DE602004018643D1 - Einrichtung und verfahren zur nassbehandlung von scheibenartigen substraten - Google Patents

Einrichtung und verfahren zur nassbehandlung von scheibenartigen substraten

Info

Publication number
DE602004018643D1
DE602004018643D1 DE602004018643T DE602004018643T DE602004018643D1 DE 602004018643 D1 DE602004018643 D1 DE 602004018643D1 DE 602004018643 T DE602004018643 T DE 602004018643T DE 602004018643 T DE602004018643 T DE 602004018643T DE 602004018643 D1 DE602004018643 D1 DE 602004018643D1
Authority
DE
Germany
Prior art keywords
plate
wet treatment
wafer
disk substrates
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004018643T
Other languages
English (en)
Inventor
Rainer Obweger
Alexander Pfeuffer
Martin Koeffler
Alexander Lippert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research AG
Original Assignee
SEZ AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SEZ AG filed Critical SEZ AG
Publication of DE602004018643D1 publication Critical patent/DE602004018643D1/de
Anticipated expiration legal-status Critical
Active legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
DE602004018643T 2003-06-24 2004-06-17 Einrichtung und verfahren zur nassbehandlung von scheibenartigen substraten Active DE602004018643D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT9702003 2003-06-24
PCT/EP2004/051159 WO2004114372A1 (en) 2003-06-24 2004-06-17 Device and method for wet treating disc-like substrates

Publications (1)

Publication Number Publication Date
DE602004018643D1 true DE602004018643D1 (de) 2009-02-05

Family

ID=33520101

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004018643T Active DE602004018643D1 (de) 2003-06-24 2004-06-17 Einrichtung und verfahren zur nassbehandlung von scheibenartigen substraten

Country Status (10)

