DE602004005505D1 - Verfahren zur Herstellung und Reinigung von Bis(tertiärbutylamino)silan - Google Patents

Verfahren zur Herstellung und Reinigung von Bis(tertiärbutylamino)silan

Info

Publication number
DE602004005505D1
DE602004005505D1 DE602004005505T DE602004005505T DE602004005505D1 DE 602004005505 D1 DE602004005505 D1 DE 602004005505D1 DE 602004005505 T DE602004005505 T DE 602004005505T DE 602004005505 T DE602004005505 T DE 602004005505T DE 602004005505 D1 DE602004005505 D1 DE 602004005505D1
Authority
DE
Germany
Prior art keywords
bis
silane
purification
preparation
tertiarybutylamino
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE602004005505T
Other languages
English (en)
Other versions
DE602004005505T2 (de
Inventor
Yin Pang Tsui
Thomas Elwood Zellner
Rajiv K Agarwal
Ravi Kumar Laxman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Publication of DE602004005505D1 publication Critical patent/DE602004005505D1/de
Application granted granted Critical
Publication of DE602004005505T2 publication Critical patent/DE602004005505T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • AHUMAN NECESSITIES
    • A62LIFE-SAVING; FIRE-FIGHTING
    • A62CFIRE-FIGHTING
    • A62C2/00Fire prevention or containment
    • A62C2/06Physical fire-barriers
    • A62C2/08Water curtains
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02Silicon compounds
    • C07F7/025Silicon compounds without C-silicon linkages
    • AHUMAN NECESSITIES
    • A62LIFE-SAVING; FIRE-FIGHTING
    • A62CFIRE-FIGHTING
    • A62C2/00Fire prevention or containment
    • A62C2/06Physical fire-barriers
    • A62C2/24Operating or controlling mechanisms
    • A62C2/246Operating or controlling mechanisms having non-mechanical actuators
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/50Improvements relating to the production of bulk chemicals
    • Y02P20/582Recycling of unreacted starting or intermediate materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE602004005505T 2003-01-15 2004-01-12 Verfahren zur Herstellung und Reinigung von Bis(tertiärbutylamino)silan Expired - Fee Related DE602004005505T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/342,930 US6963006B2 (en) 2003-01-15 2003-01-15 Process for the production and purification of bis(tertiary-butylamino)silane
US342930 2003-01-15

Publications (2)

Publication Number Publication Date
DE602004005505D1 true DE602004005505D1 (de) 2007-05-10
DE602004005505T2 DE602004005505T2 (de) 2007-12-13

Family

ID=32594858

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004005505T Expired - Fee Related DE602004005505T2 (de) 2003-01-15 2004-01-12 Verfahren zur Herstellung und Reinigung von Bis(tertiärbutylamino)silan

Country Status (10)

