DE602004027052D1 - Hochreines hafniummaterial, targetdünnfilm daraus und verfahren zur herstellung von hochreinem hafnium - Google Patents

Hochreines hafniummaterial, targetdünnfilm daraus und verfahren zur herstellung von hochreinem hafnium

Info

Publication number
DE602004027052D1
DE602004027052D1 DE602004027052T DE602004027052T DE602004027052D1 DE 602004027052 D1 DE602004027052 D1 DE 602004027052D1 DE 602004027052 T DE602004027052 T DE 602004027052T DE 602004027052 T DE602004027052 T DE 602004027052T DE 602004027052 D1 DE602004027052 D1 DE 602004027052D1
Authority
DE
Germany
Prior art keywords
purity hafnium
production
thin film
target thin
purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004027052T
Other languages
English (en)
Inventor
Yuichiro Shindo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Mining Holdings Inc
Original Assignee
Nikko Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikko Materials Co Ltd filed Critical Nikko Materials Co Ltd
Publication of DE602004027052D1 publication Critical patent/DE602004027052D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B1/00—Preliminary treatment of ores or scrap
    • C22B1/02—Roasting processes
    • C22B1/08—Chloridising roasting
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B3/00—Extraction of metal compounds from ores or concentrates by wet processes
    • C22B3/20—Treatment or purification of solutions, e.g. obtained by leaching
    • C22B3/26—Treatment or purification of solutions, e.g. obtained by leaching by liquid-liquid extraction using organic compounds
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B34/00—Obtaining refractory metals
    • C22B34/10—Obtaining titanium, zirconium or hafnium
    • C22B34/14—Obtaining zirconium or hafnium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/16—Remelting metals
    • C22B9/22—Remelting metals with heating by wave energy or particle radiation
    • C22B9/228—Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/20—Recycling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Geology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
DE602004027052T 2003-07-25 2004-04-15 Hochreines hafniummaterial, targetdünnfilm daraus und verfahren zur herstellung von hochreinem hafnium Expired - Lifetime DE602004027052D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003279695 2003-07-25
PCT/JP2004/005389 WO2005010220A1 (ja) 2003-07-25 2004-04-15 高純度ハフニウム材料、同材料からなるターゲット及び薄膜並びに高純度ハフニウムの製造方法

Publications (1)

Publication Number Publication Date
DE602004027052D1 true DE602004027052D1 (de) 2010-06-17

Family

ID=34100826

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004027052T Expired - Lifetime DE602004027052D1 (de) 2003-07-25 2004-04-15 Hochreines hafniummaterial, targetdünnfilm daraus und verfahren zur herstellung von hochreinem hafnium

Country Status (8)

