DE602004001795D1 - Röntgendiffraktometer für Messungen bei streifendem Einfall, das zwischen Messungen in der Ebene und ausserhalb der Ebene hin und her geschaltet werden kann - Google Patents

Röntgendiffraktometer für Messungen bei streifendem Einfall, das zwischen Messungen in der Ebene und ausserhalb der Ebene hin und her geschaltet werden kann

Info

Publication number
DE602004001795D1
DE602004001795D1 DE602004001795T DE602004001795T DE602004001795D1 DE 602004001795 D1 DE602004001795 D1 DE 602004001795D1 DE 602004001795 T DE602004001795 T DE 602004001795T DE 602004001795 T DE602004001795 T DE 602004001795T DE 602004001795 D1 DE602004001795 D1 DE 602004001795D1
Authority
DE
Germany
Prior art keywords
plane
measurements
toggled
ray diffractometer
grazing incidence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004001795T
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English (en)
Other versions
DE602004001795T2 (de
Inventor
Kazuhiko Omote
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Rigaku Corp
Original Assignee
Rigaku Denki Co Ltd
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Rigaku Denki Co Ltd, Rigaku Corp filed Critical Rigaku Denki Co Ltd
Publication of DE602004001795D1 publication Critical patent/DE602004001795D1/de
Application granted granted Critical
Publication of DE602004001795T2 publication Critical patent/DE602004001795T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K5/00—Feeding devices for stock or game ; Feeding wagons; Feeding stacks
    • A01K5/01—Feed troughs; Feed pails
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators

Landscapes

  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Animal Husbandry (AREA)
  • Birds (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE602004001795T 2003-03-26 2004-03-23 Röntgendiffraktometer für Messungen bei streifendem Einfall, das zwischen Messungen in der Ebene und ausserhalb der Ebene hin und her geschaltet werden kann Expired - Lifetime DE602004001795T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003084055 2003-03-26
JP2003084055A JP3697246B2 (ja) 2003-03-26 2003-03-26 Ｘ線回折装置

Publications (2)

Publication Number Publication Date
DE602004001795D1 true DE602004001795D1 (de) 2006-09-21
DE602004001795T2 DE602004001795T2 (de) 2007-08-16

Family

ID=32821478

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004001795T Expired - Lifetime DE602004001795T2 (de) 2003-03-26 2004-03-23 Röntgendiffraktometer für Messungen bei streifendem Einfall, das zwischen Messungen in der Ebene und ausserhalb der Ebene hin und her geschaltet werden kann

Country Status (7)