Country Link
US (1) US6963006B2 (de)
EP (1) EP1439180B1 (de)
JP (1) JP4031445B2 (de)
KR (1) KR100582878B1 (de)
CN (1) CN100384858C (de)
AT (1) ATE358133T1 (de)
DE (1) DE602004005505T2 (de)
IL (1) IL159769A (de)
SG (1) SG113493A1 (de)
TW (1) TWI260326B (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7875556B2 (en) 2005-05-16 2011-01-25 Air Products And Chemicals, Inc. Precursors for CVD silicon carbo-nitride and silicon nitride films
US7875312B2 (en) * 2006-05-23 2011-01-25 Air Products And Chemicals, Inc. Process for producing silicon oxide films for organoaminosilane precursors
US8530361B2 (en) 2006-05-23 2013-09-10 Air Products And Chemicals, Inc. Process for producing silicon and oxide films from organoaminosilane precursors
US8318966B2 (en) * 2006-06-23 2012-11-27 Praxair Technology, Inc. Organometallic compounds
US20080044572A1 (en) * 2006-08-15 2008-02-21 Loeffler Stephen D Right-sized vacuum precursor (rsvp) distillation system
US7442822B2 (en) 2006-09-01 2008-10-28 Air Products And Chemicals, Inc. Stabilization of nitrogen-containing and oxygen-containing organosilanes using weakly basic ion-exchange resins
US20080145978A1 (en) * 2006-12-18 2008-06-19 Air Liquide Electronics U.S. Lp Deposition of silicon germanium nitrogen precursors for strain engineering
DE102008002181A1 (de) * 2008-06-03 2009-12-10 Evonik Degussa Gmbh Verfahren zur wässrigen Aufarbeitung eines Ammoniumhalogenide und/oder organische Aminhydrohalogenide enthaltenden aminofunktionellen Organosilans
DE102008002183A1 (de) * 2008-06-03 2009-12-10 Evonik Degussa Gmbh Verfahren zur Aufarbeitung salzhaltiger Rückstände aus der Herstellung von aminofunktionellen Organosilanen
KR101040325B1 (ko) 2009-08-25 2011-06-10 (주)디엔에프 알킬아미노실란의 제조방법
CN102442672B (zh) * 2011-09-28 2013-07-24 洛阳晶辉新能源科技有限公司 一种将含杂质的氯硅烷净化回收的方法及其在多晶硅生产中的应用
JP6094994B2 (ja) * 2013-02-04 2017-03-15 大陽日酸株式会社 原料ガス生成供給方法
JP6086250B2 (ja) * 2014-04-25 2017-03-01 大陽日酸株式会社 気液反応方法及びアミノシランの製造方法
KR101525174B1 (ko) * 2014-06-30 2015-06-02 주식회사 유피케미칼 디클로로실란을 이용한 알킬아미노실란의 제조 방법
JP6812855B2 (ja) * 2017-03-10 2021-01-13 Jnc株式会社 ジアルキルアミノシランの製造方法
CN112110948B (zh) * 2020-09-29 2023-07-14 合肥安德科铭半导体科技有限公司 一种液态双氨基取代的乙硅烷制备方法及其产物的应用
CN112661781A (zh) * 2020-12-26 2021-04-16 浙江博瑞电子科技有限公司 一种双(叔丁基氨基)硅烷的制备方法
CN112812134A (zh) * 2020-12-26 2021-05-18 浙江博瑞电子科技有限公司 一种双(叔丁基氨基)硅烷的精制方法
CN114573628A (zh) * 2022-04-13 2022-06-03 洛阳中硅高科技有限公司 胺基硅烷的制备系统和方法
CN115073507A (zh) * 2022-07-04 2022-09-20 浙江博瑞电子科技有限公司 一种无溶剂参与制备二(二乙基氨基)硅烷的方法
CN116036630A (zh) * 2023-01-10 2023-05-02 贵州威顿晶磷电子材料股份有限公司 一种电子级双-二乙氨基-硅烷的制造装置及制造方法
CN116036633B (zh) * 2023-02-13 2024-04-26 贵州威顿晶磷电子材料股份有限公司 一种电子级硼酸三乙酯的环保节能制备方法及配套设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4304805A (en) * 1978-12-04 1981-12-08 Joseph J. Packo Sealing leaks by polymerization of volatilized aminosilane monomers
JPS61287930A (ja) * 1985-06-17 1986-12-18 Chisso Corp ポリシラザンの製造方法
US5874368A (en) 1997-10-02 1999-02-23 Air Products And Chemicals, Inc. Silicon nitride from bis(tertiarybutylamino)silane
EP0980375B1 (de) * 1998-01-30 2005-11-09 Boulder Scientific Company Synthese von n-silylierten verbindungen
US5976991A (en) 1998-06-11 1999-11-02 Air Products And Chemicals, Inc. Deposition of silicon dioxide and silicon oxynitride using bis(tertiarybutylamino) silane
US7084080B2 (en) 2001-03-30 2006-08-01 Advanced Technology Materials, Inc. Silicon source reagent compositions, and method of making and using same for microelectronic device structure

Also Published As

Publication number Publication date
SG113493A1 (en) 2005-08-29
IL159769A0 (en) 2004-06-20
US6963006B2 (en) 2005-11-08
CN100384858C (zh) 2008-04-30
CN1517352A (zh) 2004-08-04
IL159769A (en) 2008-03-20
TW200412348A (en) 2004-07-16
KR100582878B1 (ko) 2006-05-24
JP4031445B2 (ja) 2008-01-09
ATE358133T1 (de) 2007-04-15
TWI260326B (en) 2006-08-21
DE602004005505T2 (de) 2007-12-13
EP1439180A1 (de) 2004-07-21
US20040138491A1 (en) 2004-07-15
KR20040065165A (ko) 2004-07-21
EP1439180B1 (de) 2007-03-28
JP2004217659A (ja) 2004-08-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee