206103A (ja) * 2000-11-09 2002-07-26 Nikko Materials Co Ltd 高純度ジルコニウム若しくはハフニウム粉の製造方法
EP1743949B1 (de) * 2000-10-02 2012-02-15 JX Nippon Mining & Metals Corporation Hochreines Zirkonium- oder Hafniummetall für Sputtertargets und Dünnschichtherstellung
JP4104039B2 (ja) * 2000-10-02 2008-06-18 日鉱金属株式会社 高純度ジルコニウム又はハフニウムの製造方法
JP4596379B2 (ja) * 2001-07-09 2010-12-08 Ｊｘ日鉱日石金属株式会社 ゲート酸化膜形成用ハフニウムシリサイドターゲット
JP3995082B2 (ja) * 2001-07-18 2007-10-24 日鉱金属株式会社 ゲート酸化膜形成用ハフニウムシリサイドターゲット及びその製造方法
JP3737429B2 (ja) * 2001-12-25 2006-01-18 住友チタニウム株式会社 金属塩の精製方法並びにチタン材の脱酸方法および製造方法
US6737030B2 (en) * 2002-01-29 2004-05-18 Ati Properties, Inc. Method for separating hafnium from zirconium
EP1528120B1 (de) * 2002-08-06 2011-04-13 Nippon Mining & Metals Co., Ltd. Hafniumsilicid-target und verfahren zu seiner herstellung
CN100445420C (zh) * 2003-03-07 2008-12-24 日矿金属株式会社 铪合金靶及其制造方法
DE602004027052D1 (de) * 2003-07-25 2010-06-17 Nikko Materials Co Ltd Hochreines hafniummaterial, targetdünnfilm daraus und verfahren zur herstellung von hochreinem hafnium
US20060062910A1 (en) * 2004-03-01 2006-03-23 Meiere Scott H Low zirconium, hafnium-containing compositions, processes for the preparation thereof and methods of use thereof
JP5032316B2 (ja) * 2005-07-07 2012-09-26 Ｊｘ日鉱日石金属株式会社 高純度ハフニウム、高純度ハフニウムからなるターゲット及び薄膜並びに高純度ハフニウムの製造方法

Also Published As

Publication number Publication date
CN1882711A (zh) 2006-12-20
KR100766275B1 (ko) 2007-10-15
EP1686196B1 (de) 2009-04-29
KR20060101526A (ko) 2006-09-25
EP1686196A4 (de) 2007-04-25
TW200521255A (en) 2005-07-01
TWI275653B (en) 2007-03-11
EP1686196A1 (de) 2006-08-02
EP2017360A2 (de) 2009-01-21
WO2005049882A1 (ja) 2005-06-02
JP2010196172A (ja) 2010-09-09
JP5406104B2 (ja) 2014-02-05
JPWO2005049882A1 (ja) 2008-06-12
CN101760647A (zh) 2010-06-30
EP2017360B1 (de) 2012-08-08
EP2017360A3 (de) 2009-08-05
US20060266158A1 (en) 2006-11-30
JP4749862B2 (ja) 2011-08-17
CN1882711B (zh) 2010-05-12

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