Country Link
US (2) US8261757B2 (de)
EP (1) EP1644960B1 (de)
JP (1) JP4674207B2 (de)
KR (2) KR101333288B1 (de)
CN (2) CN100369187C (de)
AT (1) ATE418790T1 (de)
DE (1) DE602004018643D1 (de)
SG (1) SG166038A1 (de)
TW (1) TWI236937B (de)
WO (1) WO2004114372A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006033372B4 (de) * 2006-02-17 2010-04-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ultraschallaktor zur Reinigung von Objekten
JP2009536450A (ja) * 2006-05-05 2009-10-08 ラム・リサーチ・アクチエンゲゼルシヤフト プレート状基材を湿式処理するための装置と方法
TWI359456B (en) * 2006-12-15 2012-03-01 Lam Res Ag Device and method for wet treating plate-like arti
TWI421933B (zh) 2007-05-16 2014-01-01 Lam Res Corp 板狀物件之超音波濕式處理的裝置與方法
US8793898B2 (en) * 2007-05-23 2014-08-05 Semes Co., Ltd. Apparatus and method for drying substrates
US9492852B2 (en) 2009-03-31 2016-11-15 Acm Research (Shanghai) Inc. Methods and apparatus for cleaning semiconductor wafers
US9523155B2 (en) 2012-12-12 2016-12-20 Novellus Systems, Inc. Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating
US9624592B2 (en) 2010-07-02 2017-04-18 Novellus Systems, Inc. Cross flow manifold for electroplating apparatus
US8795480B2 (en) 2010-07-02 2014-08-05 Novellus Systems, Inc. Control of electrolyte hydrodynamics for efficient mass transfer during electroplating
US10094034B2 (en) 2015-08-28 2018-10-09 Lam Research Corporation Edge flow element for electroplating apparatus
US10233556B2 (en) 2010-07-02 2019-03-19 Lam Research Corporation Dynamic modulation of cross flow manifold during electroplating
US8539969B2 (en) * 2010-07-30 2013-09-24 Sematech, Inc. Gigasonic brush for cleaning surfaces
EP2515323B1 (de) * 2011-04-21 2014-03-19 Imec Verfahren und Vorrichtung zur Reinigung von Halbleitersubstraten
US8551251B2 (en) * 2011-04-28 2013-10-08 Lam Research Ag Ultrasonic treatment method and apparatus
US10269615B2 (en) * 2011-09-09 2019-04-23 Lam Research Ag Apparatus for treating surfaces of wafer-shaped articles
US8974632B2 (en) * 2011-11-30 2015-03-10 Lam Research Ag Device and method for treating wafer-shaped articles
US9548223B2 (en) * 2011-12-23 2017-01-17 Lam Research Ag Apparatus for treating surfaces of wafer-shaped articles
US9449808B2 (en) 2013-05-29 2016-09-20 Novellus Systems, Inc. Apparatus for advanced packaging applications
US9523158B2 (en) * 2014-02-07 2016-12-20 Applied Materials, Inc. Methods and apparatus for forming semiconductor
US10688536B2 (en) * 2014-02-24 2020-06-23 The Boeing Company System and method for surface cleaning
US9714462B2 (en) * 2014-10-08 2017-07-25 Applied Materials, Inc. Vacuum pre-wetting apparatus and methods
US10167552B2 (en) * 2015-02-05 2019-01-01 Lam Research Ag Spin chuck with rotating gas showerhead
AU2016365335B2 (en) 2015-12-04 2021-10-21 Icu Medical, Inc. Systems methods and components for transferring medical fluids
US10364505B2 (en) 2016-05-24 2019-07-30 Lam Research Corporation Dynamic modulation of cross flow manifold during elecroplating
US11001934B2 (en) 2017-08-21 2021-05-11 Lam Research Corporation Methods and apparatus for flow isolation and focusing during electroplating
US10781527B2 (en) 2017-09-18 2020-09-22 Lam Research Corporation Methods and apparatus for controlling delivery of cross flowing and impinging electrolyte during electroplating
JP7165201B2 (ja) * 2018-09-25 2022-11-02 日立Astemo株式会社 認識装置
JP7213648B2 (ja) * 2018-09-27 2023-01-27 東京エレクトロン株式会社 基板処理装置
AU2020221235B2 (en) * 2019-02-13 2021-12-02 Restec Solutions Llc Ultrasonic standing wave nebulization system
JP7402698B2 (ja) 2020-01-21 2023-12-21 東京エレクトロン株式会社 基板洗浄装置及び基板洗浄方法
CN112599441A (zh) * 2020-11-30 2021-04-02 硅密芯镀(海宁)半导体技术有限公司 清洗系统、晶圆清洗设备及晶圆浸润水洗方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4401131A (en) * 1981-05-15 1983-08-30 Gca Corporation Apparatus for cleaning semiconductor wafers
JPH07171526A (ja) * 1993-12-22 1995-07-11 Hitachi Ltd 超音波洗浄装置
US5979475A (en) * 1994-04-28 1999-11-09 Hitachi, Ltd. Specimen holding method and fluid treatment method of specimen surface and systems therefor
JP3099054B2 (ja) * 1994-09-09 2000-10-16 東京エレクトロン株式会社 塗布装置及びその方法
JP3326656B2 (ja) 1994-10-31 2002-09-24 ソニー株式会社 回転式半導体基板処理装置及び回転式半導体基板処理方法
US5788453A (en) * 1996-05-30 1998-08-04 Applied Materials, Inc. Piezoelectric wafer gripping system for robot blades
DE19629705A1 (de) * 1996-07-24 1998-01-29 Joachim Dr Scheerer Verfahren und Vorrichtung zur Reinigung von scheibenförmigen Gegenständen, insbesondere Wafern, mit Ultraschall und Wasser als Spülmedium
JPH10154677A (ja) 1996-11-26 1998-06-09 Hitachi Ltd 半導体集積回路装置の製造方法および製造装置
JP3511441B2 (ja) 1996-11-29 2004-03-29 忠弘 大見 洗浄やエッチング、現像、剥離等を含むウエット処理に用いる省液型の液体供給ノズル、ウエット処理装置及びウエット処理方法
JP3309749B2 (ja) 1997-01-07 2002-07-29 凸版印刷株式会社 超音波洗浄装置
US6632292B1 (en) * 1998-03-13 2003-10-14 Semitool, Inc. Selective treatment of microelectronic workpiece surfaces
JP2930583B1 (ja) 1998-07-02 1999-08-03 株式会社カイジョー 半導体ウェハのスピン枚葉処理装置
JP2001009387A (ja) * 1999-06-29 2001-01-16 Dainippon Screen Mfg Co Ltd 基板洗浄装置
US6532977B2 (en) * 2000-03-16 2003-03-18 Bridgestone Corporation Cleaning vessel and silicon carbide sintered body used therefor
FR2808120B1 (fr) * 2000-04-20 2002-07-26 Karl Suss France Procede et dispositif pour le traitement du substrat d'un circuit integre ou d'un produit analogue en cours de fabrication
DE50004935D1 (de) * 2000-10-31 2004-02-05 Sez Ag Villach Vorrichtung zur Flüssigkeitsbehandlung von scheibenförmigen Gegenständen
CN1241241C (zh) * 2001-09-04 2006-02-08 阿尔卑斯电气株式会社 湿式处理用喷嘴
US7306002B2 (en) * 2003-01-04 2007-12-11 Yong Bae Kim System and method for wet cleaning a semiconductor wafer

Also Published As

Publication number Publication date
CN1809913A (zh) 2006-07-26
US20060151014A1 (en) 2006-07-13
ATE418790T1 (de) 2009-01-15
CN101308766B (zh) 2010-06-09
TWI236937B (en) 2005-08-01
KR20060024811A (ko) 2006-03-17
US8261757B2 (en) 2012-09-11
KR101333288B1 (ko) 2013-11-27
JP2007527606A (ja) 2007-09-27
US8435356B2 (en) 2013-05-07
KR20130019013A (ko) 2013-02-25
KR101364137B1 (ko) 2014-02-17
SG166038A1 (en) 2010-11-29
CN101308766A (zh) 2008-11-19
EP1644960A1 (de) 2006-04-12
CN100369187C (zh) 2008-02-13
EP1644960B1 (de) 2008-12-24
WO2004114372A1 (en) 2004-12-29
US20120167914A1 (en) 2012-07-05
JP4674207B2 (ja) 2011-04-20
TW200505599A (en) 2005-02-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: LAM RESEARCH AG, VILLACH, AT