Country Link
US (1) US7035373B2 (de)
EP (1) EP1462795B1 (de)
JP (1) JP3697246B2 (de)
KR (1) KR100827392B1 (de)
CN (1) CN1534289B (de)
DE (1) DE602004001795T2 (de)
TW (1) TWI254794B (de)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3953754B2 (ja) * 2001-06-27 2007-08-08 株式会社リガク 密度不均一試料解析方法ならびにその装置およびシステム
JP3919775B2 (ja) * 2004-07-15 2007-05-30 株式会社リガク Ｘ線反射率測定方法及び装置
EP1720006A1 (de) * 2005-05-02 2006-11-08 F. Hoffmann-La Roche Ag Methode und Vorrichtung zur Röntgenbeugunsanalyse
JP2007010483A (ja) * 2005-06-30 2007-01-18 Rigaku Corp Ｘ線ビーム処理装置及びｘ線分析装置
JP4906038B2 (ja) * 2005-07-07 2012-03-28 株式会社リガク Ｘ線分析装置の試料支持装置及びｘ線分析装置
US8000444B2 (en) * 2005-08-29 2011-08-16 Rigaku Corporation Vertical/horizontal small angle X-ray scattering apparatus and method for measuring small angle X-ray scattering
JP4615022B2 (ja) * 2005-09-05 2011-01-19 株式会社リガク 単結晶試料の極性判定方法及び装置
JP4278108B2 (ja) * 2006-07-07 2009-06-10 株式会社リガク 超小角ｘ線散乱測定装置
JP4860418B2 (ja) * 2006-10-10 2012-01-25 株式会社リガク Ｘ線光学系
JP5081556B2 (ja) 2007-09-28 2012-11-28 株式会社リガク デバイシェラー光学系を備えたｘ線回折測定装置とそのためのｘ線回折測定方法
US7906358B2 (en) * 2007-10-18 2011-03-15 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Epitaxial growth of cubic crystalline semiconductor alloys on basal plane of trigonal or hexagonal crystal
US7848483B2 (en) * 2008-03-07 2010-12-07 Rigaku Innovative Technologies Magnesium silicide-based multilayer x-ray fluorescence analyzers
JP5237186B2 (ja) * 2009-04-30 2013-07-17 株式会社リガク Ｘ線散乱測定装置およびｘ線散乱測定方法
US8243878B2 (en) 2010-01-07 2012-08-14 Jordan Valley Semiconductors Ltd. High-resolution X-ray diffraction measurement with enhanced sensitivity
US8126117B2 (en) * 2010-02-03 2012-02-28 Rigaku Innovative Technologies, Inc. Multi-beam X-ray system
US8687766B2 (en) 2010-07-13 2014-04-01 Jordan Valley Semiconductors Ltd. Enhancing accuracy of fast high-resolution X-ray diffractometry
US8437450B2 (en) 2010-12-02 2013-05-07 Jordan Valley Semiconductors Ltd. Fast measurement of X-ray diffraction from tilted layers
DE102010062472A1 (de) * 2010-12-06 2012-06-06 Bruker Axs Gmbh Punkt-Strich-Konverter
KR101165987B1 (ko) * 2011-05-30 2012-07-18 테크밸리 주식회사 Ｘ선을 이용한 분석 기구
KR101136931B1 (ko) * 2011-05-30 2012-04-20 테크밸리 주식회사 Ｘ선을 이용한 분석 기구의 테이블 모듈
US8781070B2 (en) 2011-08-11 2014-07-15 Jordan Valley Semiconductors Ltd. Detection of wafer-edge defects
CN102435626A (zh) * 2011-09-13 2012-05-02 丹东通达科技有限公司 一种台式x射线衍射仪
US20130108023A1 (en) * 2011-11-02 2013-05-02 Alex Deyhim Development of a double crystal monochromator
CN103151089B (zh) * 2011-12-06 2016-04-20 同济大学 硬X射线微聚焦多厚度比复合多层膜Laue透镜
DE102012000736A1 (de) 2012-01-16 2013-07-18 Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt Braunschweig und Berlin Probenpositioniereinrichtung und Verfahren zu ihrem Betrieb
KR101209518B1 (ko) * 2012-02-23 2012-12-07 테크밸리 주식회사 헬리컬 ｃｔ장치
US9269468B2 (en) * 2012-04-30 2016-02-23 Jordan Valley Semiconductors Ltd. X-ray beam conditioning
JP5998666B2 (ja) * 2012-06-14 2016-09-28 富士通株式会社 Ｘ線分析装置及びｘ線分析方法
JP2014089143A (ja) 2012-10-31 2014-05-15 Rigaku Corp Ｘ線検出器およびｘ線回折装置
JP2014122860A (ja) * 2012-12-21 2014-07-03 Sumitomo Metal Mining Co Ltd 単結晶ウェハの結晶方位測定用治具
US9614026B2 (en) 2013-03-13 2017-04-04 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High mobility transport layer structures for rhombohedral Si/Ge/SiGe devices
US9613728B2 (en) * 2013-03-15 2017-04-04 Proto Manufacturing Ltd. X-ray diffraction apparatus and method
JP6025211B2 (ja) * 2013-11-28 2016-11-16 株式会社リガク Ｘ線トポグラフィ装置
EP2896960B1 (de) * 2014-01-15 2017-07-26 PANalytical B.V. Röntgenvorrichtung für SAXS und Bragg-Brentano Messungen
US9976971B2 (en) * 2014-03-06 2018-05-22 United Technologies Corporation Systems and methods for X-ray diffraction
JP6202684B2 (ja) * 2014-06-05 2017-09-27 株式会社リガク Ｘ線回折装置
US9726624B2 (en) 2014-06-18 2017-08-08 Bruker Jv Israel Ltd. Using multiple sources/detectors for high-throughput X-ray topography measurement
US10060865B2 (en) 2015-03-10 2018-08-28 Lyncean Technologies, Inc. Measurement of critical dimensions of nanostructures using X-ray grazing incidence in-plane diffraction
WO2016152654A1 (ja) * 2015-03-24 2016-09-29 国立大学法人京都大学 Ｘ線回折測定装置及びｘ線回折測定方法
CN104914121A (zh) * 2015-06-12 2015-09-16 朱彦婷 工程化单晶体取向的测量方法及装置
JP6322172B2 (ja) * 2015-09-11 2018-05-09 株式会社リガク Ｘ線小角光学系装置
DE102015226101A1 (de) * 2015-12-18 2017-06-22 Bruker Axs Gmbh Röntgenoptik-Baugruppe mit Umschaltsystem für drei Strahlpfade und zugehöriges Röntgendiffraktometer
US9897559B2 (en) * 2015-12-22 2018-02-20 Bruker Axs, Inc. Method for collecting accurate X-ray diffraction data with a scanning two-dimensional detector
JP6940163B2 (ja) * 2015-12-28 2021-09-22 ユニバーシティ オブ ワシントンＵｎｉｖｅｒｓｉｔｙ ｏｆ Ｗａｓｈｉｎｇｔｏｎ 分光器を整列させるための方法
JP6606706B2 (ja) * 2016-06-24 2019-11-20 株式会社リガク 処理方法、処理装置および処理プログラム
JP6864888B2 (ja) * 2016-07-15 2021-04-28 株式会社リガク Ｘ線検査装置、ｘ線薄膜検査方法およびロッキングカーブ測定方法
DE102016224940B3 (de) 2016-12-14 2017-08-24 Bruker Axs Gmbh Röntgenvorrichtung mit motorischer Drehmomentkompensation am Detektorkreis des Goniometers und Verfahren zum Betrieb einer Röntgenvorrichtung
US10753890B2 (en) * 2017-03-09 2020-08-25 Malvern Panalytical B.V. High resolution X-ray diffraction method and apparatus
US10416102B2 (en) * 2017-06-23 2019-09-17 Bruker Axs, Inc. X-ray diffraction device and method to measure stress with 2D detector and single sample tilt
JP6905748B2 (ja) * 2017-10-25 2021-07-21 株式会社リガク ソーラースリット、ｘ線回折装置および方法
CN107817256A (zh) * 2017-10-25 2018-03-20 哈尔滨工业大学 一种用于光学晶体超精密加工亚表面损伤的无损检测方法
CN107966463B (zh) * 2017-12-08 2020-07-31 中国科学院青海盐湖研究所 一种x射线衍射仪用测量液体样品的样品台
CN111527400A (zh) * 2017-12-28 2020-08-11 株式会社理学 X射线检查装置
JP2019191167A (ja) 2018-04-23 2019-10-31 ブルカー ジェイヴィ イスラエル リミテッドＢｒｕｋｅｒ Ｊｖ Ｉｓｒａｅｌ Ｌｔｄ． 小角ｘ線散乱測定用のｘ線源光学系
CN112654861B (zh) 2018-07-05 2024-06-11 布鲁克科技公司 小角度x射线散射测量
US11835476B2 (en) * 2018-11-22 2023-12-05 Rigaku Corporation Single-crystal X-ray structure analysis apparatus and sample holder attaching device
JP7165400B2 (ja) * 2019-03-19 2022-11-04 株式会社リガク Ｘ線分析装置
JP7300718B2 (ja) 2019-12-13 2023-06-30 株式会社リガク 制御装置、システム、方法およびプログラム
EP3845891B1 (de) * 2019-12-30 2022-02-09 Xenocs SAS Röntgenstrahlstreuungsvorrichtung
CN111505028A (zh) * 2020-04-23 2020-08-07 上海逸动医学科技有限公司 一种移动式x光数字成像检测系统
US11781999B2 (en) 2021-09-05 2023-10-10 Bruker Technologies Ltd. Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
CN113945591B (zh) * 2021-09-14 2023-10-24 中国电子科技集团公司第十一研究所 一种半峰宽自动化测试工装

