DE602004019265D1 - Akustische Oberflächenwellenanordnung und Verfahren zu ihrer Herstellung - Google Patents

Akustische Oberflächenwellenanordnung und Verfahren zu ihrer Herstellung

Info

Publication number
DE602004019265D1
DE602004019265D1 DE602004019265T DE602004019265T DE602004019265D1 DE 602004019265 D1 DE602004019265 D1 DE 602004019265D1 DE 602004019265 T DE602004019265 T DE 602004019265T DE 602004019265 T DE602004019265 T DE 602004019265T DE 602004019265 D1 DE602004019265 D1 DE 602004019265D1
Authority
DE
Germany
Prior art keywords
electrode
film
acoustic wave
surface acoustic
electrode film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004019265T
Other languages
English (en)
Inventor
Shuji Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE602004019265D1 publication Critical patent/DE602004019265D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE602004019265T 2003-10-03 2004-10-01 Akustische Oberflächenwellenanordnung und Verfahren zu ihrer Herstellung Expired - Lifetime DE602004019265D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003345779A JP2005117151A (ja) 2003-10-03 2003-10-03 弾性表面波装置の製造方法及び弾性表面波装置

Publications (1)

Publication Number Publication Date
DE602004019265D1 true DE602004019265D1 (de) 2009-03-19

Family

ID=34309161

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004019265T Expired - Lifetime DE602004019265D1 (de) 2003-10-03 2004-10-01 Akustische Oberflächenwellenanordnung und Verfahren zu ihrer Herstellung

Country Status (7)

Country Link
US (1) US7205700B2 (de)
EP (1) EP1521362B1 (de)
JP (1) JP2005117151A (de)
KR (1) KR100766262B1 (de)
CN (1) CN1604467A (de)
AT (1) ATE422111T1 (de)
DE (1) DE602004019265D1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1770860A1 (de) * 2004-03-18 2007-04-04 Murata Manufacturing Co., Ltd. Oberflächenwellenbauelement
JP2006287881A (ja) * 2005-04-05 2006-10-19 Alps Electric Co Ltd 表面弾性波ディバイスの製造方法
US7454974B2 (en) * 2006-09-29 2008-11-25 General Electric Company Probe system, ultrasound system and method of generating ultrasound
US7605595B2 (en) * 2006-09-29 2009-10-20 General Electric Company System for clearance measurement and method of operating the same
JP4898396B2 (ja) * 2006-11-17 2012-03-14 太陽誘電株式会社 弾性波デバイス
JP5115184B2 (ja) * 2007-12-25 2013-01-09 パナソニック株式会社 弾性境界波デバイス、及びそれを用いたフィルタ、アンテナ共用器
JP2011244065A (ja) * 2010-05-14 2011-12-01 Murata Mfg Co Ltd 弾性表面波装置の製造方法
CN103201866B (zh) 2010-11-10 2015-12-02 株式会社村田制作所 弹性波装置及其制造方法
JP5704263B2 (ja) 2012-02-06 2015-04-22 株式会社村田製作所 フィルタ装置
KR101804496B1 (ko) 2013-07-17 2017-12-04 가부시키가이샤 무라타 세이사쿠쇼 전자부품 및 그 제조방법
DE112014003731B4 (de) 2013-08-14 2022-07-28 Murata Manufacturing Co., Ltd. Bauelement für elastische Oberflächenwellen und elektronische Komponente
JP6385690B2 (ja) * 2014-03-05 2018-09-05 太陽誘電株式会社 弾性波デバイス及びその製造方法
JP7037333B2 (ja) 2017-11-13 2022-03-16 太陽誘電株式会社 弾性波デバイスおよびその製造方法、フィルタ並びにマルチプレクサ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62173813A (ja) * 1986-01-28 1987-07-30 Alps Electric Co Ltd 弾性表面波素子
JP3328102B2 (ja) * 1995-05-08 2002-09-24 松下電器産業株式会社 弾性表面波装置及びその製造方法
JPH09172341A (ja) * 1995-12-19 1997-06-30 Toshiba Corp 弾性表面波デバイスおよびその製造方法
JPH10163789A (ja) * 1996-11-25 1998-06-19 Sanyo Electric Co Ltd 弾性表面波素子
JP3435639B2 (ja) 2000-04-13 2003-08-11 株式会社村田製作所 弾性表面波装置の製造方法及び弾性表面波装置
CN1190007C (zh) * 2000-10-23 2005-02-16 松下电器产业株式会社 弹性表面波滤波器
JP3521864B2 (ja) * 2000-10-26 2004-04-26 株式会社村田製作所 弾性表面波素子
JP2002141762A (ja) 2000-11-02 2002-05-17 Murata Mfg Co Ltd 弾性表面波フィルタの製造方法
JP3394752B2 (ja) 2000-11-10 2003-04-07 沖電気工業株式会社 弾性表面波素子の製造方法
JP3925133B2 (ja) * 2000-12-26 2007-06-06 株式会社村田製作所 弾性表面波装置の製造方法及び弾性表面波装置
JP2002299985A (ja) 2001-03-29 2002-10-11 Murata Mfg Co Ltd 弾性表面波装置の製造方法
KR20020091327A (ko) * 2001-05-31 2002-12-06 삼성전자 주식회사 측면 몸체부가 형성되어 있는 웨이퍼 레벨 패키지 및 그제조 방법
JP2002374137A (ja) 2001-06-12 2002-12-26 Murata Mfg Co Ltd 弾性表面波装置の製造方法、弾性表面波装置、およびこれを搭載した通信装置
JP2003078388A (ja) 2001-08-30 2003-03-14 Kyocera Corp 弾性波装置及びその製造方法
JP3945363B2 (ja) * 2001-10-12 2007-07-18 株式会社村田製作所 弾性表面波装置
JP3841053B2 (ja) * 2002-07-24 2006-11-01 株式会社村田製作所 弾性表面波装置及びその製造方法
JP3969311B2 (ja) * 2003-01-20 2007-09-05 株式会社村田製作所 端面反射型弾性表面波装置

Also Published As

Publication number Publication date
CN1604467A (zh) 2005-04-06
EP1521362A2 (de) 2005-04-06
JP2005117151A (ja) 2005-04-28
ATE422111T1 (de) 2009-02-15
KR20050033444A (ko) 2005-04-12
KR100766262B1 (ko) 2007-10-15
EP1521362B1 (de) 2009-01-28
US20050071971A1 (en) 2005-04-07
EP1521362A3 (de) 2005-10-26
US7205700B2 (en) 2007-04-17

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