Country Link
US (2) US7964070B2 (de)
EP (1) EP1652944B1 (de)
JP (2) JP4519773B2 (de)
KR (2) KR100749653B1 (de)
CN (1) CN100376696C (de)
DE (1) DE602004027052D1 (de)
TW (1) TWI271441B (de)
WO (1) WO2005010220A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3995082B2 (ja) * 2001-07-18 2007-10-24 日鉱金属株式会社 ゲート酸化膜形成用ハフニウムシリサイドターゲット及びその製造方法
KR100698744B1 (ko) * 2003-03-07 2007-03-23 닛코킨조쿠 가부시키가이샤 하프늄 합금 타겟트 및 그 제조방법
KR100749653B1 (ko) * 2003-07-25 2007-08-14 닛코킨조쿠 가부시키가이샤 고순도 하프늄 재료, 이 재료로 이루어진 타겟트 및 박막과고순도 하프늄의 제조방법
KR100766275B1 (ko) * 2003-11-19 2007-10-15 닛코킨조쿠 가부시키가이샤 고순도 하프늄, 동 고순도 하프늄으로 이루어진 타겟트 및박막과 고순도 하프늄의 제조방법
US20060062910A1 (en) * 2004-03-01 2006-03-23 Meiere Scott H Low zirconium, hafnium-containing compositions, processes for the preparation thereof and methods of use thereof
US20050214458A1 (en) * 2004-03-01 2005-09-29 Meiere Scott H Low zirconium hafnium halide compositions
CN101218360B (zh) * 2005-07-07 2010-06-16 日矿金属株式会社 高纯度铪及其制造方法、由高纯度铪构成的靶及薄膜
WO2008110551A1 (en) 2007-03-12 2008-09-18 Zadec Aps An anti-diabetic extract of rooibos
CN101864559B (zh) * 2010-04-26 2012-07-04 南京三乐电子信息产业集团有限公司 一种栅网磁控溅射蒸铪的方法
CN103725901B (zh) * 2013-12-12 2015-10-28 上海哈峰新材料科技有限公司 氧化锆/氧化铪混合物的火法分离方法
JP6126648B2 (ja) * 2015-06-26 2017-05-10 田中貴金属工業株式会社 白金合金ターゲット
CN106698512A (zh) * 2016-11-22 2017-05-24 郑旭 一种四氯化铪的制备方法
CN108611502B (zh) * 2018-04-12 2020-07-31 北京金铂宇金属科技有限公司 一种降低镁还原法制备海绵铪中氧含量的方法

Family Cites Families (32)