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR920004937B1 (ko) * 1989-12-30 1992-06-22 포항종합제철 주식회사 고청정 알루미늄 탈산강 제조방법
JP2904891B2 (ja) * 1990-08-31 1999-06-14 日新製鋼株式会社 合金化亜鉛めつき鋼板のオンライン合金化度測定装置
GB9620160D0 (en) * 1996-09-27 1996-11-13 Bede Scient Instr Ltd X-ray generator
US6014423A (en) * 1998-02-19 2000-01-11 Osmic, Inc. Multiple corner Kirkpatrick-Baez beam conditioning optic assembly
US6069934A (en) * 1998-04-07 2000-05-30 Osmic, Inc. X-ray diffractometer with adjustable image distance
JP3659553B2 (ja) 1998-04-22 2005-06-15 株式会社リガク Ｘ線装置
JP4211192B2 (ja) * 2000-04-28 2009-01-21 株式会社島津製作所 Ｘ線回折装置
GB0222334D0 (en) * 2001-10-04 2002-10-30 X Ray Res Gmbh Automatic adjusting method for a goniometer and associated device
CN2496018Y (zh) * 2001-10-08 2002-06-19 中国科学院物理研究所 一种多功能x射线衍射仪

Also Published As

Publication number Publication date
US7035373B2 (en) 2006-04-25
JP2004294136A (ja) 2004-10-21
EP1462795A3 (de) 2004-10-06
DE602004001795T2 (de) 2007-08-16
TWI254794B (en) 2006-05-11
CN1534289A (zh) 2004-10-06
KR100827392B1 (ko) 2008-05-07
TW200508600A (en) 2005-03-01
US20040190681A1 (en) 2004-09-30
KR20040084849A (ko) 2004-10-06
JP3697246B2 (ja) 2005-09-21
CN1534289B (zh) 2010-04-07
EP1462795A2 (de) 2004-09-29
EP1462795B1 (de) 2006-08-09

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