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US2782116A (en) * 1946-09-06 1957-02-19 Frank H Spedding Method of preparing metals from their halides
EP0134643A3 (de) 1983-07-08 1986-12-30 Solex Research Corporation of Japan Verfahren zur Herstellung von metallischem Zirkon, Hafnium oder Titan
AU3898785A (en) 1984-02-22 1985-08-29 Iron Ore Co. Of Canada Recovery of zirconium (and the like) by solvent extraction
US4637831A (en) * 1985-05-30 1987-01-20 Westinghouse Electric Corp. Process for reduction of zirconium, hafnium or titanium using a zinc or tin seal
US4668287A (en) 1985-09-26 1987-05-26 Westinghouse Electric Corp. Process for producing high purity zirconium and hafnium
JPH0723526B2 (ja) * 1986-01-13 1995-03-15 株式会社日立製作所 耐食ハフニウム基体およびその製造方法
US4897116A (en) * 1988-05-25 1990-01-30 Teledyne Industries, Inc. High purity Zr and Hf metals and their manufacture
US5160482A (en) * 1989-03-02 1992-11-03 Teledyne Industries, Inc. Zirconium-hafnium separation and purification process
KR940008936B1 (ko) * 1990-02-15 1994-09-28 가부시끼가이샤 도시바 고순도 금속재와 그 성질을 이용한 반도체 장치 및 그 제조방법
US5112493A (en) * 1990-12-10 1992-05-12 Westinghouse Electric Corp. Zirconium-hafnium production in a zero liquid discharge process
WO1994012435A1 (en) * 1992-11-20 1994-06-09 Teledyne Industries, Inc. Process for making solutions containing basic zirconium and hafnium chlorides
JP2794382B2 (ja) * 1993-05-07 1998-09-03 株式会社ジャパンエナジー スパッタリング用シリサイドターゲット及びその製造方法
EP0666336B1 (de) * 1993-07-27 2001-10-17 Kabushiki Kaisha Toshiba Verfahren zur herstellung eines hochschmelzenden metallischen silizidtargets
JPH07316681A (ja) 1994-05-25 1995-12-05 Japan Energy Corp 金属材料又は合金材料の製造方法及び精製剤、並びに耐食性に優れた金属材料又は合金材料
JP3674732B2 (ja) 1997-01-22 2005-07-20 同和鉱業株式会社 ジルコニウムおよび／またはハフニウム化合物の精製方法
JP3591756B2 (ja) * 1997-04-04 2004-11-24 日本電信電話株式会社 金属フッ化物の製造方法
US6309595B1 (en) * 1997-04-30 2001-10-30 The Altalgroup, Inc Titanium crystal and titanium
US20030052000A1 (en) * 1997-07-11 2003-03-20 Vladimir Segal Fine grain size material, sputtering target, methods of forming, and micro-arc reduction method
JP4501250B2 (ja) * 2000-06-19 2010-07-14 日鉱金属株式会社 耐脆化性に優れたゲート酸化膜形成用シリサイドターゲット
JP4104039B2 (ja) * 2000-10-02 2008-06-18 日鉱金属株式会社 高純度ジルコニウム又はハフニウムの製造方法
DE60130477T2 (de) * 2000-10-02 2008-01-03 Nippon Mining & Metals Co., Ltd. Hochreines Zirkonium oder Hafnium, diese beinhaltendes Sputtering Target und mit diesesm hergestellte dünnen Filme, Verfahren zur Herstellung von hochreinem Zirkonium oder Hafnium und Herstellungsverfahren für Pulver aus hochreinem Zirkonium oder Hafnium
JP4596379B2 (ja) * 2001-07-09 2010-12-08 Ｊｘ日鉱日石金属株式会社 ゲート酸化膜形成用ハフニウムシリサイドターゲット
JP3995082B2 (ja) * 2001-07-18 2007-10-24 日鉱金属株式会社 ゲート酸化膜形成用ハフニウムシリサイドターゲット及びその製造方法
US6472337B1 (en) * 2001-10-30 2002-10-29 Sharp Laboratories Of America, Inc. Precursors for zirconium and hafnium oxide thin film deposition
US6737030B2 (en) * 2002-01-29 2004-05-18 Ati Properties, Inc. Method for separating hafnium from zirconium
US6986834B2 (en) * 2002-08-06 2006-01-17 Nikko Materials Co., Ltd. Hafnium silicide target and manufacturing method for preparation thereof
KR100698744B1 (ko) * 2003-03-07 2007-03-23 닛코킨조쿠 가부시키가이샤 하프늄 합금 타겟트 및 그 제조방법
KR100749653B1 (ko) * 2003-07-25 2007-08-14 닛코킨조쿠 가부시키가이샤 고순도 하프늄 재료, 이 재료로 이루어진 타겟트 및 박막과고순도 하프늄의 제조방법
KR100766275B1 (ko) * 2003-11-19 2007-10-15 닛코킨조쿠 가부시키가이샤 고순도 하프늄, 동 고순도 하프늄으로 이루어진 타겟트 및박막과 고순도 하프늄의 제조방법
US20060062910A1 (en) * 2004-03-01 2006-03-23 Meiere Scott H Low zirconium, hafnium-containing compositions, processes for the preparation thereof and methods of use thereof
CN101218360B (zh) * 2005-07-07 2010-06-16 日矿金属株式会社 高纯度铪及其制造方法、由高纯度铪构成的靶及薄膜
JP2008115063A (ja) * 2006-11-06 2008-05-22 Mitsuhide Kawasaki 高純度ハフニウム材料および溶媒抽出法を用いた該材料の製造方法。

Also Published As

Publication number Publication date
WO2005010220A1 (ja) 2005-02-03
EP1652944A1 (de) 2006-05-03
US7674441B2 (en) 2010-03-09
KR20070070263A (ko) 2007-07-03
JP2010180480A (ja) 2010-08-19
EP1652944A4 (de) 2007-05-23
KR100749653B1 (ko) 2007-08-14
JP4519773B2 (ja) 2010-08-04
CN1829807A (zh) 2006-09-06
US20070018138A1 (en) 2007-01-25
US20090126529A1 (en) 2009-05-21
JPWO2005010220A1 (ja) 2006-09-07
TW200504232A (en) 2005-02-01
CN100376696C (zh) 2008-03-26
KR20060026967A (ko) 2006-03-24
TWI271441B (en) 2007-01-21
US7964070B2 (en) 2011-06-21
EP1652944B1 (de) 2010-05-05

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